CN214655360U - Auxiliary chamber lifting device - Google Patents
Auxiliary chamber lifting device Download PDFInfo
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- CN214655360U CN214655360U CN202120053973.7U CN202120053973U CN214655360U CN 214655360 U CN214655360 U CN 214655360U CN 202120053973 U CN202120053973 U CN 202120053973U CN 214655360 U CN214655360 U CN 214655360U
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- sliding seat
- auxiliary chamber
- fixed support
- screw rod
- sliding
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Abstract
The utility model discloses an auxiliary chamber lifting device, a sliding seat is arranged on a fixed support in a sliding and limiting way, the sliding seat can vertically slide relative to the fixed support, and the fixed support provides guiding and limiting for the sliding seat; the sliding seat is provided with an auxiliary chamber, so that the auxiliary chamber can synchronously move upwards or downwards along with the sliding seat. A screw rod jack is arranged on the fixed support, a screw rod structure is arranged in the screw rod jack, a movable sleeve part of the screw rod jack is connected with a telescopic shaft, the telescopic shaft and the sliding seat are relatively fixed, and a screw rod part of the screw rod jack rotates to enable the telescopic shaft to vertically extend and retract so as to drive the sliding seat to vertically lift; because the utility model discloses a lead screw jack's vertical drive structure realizes the lift drive through the rotation of lead screw, need not use the hydro-cylinder, consequently can avoid using the problem of oil leak for a long time effectively, and accurate control can also be realized to lead screw driven form to can realize the auto-lock.
Description
Technical Field
The utility model relates to a semiconductor production technical field further relates to a subchamber hoisting device.
Background
In the production process of the monocrystalline silicon, the auxiliary chamber is used as a cavity for storing a crystal bar and is in a slender cylindrical structure; the furnace barrel can be butted below the auxiliary chamber, polycrystalline silicon is melted to form liquid by heating in the furnace barrel, the seed crystal inside the auxiliary chamber is driven by a rod lifting mechanism arranged at the upper end of the auxiliary chamber to descend into liquid in the furnace barrel, the polycrystalline silicon grows to form solid monocrystalline silicon under the guidance of the seed crystal, after the monocrystalline silicon rod reaches a certain length, the rod lifting mechanism upwards lifts the monocrystalline silicon rod into the auxiliary chamber, and the auxiliary chamber and the monocrystalline silicon rod are driven by the lifting mechanism to integrally move upwards.
Most of auxiliary chamber lifting mechanisms in the existing market adopt hydraulic oil cylinders and polished rod guide, the weight of the auxiliary chamber and the single crystal silicon rod can reach 3-4 tons, and the problems of oil leakage, oil diffusion and the like can occur when the hydraulic oil cylinders are used for a long time, so that the quality of single crystals can be influenced; the hydraulic push rod can not be self-locked, the lifting precision is poor, and the auxiliary chamber can be kept at a certain height only by continuously supplying oil.
For technical personnel in the field, how to avoid the influence of oil on the quality of single crystals and realize accurate vertical lifting is a technical problem to be solved at present.
SUMMERY OF THE UTILITY MODEL
The utility model provides a sublance hoisting device can accurate control elevating position, realizes the auto-lock simultaneously, need not to consider the oil leak problem, and concrete scheme is as follows:
the auxiliary chamber lifting device comprises a fixed support, wherein a sliding seat is slidably and limitedly mounted on the fixed support and can vertically slide relative to the fixed support; the sliding seat is provided with an auxiliary chamber;
and a screw rod jack is arranged on the fixed support, a telescopic shaft of the screw rod jack is relatively fixed with the sliding seat, and a screw rod part of the screw rod jack rotates to drive the sliding seat to vertically lift.
Optionally, the top end of the telescopic shaft is fixedly connected with the bottom end of a lifting rod, and the top end of the lifting rod is fixedly connected with the sliding seat;
and the fixed support is provided with a guide block for guiding the lifting rod.
Optionally, the input end of the screw jack is connected with the motor through a worm gear reducer.
Optionally, two guide rails are arranged on the fixed support, a plurality of groups of sliding blocks are fixedly arranged on the sliding seat, and the sliding blocks are in sliding clamping connection with the guide rails.
Optionally, the sliding seat is rotatably connected with a rotating arm, and the rotating arm is fixedly connected with an auxiliary chamber.
Optionally, a rotary driver is arranged on the sliding seat, and the rotary driver drives the rotating arm and the auxiliary chamber to rotate through a gear.
Optionally, a rotary anti-backlash member is provided on the sliding seat, and the rotary anti-backlash member can apply an elastic force opposite to the moving direction to the rotating arm near the stop position.
The utility model provides an auxiliary chamber lifting device, a sliding seat is arranged on a fixed support in a sliding and limiting way, the sliding seat can vertically slide relative to the fixed support, and the fixed support provides guiding and limiting for the sliding seat; the sliding seat is provided with an auxiliary chamber, so that the auxiliary chamber can synchronously move upwards or downwards along with the sliding seat. A screw rod jack is arranged on the fixed support, a screw rod structure is arranged in the screw rod jack, a movable sleeve part of the screw rod jack is connected with a telescopic shaft, the telescopic shaft and the sliding seat are relatively fixed, and a screw rod part of the screw rod jack rotates to enable the telescopic shaft to vertically extend and retract so as to drive the sliding seat to vertically lift; because the utility model discloses a lead screw jack's vertical drive structure realizes the lift drive through the rotation of lead screw, need not use the hydro-cylinder, consequently can avoid using the problem of oil leak for a long time effectively, and accurate control can also be realized to lead screw driven form to can realize the auto-lock.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a structural diagram of the auxiliary chamber lifting device provided by the present invention.
The figure includes:
the device comprises a fixed support 1, a guide block 11, a guide rail 12, a sliding seat 2, a sliding block 21, a screw rod jack 3, a telescopic shaft 31, a worm and gear speed reducer 32, a motor 33, a lifting rod 4, a rotating arm 5, a rotary driver 6 and a rotary clearance eliminating piece 7.
Detailed Description
The core of the utility model is to provide a subchamber hoisting device can accurate control elevating position, realizes the auto-lock simultaneously, need not to consider the oil leak problem.
In order to make those skilled in the art better understand the technical solution of the present invention, the auxiliary chamber lifting device of the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, it is a structural diagram of the auxiliary chamber lifting device provided by the present invention; in the figure, A represents a sub-chamber; the auxiliary chamber lifting device comprises a fixed support 1, a sliding seat 2, a screw rod jack 3 and the like, wherein the fixed support 1 is a supporting structure, other components are arranged on the fixed support 1, and the fixed support 1 is fixed and is usually fixed on the ground.
The fixed support 1 is provided with a sliding seat 2 in a sliding limiting manner, the sliding seat 2 can slide vertically relative to the fixed support 1, and the sliding of the sliding seat 2 is convenient to move along the guide of the fixed support 1; the sliding seat 2 is provided with an auxiliary chamber, so that the auxiliary chamber and the sliding seat 2 keep synchronous vertical lifting movement.
The fixed support 1 is provided with a screw rod jack 3 which is of a jacking structure and comprises an external support structure, a screw rod is arranged in the external support structure, the screw rod can rotate relative to the support, a movable sleeve is arranged on the screw rod, the movable sleeve is in threaded connection with the screw rod, and the movable sleeve cannot rotate and can only translate due to the limitation of the support, so that when the screw rod rotates, the movable sleeve can be driven to move, a telescopic shaft 31 is arranged on the movable sleeve, and one end of the telescopic shaft 31 extends out of the support; the telescopic shaft 31 of the screw rod jack 3 is relatively fixed with the sliding seat 2, the screw rod part of the screw rod jack 3 rotates to drive the sliding seat 2 to vertically lift, and the sliding seat 2 drives the auxiliary chamber to synchronously vertically move when moving.
Because the utility model uses the screw rod structure as the driving device, the rotation of the screw rod is converted into the translational motion of the sliding seat 2, the rotation angle of the screw rod has a proportional relation with the vertical movement distance, the vertical lifting position can be accurately controlled by controlling the rotation angle of the screw rod, and the self-locking can be realized when the screw rod does not rotate, so that the auxiliary chamber can be positioned at any position; the screw rod jack adopts a mechanism transmission mode, and the oil leakage problem cannot occur.
On the basis of the above scheme, the utility model discloses in the bottom of the top fixed connection lift bar 4 of telescopic shaft 31, the top fixed connection of lift bar 4 is in sliding seat 2, and extension rod 4 adopts the surface of polished rod, sets up the guide block 11 that is used for direction lift bar 4 on the fixed bolster 1, and lift bar 4 passes guide block 11, can guide block 11 play the effect of direction to lift bar 4 to make lift bar 4's removal more stable.
The input end of the screw jack 3 is connected with a motor 33 through a worm gear reducer 32, the motor 33 inputs power to the screw through the worm gear reducer 32, and the rotating torque can be improved through a worm gear structure.
Preferably, the utility model discloses set up two guide rails 12 on fixed bolster 1, the fixed multiunit slider 21 that sets up on sliding seat 2, slider 21 and guide rail 12 slip joint set up two rows of sliders 1 on the sliding seat 2, and every guide rail 12 is one row of slider 21 of sliding connection respectively, can make the guide effect more stable through two rows of sliders.
The sliding seat 2 is rotatably connected with a rotating arm 5, the rotating arm 5 is fixedly connected with an auxiliary chamber, the rotating arm 5 rotates relative to the sliding seat 2 through a rotating shaft, the rotating shaft is vertically arranged, and the auxiliary chamber rotates to different angles through the rotating arm 5.
As shown in fig. 1, a rotary driver 6 is arranged on the sliding seat 2, the rotary driver 6 can be in a motor driving mode, a gear transmission structure is adopted between a motor and a rotating arm, the rotary driver 6 drives the rotating arm 5 and an auxiliary chamber to rotate through a gear, and the rotation angle of the motor is controlled to control the angle of the auxiliary chamber.
Preferably, the utility model discloses set up rotatory anti-backlash spare 7 on sliding seat 2, rotatory anti-backlash spare 7 can exert the elasticity opposite to the direction of motion to rocking arm 5 that is close to the stop position, because the sub-chamber needs to rotate between main cavity position and getting excellent position to reciprocate, the sub-chamber needs to satisfy higher precision when docking with the main cavity, because the aforesaid utilizes the way of motor gear drive to drive rocking arm 5 to rotate, therefore should stop rotating when the sub-chamber just reaches above the main cavity, but because there is the clearance in the gear drive meshing, the motor has stopped after reaching to the place, but the sub-chamber has inertia to continue rotating; because the utility model discloses a rotatory gap eliminating piece 7 applys reverse elasticity to the rotor arm, has avoided the accessory chamber to continue pivoted process because of inertia, consequently the accessory chamber can stop above the main cavity accurately, eliminates and causes the phenomenon that the stop position produces the deviation because of the gear clearance.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. The auxiliary chamber lifting device is characterized by comprising a fixed support (1), wherein a sliding seat (2) is arranged on the fixed support (1) in a sliding limiting manner, and the sliding seat (2) can vertically slide relative to the fixed support (1); the sliding seat (2) is provided with an auxiliary chamber;
the lead screw lifting mechanism is characterized in that a lead screw jack (3) is installed on the fixed support (1), a telescopic shaft (31) of the lead screw jack (3) is fixed relative to the sliding seat (2), and a lead screw part of the lead screw jack (3) rotates to drive the sliding seat (2) to vertically lift.
2. The auxiliary chamber lifting device according to claim 1, characterized in that the top end of the telescopic shaft (31) is fixedly connected with the bottom end of a lifting rod (4), and the top end of the lifting rod (4) is fixedly connected with the sliding seat (2);
the fixed support (1) is provided with a guide block (11) for guiding the lifting rod (4).
3. The subchamber lifting device as claimed in claim 1, characterised in that the input of the screw jack (3) is connected to a motor (33) through a worm gear reducer (32).
4. The auxiliary chamber lifting device according to claim 1, wherein two guide rails (12) are arranged on the fixed bracket (1), a plurality of sets of sliding blocks (21) are fixedly arranged on the sliding seat (2), and the sliding blocks (21) are in sliding clamping connection with the guide rails (12).
5. A device according to any of claims 1-4, characterized in that the sliding seat (2) is pivotally connected to a pivoted arm (5), and the pivoted arm (5) is fixedly connected to the secondary chamber.
6. Auxiliary chamber lifting device according to claim 5, characterized in that a rotary drive (6) is arranged on the sliding seat (2), and the rotary drive (6) drives the swivel arm (5) and the auxiliary chamber to rotate through a gear.
7. A device according to claim 6, characterized in that a rotary anti-backlash member (7) is arranged on the sliding seat (2), the rotary anti-backlash member (7) being capable of exerting a spring force against the tumbler (5) towards the stop position, opposite to the direction of movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120053973.7U CN214655360U (en) | 2021-01-08 | 2021-01-08 | Auxiliary chamber lifting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120053973.7U CN214655360U (en) | 2021-01-08 | 2021-01-08 | Auxiliary chamber lifting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214655360U true CN214655360U (en) | 2021-11-09 |
Family
ID=78514821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120053973.7U Active CN214655360U (en) | 2021-01-08 | 2021-01-08 | Auxiliary chamber lifting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214655360U (en) |
-
2021
- 2021-01-08 CN CN202120053973.7U patent/CN214655360U/en active Active
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