CN216117736U

CN216117736U - Adjustable semiconductor chip test probe platform

Info

Publication number: CN216117736U
Application number: CN202121853047.4U
Authority: CN
Inventors: 陆鹏; 王硕秋; 卞杰锋
Original assignee: Jiangsu Weimai Intelligent Technology Co ltd
Current assignee: Jiangsu Weimai Intelligent Technology Co ltd
Priority date: 2021-08-10
Filing date: 2021-08-10
Publication date: 2022-03-22
Anticipated expiration: 2031-08-10

Abstract

The application relates to an adjustable semiconductor chip test probe station, which comprises a workbench, wherein a supporting arm and a power supply control box are arranged on the upper surface of the workbench, an observation table is arranged at the end part of the supporting arm, a carrying frame is arranged in the workbench, a driving device is arranged on the lower surface of the carrying frame, a carrying plate is arranged in the carrying frame, a lifting device is arranged in the workbench, a lifting plate is arranged at the top end of the lifting device, a motor, a fixed plate and a fixed block are arranged on the upper surface of the lifting plate, a double screw rod is arranged at the output end of the motor and provided with two sliding blocks, a connecting device is arranged on the upper surface of the lifting plate in a sliding manner, probes are arranged on the side wall of a connecting column, a rotating rod is arranged between the connecting device and the two sliding blocks in a rotating manner, side plates are symmetrically arranged on the side walls at two ends of the lifting plate, stabilizing columns are symmetrically fixed on the upper surface of the workbench and are respectively arranged on the two stabilizing columns in a sliding manner, this application has the effect that improves probe and remove the accuracy.

Description

Adjustable semiconductor chip test probe platform

Technical Field

The application relates to the technical field of probe stations, in particular to an adjustable semiconductor chip test probe station.

Background

At present, probe stations are mainly applied to the testing of semiconductor industry, photoelectric industry, integrated circuits and packaging, are widely applied to the research and development of precise electrical measurement of complex and high-speed devices, aim at ensuring quality and reliability and reducing research and development time and cost of device manufacturing process, and are generally divided into full-automatic probe stations, semi-automatic probe stations and manual probe stations.

The existing chip has the problem that the chip detection accuracy of a probe table is not high enough due to the fact that the core tube of the chip is small in size, the requirement on the moving accuracy of the probe table is high, and the moving accuracy is not high.

In view of the above-mentioned related art, the inventors consider that there is a drawback that the probe stage movement accuracy is not high.

SUMMERY OF THE UTILITY MODEL

In order to solve the above-mentioned problems in the background art, the present application provides an adjustable semiconductor chip test probe station.

The application provides an adjustable semiconductor chip test probe platform adopts following technical scheme:

an adjustable semiconductor chip test probe station comprises a workbench, wherein a support arm and a power supply control box are arranged on the upper surface of the workbench, an observation table is arranged at the end part of the support arm, an eyepiece is arranged at the top end of the observation table, an observation mirror is arranged at the bottom end of the observation table, a carrying frame is arranged in the workbench, a driving device is arranged on the lower surface of the carrying frame, a carrying plate is arranged in the carrying frame, the output end of the driving device is connected with the carrying plate, a lifting device is arranged in the workbench, a lifting plate is arranged at the top end of the lifting device, a motor, a fixed plate and a fixed block are arranged on the upper surface of the lifting plate, a double screw rod is arranged at the output end of the motor, the end part of the double screw rod is rotatably arranged in the side wall of the fixed plate, the double screw rod is rotatably arranged in the fixed block, and two thread parts of the double screw rod are respectively provided with a sliding block, the upper surface of lifter plate slides and is provided with connecting device, the lateral wall of connection post is provided with the probe, it is provided with the bull stick all to rotate between connecting device and two sliders, the both ends lateral wall symmetry of lifter plate is provided with the curb plate, and the upper surface symmetry of workstation is fixed with the post of stabilizing, two the curb plate slides respectively and sets up on two posts of stabilizing.

Through adopting above-mentioned technical scheme, the control bull stick rotates and controls the probe and remove, has improved the removal accuracy of probe, and after the probe removed suitable horizontal position, elevating gear drove the lifter plate and goes up and down to make the probe test to suitable vertical position, and the lift of lifter plate is stabilized with the curb plate to the lift process stabilization post, prevents that the lifter plate from taking place the skew and influencing the test, and drive arrangement control carries the thing board and rotates the test to the semiconductor chip, and the staff observes the content of sight glass through the eyepiece.

Preferably, a plurality of supporting legs are symmetrically fixed on the upper surface of the workbench.

Through adopting above-mentioned technical scheme, the supporting leg improves the height of workstation.

Preferably, the side wall of the observation platform is provided with a rotary head in a rotating manner.

Through adopting above-mentioned technical scheme, the observation platform is conveniently adjusted to the turn round.

Preferably, the lower surface of the object carrying frame is provided with a fixing frame, and the driving device is arranged in the fixing frame.

Through adopting above-mentioned technical scheme, drive arrangement is stabilized to the mount.

Preferably, the top ends of the two stabilizing columns are fixed with limiting heads.

Through adopting above-mentioned technical scheme, spacing head prevents the lifter plate roll-off.

Preferably, the upper surface of the lifting plate is provided with a sliding groove, and the bottom end of the connecting device is slidably arranged in the sliding groove.

Through adopting above-mentioned technical scheme, connecting device's slip is stabilized to the spout.

Preferably, the side walls of the sliding block and the connecting device are symmetrically fixed with rotating plates, rotating shafts are arranged between every two adjacent rotating plates, and two ends of each rotating rod are respectively rotatably arranged in the rotating shafts.

Through adopting above-mentioned technical scheme, the rotor plate makes things convenient for the stable of bull stick to be connected with the pivot.

Preferably, a box door is arranged on the side wall of the power control box.

Through adopting above-mentioned technical scheme, the power control box is conveniently adjusted to the chamber door.

In summary, the present application includes at least one of the following beneficial technical effects:

1. according to the utility model, the double screw rods are controlled by the motor to rotate to drive the sliding blocks to slide, the two sliding blocks slide to control the rotating rod to rotate to control the probe to move, so that the moving accuracy of the probe is improved, the probe moves to a proper horizontal position, and the lifting device drives the lifting plate to lift to enable the probe to move to a proper vertical position for testing;

2. the lifting of the lifting plate is stabilized through the stabilizing columns and the side plates, the lifting plate is prevented from being deviated to influence testing, the driving device controls the loading plate to rotate to test the semiconductor chip, and the observation stability is improved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of the present invention;

FIG. 3 is a schematic structural view at A of the present invention;

FIG. 4 is a schematic view of the stage of the present invention;

description of reference numerals: 1. a work table; 11. supporting legs; 12. a carrying frame; 2. a support arm; 21. an observation stage; 22. an eyepiece; 23. an observation mirror; 24. turning the head; 3. a drive device; 31. a fixed mount; 32. a loading plate; 4. a power supply control box; 41. a box door; 5. a lifting plate; 51. a lifting device; 52. a side plate; 53. A stabilization post; 54. a limiting head; 55. a chute; 6. a probe; 61. a connecting device; 62. a rotating rod; 63. A motor; 64. a fixing plate; 65. a double screw; 66. a fixed block; 67. a slider; 68. a rotating plate; 69. a rotating shaft.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses an adjustable semiconductor chip test probe station. Referring to fig. 1-4, an adjustable semiconductor chip test probe station comprises a workbench 1, a supporting arm 2 and a power control box 4 are arranged on the upper surface of the workbench 1, the power control box 4 is used for controlling a driving device 3 and a motor 63, an observation platform 21 is arranged at the end part of the supporting arm 2, an eyepiece 22 is arranged at the top end of the observation platform 21, an observation mirror 23 is arranged at the bottom end of the observation platform 21, the observation platform 21 is used for observing a semiconductor chip, an object carrying frame 12 is arranged in the workbench 1, the object carrying frame 12 is used for limiting the position of an object carrying plate 32, the driving device 3 is arranged on the lower surface of the object carrying frame 12, an object carrying plate 32 is arranged in the object carrying frame 12, the output end of the driving device 3 is connected with the object carrying plate 32, the driving device 3 is used for controlling the object carrying plate 32 to rotate, a lifting device 51 is arranged in the workbench 1, a lifting plate 5 is arranged at the top end of the lifting device 51, the lifting device 51 is used for controlling the lifting of the lifting plate 5 to control the lifting of the probe 6, the upper surface of the lifting plate 5 is provided with a motor 63, a fixing plate 64 and a fixing block 66, the output end of the motor 63 is provided with a double screw 65, the end part of the double screw 65 is rotatably arranged in the side wall of the fixing plate 64, the double screw 65 is rotatably arranged in the fixing block 66, two thread parts of the double screw 65 are respectively provided with a slide block 67, the motor 63 is used for controlling the double screw 65 to rotate to drive the slide block 67 to slide, the two slide blocks 67 are used for controlling the rotation rod 62 to rotate to control the movement of the probe 6, the movement accuracy of the probe 6 is improved, the upper surface of the lifting plate 5 is provided with a connecting device 61 in a sliding manner, the side wall of a connecting column is provided with the probe 6, rotating rods 62 are rotatably arranged between the connecting device 61 and the two slide blocks 67, the side walls at two ends of the lifting plate 5 are symmetrically provided with side plates 52, stabilizing columns 53 are symmetrically fixed on the upper surface of the workbench 1, the two side plates 52 are respectively arranged on the two stabilizing columns 53 in a sliding manner, and the stabilizing columns 53 stabilize the lifting of the lifting plate 5.

Referring to fig. 1, a plurality of support legs 11 are symmetrically fixed to the upper surface of a table 1.

Referring to fig. 1, a side wall of the observation stage 21 is rotatably provided with a swivel 24.

Referring to fig. 4, the lower surface of the object frame 12 is provided with a fixing frame 31, the driving device 3 is disposed in the fixing frame 31, and the fixing frame 31 is used for fixing the driving device 3.

Referring to fig. 2, the top ends of the two stabilizing columns 53 are fixed with limit heads 54.

Referring to fig. 3, a sliding groove 55 is formed on the upper surface of the lifting plate 5, and the bottom end of the connecting device 61 is slidably disposed in the sliding groove 55.

Referring to fig. 3, the side walls of the connecting device 61 and the sliding block 67 are symmetrically fixed with rotating plates 68, a rotating shaft 69 is arranged between adjacent rotating plates 68, and two ends of the rotating rod 62 are respectively rotatably arranged in the rotating shaft 69.

Referring to fig. 1, the side wall of the power control box 4 is provided with a box door 41.

The implementation principle of the adjustable semiconductor chip test probe station in the embodiment of the application is as follows: when the device is used, firstly, the motor 63 controls the double screw rod 65 to rotate to drive the slide blocks 67 to slide, the two slide blocks 67 slide to control the rotation rod 62 to rotate to control the movement of the probe 6, the movement accuracy of the probe 6 is improved, after the probe 6 moves to a proper horizontal position, the lifting device 51 drives the lifting plate 5 to lift to enable the connecting device 61 to lift, the connecting device 61 lifts to adjust the probe 6 to a proper vertical position for testing, the lifting process stabilizing column 53 and the side plate 52 stabilize the lifting of the lifting plate 5 to prevent the lifting plate 5 from shifting to influence the testing, the driving device 3 controls the carrying plate 32 to rotate to test a semiconductor chip, and a worker observes the content observed by the observation mirror 23 through the eyepiece 22.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. An adjustable semiconductor chip test probe station, includes workstation (1), its characterized in that: the upper surface of the workbench (1) is provided with a supporting arm (2) and a power supply control box (4), the end part of the supporting arm (2) is provided with an observation table (21), the top end of the observation table (21) is provided with an eyepiece (22), the bottom end of the observation table (21) is provided with an observation mirror (23), the workbench (1) is internally provided with an objective frame (12), the lower surface of the objective frame (12) is provided with a driving device (3), the objective plate (32) is arranged in the objective frame (12), the output end of the driving device (3) is connected with the objective plate (32), the workbench (1) is internally provided with a lifting device (51), the top end of the lifting device (51) is provided with a lifting plate (5), the upper surface of the lifting plate (5) is provided with a motor (63), a fixing plate (64) and a fixing block (66), the output end of the motor (63) is provided with a double screw (65), the tip of dual screw rod (65) is rotated and is set up in the lateral wall of fixed plate (64), dual screw rod (65) are rotated and are set up in fixed block (66), two screw thread parts of dual screw rod (65) are provided with slider (67) respectively, the last surface sliding of lifter plate (5) is provided with connecting device (61), the lateral wall of connecting device (61) is provided with probe (6), it is provided with bull stick (62) all to rotate between connecting device (61) and two slider (67), the both ends lateral wall symmetry of lifter plate (5) is provided with curb plate (52), and the upper surface symmetry of workstation (1) is fixed with stabilization column (53), two curb plate (52) slide respectively and set up on two stabilization column (53).

2. The adjustable semiconductor chip test probe station of claim 1, wherein: a plurality of supporting legs (11) are symmetrically fixed on the upper surface of the workbench (1).

3. The adjustable semiconductor chip test probe station of claim 1, wherein: the side wall of the observation platform (21) is rotatably provided with a rotating head (54).

4. The adjustable semiconductor chip test probe station of claim 1, wherein: the lower surface of the object carrying frame (12) is provided with a fixed frame (31), and the driving device (3) is arranged in the fixed frame (31).

5. The adjustable semiconductor chip test probe station of claim 1, wherein: the top ends of the two stabilizing columns (53) are fixed with limiting heads (24).

6. The adjustable semiconductor chip test probe station of claim 1, wherein: the upper surface of lifter plate (5) has seted up spout (55), the bottom of connecting device (61) slides and sets up in spout (55).

7. The adjustable semiconductor chip test probe station of claim 1, wherein: the side wall of slider (67) and connecting device (61) all the symmetry is fixed with rotor plate (68), and is adjacent be provided with pivot (69) between rotor plate (68), the both ends of bull stick (62) rotate respectively and set up in pivot (69).

8. The adjustable semiconductor chip test probe station of claim 1, wherein: and a box door (41) is arranged on the side wall of the power control box (4).