CN214387453U

CN214387453U - Physiological signal detection sensor with environmental vibration compensation

Info

Publication number: CN214387453U
Application number: CN202022191435.2U
Authority: CN
Inventors: 单华锋; 王家冬; 陈磊; 查陈飞; 沈驾; 潘文超
Original assignee: Keeson Technology Corp Ltd; Yangtze Delta Region Institute of Tsinghua University Zhejiang
Current assignee: Keeson Technology Corp Ltd; Yangtze Delta Region Institute of Tsinghua University Zhejiang
Priority date: 2020-09-29
Filing date: 2020-09-29
Publication date: 2021-10-15
Anticipated expiration: 2030-09-29

Abstract

The utility model provides a pair of take physiological signal detection sensor of environmental vibration compensation, this sensor includes: an upper housing, a lower housing and a circuit board; the upper shell and the lower shell are connected to form an internal hollow structure, the upper shell and the lower shell can relatively move in a telescopic mode, and the circuit board is perpendicular to the telescopic movement direction; the circuit board includes: the vibration-compensated sensor assembly comprises a plate body, at least one vibration-compensated sensing assembly and at least one dynamic force sensing assembly; the plate body is erected in the lower shell and is provided with at least two openings; the vibration compensation sensing assembly and the dynamic force sensing assembly are respectively arranged in different openings; the upper shell is provided with a salient point facing the lower shell, and the salient point is in contact with the dynamic force sensing assembly. The utility model discloses an integrated environmental vibration compensating circuit and structure eliminate the influence of environmental vibration noise to a certain extent, improve the accuracy that the sensor detected.

Description

Physiological signal detection sensor with environmental vibration compensation

Technical Field

The utility model relates to a sensor technical field especially relates to a take physiological signal detection sensor of environmental vibration compensation.

Background

The physiological phenomena such as breathing, heartbeat and the like can generate weak vibration signals when a human body sleeps, the vibration signals can be transmitted to certain sensors arranged on a mattress or transmitted to sensors arranged on a bed board or in the bed board through the mattress, the sensors sense the weak vibration, and meanwhile, when the environment has stronger vibration, such as vibration caused by outdoor construction, vibration caused by driving of roadside automobiles and the like, the detection result can be influenced. The signal received by a pure force sensor is mixed with noise, and when the frequency of the noise is close to that of the signal or the amplitude is large, effective signals are difficult to distinguish.

SUMMERY OF THE UTILITY MODEL

The utility model provides a take physiological signal detection sensor of environmental vibration compensation to solve prior art and easily receive the environmental vibration influence, appear measuring error's technical problem when leading to physiological signal to detect.

Therefore, the utility model provides a pair of take physiological signal detection sensor of ambient vibration compensation, this physiological signal detection sensor of take ambient vibration compensation includes: an upper housing, a lower housing and a circuit board; the upper shell and the lower shell are connected to form an internal hollow structure, the upper shell and the lower shell can relatively move in a telescopic mode, and the circuit board is perpendicular to the telescopic movement direction; the circuit board includes: the vibration-compensated sensor assembly comprises a plate body, at least one vibration-compensated sensing assembly and at least one dynamic force sensing assembly; the plate body is erected in the lower shell and is provided with at least two openings; the vibration compensation sensing assembly and the dynamic force sensing assembly are respectively arranged in different openings; the upper shell is provided with a salient point facing the lower shell, and the salient point is in contact with the dynamic force sensing assembly.

Further, the vibration compensating sensing assembly includes: the vibration compensation cantilever beam, the first piezoelectric film and the mass block; the tail end of the vibration compensation cantilever beam is connected with the inner wall of the opening, and the first piezoelectric film and the mass block are arranged on the vibration compensation cantilever beam.

Further, the first piezoelectric film is located in the middle of the vibration compensation cantilever beam, and the mass block is located at the head end of the vibration compensation cantilever beam.

Further, the dynamic force sensing assembly comprises: the piezoelectric actuator comprises a pressure cantilever beam and a second piezoelectric film, wherein the second piezoelectric film is arranged on the pressure cantilever beam.

Further, the second piezoelectric film is located in the middle of the pressure cantilever.

Further, still include: and one end of the elastic gasket is in surface contact with the second piezoelectric film, and the other end of the elastic gasket is connected with the upper shell or the lower shell.

Further, the plate body is connected to the lower shell or the lower shell at a position between the two openings.

Further, still include: the elastic gasket is arranged between the upper shell and the lower shell, and the upper shell is connected with the lower shell through the elastic gasket.

Further, the opening, the vibration compensation sensing assembly and the dynamic force sensing assembly are all elongated.

Further, the plate body, the vibration compensation sensing assembly and the dynamic force sensing assembly are integrally formed.

Further, the openings are respectively located at both sides of the plate body.

Further, the openings are respectively located at one side of the plate body and at a middle portion of the plate body.

Further, the plate body is provided with a bonding pad, and the bonding pad is electrically connected with the first piezoelectric film and the second piezoelectric film respectively.

Further, still include the chip: the chip is electrically connected to the board body.

Furthermore, the first piezoelectric film is made of polyvinylidene fluoride or polydimethylsiloxane.

Furthermore, the second piezoelectric film is made of polyvinylidene fluoride or polydimethylsiloxane.

Further, the elastic washer is made of silica gel or rubber.

Furthermore, the inner walls of the upper shell and the lower shell are provided with shielding layers.

Further, the vibration compensating sensing assembly is parallel to the dynamic force sensing assembly.

Furthermore, the elastic gasket is made of silica gel or rubber.

Through integrated environmental vibration compensating circuit and structure, eliminate the influence of environmental vibration noise to a certain extent, improve the accuracy that the sensor detected.

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:

fig. 1 is a cross-sectional view of a physiological signal detecting sensor with environmental vibration compensation along the extended center line of a dynamic force sensing assembly according to an embodiment of the present invention;

fig. 2 is a cross-sectional view of a physiological signal detecting sensor with environmental vibration compensation along the extended center line of a dynamic force sensing assembly according to an embodiment of the present invention;

fig. 3 is a top view of a first embodiment of a circuit board according to an embodiment of the present invention;

fig. 4 is a top view of a second embodiment of a circuit board according to an embodiment of the present invention.

Description of reference numerals:

1-an upper shell, 2-a lower shell, 3-a circuit board, 4-an elastic washer and 5-an elastic gasket;

11-salient points, 31-plate bodies, 32-vibration compensation sensing components and 33-dynamic force sensing components;

311-opening, 312-pad, 321-vibration compensation cantilever, 322-first piezoelectric film, 323-mass, 331-pressure cantilever, 332-second piezoelectric film.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Fig. 1 is the utility model provides a take physiological signal detection sensor of ambient vibration compensation along the section view of dynamic force sensing subassembly extension central line, fig. 2 do the utility model discloses a take physiological signal detection sensor of ambient vibration compensation along the section view of dynamic force sensing subassembly extension central line, fig. 3 do the embodiment of the utility model provides an embodiment of a first implementation of circuit board is listed as the plan view, fig. 4 is the utility model provides an embodiment of a second implementation of circuit board is listed as the plan view, as shown in fig. 1 to fig. 4, the utility model provides a physiological signal detection sensor of belt loop ambient vibration compensation includes: an upper case 1, a lower case 2, and a circuit board 3; the upper shell 1 and the lower shell 2 are connected to form an internal hollow structure, the upper shell 1 and the lower shell 2 can relatively move in a telescopic manner, and the circuit board 3 is perpendicular to the direction of the telescopic movement; the circuit board 3 includes: a plate body 31, at least one vibration compensating sensing assembly 32 and at least one dynamic force sensing assembly 33; the plate body 31 is erected in the lower shell 2, and the plate body 31 is provided with at least two openings 311; the vibration compensation sensing assembly 32 and the dynamic force sensing assembly 33 are respectively arranged in the different openings 311; the upper shell 1 is provided with a salient point 11 facing the lower shell 2, and the salient point 11 is in contact with the dynamic force sensing assembly 33.

Go up casing 1 and casing 2 and form an inner space and be used for installing circuit board 3, circuit board 3 erects on casing 2 down, and circuit board 3 and casing 2 fixed connection down help reducing the interference of environmental vibration. When the outer surfaces of the upper shell 1 and the lower shell 2 are stressed in the vertical direction, the upper shell 1 and the lower shell 2 are extruded to produce relative micro shrinkage, the stress disappears, the upper shell 1 and the lower shell 2 recover, and relative telescopic motion between the upper shell 1 and the lower shell 2 is realized. The hardness of the upper shell 1 and the lower shell 2 can be controlled or the elastic part is additionally arranged at the joint of the upper shell 1 and the lower shell 2, the hardness of the upper shell 1 and the lower shell 2 can be realized through the selection of materials, the thickness and the structural design, for example, the upper shell 1 is realized by using materials such as plastics and rubber or a structure with a telescopic function such as a spring, and a large number of related technical schemes can be selected in the prior art and are not listed. The board body 31 is provided with at least two openings 311, each opening 311 is provided with one vibration compensation sensing component 32 or one dynamic force sensing component 33, but the circuit board 3 is provided with at least one vibration compensation sensing component 32 and at least one dynamic force sensing component 33, the openings 311 can be additionally arranged independently, the vibration compensation sensing components 32 or the dynamic force sensing components 33 are increased, and the data acquisition performance of the sensor is further enhanced. The vibration-compensating sensing assembly 32, the dynamic force sensing assembly 33 and the plate body 31 are in the same plane. The salient points 11 are used for matching with the dynamic force sensing assembly 33, preferably surface contact, so as to transmit the pressure applied to the upper shell 1 or the lower shell 2 to the dynamic force sensing assembly 33, the dynamic force sensing assembly 33 outputs a corresponding dynamic force signal, the theoretical output of the vibration compensation sensing assembly 32 is zero, and when the external environment vibrates, due to inertia, the vibration compensation sensing assembly 32 and the dynamic force sensing assembly 33 both have electric signal output, and the signals have certain correlation.

When the sensor is installed at the acquisition position, and the upper shell 1 and the lower shell 2 only bear external pressure, the salient points 11 transmit the pressure to the dynamic force sensing assembly 33, the dynamic force sensing assembly 33 outputs dynamic force signals, and the vibration compensation sensing assembly 32 outputs no signals; when the upper shell 1 and the lower shell 2 are influenced by external vibration while receiving external pressure, the vibration compensation sensing assembly 32 and the circuit board 3 which are arranged in a certain opening 311 do not interfere with each other, the upper shell 1 and the lower shell 2 do not interfere with each other, the vibration compensation sensing assembly 32 takes the circuit board 3 as a fulcrum, vibration signals are output by free vibration under the action of inertia, the dynamic force sensing assembly 33 outputs dynamic force signals, certain correlation is shown between the vibration signals and the dynamic force signals, the vibration signals perform certain compensation on the dynamic force signals, and the influence of environmental vibration on the sensor output signals is eliminated or weakened.

The utility model discloses a gather the function of the vibration compensation signal that dynamic force signal and environmental vibration produced simultaneously, and need not to calibrate the time difference between two kinds of signals, also need not extra wiring, strengthened signal integrality, avoided the installation error because of the externally mounted of sensor introduces, reduced the production degree of difficulty and cost, help promoting the speed of acquireing the effective signal. Through integrated environmental vibration compensating circuit and structure, eliminate the influence of environmental vibration noise to a certain extent, improve the accuracy that the sensor detected.

Preferably, the method further comprises the following steps: elastic washer 4, like silica gel, rubber material, elastic washer 4 is located go up casing 1 with between casing 2 down, go up casing 1 through elastic washer 4 with casing 2 is connected down.

When the upper shell 1 or the lower shell 2 is influenced by external force and pressed to the opposite side, the elastic gasket 4 between the upper shell and the lower shell can be extruded to generate small opposite displacement, after the external force disappears, the lower shell 2 and the upper shell 1 recover to the original position because the elastic gasket 4 has elasticity, the stability of the sensor structure is ensured, and the pressure detection is realized. The opposite small displacement of the upper shell 1 and the lower shell 2 is realized through the elastic gasket 4, and the mode is the simplest and is convenient to produce and maintain.

Preferably, as shown in fig. 3, the openings 311 are respectively located at both sides of the plate body 31.

Preferably, as shown in fig. 4, the openings 311 are respectively located at one side of the plate body 31 and at the middle of the plate body 31.

The addition of the cantilever beam needs to increase a circuit processing unit, so that the two are better in terms of cost and function. Dynamic force sensing component 33 is located the centre, can conveniently receive directly over pressure, and whole data is more stable, helps improving the accuracy that the sensor detected. If the side edge is arranged, but the upper cover structure is processed, otherwise, the upper cover structure is sensitive to the force detection ratio of one side edge of the upper cover.

Further, the vibration compensating sensing assembly 32 is parallel to the dynamic force sensing assembly 33.

The position of the opening 311 has no specific requirement, and even a plurality of cantilever beams can be arranged, the cantilever beams are transversely and longitudinally vertical, but at least one cantilever beam is ensured to be in the same direction as the dynamic force sensing assembly 33, so that the external vibration is detected from the same direction basically, the correlation between data is ensured, and the accuracy of the detection result is enhanced.

Further, as shown in fig. 2 to 4, the vibration compensating sensing assembly 32 includes: a vibration-compensating cantilever beam 321, a first piezoelectric film 322 and a mass 323; the end of the vibration compensation cantilever 321 is connected to the inner wall of the opening 311, and the first piezoelectric film 322 and the mass block 323 are disposed on the vibration compensation cantilever 321.

The vibration compensation cantilever 321 is provided with a mass block 323, and is mounted by welding, riveting, gluing and the like. The vibration compensation cantilever beam 321 is suspended only when the tail end is connected with the inner wall of one opening 311, and does not interfere with the upper shell 1 and the lower shell 2, and the vibration compensation cantilever beam 321 can vibrate up and down freely. When the upper shell 1 and the lower shell 2 are affected by external vibration, the vibration compensation cantilever 321 generates corresponding vibration to generate a cyclic reciprocating displacement under the cooperation of the mass block 323, so that the first piezoelectric film 322 is deformed, and a corresponding electrical signal is output. The structure is simple and practical, the large-scale production and application are suitable, and the production cost is low.

Preferably, the first piezoelectric film 322 is attached to the upper surface or the lower surface of the vibration compensation cantilever 321, so as to pursue a piezoelectric film with a larger area, facilitate attachment, and more importantly, enhance the signal output of the vibration compensation sensing assembly 32.

Further, as shown in fig. 2 to 4, the first piezoelectric film 322 is located in the middle of the vibration-compensating cantilever 321, and the mass 323 is located at the head end of the vibration-compensating cantilever 321.

First piezoelectric film 322 is located the middle part of vibration compensation cantilever beam 321, the quality piece 323 of locating vibration compensation cantilever beam 321 head end helps strengthening the vibration inertia, the sensitivity of vibration compensation cantilever beam 321 to vibration feedback is strengthened to quality piece 323, strengthen the reciprocal deformation of vibration compensation cantilever beam 321, first piezoelectric film 322 that is located vibration compensation cantilever beam 321 middle part is even deformation thereupon, the signal of telecommunication that produces sets up the signal of telecommunication fluctuation scope that first piezoelectric film 322 produced than other positions is littleer, further improve the vibration signal degree of accuracy of sensor output.

Further, as shown in fig. 3 and 4, the dynamic force sensing assembly 33 includes: a pressure cantilever 331 and a second piezoelectric film 332, wherein the second piezoelectric film 332 is disposed on the pressure cantilever 331.

The upper shell 1 contacts the pressure cantilever beam 331 through the bumps 11, and the second piezoelectric film 332 is attached to the upper surface or the lower surface of the pressure cantilever beam 331, so as to pursue a piezoelectric film with a larger area, facilitate attachment, and more importantly, enhance the signal output of the dynamic force sensing component 33. When the upper casing 1 or the lower casing 2 is subjected to external pressure, the pressure cantilever beam 331 is deformed accordingly, and the piezoelectric film is also deformed to output an electric signal. The structure is simple and practical, the large-scale production and application are suitable, and the production cost is low.

Further, as shown in fig. 2 to 4, the second piezoelectric film 332 is located in the middle of the pressure cantilever 331.

The second piezoelectric film 332 is arranged in the middle of the pressure cantilever beam 331, the vibration compensation cantilever beam 321 makes the piezoelectric film in the middle deform due to the vibration compensation generated by the vibration, so that the piezoelectric film in the middle deforms uniformly, the fluctuation range of the generated electric signal is smaller than that of the electric signal generated by arranging the first piezoelectric film 322 in other positions, and the accuracy of the pressure signal output by the sensor is further improved.

Further, as shown in fig. 1, the method further includes: and one end of the elastic gasket 5 is in surface contact with the second piezoelectric film 332, and the other end of the elastic gasket 5 is connected with the upper shell 1 or the lower shell 2.

An elastic gasket 5 is additionally arranged between the second piezoelectric film 332 and the upper shell 1 or the lower shell 2, the size of the elastic gasket is equivalent to that of the pressure cantilever beam 331, a certain pre-pressure is formed between the elastic gasket 5 and the pressure cantilever beam 331 and is loaded on the pressure piezoelectric film clamped by the elastic gasket and the pressure cantilever beam 331, vibration interference generated by external force on the upper shell 1 or the lower shell 2 can be relieved, and therefore a more accurate dynamic force signal is obtained.

The elastic gasket 5 may be made of soft elastic material such as silica gel or rubber, and has a thickness of 1mm, and the thickness of the soft silica gel will vary according to the height of the connector between boards. The hardness of the soft silica gel can be selected from 20 to 40 Shore hardness, and can be adjusted according to the pressure stress to be measured. In addition, the elastic pad 5 can press the second piezoelectric film 332 to prevent the second piezoelectric film from falling off accidentally.

Further, as shown in fig. 3 and 4, the plate body 31 is connected to the lower case 2 or the lower case 2 at a position between the two openings 311.

The circuit board 3 is fixedly mounted on the lower housing 2 through a fixing screw post, so that the vibration compensation sensing assembly 32 and the dynamic force sensing assembly 33 on both sides do not interfere with each other during vibration. Optimizing the accuracy of the signal.

Further, as shown in fig. 3 and 4, the opening 311, the vibration compensation sensing assembly 32, and the dynamic force sensing assembly 33 are all elongated. The sensitivity is higher, and the deformation is more even, helps the collection of signal.

Further, as shown in fig. 3 and 4, the plate body 31, the vibration compensation sensing assembly 32 and the dynamic force sensing assembly 33 are integrally formed.

The strength among the reinforcing plate body 31, the vibration compensation sensing assembly 32 and the dynamic force sensing assembly 33 improves the overall durability, reduces the number of parts and the assembly process, and improves the production efficiency.

Further, as shown in fig. 3 and 4, the board body 31 is provided with pads 312, and the pads 312 are electrically connected to the first piezoelectric film 322 and the second piezoelectric film 332, respectively.

The pads 312 may be divided into signal pads electrically connected to the positive electrodes of the piezoelectric film and ground pads electrically connected to the negative electrodes of the piezoelectric film. And the power supply realizes the transmission of signals at the same time.

Further, still include: a chip electrically connected with the board body 31.

The chip is shown in the figure. The two collected signals are simultaneously sent to the processor, the influence of environmental vibration on the sensor is eliminated through a compensation algorithm, useful signals are obtained, and the accuracy of data collection of the sensor is optimized.

Further, the first piezoelectric film 322 is made of polyvinylidene fluoride or polydimethylsiloxane.

The piezoelectric film is made of common piezoelectric materials, such as polyvinylidene fluoride (PVDF), Polydimethylsiloxane (PDMS), and the like, and both the first piezoelectric film 322 and the second piezoelectric film 332 may be made of the above materials. When the vibration compensation cantilever 321 and the pressure cantilever 331 are deformed by vibration and pressure, the first piezoelectric film 322 and the second piezoelectric film 332 are driven to deform to generate an electrical signal. The piezoelectric materials have the advantages of light weight, wide frequency response, high piezoelectric voltage constant and simple vibration mode, and are beneficial to optimizing the performance of the sensor.

Furthermore, the inner walls of the upper shell 1 and the lower shell 2 are both provided with shielding layers.

Go up casing 1 and casing 2 and be equipped with the shielding layer (not shown in the figure), especially be equipped with the shielding layer on the inner wall of both respectively, form the shielding layer or directly attach materials such as electrically conductive cloth through carrying out electroplating process to both surfaces, further strengthen the sensor to external radiation interference's suppression effect, promote the accuracy of signal.

Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.

It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof.

Claims

1. A physiological signal detecting sensor with ambient vibration compensation, comprising: an upper housing, a lower housing and a circuit board;

the upper shell and the lower shell are connected to form an internal hollow structure, the upper shell and the lower shell can relatively move in a telescopic mode, and the circuit board is perpendicular to the telescopic movement direction;

the circuit board includes: the vibration-compensated sensor assembly comprises a plate body, at least one vibration-compensated sensing assembly and at least one dynamic force sensing assembly;

the plate body is erected in the lower shell and is provided with at least two openings;

the vibration compensation sensing assembly and the dynamic force sensing assembly are respectively arranged in different openings;

the upper shell is provided with a salient point facing the lower shell, and the salient point is in contact with the dynamic force sensing assembly.

2. The ambient vibration compensated physiological signal detecting sensor of claim 1, wherein the vibration compensation sensing assembly comprises: the vibration compensation cantilever beam, the first piezoelectric film and the mass block;

the tail end of the vibration compensation cantilever beam is connected with the inner wall of the opening, and the first piezoelectric film and the mass block are arranged on the vibration compensation cantilever beam.

3. The ambient vibration compensated physiological signal detecting sensor of claim 2, wherein the first piezoelectric film is located at a middle portion of the vibration compensating cantilever beam and the mass block is located at a head end of the vibration compensating cantilever beam.

4. The ambient vibration compensated physiological signal detecting sensor of claim 2 or 3, wherein the dynamic force sensing assembly comprises: the piezoelectric actuator comprises a pressure cantilever beam and a second piezoelectric film, wherein the second piezoelectric film is arranged on the pressure cantilever beam.

5. The ambient vibration compensated physiological signal detecting sensor of claim 4, wherein the second piezoelectric film is located in the middle of the pressure cantilever.

6. The ambient vibration compensated physiological signal detecting sensor of claim 4, further comprising: and one end of the elastic gasket is in surface contact with the second piezoelectric film, and the other end of the elastic gasket is connected with the upper shell or the lower shell.

7. The ambient vibration compensated physiological signal detecting sensor of claim 6, wherein the plate body is connected to the lower housing or the lower housing at a position between the two openings.

8. The ambient vibration compensated physiological signal detecting sensor of claim 6, further comprising: the elastic gasket is arranged between the upper shell and the lower shell, and the upper shell is connected with the lower shell through the elastic gasket.

9. The ambient vibration compensated physiological signal detecting sensor of claim 6, wherein the opening, the vibration compensating sensing assembly and the dynamic force sensing assembly are all elongated.

10. The ambient vibration compensated physiological signal detecting sensor of claim 6, wherein the plate body, the vibration compensating sensing assembly and the dynamic force sensing assembly are integrally formed.

11. The ambient vibration compensated physiological signal detecting sensor of claim 6, wherein the openings are located at both sides of the plate body, respectively.

12. The ambient vibration compensated physiological signal detecting sensor of claim 6, wherein the openings are located at one side of the plate body and at a middle portion of the plate body, respectively.

13. The physiological signal detecting sensor with ambient vibration compensation according to claim 6, wherein the plate body is provided with pads electrically connected to the first piezoelectric film and the second piezoelectric film, respectively.

14. The ambient vibration compensated physiological signal detecting sensor of claim 13, further comprising a chip: the chip is electrically connected to the board body.

15. The physiological signal detecting sensor with ambient vibration compensation according to claim 2 or 3, wherein the first piezoelectric film is made of polyvinylidene fluoride or polydimethylsiloxane.

16. The physiological signal detecting sensor with ambient vibration compensation according to claim 4 or 5, wherein the second piezoelectric film is made of polyvinylidene fluoride or polydimethylsiloxane.

17. The physiological signal detecting sensor with environmental vibration compensation of claim 8, wherein the elastic washer is made of silica gel or rubber.

18. The ambient vibration compensated physiological signal detecting sensor of claim 6, wherein the inner walls of the upper housing and the lower housing are provided with shielding layers.

19. The ambient vibration compensated physiological signal detecting sensor of any one of claims 1 to 5, wherein the vibration compensating sensing assembly is parallel to the dynamic force sensing assembly.

20. The physiological signal detecting sensor with environmental vibration compensation of claim 6, wherein the elastic pad is made of silica gel or rubber.