CN110375845B - Electrostatic balance type high-sensitivity hydrophone - Google Patents
Electrostatic balance type high-sensitivity hydrophone Download PDFInfo
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- CN110375845B CN110375845B CN201910595768.0A CN201910595768A CN110375845B CN 110375845 B CN110375845 B CN 110375845B CN 201910595768 A CN201910595768 A CN 201910595768A CN 110375845 B CN110375845 B CN 110375845B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/186—Hydrophones
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- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Environmental & Geological Engineering (AREA)
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- General Life Sciences & Earth Sciences (AREA)
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- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
The invention discloses an electrostatic balance type high-sensitivity hydrophone which comprises a sound pressure sensitive structure, a displacement detection device, an electrostatic driving device and a detection and control circuit. Under the condition of strong background noise, the acoustic elastomer in the sound pressure sensitive structure of the traditional hydrophone presents nonlinear characteristics due to overlarge deformation, and the sensitivity is reduced. According to the invention, through a closed-loop detection mode, the deformation quantity of the elastic body is detected by adopting the displacement detection device, and the elastic body is driven by adopting the electrostatic driving device to work at a balance position. The invention makes up the defect that the sensitivity of the hydrophone elastomer is reduced due to the nonlinearity of the hydrophone elastomer under strong background noise, and is beneficial to improving the sensitivity of the hydrophone.
Description
Technical Field
The invention relates to a hydrophone, in particular to an electrostatic balance type high-sensitivity hydrophone, and belongs to the technical field of measuring instruments.
Background
Hydrophones are key components of underwater acoustic detection. In the probe of the hydrophone, a weak acoustic pressure signal is generally obtained by detecting the displacement of the acoustic elastomer. In marine environments, hydrophones tend to be disturbed by strong background noise. Under strong noise, the deformation of the acoustic elastomer is large, and the relation between vibration displacement and sound pressure is nonlinear, so that the detection sensitivity of the hydrophone is reduced. After the large deformation of the hydrophone elastomer is detected, the elastomer is maintained at a balance position through feedback control, the nonlinearity of the elastomer can be reduced, and the sensitivity of the hydrophone is improved.
Disclosure of Invention
The invention aims to solve the technical problem that the hydrophone is insufficient in sensitivity under strong background noise, and provides an electrostatic balance type high-sensitivity hydrophone.
In order to achieve the purpose, the invention adopts the following design scheme: an electrostatically balanced high sensitivity hydrophone comprising:
the sound pressure sensitive structure comprises a sound elastic body and a shell, wherein the sound elastic body is arranged in the shell, and the edge of the sound elastic body is fixedly connected with the shell;
displacement detection means for detecting the amount of deformation of the acoustic elastic body;
the electrostatic driving device is used for driving and keeping the acoustic elastomer at a balance position;
and the detection and control circuit is used for receiving and processing the signal of the displacement detection device and outputting a feedback voltage to the electrostatic driving device.
Furthermore, the acoustic elastomer is a film with a conductor attached to the surface.
Further, the electric conductor is a metal conductive sheet.
Further, the electrostatic driving device comprises an upper driving polar plate and a lower driving polar plate; the upper driving polar plate is positioned above the acoustic elastomer, and the lower driving polar plate is positioned below the acoustic elastomer; the upper driving polar plate and the lower driving polar plate are both fixedly connected with the shell, and both the upper driving polar plate and the lower driving polar plate are connected with a feedback signal output end of the closed-loop control circuit.
Further, the upper driving polar plate and the lower driving polar plate are made of conductor materials.
Furthermore, the upper driving polar plate and the lower driving polar plate are both provided with sound-transmitting small holes in an intensive manner, so that the polar plates do not obstruct sound pressure transmission.
Furthermore, the displacement detection device comprises a fixed polar plate, a movable polar plate and a connecting piece; the fixed polar plate is electrically connected with the signal processing and controlling circuit; the movable polar plate is connected with the acoustic elastomer through a connecting piece; the connecting piece passes through a small hole in the center of the lower driving polar plate, so that the movable polar plate is positioned below the lower driving polar plate.
Further, the connecting piece is made of an insulating material; the movable polar plate and the fixed polar plate are both made of conductor materials.
Furthermore, the signal processing and control circuit and the grading plate are fixedly connected with the shell.
Furthermore, the signal processing and control circuit comprises a capacitance detection module, a processor module and a high-voltage driving module; the capacitance detection module and the high-voltage driving module are connected with the processor module; the capacitance detection module is connected with the displacement detection device and used for detecting the displacement of the acoustic elastomer; the high-voltage driving module is connected with the electrostatic driving device and used for controlling the voltage of the driving polar plate; the processor module receives an output signal of the capacitance detection module and processes the output signal through a PID control algorithm to obtain a feedback control signal; the high-voltage driving module applies feedback voltage to the upper driving polar plate and the lower driving polar plate according to the feedback control signal, so that feedback force is generated to keep the acoustic elasticity at a balance position; the feedback control signal output by the signal processing and control circuit is also used for representing the sound pressure measured value.
The invention has the beneficial effects that: the acoustic elastomer in the sound pressure sensitive structure of the hydrophone tends to generate large displacement under strong background noise. The acoustic elastomer is nonlinear under large deformation, which leads to the reduction of the detection sensitivity of the hydrophone. The static closed-loop control can maintain the acoustic elasticity of the hydrophone at a balance position, make up for the defect that the sensitivity is reduced because the hydrophone elastic body is deformed greatly under strong background noise and is nonlinear, and is favorable for improving the sensitivity of the hydrophone.
Drawings
FIG. 1 is a schematic diagram of the general structure of an electrostatic equilibrium type high-sensitivity hydrophone;
FIG. 2 is a schematic diagram of an acoustic elastomer for an electrostatic equilibrium type high-sensitivity hydrophone;
FIG. 3 is a schematic diagram of an electrostatic equilibrium type high sensitivity hydrophone in an electrostatic drive arrangement;
fig. 4 is a schematic diagram of a displacement detection device of an electrostatic equilibrium type high-sensitivity hydrophone.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. Other embodiments, which can be derived by one of ordinary skill in the art from the embodiments of the present invention without creative efforts, are also within the scope of the present invention.
As shown in fig. 1, the present invention provides an electrostatic balance type high-sensitivity hydrophone, which includes a sound pressure sensitive structure 1, a displacement detection device 2, an electrostatic driving device 3, and a detection and control circuit 4. The sound pressure sensitive structure comprises a sound elastic body 11 and a shell 12, wherein the sound elastic body 11 is arranged in the shell 12, and the edge of the sound elastic body is fixedly connected with the shell 12; the displacement detection device 2 is used for detecting the deformation amount of the acoustic elastic body 11; the electrostatic driving device 3 is used for driving and keeping the acoustic elastic body 11 at a balance position; and the detection and control circuit 4 is used for receiving and processing signals of the displacement detection device 2 and outputting feedback voltage to the electrostatic driving device 3. At the same time, the feedback voltage also characterizes the sound pressure measurement.
As shown in fig. 2, the acoustic elastic body 11 is a film 111 with a conductor 112 attached to the surface. The conductive body 112 is a metal conductive sheet. The shape of the membrane 111 is circular. The displacement of the central point of the circular film is larger than that of films in other shapes under the same sound pressure, so that the circular film is selected to be beneficial to improving the detection sensitivity.
As shown in fig. 3, the electrostatic driving device 3 includes an upper driving plate 31 and a lower driving plate 32; the upper driving pole plate 31 is located above the acoustic elastic body 11, and the lower driving pole plate 32 is located below the acoustic elastic body 11. The upper driving polar plate 31 and the lower driving polar plate 32 are both fixedly connected with the shell and connected with a feedback voltage output end of the detection and control circuit 4. The upper driving polar plate 31 and the lower driving polar plate 32 are made of conductor materials and are densely provided with sound-transmitting small holes 311, so that the polar plates do not obstruct sound pressure transmission.
As shown in fig. 4, the displacement detecting device 2 includes a fixed pole plate 21, a movable pole plate 22, and a connecting member 23. The fixed pole plate 21 is electrically connected with the signal processing and control circuit 4. The signal processing and control circuit 4 and the grading plate 21 are both fixedly connected with the shell 12. The movable pole plate 22 is connected to the acoustic elastic body 11 through a connecting member 23. The connector 23 passes through a small hole in the centre of the lower drive plate 32 so that the moving plate 22 is located below the lower drive plate 32. The connecting piece 23 is made of insulating material; the grading plate 21 and the movable plate 22 are both made of conductor materials. The fixed pole plate 21 and the movable pole plate 22 form a detection capacitor, and the acoustic elastomer 11 deforms under the action of sound pressure, so that the movable pole plate 22 displaces, and the change of the detection capacitor is caused. The displacement detection means is not limited to capacitance detection. The connecting piece 23 is made of a light-weight high-rigidity material, and silicon carbide ceramics is selected, but not limited to; the movable polar plate 22 is made of a light-weight high-rigidity material, and is made of an aluminum magnesium alloy, but is not limited thereto.
The signal processing and control circuit 4 comprises a capacitance detection module, a processor module and a high-voltage driving module. The capacitance detection module and the high-voltage driving module are connected with the processor module; the capacitance detection module is connected with the displacement detection device 2 and is used for detecting the displacement of the acoustic elastomer 11; the high-voltage driving module is connected with the electrostatic driving device 3 and is used for controlling the voltage of the driving polar plate; the processor module receives the output signal of the capacitance detection module, processes the output signal through a PID control algorithm to obtain a feedback control signal, the feedback control signal drives the electrostatic driving device, so that the high-voltage driving module applies feedback voltage to the upper driving polar plate 31 and the lower driving polar plate 32 to generate feedback force to keep the acoustic elasticity 11 at a balance position, and the feedback control signal output by the signal processing and control circuit 4 is used for representing a sound pressure measured value. The capacitance detection module adopts an MS3110 chip, but is not limited thereto; the processor module adopts an STM32F103VB chip, but is not limited to the chip; the high voltage driving module adopts DAC082S085 and OPA187 chips, but is not limited to this.
The invention detects the deformation quantity of the elastic body through the displacement detection device, and drives the elastic body to work at a balance position by adopting the electrostatic driving device. The closed-loop detection overcomes the defect that the sensitivity of the hydrophone elastomer is reduced due to the large deformation and nonlinearity of the hydrophone elastomer under strong background noise, and improves the sensitivity of the hydrophone.
One skilled in the art can, using the teachings of the present invention, readily make various changes and modifications to the invention without departing from the spirit and scope of the invention as defined by the appended claims. Any modifications and equivalent variations of the above-described embodiments, which are made in accordance with the technical spirit and substance of the present invention, fall within the scope of protection of the present invention as defined in the claims.
Claims (7)
1. An electrostatic equilibrium type high sensitivity hydrophone, characterized in that: the method comprises the following steps:
the sound pressure sensitive structure (1) comprises a sound elastic body (11) and a shell (12), wherein the sound elastic body (11) is arranged in the shell (12), and the edge of the sound elastic body is fixedly connected with the shell (12);
displacement detection means (2) for detecting the amount of deformation of the acoustic elastic body (11);
an electrostatic drive device (3) for driving and maintaining the acoustic elastomer (11) in a balanced position;
the detection and control circuit (4) is used for receiving and processing signals of the displacement detection device (2) and outputting feedback voltage to the electrostatic driving device (3);
the electrostatic driving device (3) comprises an upper driving polar plate (31) and a lower driving polar plate (32); the upper driving polar plate (31) is positioned above the acoustic elastomer (11), and the lower driving polar plate (32) is positioned below the acoustic elastomer (11); the upper driving polar plate (31) and the lower driving polar plate (32) are both fixedly connected with the shell (12), and the upper driving polar plate (31) and the lower driving polar plate (32) are both connected with a feedback signal output end of the detection and control circuit (4);
the upper driving polar plate (31) and the lower driving polar plate (32) are both provided with sound-transmitting small holes (311) densely, so that the polar plates do not obstruct sound pressure transmission;
the displacement detection device (2) comprises a fixed polar plate (21), a movable polar plate (22) and a connecting piece (23); the fixed polar plate (21) is electrically connected with the detection and control circuit (4); the movable polar plate (22) is connected with the acoustic elastomer (11) through a connecting piece (23); the connecting piece (23) passes through a small hole in the center of the lower driving pole plate (32), and the movable pole plate (22) is positioned below the lower driving pole plate (32).
2. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the acoustic elastomer (11) is a film (111) with a conductor (112) attached to the surface.
3. The electrostatically balanced high sensitivity hydrophone of claim 2, wherein: the conductor (112) is a metal conductive sheet.
4. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the upper driving polar plate (31) and the lower driving polar plate (32) are made of conductor materials.
5. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the connecting piece (23) is made of insulating materials; the fixed polar plate (21) and the movable polar plate (22) are both made of conductor materials.
6. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the detection and control circuit (4) and the fixed pole plate (21) are both fixedly connected with the shell (12).
7. The electrostatically balanced high sensitivity hydrophone of claim 1, wherein: the detection and control circuit (4) comprises a capacitance detection module, a processor module and a high-voltage driving module; the capacitance detection module and the high-voltage driving module are connected with the processor module; the capacitance detection module is connected with the displacement detection device (2) and is used for detecting the displacement of the acoustic elastomer (11); the high-voltage driving module is connected with the electrostatic driving device (3) and is used for controlling the voltage of the driving polar plate; the processor module receives an output signal of the capacitance detection module and processes the output signal through a PID control algorithm to obtain a feedback control signal; the high-voltage driving module applies feedback voltage to the upper driving polar plate (31) and the lower driving polar plate (32) according to the feedback control signal, so that feedback force is generated to keep the acoustic elastomer (11) at a balance position; the feedback control signal output by the detection and control circuit (4) is also used for representing the sound pressure measured value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910595768.0A CN110375845B (en) | 2019-07-03 | 2019-07-03 | Electrostatic balance type high-sensitivity hydrophone |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910595768.0A CN110375845B (en) | 2019-07-03 | 2019-07-03 | Electrostatic balance type high-sensitivity hydrophone |
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| CN110375845A CN110375845A (en) | 2019-10-25 |
| CN110375845B true CN110375845B (en) | 2020-08-25 |
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Citations (4)
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| WO2005029012A1 (en) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | Vibration sensor |
| CN1846121A (en) * | 2003-09-02 | 2006-10-11 | 星电株式会社 | Vibration sensor |
| JP2006311106A (en) * | 2005-04-27 | 2006-11-09 | Matsushita Electric Works Ltd | Acoustic sensor |
| CN107505479A (en) * | 2017-09-26 | 2017-12-22 | 华中科技大学 | A kind of electrostatic support accelerometer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU487471A1 (en) * | 1972-12-18 | 1975-10-05 | Ленинградский Институт Киноинженеров | Electrostatic headset |
| JPS56165490A (en) * | 1980-05-23 | 1981-12-19 | Toshiba Corp | Headphone device |
| CN2349736Y (en) * | 1998-09-25 | 1999-11-17 | 戴文彬 | Electrostatic loudspeaker using insulating-board plated metal on back side as electrode |
| JP4103877B2 (en) * | 2004-09-22 | 2008-06-18 | セイコーエプソン株式会社 | Electrostatic ultrasonic transducer and ultrasonic speaker |
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2019
- 2019-07-03 CN CN201910595768.0A patent/CN110375845B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1846121A (en) * | 2003-09-02 | 2006-10-11 | 星电株式会社 | Vibration sensor |
| WO2005029012A1 (en) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | Vibration sensor |
| JP2006311106A (en) * | 2005-04-27 | 2006-11-09 | Matsushita Electric Works Ltd | Acoustic sensor |
| CN107505479A (en) * | 2017-09-26 | 2017-12-22 | 华中科技大学 | A kind of electrostatic support accelerometer |
Non-Patent Citations (1)
| Title |
|---|
| 自校准智能水听器研究;张益;《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》;20071115;正文第11-37页 * |
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