CN206670783U - Based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape - Google Patents
Based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape Download PDFInfo
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- CN206670783U CN206670783U CN201720234569.3U CN201720234569U CN206670783U CN 206670783 U CN206670783 U CN 206670783U CN 201720234569 U CN201720234569 U CN 201720234569U CN 206670783 U CN206670783 U CN 206670783U
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Abstract
The utility model discloses it is a kind of based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, including frame-type pedestal, crossbeam, circular connector, spherical polyethylene pick-up unit, PZT piezoelectric membranes；The spherical polyethylene pick-up unit is fixed on circular connector, circular connector is connected to by crossbeam at the center of frame-type pedestal, the outside growth of every crossbeam has PZT piezoelectric membranes, it is bottom electrode below PZT piezoelectric membranes, and the bottom electrode of every crossbeam and the electrode on other crossbeams and frame-type pedestal are separate；Each PZT piezoelectric membranes upper surface sputters separate Top electrode.The utility model is that have common mode output, the high sensitivity of differential mode suppression, the spherical oscillator vector hydrophone of the same vibration shape of wide working band；Using micro-nano technology technology, the miniaturization of spherical oscillator vector hydrophone is realized.And be arranged in signal acquisition module on four crossbeams for connecting spherical oscillator, it can detect the acoustical signal component on crossbeam direction.
Description
Technical field
It the utility model is related to the vector hydrophone in a kind of MEMS sensor field, and in particular to one kind is imitated based on piezoelectricity
The MEMS answered is the same as the spherical oscillator vector hydrophone of the vibration shape.
Background technology
Currently, the vector hydrophone developed both at home and abroad is generally divided into synchronous vibration type and differential two major class.For pressure difference
Vector hydrophone, because its " 8 " font cosine directivity concave point depth is too shallow, pointing accuracy is not high, so as to limit its underwater sound
The application in field.For synchronous vibration type vector hydrophone, same will can be shaken according to the theoretical difference of particle velocity hydrophone acoustic receiver
Type vector hydrophone is divided into same vibration shape cylinder oscillator vector hydrophone and with the spherical oscillator vector hydrophone of the vibration shape.The conventional same vibration shape
Vector hydrophone must be fixed on rigid mount using resilient suspension element (such as rubber rope or metal spring), hang original paper
Mechanical property directly affects the electroacoustic performance of hydrophone.Such vector hydrophone is all either internal equal in pick-up unit center
The even one or more acceleration transducers of arrangement, to measure the speed and acceleration of the vibration of pick-up unit, so as to obtain in sound field
The relevant information of particle vibration velocity.Due to the design and the low frequency characteristic that brings of processing technology of routine are poor, sensitivity is low, quality is big,
Acoustic impedance and water mismatches, is difficult to used on small size platform the problems such as.
Utility model content
To solve the existing spherical oscillator vector underwaster sensing brought using technical schemes such as conventional design and processing technologys
Device anti-current noiseproof feature is poor, sensitivity is low, shock resistance is poor, quality is big, acoustic impedance and water mismatch and processing and fabricating is answered
The problems such as miscellaneous, the utility model provide it is a kind of based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape.
To achieve the above object, the technical scheme that the utility model is taken is：
Based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, including frame-type pedestal, crossbeam, annular connection
Body, spherical polyethylene pick-up unit, PZT piezoelectric membranes；The spherical polyethylene pick-up unit is fixed on circular connector, institute
Circular connector to be stated to be connected to by crossbeam at the center of frame-type pedestal, the outside growth of every crossbeam has PZT piezoelectric membranes,
It is bottom electrode below PZT piezoelectric membranes, and the bottom electrode of every crossbeam and the electrode on other crossbeams and frame-type pedestal are mutual
It is independent；Each PZT piezoelectric membranes upper surface sputters separate Top electrode.
Preferably, described crossbeam and circular connector form through ICP fronts etching and DRIE back of the body chamber lithographies；Institute
The PZT piezoelectric membranes stated are the piezoelectric layer that the μ m-thick of thickness 1 is made by the method for sol-gel.
Preferably, outer 5000 μm of the length of side of described frame-type pedestal, interior 3500 μm of the length of side；Crossbeam grows 900 μm, wide 120 μm, thickness
30μm。
Preferably, 1700 μm of the circular connector external diameter, 1500 μm of internal diameter, 30 μm of thickness；Spherical vibrator diameter is
1500μm。
Preferably, the bottom electrode is Pt/Ti layers, and the Top electrode is Au layers.
Preferably, the bottom electrode, PZT piezoelectric membranes, Top electrode Au length are 600 μm, and wide is 120 μm, thickness point
Wei not 150nm, 1 μm, 150nm.
Preferably, the spherical polyethylene pick-up unit using density and aqueous phase with or subglobular polyethylene.
The utility model has the advantages that：
The utility model designs and optimizes a kind of output of common mode, the high sensitivity that differential mode suppresses, wide working band it is same
The spherical oscillator vector hydrophone of the vibration shape；Using micro-nano technology technology, the miniaturization of spherical oscillator vector hydrophone is realized.And will
Signal acquisition module is arranged on four crossbeams for connecting spherical oscillator, can detect the acoustical signal point on crossbeam direction
Measure, the output signal on every crossbeam is identical, bigger so as to obtain by the Signal averaging of the direction by way of series connection
Output.It is symmetrical in the utility model XOY plane, it is same when being acted on by the acoustical signal in horizontal direction
Two crossbeams on direction are respectively by equal-sized tension and compression, symmetrical piezo electric module on every crossbeam
The electric charge of equivalent contrary sign is produced, because piezoelectricity output is series connection in same direction, so caused electric charge can on same root crossbeam
It is completely counterbalanced by.So as to which this structure can effectively improve the acoustical signal component output in Z-direction, suppress on X or Y-direction
Acoustical signal component exports.
Brief description of the drawings
Fig. 1 is the structural representation based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape.
Fig. 2 is that two piezo electric modules are connected by distribution of charges during acceleration effect in Z-direction and circuit in X or Y-direction
Connect schematic diagram.
Fig. 3 is the first-order modal figure of the vector hydrophone simulation model.
Fig. 4 is that the vector hydrophone simulation model obtains the Stress Map of structure in Z-direction application 1g acceleration.
Fig. 5 is the piezoelectric response that the vector hydrophone simulation model obtains in Z-direction application 1g acceleration.
Fig. 6 is the piezoelectric response that the vector hydrophone simulation model obtains in X-direction application 1g acceleration.
In figure：1- frame-type pedestal, 2- crossbeams, 3- circular connectors, 4- spherical polyethylene pick-ups unit, 5-PZT piezoelectricity are thin
Film, 6- bottom electrodes, 7- Top electrodes.
Embodiment
In order that the purpose of this utility model and advantage are more clearly understood, the utility model is entered with reference to embodiments
Row is further described.It should be appreciated that specific embodiment described herein is only to explain the utility model, and do not have to
In restriction the utility model.
As shown in figure 1, the utility model embodiment is provided based on the MEMS of piezo-electric effect with the spherical oscillator vector of the vibration shape
Hydrophone, including frame-type pedestal 1, crossbeam 2, circular connector 3, spherical polyethylene pick-up unit 4, PZT piezoelectric membranes 5；It is described
Spherical polyethylene pick-up unit 4 is fixed on circular connector 3, and the circular connector 3 is connected to frame-type pedestal by crossbeam 2
At 1 center, the outside growth of every crossbeam 2 has a PZT piezoelectric membranes 5, and PZT piezoelectric membranes 5 are bottom electrode 6 below, and every
The bottom electrode 6 of crossbeam and the electrode on other crossbeams and frame-type pedestal are separate；Each 5 upper surfaces of PZT piezoelectric membranes are equal
Sputtering has separate Top electrode 7.Described crossbeam and circular connector adds through ICP fronts etching and DRIE back of the body chamber etchings
Work forms；Described PZT piezoelectric membranes are the piezoelectric layer that the μ m-thick of thickness 1 is made by the method for sol-gel；It is described spherical poly-
Ethene pick-up unit uses density and aqueous phase together or subglobular polyethylene.
5000 μm of the outer length of side of described frame-type pedestal 1, interior 3500 μm of the length of side；Crossbeam 2 grows 900 μm, wide 120 μm, 30 μm of thickness；
1700 μm of 3 external diameter of circular connector, 1500 μm of internal diameter, 30 μm of thickness；Substrate is 5000 μm；Spherical polyethylene pick-up unit 4 is straight
Footpath is 1500 μm；
Bottom electrode Pt/Ti6, PZT piezoelectric membrane 5, Top electrode Au 7 grow 600 μm, and wide 120 μm, thickness is respectively
150nm、1μm、150nm。
When this specific implementation is processed, sputtering is had bottom electrode Pt/Ti's<100>Crystal orientation monocrystalline silicon passes through sol-gel process
The thick PZT of 1um are grown, first etch PZT, then bottom electrode is etched by IBE, next use the fabrication techniques Top electrode peeled off,
Reuse ICP fronts etching and DRIE back-etchings release crossbeam 2 and circular connector 3；Finally by the side of Two-level ensemble
Spherical polyethylene pick-up unit 4 is adhered on circular connector 3 by method.
This specific implementation utility model uses micro-nano technology technology, realizes the miniaturization of spherical oscillator vector hydrophone.
And be arranged in signal acquisition module on four crossbeams for connecting spherical oscillator, it can detect the acoustical signal on crossbeam direction
Component, the output signal on every crossbeam is identical, by the Signal averaging of the direction by way of series connection, so as to obtain more
Big output (Fig. 2).Theoretical according to particle velocity hydrophone acoustic receiver, as ka ＜ ＜ 1, (k is the wave number of sound wave, and a is to pick up
Shake element diameter) when, nearby sound field does not occur substantially to distort pick-up unit.When the upper limit operation frequency of the vector hydrophone
During 2000Hz, due to a=1500 μm, so (k=2 π f/u, wherein v are the velocity of sound in water to detection target sound waves wave number k ＜ 8.4, are taken
1500m/s).Vector hydrophone designed by the utility model meets ka ＜ ＜ 1 (ka ＜ 0.0125) condition, and spherical oscillator is attached
Near sound field will not be distorted；By theory analysis, the structure is rational.
Model analysis (Fig. 3) is carried out to the vector hydrophone using COMSOL, obtaining the vector hydrophone intrinsic frequency is
3.3KHz；Apply 1g acceleration load in Z-direction, it is about 0.4MPa (Fig. 4) to obtain maximum stress on crossbeam；Single-beam piezoelectricity is defeated
Go out for 0.88mV/g (Fig. 5), under conditions of without using any additional amplifying circuit, system sensitivity 3.5mV/g.In level
(X or Y-direction) applies 1g acceleration on direction, and it is 0.03MPa to obtain maximum (normal) stress on beam, and the piezoelectricity on four crossbeams is defeated
Go out for 3.4 × 10-5MV (Fig. 6).Simulation result also illustrates that four common-mode signals of the utility model in the vertical direction are overlapped mutually,
Difference mode signal in horizontal direction mutually suppresses, and having fully demonstrated this hydrophone has common mode output, the workability that differential mode suppresses
Matter, can improve the sensitivity on vertical direction well, the component of signal on suppression level direction；So as to which the utility model can be very
The resolution ratio of good improvement vector hydrophone and sensitivity.
Described above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as the scope of protection of the utility model.
Claims (7)
1. based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that including frame-type pedestal, horizontal stroke
Beam, circular connector, spherical polyethylene pick-up unit, PZT piezoelectric membranes；The spherical polyethylene pick-up unit is fixed on annular
On connector, the circular connector is connected to by crossbeam at the center of frame-type pedestal, and the outside growth of every crossbeam has PZT
Piezoelectric membrane, is bottom electrode below PZT piezoelectric membranes, and the bottom electrode of every crossbeam with other crossbeams and frame-type pedestal
Electrode is separate；Each PZT piezoelectric membranes upper surface sputters separate Top electrode.
2. as claimed in claim 1 based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that
Crossbeam and circular connector form through ICP fronts etching and DRIE back of the body chamber lithographies；Described PZT piezoelectric membranes are to pass through
The piezoelectric layer of the μ m-thick of thickness 1 is made in the method for sol-gel.
3. as claimed in claim 1 based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that
Outer 5000 μm of the length of side of described frame-type pedestal, interior 3500 μm of the length of side；Crossbeam grows 900 μm, wide 120 μm, 30 μm of thickness.
4. as claimed in claim 1 based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that
1700 μm of the circular connector external diameter, 1500 μm of internal diameter, 30 μm of thickness；Spherical vibrator diameter is 1500 μm.
5. as claimed in claim 1 based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that
The bottom electrode is Pt/Ti layers, and the Top electrode is Au layers.
6. as claimed in claim 1 based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that
The bottom electrode, PZT piezoelectric membranes, Top electrode Au length be 600 μm, wide is 120 μm, thickness be respectively 150nm, 1 μm,
150nm。
7. as claimed in claim 1 based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape, it is characterised in that
The spherical polyethylene pick-up unit uses density and aqueous phase together or subglobular polyethylene.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720234569.3U CN206670783U (en) | 2017-03-10 | 2017-03-10 | Based on the MEMS of piezo-electric effect with the spherical oscillator vector hydrophone of the vibration shape |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706108A (en) * | 2017-03-10 | 2017-05-24 | 中北大学 | MEMS (micro-electromechanical system) co-vibration type spherical vibrator vector hydrophone based on piezoelectric effect |
| CN109787508A (en) * | 2019-02-28 | 2019-05-21 | 福建工程学院 | A kind of two-freedom piezoelectric motor and its control method |
-
2017
- 2017-03-10 CN CN201720234569.3U patent/CN206670783U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706108A (en) * | 2017-03-10 | 2017-05-24 | 中北大学 | MEMS (micro-electromechanical system) co-vibration type spherical vibrator vector hydrophone based on piezoelectric effect |
| CN109787508A (en) * | 2019-02-28 | 2019-05-21 | 福建工程学院 | A kind of two-freedom piezoelectric motor and its control method |
| CN109787508B (en) * | 2019-02-28 | 2020-02-11 | 福建工程学院 | Two-degree-of-freedom piezoelectric motor and control method thereof |
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| CF01 | Termination of patent right due to non-payment of annual fee |
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