JP3297887B2 - Capacitive sensor - Google Patents
Capacitive sensorInfo
- Publication number
- JP3297887B2 JP3297887B2 JP15036593A JP15036593A JP3297887B2 JP 3297887 B2 JP3297887 B2 JP 3297887B2 JP 15036593 A JP15036593 A JP 15036593A JP 15036593 A JP15036593 A JP 15036593A JP 3297887 B2 JP3297887 B2 JP 3297887B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- electrode
- sensor
- shaft
- elastic body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Position Input By Displaying (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明はセンサー、特に、静電
容量式センサーに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor, and more particularly to a capacitance type sensor.
【０００２】[0002]
【従来の技術】静電容量式センサーとしては、例えば、
図９に示すようなものがある。このセンサーは、同図に
示すように、中央部にダイヤフラム部９０を有し且つ前
記ダイヤフラム部９０の中央に操作軸９１を有した起歪
体９ａと、前記起歪体９ａに略気密状態に取付けられた
蓋体９ｂとを具備し、前記起歪体９ａと蓋体９ｂ相互間
に空室Ｋを形成させると共にその空室Ｋ内において、起
歪体９ａ側に電極板１が、蓋体９ｂ側に絶縁板９４を介
して電極板２がそれぞれ取付けられた構成としてある。
そして、前記蓋体９ｂの外壁に取付け台９３を介して電
子装置９２を取付け、更に、これら取付け台９３及び電
子装置９２を包囲するようにしてキャップ９ｃを取付け
てある。2. Description of the Related Art As a capacitance type sensor, for example,
There is one as shown in FIG. As shown in the figure, this sensor has a diaphragm portion 90 at the center and an operation shaft 91 at the center of the diaphragm portion 90, and a substantially elastically sealed state with the strain body 9a. A lid 9b attached thereto, an empty space K is formed between the strain body 9a and the lid 9b, and the electrode plate 1 is provided on the strain body 9a side in the empty space K. The electrode plate 2 is mounted on the 9b side via an insulating plate 94.
An electronic device 92 is mounted on the outer wall of the lid 9b via a mounting table 93, and a cap 9c is mounted so as to surround the mounting table 93 and the electronic device 92.
【０００３】上記電極板１と電極板２との対向面にはそ
れぞれ電極部を設けてあり、具体的には、図１０に示す
如く前記電極板１側に電極部Ｃを、図１１に示す如く前
記電極板２側に電極部Ｃｘ＋，Ｃｘ−，Ｃｙ＋，Ｃｙ
−，Ｃｚを、それぞれ設けてある。また、上記した電子
装置９２は、電極板１，２相互間のギャップＧの変化に
伴う電極部Ｃと電極部Ｃｘ＋相互間，電極部Ｃと電
極部Ｃｘ−相互間，電極部Ｃと電極部Ｃｙ＋相互間，
電極部Ｃと電極部Ｃｙ−相互間，電極部Ｃと電極部
Ｃｚ相互間における静電容量の変化を電圧の変化に変換
するものとしてある。An electrode portion is provided on each of the opposing surfaces of the electrode plate 1 and the electrode plate 2. Specifically, as shown in FIG. 10, an electrode portion C is provided on the electrode plate 1 side, and FIG. As described above, the electrode portions Cx +, Cx-, Cy +, Cy
−, Cz are provided respectively. Further, the above-described electronic device 92 includes an electrode section C and an electrode section Cx +, an electrode section C and an electrode section Cx-, an electrode section C and an electrode section, as the gap G between the electrode plates 1 and 2 changes. Cy + between each other,
A change in capacitance between the electrode portions C and Cy and between the electrode portions C and Cz is converted into a change in voltage.
【０００４】したがって、このセンサーでは、上記操作
軸９１に作用する力の大きさ及び方向を電圧として検出
し得る。しかしながら、この力センサーでは、起歪体９
ａや蓋９ｂがそれぞれ所謂立体構造であることから嵩高
なものとなってしまい、更に電極板１，２相互間は空気
が存在するためにゴミ等の影響を受けやすい。Therefore, this sensor can detect the magnitude and direction of the force acting on the operation shaft 91 as a voltage. However, in this force sensor, the flexure element 9
a and the lid 9b each have a so-called three-dimensional structure, so that it becomes bulky, and furthermore, the space between the electrode plates 1 and 2 is susceptible to dust and the like due to the presence of air.
【０００５】[0005]
【発明が解決しようとする課題】そこで、この発明で
は、ゴミ等の影響を受けにくく且つ嵩の低い静電容量式
センサーを提供することを課題とする。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a capacitive sensor which is hardly affected by dust and the like and has a low bulk.
【０００６】[0006]
【課題を解決する為の手段】この発明の静電容量式セン
サーは、軸部１１を有した平板状の電極板１とこの電極
板１と対向する平板状の電極板２との間のギャップの変
化によって生じる静電容量変化により、上記軸部１１に
作用している外力の大きさ及び方向が検出できるセンサ
ーであって、電極板１と電極板２との間に薄い弾性体３
を介在させると共に電極板１の外周部に等角度間隔で複
数の支持軸４を垂設し、この支持軸４の下端を電極板２
側に設けた貫通孔２０に抜止め状態に遊挿し、前記支持
軸４が電極板２に対して抜止め位置にあるときには上記
弾性体３が電極板１，２と密着している。According to the present invention, there is provided a capacitance type sensor having a gap between a flat electrode plate having a shaft portion and a flat electrode plate opposed to the electrode plate. Is a sensor capable of detecting the magnitude and direction of the external force acting on the shaft portion 11 by the change in capacitance caused by the change in the thickness of the elastic member 3 between the electrode plate 1 and the electrode plate 2.
And a plurality of support shafts 4 are suspended from the outer peripheral portion of the electrode plate 1 at equal angular intervals, and the lower end of the support shaft 4 is
The elastic body 3 is in close contact with the electrode plates 1 and 2 when the support shaft 4 is at the retaining position with respect to the electrode plate 2 when the support shaft 4 is at the retaining position with respect to the electrode plate 2.
【０００７】また、この発明の静電容量式センサーは、
軸部１１を有した平板状の電極板１とこの電極板１と対
向する平板状の電極板２との間のギャップの変化によっ
て生じる静電容量変化により、上記軸部１１に作用して
いる外力の大きさ及び方向が検出できるセンサーであっ
て、電極板１と電極板２との間に薄い弾性体３を介在さ
せると共に電極板２の外周部に等角度間隔で複数の支持
軸４を立設し、この支持軸４の上端を電極板１側に設け
た貫通孔１０に抜止め状態に遊挿し、前記支持軸４が電
極板１に対して抜止め位置にあるときには上記弾性体３
が電極板１，２と密着している。[0007] Further, the capacitance type sensor of the present invention comprises:
It acts on the shaft portion 11 by a change in capacitance caused by a change in the gap between the flat plate-shaped electrode plate 1 having the shaft portion 11 and the flat plate-shaped electrode plate 2 facing the electrode plate 1. This is a sensor capable of detecting the magnitude and direction of an external force. A thin elastic body 3 is interposed between an electrode plate 1 and an electrode plate 2 and a plurality of support shafts 4 are arranged at equal angular intervals around the outer periphery of the electrode plate 2. The upper end of the support shaft 4 is loosely inserted into a through hole 10 provided on the electrode plate 1 side in a retaining state. When the support shaft 4 is at the retaining position with respect to the electrode plate 1,
Are in close contact with the electrode plates 1 and 2.
【０００８】更に、この発明の静電容量式センサーは、
軸部１１を有した平板状の電極板１とこの電極板１と対
向する平板状の電極板２との間のギャップの変化によっ
て生じる静電容量変化により、上記軸部１１に作用して
いる外力の大きさ及び方向が検出できるセンサーであっ
て、電極板１と電極板２との間に薄い弾性体３を介在さ
せると共に電極板１，２相互を繋ぐ支持軸４を設け、こ
の支持軸４の上端を電極板１側に設けた貫通孔１０に、
下端を電極板２側に設けた貫通孔２０に、それぞれ抜止
状態に遊挿し、前記支持軸４が電極板１，２に対して抜
止め位置にあるときには上記弾性体３が電極板１，２と
密着している。[0008] Further, the capacitance type sensor of the present invention comprises:
It acts on the shaft portion 11 by a change in capacitance caused by a change in the gap between the flat plate-shaped electrode plate 1 having the shaft portion 11 and the flat plate-shaped electrode plate 2 facing the electrode plate 1. A sensor capable of detecting the magnitude and direction of an external force, wherein a thin elastic body 3 is interposed between an electrode plate 1 and an electrode plate 2 and a support shaft 4 connecting the electrode plates 1 and 2 is provided. 4 into the through hole 10 provided on the electrode plate 1 side,
The lower end is loosely inserted into a through hole 20 provided on the electrode plate 2 side in a retaining state, and when the support shaft 4 is at the retaining position with respect to the electrode plates 1 and 2, the elastic body 3 is And close contact.
【０００９】[0009]
【作用】この発明は次のように作用する。電極板１，２
は立体構造ではなく、これら相互間に介在せしめられた
弾性体３は薄く設定されているから、従来のセンサーと
比較して非常に嵩が低い。また、前記電極板１と電極板
２との間に薄い弾性体２をこれらに支持軸４等の構成に
より密着させる態様で介在させているから、従来の技術
の欄に記載したセンサーのようにごみ等の影響は全く受
けない。The present invention operates as follows. Electrode plates 1, 2
Is not a three-dimensional structure, and since the elastic body 3 interposed between them is set to be thin, it is much less bulky than a conventional sensor. Further, since the thin elastic body 2 is interposed between the electrode plate 1 and the electrode plate 2 in such a manner that the thin elastic body 2 is closely adhered to the electrode plate 1 by the structure of the support shaft 4 or the like, like the sensor described in the section of the prior art. There is no influence from garbage.
【００１０】[0010]
【実施例】この発明の構成を実施例として示した図面に
従って説明する。この実施例では電極板２をプリント基
板で形成させてあり、センサーは、図１に示すように、
基本的には、電極板１と、前記電極板１の下方に設けら
れたプリント基板２’と、前記電極１とプリント基板
２’相互間に設けられた弾性体３と、前記プリント基板
２’の下面に設けられた電子装置５とから構成されてい
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration of the present invention will be described with reference to the drawings shown as embodiments. In this embodiment, the electrode plate 2 is formed by a printed board, and the sensor is, as shown in FIG.
Basically, an electrode plate 1, a printed board 2 'provided below the electrode plate 1, an elastic body 3 provided between the electrode 1 and the printed board 2', and the printed board 2 ' And an electronic device 5 provided on the lower surface of the electronic device.
【００１１】基板１は円形状板により構成されており、
図１に示すように、その上面中央部に軸部１１を設ける
と共に下面に、図１や図２に示すように、スクリーン印
刷により円形状の電極部Ｃを形成させてある。また、こ
の基板１の外周部分には９０°角度間隔でスタッドボル
ト４０を垂設してある。プリント基板２’は、図１や図
３に示すように、上記したそれぞれのスタッドボルト４
０と対応する位置にこれよりも大きな径の貫通孔２０を
設けると共に、前記貫通孔２０が囲む部分に図３に示す
ような電極部群Ｃ’（電極部Ｃｘ＋、電極部Ｃｘ−、電
極部Ｃｙ＋、電極部Ｃｙ−、電極部Ｃz から成る）をス
クリーン印刷により形成してある。The substrate 1 is constituted by a circular plate.
As shown in FIG. 1, a shaft portion 11 is provided at the center of the upper surface, and a circular electrode portion C is formed on the lower surface by screen printing as shown in FIGS. Further, stud bolts 40 are suspended from the outer peripheral portion of the substrate 1 at 90 ° angular intervals. As shown in FIG. 1 and FIG. 3, the printed circuit board 2 ′
A through hole 20 having a larger diameter is provided at a position corresponding to 0, and an electrode group C ′ (electrode Cx +, electrode Cx−, electrode Cy +, electrode section Cy-, and electrode section Cz) are formed by screen printing.
【００１２】弾性体３は平面視円形状のゴム板（0.2mm
〜1.0mm 程度）により構成されており、その外径は図１
に示すように、電極部Ｃとほぼ同径としている。電子装
置５は、電極部Ｃと電極部Ｃｘ＋相互間，電極部Ｃ
と電極部Ｃｘ−相互間，電極部Ｃと電極部Ｃｙ＋相互
間，電極部Ｃと電極部Ｃｙ−相互間，電極部Ｃと電
極部Ｃｚ相互間における静電容量の変化をそれぞれ電圧
Ｖｘ＋，Ｖｘ−，Ｖｙ＋，Ｖｙ−，Ｖｚに変換するもの
としてある。The elastic member 3 is a circular rubber plate (0.2 mm in plan view).
~ 1.0mm) and its outer diameter is
As shown in FIG. The electronic device 5 is provided between the electrode section C and the electrode section Cx +,
The capacitance changes between the electrodes Cx and Cx-, between the electrodes C and Cy +, between the electrodes C and Cy-, and between the electrodes C and Cz are respectively expressed as voltages Vx + and Vx. −, Vy +, Vy−, Vz.
【００１３】そして、このセンサーでは、図１に示す組
立状態では、電極板１に設けたスタッドボルト４０をプ
リント基板２’に設けた貫通孔２０に挿入し、貫通孔２
０から貫通突出したスタッドボルト４０部分にナット４
１を螺合するようにして、弾性体３が基板１の下面及び
プリント基板２’の上面と密着させるようにしてある。
尚、この実施例では、上記ナット４１の存在により、ス
タッドボルト４０がプリント基板２’の貫通孔２０から
抜けない構造になっている。In this sensor, in the assembled state shown in FIG. 1, the stud bolt 40 provided on the electrode plate 1 is inserted into the through hole 20 provided on the printed circuit board 2 '.
Nut 4 on the stud bolt 40 part
1, the elastic body 3 is brought into close contact with the lower surface of the substrate 1 and the upper surface of the printed circuit board 2 '.
In this embodiment, the stud bolt 40 does not come out of the through hole 20 of the printed circuit board 2 'due to the presence of the nut 41.
【００１４】この実施例の静電容量デンサーは上記のよ
うな構成としてあるから、以下に示すような働きをす
る。〔軸部１１がＸ−Ｘ方向の外力Ｆを受けた場合〕 図４に
示すように、弾性体３が変形（厚みが部分によってｄ−
Δｄや≒ｄに変形）せしめられて、電極Ｃと電極Ｃｘ＋
相互間の静電容量は大きく増加し、電極Ｃと電極Ｃｘ−
相互間の静電容量は少しだけ増加し、電極Ｃと電極Ｃｙ
＋相互間及び電極Ｃと電極Ｃｙ−相互間の静電容量は同
程度増加し、電極Ｃと電極Ｃｚ相互間の静電容量は少し
だけ増加する。Since the capacitance denser of this embodiment is configured as described above, it functions as follows. [When the shaft portion 11 receives an external force F in the XX direction] As shown in FIG. 4, the elastic body 3 is deformed (d-
Δd and ≒ d), the electrode C and the electrode Cx +
The capacitance between them greatly increases, and the electrode C and the electrode Cx−
The capacitance between them slightly increases, and the electrode C and the electrode Cy
The capacitance between + and between the electrode C and the electrode Cy-increases to the same extent, and the capacitance between the electrode C and the electrode Cz increases slightly.
【００１５】したがって、Ｃ／Ｖ変換したときＶｘ＝
（Ｖｘ＋）＋（Ｖｘ−）は大きく変化し、Ｖｙ＝（Ｖｙ
＋）＋（Ｖｙ−）＝０で変化せず、Ｖｚは大きく変化し
ない。 〔軸部１１がＹ−Ｙ方向の外力Ｆを受けた場合〕 この場
合も上記と同様であり、Ｖｙ＝（Ｖｙ＋）＋（Ｖｙ−）
は大きく変化し、Ｖｘ＝（Ｖｘ＋）＋（Ｖｘ−）＝０で
変化せず、Ｖｚは大きく変化しない。〔軸部１１の軸線方向に外力Ｆが作用した場合〕 図５に
示すように、弾性体３が変形（厚みｄが全体的にｄ−Δ
ｄに変形）せしめられるから、電極部Ｃと電極部Ｃｘ
＋、Ｃｘ−、Ｃｙ＋、Ｃｙ−、Ｃz 相互間の静電容量は
同程度増加する。Therefore, when C / V conversion is performed, Vx =
(Vx +) + (Vx−) changes greatly, and Vy = (Vy
+) + (Vy-) = 0, no change, and Vz greatly changes.
Absent. [When the shaft 11 receives an external force F in the YY direction] This place
The same applies to the above case, and Vy = (Vy +) + (Vy−)
Greatly changes, and when Vx = (Vx +) + (Vx −) = 0,
No change, and Vz does not change significantly.[When an external force F acts in the axial direction of the shaft portion 11] In FIG.
As shown, the elastic body 3 is deformed (the thickness d is entirely d−Δ
d), the electrode portion C and the electrode portion Cx
+, Cx-, Cy +, Cy-, Cz
Increase by about the same.
【００１６】したがって、Ｃ／Ｖ変換したときＶｘ及び
Ｖｙは変化せず、Ｖｚは大きく変化する。このように大
きく変化する電圧成分の正負から軸部１１に外力が作用
する方向が検出でき、前記電圧成分の電圧値から外力の
大きさが検出できる。そして、この静電容量式センサー
では、上記した作用の欄に記載したように、ゴミ等の影
響を受けにくく且つ嵩が低く、ナット４１の締め込み具
合により簡単に静電容量のバランス調整ができる。Therefore, when C / V conversion is performed, Vx and Vy do not change, and Vz greatly changes. The direction in which the external force acts on the shaft portion 11 can be detected from the positive or negative of the voltage component that greatly changes, and the magnitude of the external force can be detected from the voltage value of the voltage component. And, as described in the column of the above-described operation, the capacitance-type sensor is less susceptible to dust and the like, has a low bulk, and can easily adjust the capacitance balance by tightening the nut 41. .
【００１７】尚、上記実施例では、支持軸４をスタット
ボルト４０により構成させたが、支持軸４を樹脂で構成
させ、図６に示すように、その下端部を溶融させて拡げ
るようにした構成を採用することもできる。また、上記
実施例の電極板１の下面に導電性を有する金属板を張設
した場合、電極Ｃをスクリーン印刷する必要はないもの
となる。In the above embodiment, the support shaft 4 is constituted by the stud bolts 40. However, the support shaft 4 is constituted by resin, and as shown in FIG. 6, the lower end is melted and expanded. A configuration can also be employed. In the case where a metal plate having conductivity is provided on the lower surface of the electrode plate 1 of the above embodiment, it is not necessary to screen-print the electrode C.
【００１８】更に、上記実施例にかえて、図７に示すよ
うに、電極板１に貫通孔１０を設け、この貫通孔１０に
支持軸４の上端部を遊挿する構成としてもよく、また、
図７に示すように、電極板１，２にそれぞれ、貫通孔１
０，２０を設け、支持軸４の上端部を貫通孔１０に、下
端部を貫通孔２０に、それぞれ遊挿する構成としてもよ
い。Further, instead of the above embodiment, as shown in FIG. 7, a through hole 10 may be formed in the electrode plate 1 and the upper end of the support shaft 4 may be loosely inserted into the through hole 10. ,
As shown in FIG. 7, through holes 1 are formed in the electrode plates 1 and 2, respectively.
0 and 20 may be provided, and the upper end of the support shaft 4 may be loosely inserted into the through hole 10 and the lower end may be loosely inserted into the through hole 20.
【００１９】そして、上記実施例にかえて、電極板１側
に電極部Ｃ’を設け、電極板２側に電極部Ｃを設けるよ
うにしてもよく、前記電極部群Ｃ’は電極Ｃｘ＋、Ｃｘ
−、Ｃｙ＋、Ｃｙ−のみから構成させてもよい。Instead of the above embodiment, an electrode portion C 'may be provided on the electrode plate 1 side, and an electrode portion C may be provided on the electrode plate 2 side. Cx
-, Cy +, and Cy-.
【００２０】[0020]
【発明の効果】作用の欄に記載した内容から、ゴミ等の
影響を受けにくく且つ嵩の低い静電容量式センサーを提
供できた。According to the description in the column of action, a capacitive sensor which is hardly affected by dust and the like and has a low bulk can be provided.
【図１】この発明の実施例の静電容量式センサーの断面
図。FIG. 1 is a sectional view of a capacitance type sensor according to an embodiment of the present invention.
【図２】前記静電容量式センサーの基板の上面図。FIG. 2 is a top view of a substrate of the capacitance type sensor.
【図３】前記静電容量式センサーのプリント基板の上面
図。FIG. 3 is a top view of a printed circuit board of the capacitance type sensor.
【図４】前記静電容量式センサーの軸部にＸ−Ｘ方向に
外力が作用したときの状態を示す図。FIG. 4 is a diagram showing a state when an external force acts on a shaft of the capacitance type sensor in the XX direction.
【図５】前記静電容量式センサーの軸部にＺ方向に外力
が作用したときの状態を示す図。FIG. 5 is a diagram showing a state when an external force acts on a shaft portion of the capacitance type sensor in a Z direction.
【図６】この発明の他の実施例の要部断面図。FIG. 6 is a sectional view of a main part of another embodiment of the present invention.
【図７】この発明の他の実施例の要部断面図。FIG. 7 is a sectional view of a main part of another embodiment of the present invention.
【図８】この発明の他の実施例の要部断面図。FIG. 8 is a sectional view of a main part of another embodiment of the present invention.
【図９】先行技術の静電容量式センサーの断面図。FIG. 9 is a cross-sectional view of a prior art capacitive sensor.
【図１０】前記静電容量式センサーにおける上側の電極
板に形成された電極の平面図。FIG. 10 is a plan view of electrodes formed on an upper electrode plate in the capacitance type sensor.
【図１１】前記静電容量式センサーにおける下側の電極
板に形成された電極の平面図。FIG. 11 is a plan view of electrodes formed on a lower electrode plate in the capacitance type sensor.
Ｃ 電極部 Ｃ’ 電極部群 １ 電極板 ２ 電極板 ３ 弾性体 ４ 支持軸 １０ 貫通孔 １１ 軸部 ２０ 貫通孔 ４０ スタッドボルト ４１ ナット C electrode part C 'electrode part group 1 electrode plate 2 electrode plate 3 elastic body 4 support shaft 10 through hole 11 shaft part 20 through hole 40 stud bolt 41 nut
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平６−201491（ＪＰ，Ａ) 特開 平３−123814（ＪＰ，Ａ) 特開 昭61−164129（ＪＰ，Ａ) 特開 昭62−226030（ＪＰ，Ａ) 実開 昭58−24044（ＪＰ，Ｕ) 実開 昭61−115941（ＪＰ，Ｕ) 実開 昭52−12646（ＪＰ，Ｕ) 米国特許4719538（ＵＳ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01L 1/14 G01L 5/16 G06F 3/033 330 G01N 27/22 G01L 9/12 G01L 13/06 G01D 5/24 G01P 15/125 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-6-201491 (JP, A) JP-A-3-123814 (JP, A) JP-A-61-164129 (JP, A) JP-A-62-164 226030 (JP, A) Japanese Utility Model Application No. 58-24044 (JP, U) Japanese Utility Model Application No. 61-1115941 (JP, U) Japanese Utility Model Application No. 52-12646 (JP, U) US Patent 4,791,538 (US, A) (58) Field surveyed (Int.Cl. 7 , DB name) G01L 1/14 G01L 5/16 G06F 3/033 330 G01N 27/22 G01L 9/12 G01L 13/06 G01D 5/24 G01P 15/125
Claims (3)
（１）とこの電極板（１）と対向する平板状の電極板
（２）との間のギャップの変化によって生じる静電容量
変化により、上記軸部（１１）に作用している外力の大
きさ及び方向が検出できるセンサーであって、電極板
（１）と電極板（２）との間に薄い弾性体（３）を介在
させると共に電極板（１）の外周部に等角度間隔で複数
の支持軸（４）を垂設し、この支持軸（４）の下端を電
極板（２）側に設けた貫通孔（２０）に抜止め状態に遊
挿し、前記支持軸（４）が電極板（２）に対して抜止め
位置にあるときには上記弾性体（３）が電極板（１）
（２）と密着していることを特徴とする静電容量式セン
サー。A static electricity generated by a change in a gap between a flat electrode plate (1) having a shaft (11) and a flat electrode plate (2) opposed to the flat electrode plate (1). A sensor capable of detecting the magnitude and direction of an external force acting on the shaft portion (11) by a change in capacitance, wherein a thin elastic body (3) is provided between the electrode plates (1) and (2). And a plurality of support shafts (4) are suspended at equal angular intervals around the outer periphery of the electrode plate (1), and a lower end of the support shaft (4) is provided on the electrode plate (2) side through hole ( 20) when the support shaft (4) is in the retaining position with respect to the electrode plate (2) when the elastic body (3) is in the electrode plate (1).
(2) A capacitance type sensor which is in close contact with the sensor.
（１）とこの電極板（１）と対向する平板状の電極板
（２）との間のギャップの変化によって生じる静電容量
変化により、上記軸部（１１）に作用している外力の大
きさ及び方向が検出できるセンサーであって、電極板
（１）と電極板（２）との間に薄い弾性体（３）を介在
させると共に電極板（２）の外周部に等角度間隔で複数
の支持軸（４）を立設し、この支持軸（４）の上端を電
極板（１）側に設けた貫通孔（１０）に抜止め状態に遊
挿し、前記支持軸（４）が電極板（１）に対して抜止め
位置にあるときには上記弾性体（３）が電極板（１）
（２）と密着していることを特徴とする静電容量式セン
サー。2. A static electricity generated by a change in a gap between a flat electrode plate (1) having a shaft (11) and a flat electrode plate (2) opposed to the electrode plate (1). A sensor capable of detecting the magnitude and direction of an external force acting on the shaft portion (11) by a change in capacitance, wherein a thin elastic body (3) is provided between the electrode plates (1) and (2). A plurality of support shafts (4) are erected at equal angular intervals on the outer peripheral portion of the electrode plate (2), and the upper end of the support shaft (4) is provided on the electrode plate (1) side through hole ( When the support shaft (4) is in the retaining position with respect to the electrode plate (1), the elastic body (3) is attached to the electrode plate (1).
(2) A capacitance type sensor which is in close contact with the sensor.
（１）とこの電極板（１）と対向する平板状の電極板
（２）との間のギャップの変化によって生じる静電容量
変化により、上記軸部（１１）に作用している外力の大
きさ及び方向が検出できるセンサーであって、電極板
（１）と電極板（２）との間に薄い弾性体（３）を介在
させると共に電極板（１）（２）相互を繋ぐ支持軸
（４）を設け、この支持軸（４）の上端を電極板（１）
側に設けた貫通孔（１０）に、下端を電極板（２）側に
設けた貫通孔（２０）に、それぞれ抜止状態に遊挿し、
前記支持軸（４）が電極板（１）（２）に対して抜止め
位置にあるときには上記弾性体（３）が電極板（１）
（２）と密着していることを特徴とする静電容量式セン
サー。3. A static electricity generated by a change in a gap between a plate-like electrode plate (1) having a shaft (11) and a plate-like electrode plate (2) opposed to the electrode plate (1). A sensor capable of detecting the magnitude and direction of an external force acting on the shaft portion (11) by a change in capacitance, wherein a thin elastic body (3) is provided between the electrode plates (1) and (2). And a support shaft (4) for connecting the electrode plates (1) and (2) to each other, and an upper end of the support shaft (4) is connected to the electrode plate (1).
The lower end is loosely inserted into the through hole (10) provided on the side and the lower end is inserted into the through hole (20) provided on the electrode plate (2) side.
When the support shaft (4) is in the retaining position with respect to the electrode plates (1) and (2), the elastic body (3) is connected to the electrode plate (1).
(2) A capacitance type sensor which is in close contact with the sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15036593A JP3297887B2 (en) | 1993-06-22 | 1993-06-22 | Capacitive sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15036593A JP3297887B2 (en) | 1993-06-22 | 1993-06-22 | Capacitive sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0712775A JPH0712775A (en) | 1995-01-17 |
| JP3297887B2 true JP3297887B2 (en) | 2002-07-02 |
Family
ID=15495406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15036593A Expired - Fee Related JP3297887B2 (en) | 1993-06-22 | 1993-06-22 | Capacitive sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3297887B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4722252B2 (en) * | 1999-09-22 | 2011-07-13 | 富士通コンポーネント株式会社 | Coordinate input device |
| JP4109456B2 (en) * | 2002-01-18 | 2008-07-02 | 独立行政法人産業技術総合研究所 | Low rigidity force detector |
| JP2010238029A (en) * | 2009-03-31 | 2010-10-21 | Omron Corp | Information input device |
-
1993
- 1993-06-22 JP JP15036593A patent/JP3297887B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0712775A (en) | 1995-01-17 |
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