CN214088648U - Novel magnetic steel box - Google Patents
Novel magnetic steel box Download PDFInfo
- Publication number
- CN214088648U CN214088648U CN202120019841.2U CN202120019841U CN214088648U CN 214088648 U CN214088648 U CN 214088648U CN 202120019841 U CN202120019841 U CN 202120019841U CN 214088648 U CN214088648 U CN 214088648U
- Authority
- CN
- China
- Prior art keywords
- steel box
- magnetic steel
- magnetic
- magnet
- magnet steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a novel magnetic steel box, including the magnet steel box body, the magnet steel box body is rectangular shape, including at the bottom of the magnet steel box rectangle with magnet steel box arc top, including bottom surface, two long sides and two short sides at the bottom of the magnet steel box rectangle, at the inside yoke that is provided with in bottom surface at the bottom of the magnet steel box rectangle, three magnet steels of evenly distributed above the yoke, wherein two long sides at the bottom of two limit magnet steels are close to the steel box rectangle, and a middle magnet steel is located the positive centre of magnet yoke in the bottom of the magnet steel box rectangle, seal structure is constituteed with the arc top at the bottom of the magnet steel box rectangle. The magnetic steel box is designed into a specific shape, can be directly externally subjected to magnetic supplement adjustment, and is convenient and fast.
Description
Technical Field
The utility model relates to a magnet steel device specifically relates to a novel magnet steel box.
Background
The magnetic steel structure of the cathode matched with the existing magnetron sputtering coating line has the following structure that the magnetic steel structure relates to magnetron sputtering coating equipment in industries such as LOW-E coating line, ITO coating line, solar coating line, toy hardware, winding and the like: the middle is an N pole, the periphery is an S pole, the magnets are all arranged on the magnet yoke, the S pole and the N pole form closed magnetic lines, and the magnetic steels are positioned behind the planar target material or inside a target tube of the rotary target material. The magnetic steel used in cooperation with the rotating target material is taken as an example for use explanation, under the vacuum environment, electrons collide with process gas under the action of an electric field, so that the electrons are ionized to generate positive ions and new electrons, the new electrons fly to the substrate, the positive ions accelerate to fly to the target material under the action of the electric field, and bombard the surface of the target material at high energy, so that the target material is sputtered. The magnetic steel is usually positioned in the magnetic steel box, the magnetic steel is sealed in the magnetic steel box by the conventional magnetic steel box, and when the magnetic steel is weak-magnetized or demagnetized, the magnetic steel cannot be adjusted, so that the material waste is caused.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough of mentioning in the technical background, provide a novel magnet steel box, this magnet steel box designs into specific appearance, can directly externally carry out magnetism supplementary regulation.
The technical scheme of the utility model as follows: the utility model provides a novel magnetic steel box, includes the magnet steel box body, the magnet steel box body is rectangular shape, pushes up with the magnet steel box arc at the bottom of the magnet steel box rectangle, including bottom surface, two long sides and two short sides at the bottom of the magnet steel box rectangle, the inside yoke that is provided with in bottom surface at the bottom of the magnet steel box rectangle, three blocks of magnet steel of evenly distributed above the yoke, wherein two blocks of limit magnet steel are close to two long sides at the bottom of the steel box rectangle, and a middle magnet steel is located the positive centre of middle magnet yoke at the bottom of the magnet steel box rectangle, seal structure is constituteed with the arc top at the bottom of the magnet steel box rectangle.
As one of the improvement schemes, the outer sides of two long side surfaces of the rectangular bottom of the magnetic steel box are provided with correction plates which are magnetically attracted with the magnetic steel box.
Compared with the prior art, the beneficial effects of the utility model are that: the magnetic steel box of rectangular shape, the magnet steel is located the magnet steel box, when needs adjust magnetism, only need add the magnetic sheet on the corresponding position in two long sides at the bottom of the rectangle of the corresponding magnetism steel box weak or demagnetization and can supply this magnetism, and this method is simple, and can adjust magnetism by a large scale, also can adjust magnetism by the small size, and magnetism is adjusted more convenient and fast.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic structural view of the magnetic steel box of the present invention;
FIG. 2 is a schematic view of the magnetic adjustment of the magnetic steel box of the present invention in the embodiment 1;
FIG. 3 is a schematic view of the magnetic adjustment of the magnetic steel box of the embodiment 2 of the present invention;
wherein, 1, the magnetic steel box body; 2. a magnetic steel box rectangular bottom; 3. the magnetic steel box is provided with an arc top; 4. a bottom surface; 5. a long side; 6. a short side; 7. a magnetic yoke; 8. edge magnetic steel; 9. a middle magnetic steel; 10. and (6) correcting the board.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein.
As shown in fig. 1, a novel magnetic steel box, including magnetic steel box body 1, magnetic steel box body 1 is rectangular shape, including 2 and magnetic steel box arc tops 3 at the bottom of the magnetic steel box rectangle, 2 include bottom surface 4 at the bottom of the magnetic steel box rectangle, two long sides 5 and two short sides 6, be provided with yoke 7 inside the bottom surface of 2 at the bottom of the magnetic steel box rectangle, three blocks of magnet steel 8 of evenly distributed above the yoke 7, wherein two long sides 5 at 2 at the bottom of two blocks of limit magnet steel 8 are close to the magnetic steel box rectangle, a middle magnet steel 9 is located the positive centre of 2 middle magnet yoke 7 at the bottom of the magnetic steel box rectangle, 2 and magnetic steel box arc tops 3 constitute seal structure at the bottom of the magnetic steel box rectangle. And the outer sides of two long side surfaces 5 of the rectangular bottom 2 of the magnetic steel box are provided with correction plates 10 which are magnetically attracted with the magnetic steel box.
Example 1
As shown in fig. 2, a novel magnetic steel box, including magnetic steel box body 1, magnetic steel box body 1 is rectangular shape, including 2 and magnetic steel box arc tops 3 at the bottom of the magnetic steel box rectangle, 2 include bottom surface 4 at the bottom of the magnetic steel box rectangle, two long sides 5 and two short sides 6, be provided with yoke 7 inside the bottom surface at the bottom of 2 at the bottom of the magnetic steel box rectangle, three blocks of magnet steel 8 of evenly distributed above the yoke 7, wherein two long sides 5 at the bottom of two blocks of limit magnet steel 8 are close to the magnetic steel box rectangle 2, a middle magnet steel 9 is located the positive centre of 2 middle magnet yoke 7 at the bottom of the magnetic steel box rectangle, 2 and magnetic steel box arc tops 3 constitute seal structure at the bottom of the magnetic steel box rectangle. The outside of two long sides 5 of the rectangular bottom 2 of the magnetic steel box is provided with a correction plate 10 with the same length as the long side of the magnetic steel box, and the correction plate is magnetically attracted with the magnetic steel box to integrally adjust the magnetism.
Example 2
As shown in fig. 3, the improvement is made on the basis of embodiment 1, and a plurality of short correction plates 10 are arranged outside two long side surfaces 5 of the rectangular bottom 2 of the magnetic steel box and magnetically attract the magnetic steel box to locally adjust the magnetism.
The basic principles, main features and advantages of the present invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (2)
1. The utility model provides a novel magnet steel box, includes magnet steel box body, its characterized in that: the magnetic steel box body is in a long strip shape and comprises a magnetic steel box rectangular bottom and a magnetic steel box arc top, the magnetic steel box rectangular bottom comprises a bottom surface, two long side surfaces and two short side surfaces, a magnetic yoke is arranged inside the bottom surface of the magnetic steel box rectangular bottom, three pieces of magnetic steel are uniformly distributed on the magnetic yoke, two pieces of edge magnetic steel are close to the two long side surfaces of the magnetic steel box rectangular bottom, one piece of middle magnetic steel is located in the middle of the middle magnetic yoke of the magnetic steel box rectangular bottom, and a sealing structure is formed by the magnetic steel box rectangular bottom and the arc top.
2. The novel magnetic steel box according to claim 1, characterized in that: and the outer sides of two long side surfaces of the rectangular bottom of the magnetic steel box are provided with correction plates which are magnetically attracted with the magnetic steel box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120019841.2U CN214088648U (en) | 2021-01-06 | 2021-01-06 | Novel magnetic steel box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120019841.2U CN214088648U (en) | 2021-01-06 | 2021-01-06 | Novel magnetic steel box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214088648U true CN214088648U (en) | 2021-08-31 |
Family
ID=77437619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120019841.2U Active CN214088648U (en) | 2021-01-06 | 2021-01-06 | Novel magnetic steel box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214088648U (en) |
-
2021
- 2021-01-06 CN CN202120019841.2U patent/CN214088648U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0600070A1 (en) | Improved planar magnetron sputtering magnet assembly | |
| CN209836293U (en) | High-efficiency magnetron sputtering planar cathode | |
| EP0447764A3 (en) | Cathodic sputtering substrate coating device | |
| JP2011202217A (en) | Magnetron sputtering apparatus and sputtering method | |
| CN103572240B (en) | A kind of film coating apparatus | |
| CN214088648U (en) | Novel magnetic steel box | |
| JP2010013724A (en) | Penning type sputtering system | |
| CN115011941A (en) | Permanent magnet selective coating method based on variable magnetic field magnetron sputtering coating device | |
| CN202643828U (en) | Magnetron sputtering cathode moving target | |
| CN108231394B (en) | Low-temperature preparation method of high-coercivity neodymium-iron-boron magnet | |
| CN204959025U (en) | Planar cathode that magnetron sputtering coating film was used | |
| JPS5778123A (en) | Manufacture of anisotropic thin magnetic film | |
| US5609739A (en) | Sputtering apparatus | |
| CN210394509U (en) | Winding type arc target device | |
| CN108456867A (en) | Configure the low temperature depositing equipment of impressed current anode | |
| CN205821446U (en) | A kind of low temperature depositing magnetic control sputtering film plating device | |
| CN208378981U (en) | A kind of rotary magnetic control sputtering device | |
| CN208649457U (en) | A kind of cathode component, magnetic control sputtering cathode and magnetic control sputtering device | |
| JPS57188679A (en) | Sputtering source for thin film forming device | |
| CN220079174U (en) | Magnetron sputtering system | |
| CN205710902U (en) | Enhancement mode magnetron sputtering coil film coating equipment | |
| CN218621019U (en) | Magnetron sputtering target and vacuum coating device | |
| CN2775069Y (en) | Novel plane sputtering cathode | |
| CN206814838U (en) | A kind of non-balance magnetically controlled sputter galvanizing rig | |
| TWI496925B (en) | Sputteringapparatus for reducing the damage to the substrate by ito sputtering and the method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |