CN214022505U

CN214022505U - Cleaning equipment

Info

Publication number: CN214022505U
Application number: CN202022682971.2U
Authority: CN
Inventors: 许在烈
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2020-11-18
Filing date: 2020-11-18
Publication date: 2021-08-24
Anticipated expiration: 2030-11-18

Abstract

The utility model relates to a cleaning equipment, including gas cleaning machine and plasma cleaning machine, gas cleaning machine includes exhaust apparatus and air feeder, and exhaust apparatus includes exhaust duct, and air feeder includes gas nozzle, and gas nozzle sets up in exhaust duct's one end, and gas nozzle can spray gas to workpiece surface to make workpiece surface's foreign matter and work piece separation, exhaust duct follow workpiece surface and absorb gas, and plasma cleaning machine is used for carrying out cleaning to workpiece surface. Through setting up gas cleaning machine and plasma cleaning machine, gas cleaning machine passes through gas supply unit and jets gas to the work piece to discharge gas through exhaust apparatus, can effectively avoid the foreign matter to stop in work piece near region. Meanwhile, the plasma cleaning machine is used for cleaning foreign matters with strong adsorption force on the workpiece and foreign matters which are difficult to clean by the gas cleaning machine, so that the complementary effect of the gas cleaning machine is achieved, and the cleaning quality of the workpiece is further ensured.

Description

Cleaning equipment

Technical Field

The utility model relates to a cleaning device technical field especially relates to a cleaning equipment.

Background

In the production process of the optical element, the optical element needs to be cleaned to ensure the production quality. As shown in fig. 1, a workpiece 100 to be cleaned is provided, the workpiece 100 includes a supporting plate 101, a limiting member 102 is disposed on the supporting plate 101, and an optical glass sheet 200 is mounted and fixed on the supporting plate 101 through the limiting member 102. The supporting plate 101 is further provided with a hollow portion, so that the supporting plate 101 can shield light or transmit light to the optical glass sheet 200, and the requirement of the manufacturing process of the optical glass sheet 200 is met. To ensure the surface cleanliness of the optical glass sheet 200, it is necessary to perform a cleaning process using a cleaning apparatus. The conventional cleaning apparatus mainly performs cleaning processing on the workpiece 100 by using a gas cleaning method, and the cleaning apparatus sprays gas to the workpiece 100 so that foreign matters on the surface of the workpiece 100 are separated from the workpiece 100 under the action of the gas. For some foreign matters with strong adhesion, the foreign matters are difficult to separate from the workpiece 100 by the gas cleaning method, so that the cleaning quality of the workpiece 100 is difficult to meet the requirement.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a cleaning equipment, its clean of high quality.

To achieve the purpose, the utility model adopts the following technical proposal:

the cleaning equipment comprises a gas cleaning machine and a plasma cleaning machine, wherein the gas cleaning machine comprises an exhaust device and a gas supply device, the exhaust device comprises an exhaust pipeline, the gas supply device comprises a gas nozzle, the gas nozzle is arranged at one end of the exhaust pipeline, the gas nozzle can spray gas to the surface of a workpiece, so that foreign matters on the surface of the workpiece are separated from the workpiece, the exhaust pipeline absorbs the gas from the surface of the workpiece, and the plasma cleaning machine is used for cleaning the surface of the workpiece.

As a preferable scheme of the cleaning device, the number of the gas nozzles is two, the two gas nozzles are arranged at intervals along the moving direction of the workpiece, and the two gas nozzles are respectively located at two sides of the exhaust pipeline.

As a preferable scheme of the cleaning device, the gas nozzle is provided with a jet orifice for gas circulation, an axial direction of the jet orifice and the surface of the workpiece form an included angle, and the jet orifice faces an air inlet of the exhaust pipeline.

As a preferable mode of the cleaning apparatus, the length of the ejection port is not less than the width of the workpiece.

As a preferable mode of the cleaning apparatus, the plasma cleaning machine includes a plasma torch provided on an outer side wall of the gas nozzle.

As a preferable mode of the cleaning apparatus, the plasma torch is movably disposed on the outer sidewall, and the plasma torch is movable in a longitudinal direction of the gas nozzle.

As a preferable mode of the cleaning apparatus, the plasma torch is provided in plurality, and the plurality of plasma torches are provided at intervals in a moving direction of the workpiece.

As a preferable scheme of the cleaning device, the exhaust pipeline comprises a first pipe section and a second pipe section, an air inlet of the exhaust pipeline is arranged on the first pipe section, an air outlet of the exhaust pipeline is arranged on the second pipe section, and the first pipe section and the second pipe section are connected in an included angle.

As a preferable mode of the cleaning apparatus, a robot for carrying the workpiece is further included.

The cleaning device preferably further comprises a detection device for detecting foreign matters on the surface of the workpiece.

The utility model discloses compare in prior art's beneficial effect:

the utility model discloses a cleaning equipment, through setting up gas cleaning machine and plasma cleaning machine, gas cleaning machine passes through gas supply installation and sprays gas to the work piece to through exhaust apparatus with gas outgoing, can effectively avoid the foreign matter to stop near work piece region. Meanwhile, the plasma cleaning machine is used for cleaning foreign matters with strong adsorption force on the workpiece and foreign matters which are difficult to clean by the gas cleaning machine, so that the complementary effect of the gas cleaning machine is achieved, and the cleaning quality of the workpiece is further ensured.

Drawings

Fig. 1 is a schematic view of a workpiece according to the present invention.

Fig. 2 is a schematic view of a cleaning apparatus and a workpiece of an embodiment.

Fig. 3 is a sectional view of the cleaning apparatus of the embodiment.

In the figure:

100. a workpiece; 101. a support plate; 102. a limiting member; 200. an optical glass sheet;

1. an exhaust duct; 11. a first tube section; 110. an air inlet; 12. a second tube section; 2. a gas nozzle; 20. an accommodating chamber; 21. an ejection port; 22. a baffle; 23. mounting a plate; 3. a plasma torch; 4. a robot arm.

Detailed Description

The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Example one

Referring to fig. 2 and 3, there is provided a cleaning apparatus for cleaning foreign substances on a workpiece 100, the cleaning apparatus including a gas washer and a plasma washer. The gas cleaning machine includes an exhaust device and a gas supply device for spraying gas toward the workpiece 100 and separating foreign matter on the surface of the workpiece 100 from the workpiece 100 by kinetic energy of the gas, the foreign matter floating with the gas after being separated. The exhaust device is used for sucking gas from the surface of the workpiece 100, so that the gas and foreign matters floating along with the gas are exhausted through the exhaust device, and the purpose of cleaning the surface of the workpiece 100 is achieved. The exhaust device comprises an exhaust pipeline 1, one end of the exhaust pipeline 1 is an air inlet 110, the other end of the exhaust pipeline 1 is an air outlet, the air inlet 110 faces the workpiece 100, a fan is arranged at one end, close to the air outlet, of the exhaust pipeline 1, and the fan is used for driving air to circulate from the air inlet 110 of the exhaust pipeline 1 to the air outlet. The gas supply device comprises a gas nozzle 2, the gas nozzle 2 is provided with a containing cavity 20 capable of containing gas, and the containing cavity 20 is connected with the gas storage equipment through a gas conveying pipe. One end of the accommodating cavity 20 close to the workpiece 100 is provided with an injection port 21, the injection port 21 is communicated with the accommodating cavity 20 and the outside of the gas nozzle 2, and the gas in the accommodating cavity 20 is injected to the workpiece 100 through the injection port 21. The gas nozzle 2 is disposed at one end of the exhaust pipe 1 near the gas inlet 110, so that after the gas nozzle 2 sprays gas onto the surface of the workpiece 100, the gas can be timely sucked by the exhaust pipe 1, thereby reducing the floating time of the foreign matters in the area near the workpiece 100 and preventing the foreign matters floating with the gas from returning to the workpiece 100 again. The plasma cleaning machine is used for cleaning the surface of a workpiece, the plasma cleaning machine utilizes plasma to clean foreign matters on the workpiece 100, and the plasma contains active components such as ions, electrons, atoms, active groups, photons and the like, so that the cleaning machine is beneficial to cleaning the foreign matters with strong adhesion on the workpiece 100, and the cleaning quality of the workpiece 100 is ensured.

Specifically, the number of the gas nozzles 2 is two, the two gas nozzles 2 are arranged at intervals along the moving direction of the workpiece 100, and the two gas nozzles 2 are respectively located on both sides of the exhaust duct 1. In this embodiment, the cleaning apparatus further includes a robot 4, the robot 4 is provided with a mounting platform for placing the workpiece 100, the workpiece 100 is mounted on the mounting platform, and the workpiece 100 is transported by the robot 4 to move in a set direction. When the robot arm 4 conveys the workpiece 100 to pass through one side of the gas washer and the plasma washer, the gas washer and the plasma washer clean the workpiece 100. The moving speed of the workpiece 100 can be set correspondingly according to the cleaning speed of the gas cleaning machine and the plasma cleaning machine, so as to ensure that the gas cleaning machine and the plasma cleaning machine can clean the foreign matters on the workpiece 100. The two gas nozzles 2 are arranged at intervals along the moving direction of the workpiece 100, so that the surface of the workpiece 100 can receive two times of gas injection, and the cleaning quality is improved. The two gas nozzles 2 are respectively located at two sides of one end of the exhaust pipeline 1 close to the gas inlet 110, the gas nozzles 2 comprise a shell with an opening at one end, and one end of the shell close to the opening is connected with the side wall of the exhaust pipeline 1, and the side wall of the exhaust pipeline 1 can seal the opening of the shell. The housing and the side wall of the exhaust duct 1 form a receiving chamber 20 therebetween. This structure allows the gas nozzle 2 and the exhaust duct 1 to share a single side wall, which contributes to material saving.

Preferably, in order to further improve the cleaning quality of the gas washer on the workpiece 100, the axial direction of the injection port 21 is arranged at an angle with respect to the surface of the workpiece 100, and the injection port 21 faces the gas inlet 110 of the exhaust duct 1. It is understood that the gas in the housing chamber 20 is ejected onto the workpiece 100 through the ejection port 21, and the flow direction of the gas is the same as the axial direction of the ejection port 21. By arranging the axial direction of the injection port 21 at an angle to the surface of the workpiece 100 so that the gas is obliquely injected to the workpiece 100, it is advantageous to separate foreign substances from the workpiece 100. Meanwhile, the two gas nozzles 2 are positioned on two sides of the exhaust pipeline 1, the nozzles of the two gas nozzles 2 face the gas inlet 110, foreign matters at the intersection points of the axes of the two jet ports 21 are simultaneously subjected to gas jet in two directions, the foreign matters are more favorably separated from the workpiece 100, the foreign matters can be directly sucked into the exhaust pipeline 1 after floating along with the gas, and the cleaning effect is remarkable. In this embodiment, the housing of the gas nozzle 2 includes a baffle 22, the baffle 22 is disposed at an angle to the workpiece 100, the baffle 22 is used to guide the gas in the accommodating cavity 20, and the baffle 22 is parallel to the axial direction of the injection port 21, so that the gas is injected from the injection port 21 in a set direction.

Preferably, the length of the ejection opening 21 is not less than the width of the workpiece 100 in order to improve the cleaning efficiency. In the present embodiment, the workpiece 100 is located below the ejection port 21 and the air intake port 110, the workpiece 100 is moved in the longitudinal direction (the illustrated X direction), and when the workpiece 100 is moved to directly below the ejection port 21 and the air intake port 110, the orthographic projection of the ejection port 21 and the air intake port 110 on the workpiece 100 can cover the width area of the workpiece 100. The air inlet 110 has a rectangular shape, the longitudinal direction (shown as Y direction) of the air inlet 110 is perpendicular to the longitudinal direction of the workpiece 100, and the length of the ejection opening 21 is the same as the length of the air inlet 110. The length of the injection port 21 and the air inlet 110 is larger than or equal to the width of the workpiece 100, when the workpiece 100 passes through the position right below the injection port 21 and the air inlet 110, the gas cleaning machine can complete cleaning treatment on the workpiece 100 at one time, and the working efficiency is improved.

Specifically, the plasma cleaning machine comprises a main machine and a plasma spray gun 3, wherein the plasma spray gun 3 is communicated with the main machine through a flexible pipe, and plasma is sprayed to the workpiece 100 through the plasma spray gun 3 so as to achieve the purpose of cleaning the workpiece 100. The plasma torch 3 is provided on the outer side wall of the gas nozzle 2, and the plasma torch 3 is directed toward the workpiece 100. The outer side wall of the gas nozzle 2 is provided with a mounting plate 23, and the plasma torch 3 is arranged on the mounting plate 23.

Preferably, the plasma cleaning machine is provided with a plurality of plasma torches 3, that is, a plurality of plasma torches 3 are provided correspondingly, and the plurality of plasma torches 3 are provided at intervals in the moving direction of the workpiece 100. The present embodiment is provided with three plasma torches 3 respectively installed on the two gas nozzles 2 and inside the exhaust duct 1, and when the workpiece 100 passes under the gas nozzles 2, the surface of the workpiece 100 is subjected to cleaning treatment by the three plasma torches 3 to ensure cleaning quality.

Example two

Referring to fig. 2, the plasma torch 3 is movably provided on an outer wall of the gas nozzle 2, and the plasma torch 3 is movable in a longitudinal direction (shown Y direction) of the gas nozzle 2. An installation plate 23 for installing the plasma torch 3 is provided on the outer side wall of the gas nozzle 2, the longitudinal direction of the installation plate 23 is parallel to the longitudinal direction of the gas nozzle 2, and the longitudinal direction of the installation plate 23 is parallel to the width direction of the workpiece 100. The mounting plate 23 is further provided with a driving mechanism (not shown), the driving mechanism is connected with the plasma torch 3, and the driving mechanism can drive the plasma torch 3 to move along the length direction of the mounting plate 23. It is understood that when the width dimension of the workpiece 100 is large, the cleaning range of the plasma torch 3 cannot cover the entire width of the workpiece 100. By moving the plasma torch 3 in the width direction of the workpiece 100, therefore, cleaning processing over the entire width of the workpiece 100 is achieved.

Of course, in other embodiments, in order to adapt to the workpiece 100 with a larger width, a plurality of plasma torches 3 may be further disposed at intervals along the length direction of the mounting plate 23, so as to achieve the purpose that the cleaning range of the plasma torches 3 covers the entire width range of the workpiece 100, and improve the working efficiency.

EXAMPLE III

Referring to fig. 2 and 3, the exhaust pipeline 1 includes a first pipe section 11 and a second pipe section 12, an air inlet 110 of the exhaust pipeline 1 is disposed on the first pipe section 11, an air outlet of the exhaust pipeline 1 is disposed on the second pipe section 12, and the first pipe section 11 is connected to the second pipe section 12 at an included angle. In this embodiment, the exhaust pipe 1 is a circular pipe, the first pipe segment 11 is located at one end close to the workpiece 100, and the second pipe segment 12 is located at one end far from the workpiece 100. The included angle between the two pipe sections is set to be 90 degrees, so that the gas on the surface of the workpiece 100 can flow in the direction parallel to the workpiece 100 after being sucked into the exhaust pipeline 1 from the gas inlet 110, namely, the gas inlet 110 and the gas outlet are not in the same vertical direction. This structure prevents foreign substances in the gas from falling into the vicinity of the gas inlet 110, and prevents the workpiece 100 from being secondarily contaminated.

Specifically, the air outlet of the exhaust pipeline 1 is connected to a filtering device (not shown in the figure), and the filtering device filters the air in the exhaust pipeline 1, so as to avoid environmental pollution caused by air discharge.

Specifically, to ensure the cleaning quality of the workpiece 100, the cleaning apparatus further includes a detection device (not shown in the drawings) for detecting foreign substances on the surface of the workpiece 100. The detection device in this embodiment is a CCD vision detection device. After the cleaning equipment cleans the workpiece 100, the cleaning quality of the workpiece 100 is ensured by detecting foreign matters in the workpiece 100 by using the detection device.

The technical effects of the embodiment are as follows: by arranging the gas cleaning machine and the plasma cleaning machine, the gas cleaning machine sprays gas to the workpiece 100 through the gas supply device and discharges the gas through the exhaust device, and foreign matters can be effectively prevented from staying in the area near the workpiece 100. Meanwhile, the plasma cleaning machine cleans foreign matters with strong adsorption force on the workpiece 100 and foreign matters which are difficult to clean by the gas cleaning machine, so that the complementary effect on the gas cleaning machine is achieved, and the cleaning quality of the workpiece 100 is further ensured.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.

Claims

1. The cleaning equipment is characterized by comprising a gas cleaning machine and a plasma cleaning machine, wherein the gas cleaning machine comprises an exhaust device and a gas supply device, the exhaust device comprises an exhaust pipeline, the gas supply device comprises a gas nozzle, the gas nozzle is arranged at one end of the exhaust pipeline, the gas nozzle can spray gas to the surface of a workpiece, so that foreign matters on the surface of the workpiece are separated from the workpiece, the exhaust pipeline absorbs the gas from the surface of the workpiece, and the plasma cleaning machine is used for cleaning the surface of the workpiece.

2. The cleaning apparatus according to claim 1, wherein the number of the gas nozzles is two, the two gas nozzles are arranged at intervals in the moving direction of the workpiece, and the two gas nozzles are respectively located on both sides of the exhaust duct.

3. The cleaning apparatus according to claim 2, wherein the gas nozzle is provided with a jet port for gas circulation, an axial direction of the jet port is arranged at an angle to the surface of the workpiece, and the jet port faces an air inlet of the exhaust duct.

4. The cleaning apparatus according to claim 3, wherein the length of the ejection port is not less than the width of the workpiece.

5. The cleaning apparatus defined in claim 1, wherein the plasma cleaner comprises a plasma torch disposed on an outer sidewall of the gas nozzle.

6. The cleaning apparatus defined in claim 5, wherein the plasma torch is movably disposed on the outer sidewall and is movable along a length of the gas nozzle.

7. The cleaning apparatus according to claim 5, wherein the plasma torch is provided in plurality, and a plurality of the plasma torches are provided at intervals in a moving direction of the workpiece.

8. The cleaning apparatus defined in claim 1, wherein the exhaust conduit comprises a first section and a second section, the inlet of the exhaust conduit being disposed on the first section and the outlet of the exhaust conduit being disposed on the second section, the first section being connected to the second section at an included angle.

9. The cleaning apparatus defined in claim 1, further comprising a robot for transporting the workpiece.

10. The cleaning apparatus according to claim 1, further comprising a detection device for detecting foreign matter on the surface of the workpiece.