CN213934538U - Exposure device - Google Patents

Abstract

The application discloses exposure device, exposure device includes first light shield and vision positioning component, first light shield includes the exposure area and sets up in the peripheral non-exposure area in exposure area, the size in exposure area is adjustable in order to be used for treating the size looks adaptation of exposure component with the difference, the exposure area has first identification sign that awaits, vision positioning component includes first driving piece and sets up the vision setting element on first driving piece, first driving piece configures into and can drives the motion of vision setting element, so that the vision setting element can be discerned the first identification sign that awaits of the different positions that corresponds on the exposure area of different sizes, this design can expose the exposure component of treating of different sizes, in order to promote exposure device's suitability.

Description

Exposure device

Technical Field

The application relates to the technical field of touch display, in particular to an exposure device.

Background

The process flow of processing the touch panel by the yellow light process includes exposure-development-etching, wherein in the exposure process flow, an element to be exposed (for example, conductive glass coated with a photosensitive material) is usually placed on an exposure platform, and then ultraviolet light is utilized to pass through a photomask with a specific size to expose the element to be exposed with the specific size, so that the elements to be exposed with different sizes cannot be exposed, and the application range is small.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides an exposure device, it can be to the exposure of the component of waiting to expose of different sizes to promote exposure device's suitability.

In a first aspect, an embodiment of the present application provides an exposure apparatus; the exposure device comprises a first photomask and a visual positioning component, wherein the first photomask comprises an exposure area and a non-exposure area arranged on the periphery of the exposure area, the size of the exposure area is adjustable and is used for being matched with the sizes of different elements to be exposed, the exposure area is provided with a first identification to be recognized, the visual positioning component comprises a first driving part and a visual positioning part arranged on the first driving part, and the first driving part is configured to drive the visual positioning part to move so that the visual positioning part can recognize the first identification to be recognized at different positions corresponding to the exposure areas with different sizes.

Based on this application embodiment's exposure module, the size in the exposure area of first light shield is adjustable and design into the size looks adaptation with different components of waiting to expose, and the designer adjusts the vision setting element to suitable position through first driving piece according to the size in exposure area, so that the vision setting element can discern the first sign of waiting that is located on the exposure area of equidimension, the size in exposure area changes the adjustable design in position of collocation vision setting element, so that exposure device can expose the component of waiting to expose of equidimension not, promote exposure device's suitability.

In some embodiments, the number of the first photomasks is at least two, and the sizes of the exposure areas of at least two first photomasks are different, so as to expose the elements to be exposed with different sizes.

Based on the above embodiment, the exposure devices with different sizes are exposed by the first mask with the corresponding exposure area size, so as to achieve the purpose of improving the applicability of the exposure apparatus.

In some embodiments, the first driving member includes a driving motor and an extension rod, the extension rod is fixedly connected to a main shaft of the driving motor, and the visual positioning member is disposed on the extension rod.

Based on the above embodiment, the extension rod is arranged on the spindle of the driving motor, and the extension rod is equivalent to the extension of the length of the spindle, so that when the size of the exposure area of the first photomask is matched with the small-sized element to be exposed, the visual positioning element can effectively identify the first mark to be identified on the corresponding exposure area.

In some embodiments, the extension pole has a plurality of mounting locations for mounting the visual positioning element, and the visual positioning element can be mounted at different mounting locations to enable relative changes in position between the visual positioning element and the extension pole.

Based on the above embodiment, by designing a plurality of mounting positions on the extension rod, the visual positioning element can be mounted on different mounting positions according to the size of the exposure area of the actual first photomask, so that the visual positioning element can adapt to more sizes of the exposure area of the first photomask, thereby further enhancing the applicability of the exposure device.

In some embodiments, the extension pole has a plurality of mounting holes, and fasteners are disposed in the mounting holes to achieve relative fixation between the visual positioning element and the extension pole.

Based on the embodiment, the relative fixation of the positions of the visual positioning piece and the extension rod is realized by adopting a mode that the fastener is matched with the mounting hole, and the mounting difficulty of the visual positioning piece is reduced.

In some of these embodiments, the plurality of mounting holes are evenly spaced along the length of the extension rod.

Based on the above embodiment, because the distance between two adjacent mounting holes is equal, the distance that the visual positioning piece moves relative to the extension rod can be known without measuring on moving the visual positioning piece from one of the mounting holes to any other mounting hole, and the mounting difficulty of the visual positioning piece is reduced.

In some embodiments, the number of the first to-be-identified marks, the number of the first driving parts, and the number of the visual positioning parts are four, the four first to-be-identified marks, the four first driving parts, and the four visual positioning parts are respectively used for four sides of the corresponding exposure area, and one first driving part drives the corresponding visual positioning part to move so as to identify one first to-be-identified mark.

Based on above-mentioned embodiment, all set the quantity of first sign, first driving piece and vision setting element to four through waiting to discern to first driving piece, vision setting element and first sign one-to-one that waits to discern set up, promoted the positioning accuracy of first light shield, through setting up first sign, first driving piece and vision setting element waiting to discern in the four sides of exposure area, can avoid the shooting visual angle between each vision setting element to produce and overlap each other.

In some embodiments, the exposure area is rectangular, and four first to-be-identified markers are arranged adjacent to four corner positions of the exposure area.

Based on the above embodiment, by disposing the four first to-be-identified marks at the four corner positions of the exposure area, the first to-be-identified marks can be effectively prevented from shielding the pattern formed on the first photomask.

In some embodiments, the exposure apparatus further includes a second mask fastened to the first mask, so that a closed space for carrying the device to be exposed is formed between the first mask and the second mask.

Based on the above embodiment, a closed space for carrying the device to be exposed is formed between the first mask and the second mask, and the closed space can avoid the influence of the external environment on the device to be exposed.

In some embodiments, the exposure apparatus further includes a second driving member configured to drive the first mask to move and adjust the position of the first mask according to the recognition result of the visual positioning element.

Based on the above embodiment, the visual positioning element opens and captures the actual position of the first mark to be recognized, and the second driving element drives the first photomask to move according to the recognition result of the first mark to be recognized, so as to automatically adjust the position of the first photomask.

Based on exposure device of this application embodiment, the size in the exposure area of first light shield is adjustable and design into the size looks adaptation with different components of waiting to expose, and the designer adjusts the vision setting element to suitable position through first driving piece according to the size in exposure area, so that the vision setting element can discern the first sign of waiting that is located on the exposure area of equidimension, the size in exposure area changes the adjustable design in position of collocation vision setting element, so that exposure device can expose different sizes of the component of waiting to expose, promote exposure device's suitability.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic view of an exposure apparatus according to an embodiment of the present disclosure;

FIG. 2 is a schematic structural diagram of an exposure apparatus according to another embodiment of the present application;

FIG. 3 is a schematic diagram of a first mask according to an embodiment of the present disclosure;

FIG. 4 is a schematic diagram of a second mask according to an embodiment of the present disclosure;

fig. 5 is a schematic structural diagram of an exposure apparatus according to still another embodiment of the present application.

Reference numerals: 110. a first mask; 111. an exposure area; 112. a non-exposed region; 113. a first identification to be recognized; 120. a visual positioning assembly; 121. a first driving member; 1211. a drive motor; 1212. an extension pole; 1213. mounting holes; 1214. a fastener; 122. a visual locator; 130. an element to be exposed; 210. a housing; 220. a second mask; 221. a second identifier to be identified; 222. and (4) sealing the space.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

In the related art, the process flow of processing the touch panel by using the yellow light process includes exposure, development, and etching.

In the exposure process, the device to be exposed is usually placed on an exposure platform, and then the device to be exposed is exposed by using ultraviolet light through a specific mask, wherein, for example, the device to be exposed may be conductive glass coated with a photosensitive material, and the conductive glass may be an ITO substrate.

In the exposure process flow, a mask with a specific size is usually used to expose a device to be exposed with a specific size, for example, the mask size of the exposure apparatus is 6 inches by 6 inches (i.e., 152MM by 152MM), the mask can only expose the device to be exposed with a size of 6 inches by 6 inches, when the device to be exposed with a size of 24 inches by 24 inches (i.e., 610MM by 610MM) needs to be exposed, the mask size of the exposure apparatus cannot be adapted to the size of the device to be exposed, so the device to be exposed cannot be used to expose the device to be exposed.

In order to solve the above technical problem, referring to fig. 1 to 5, a first aspect of the present application provides an exposure apparatus capable of exposing devices to be exposed with different sizes to improve the applicability of the exposure apparatus.

Referring to fig. 1 to 3, fig. 1 is a schematic structural diagram of an exposure apparatus in an embodiment of the present application, and fig. 2 is a schematic structural diagram of an exposure apparatus in another embodiment of the present application; FIG. 3 is a schematic diagram of a first mask according to an embodiment of the present disclosure.

The exposure module includes a first mask 110 and a vision positioning assembly 120.

The first mask 110 is equivalent to a negative film and has a pattern projected onto the device 130 to be exposed, which is designed according to actual requirements, that is, after the ultraviolet light passes through the first mask 110, the pattern on the first mask 110 is copied onto the surface of the device 130 to be exposed.

The first mask 110 includes an exposure region 111 and a non-exposure region 112 disposed at the periphery of the exposure region 111. The exposed region 111 is capable of transmitting ultraviolet light, and the pattern is formed on the exposed region 111, and the non-exposed region 112 is equivalent to a portion of the first mask 110 for supporting the exposed region 111. Specifically, the first mask 110 includes a mask and a supporting frame, wherein the mask is equivalent to the exposure region 111, the supporting frame is equivalent to the non-exposure region 112, the supporting frame is annular, an outer side surface of the mask is connected to an inner annular surface of the supporting frame, and a specific connection manner between the mask and the supporting frame is not limited, for example, the mask and the supporting frame can be connected by a clamping manner, or can be connected by an adhesive manner.

The size of the exposure area 111 is adjustable for adaptation to the size of different elements 130 to be exposed. Wherein, the size of the exposure region 111 refers to the length of each edge line of the exposure region 111, and the area of the non-exposure region 112, and correspondingly the size of the element 130 to be exposed refers to the length of each edge of the element 130 to be exposed, and not the area of the element 130 to be exposed; the size of the exposure area 111 may be adjusted by various means, for example, the size of the exposure area 111 of the first reticle 110 may be adjusted by blocking a partial area of the exposure area 111; the dimension of the exposure region 111 of the first mask 110 is adapted to the dimension of the element 130 to be exposed, it should be understood that the orthographic projection of the element 130 to be exposed on the plane of the exposure region 111 can completely coincide with the exposure region 111, for example, the dimension of the element 130 to be exposed may be 6 inches by 6 inches, correspondingly, the dimension of the exposure region 111 may also be 6 inches by 6 inches, the dimension of the element 130 to be exposed may also be 20 inches by 20 inches (i.e., 229MM by 229MM), correspondingly, the dimension of the exposure region 111 may also be 20 inches by 20 inches.

The exposure area 111 has a first mark to be recognized 113, and the first mark to be recognized 113 corresponds to a mark on the exposure area 111, which may be a target ring provided on the exposure area 111.

Referring to fig. 1-2, the visual positioning assembly 120 may be used as a component for determining the position of the first mask 110 in the exposure apparatus, and the visual positioning assembly 120 includes a first driving member 121 and a visual positioning member 122 disposed on the first driving member 121. Of course, the connection between the visual positioning element 122 and the first driving element 121 may be a detachable connection or a non-detachable connection, for example, when the visual positioning element 122 is detachably connected to the first driving element 121, the visual positioning element 122 may be mounted and dismounted with the first driving element 121 through a certain clamping structure, which is not described herein.

The first driving member 121 is configured to drive the visual positioning member 122 to move, so that the visual positioning member 122 can identify the first to-be-identified marks 113 at different positions corresponding to the exposure areas 111 with different sizes. The first driving member 121 is equivalent to a driving source in the visual positioning assembly 120, and can drive the visual positioning member 122 to move, where the movement may be a linear movement or a curvilinear movement, and the movement form of the visual positioning member 122 may be determined according to the specific structure of the first driving member 121; the visual positioning element 122 corresponds to a part of the visual positioning assembly 120 for recognizing the first mark 113 to be recognized, and the visual positioning element 122 is a camera and can grab and recognize the first mark 113 to be recognized on the exposure areas 111 with different sizes under the action of the first driving member 121.

To sum up, the size of the exposure area 111 of the first mask 110 is adjustable and designed to be adapted to the sizes of different to-be-exposed devices 130, and the designer adjusts the visual positioning element 122 to a suitable position through the first driving element 121 according to the size of the exposure area 111, so that the visual positioning element 122 can identify the first to-be-identified mark 113 located on the exposure area 111 with different sizes, and the size of the exposure area 111 is changed and matched with the position adjustable design of the visual positioning element 122, so that the exposure device can expose the to-be-exposed devices 130 with different sizes, thereby improving the applicability of the exposure device.

Further, in order to reduce the difficulty of implementing the means for adjusting the size of the exposure area 111, in some embodiments, the number of the first photo-masks 110 is at least two, and the sizes of the exposure areas 111 of at least two first photo-masks 110 are different for exposing the to-be-exposed devices 130 with different sizes, that is, one exposure apparatus is at least configured with a plurality of first photo-masks 110 with a number of not less than two, and in the plurality of first photo-masks 110, the sizes of the exposure areas 111 of at least two first photo-masks 110 are different, that is, the exposure apparatus is at least capable of exposing the to-be-exposed devices 130 with two different sizes. In the design, the devices to be exposed with different sizes are exposed by the first mask 110 with the corresponding size of the exposure area 111, so as to achieve the purpose of improving the applicability of the exposure apparatus.

Further, considering that the first driving member 121 is used as a component for bearing and driving the visual positioning element 122 to move, the first driving member 121 may be a driving cylinder, and the visual positioning element 122 may be mounted on a piston rod of the driving cylinder, so that the visual positioning element 122 has a movement stroke in a direction parallel to a length of the piston rod, and a position of the driving cylinder itself may also be adjustable at this time, for example, the driving cylinder is fixedly mounted on the housing 210 of the exposure apparatus through a screw, and a designer may adjust a relative position between the driving cylinder and the housing 210 according to actual needs, so as to implement the movement stroke of the visual positioning element 122 in the direction perpendicular to the length of the piston rod.

Referring to fig. 1-2, in some embodiments, the first driving member 121 includes a driving motor 1211 and an extension rod 1212, the extension rod 1212 is fixedly connected to a main shaft of the driving motor 1211, and the visual positioning element 122 is disposed on the extension rod 1212. Specifically, in some embodiments, the driving motor 1211 is a linear motor, the extension rod 1212 is linear, one end of the extension rod 1212 near the driving motor 1211 is provided with a jack adapted to the main shaft of the driving motor 1211 and a through hole communicated with the jack, a hole axis of the jack is perpendicular to a hole axis of the through hole, the main shaft of the motor is provided with a threaded hole, a screw capable of being in threaded connection with the threaded hole is inserted into the through hole to achieve relative fixing of the position between the extension rod 1212 and the main shaft of the motor, the visual positioning element 122 is disposed on the extension rod 1212, it should be noted that, the extension rod 1212 is linear, so that after the visual positioning element 122 is installed on the extension rod 1212, the first driving element 121 can drive the visual positioning element 122 to move along a length direction parallel to the extension rod 1212, and in a horizontal plane, the movement of the visual positioning element 122 along the length direction perpendicular to the extension rod 1212 can be achieved by adjusting the relative position between the first driving element 121 and the housing 210 of the exposure apparatus . In this design, by disposing the extension rod 1212 on the main shaft of the driving motor 1211, the extension rod 1212 is equivalent to extending the length of the main shaft, and the visual positioning element 122 is disposed on the extension rod 1212, under the action of the driving motor 1211, the visual positioning element 122 has a moving stroke in a direction parallel to the length direction of the extension rod 1212 or in a direction perpendicular to the length direction of the extension rod 1212, so that when the size of the exposure area 111 of the first mask 110 is matched with the small-sized device to be exposed 130, the visual positioning element 122 can effectively identify the first mark to be identified 113 on the corresponding exposure area 111.

Of course, in some other embodiments, the extension rod 1212 may also include a first extension rod and a second extension rod, one end of the first extension rod close to the driving motor 1211 is fixedly connected to the spindle of the driving motor 1211, the second extension rod is vertically connected to the first extension rod, and a relative position between the second extension rod and the first extension rod may be changed, for example, the first extension rod has a plurality of through holes thereon, the second extension rod is fixed to the first extension rod through screws inserted into the through holes, at this time, the visual positioning element 122 is installed on the second extension rod, and a relative position between the visual positioning element 122 and the second extension rod may also be changed, in this design, the position of the visual positioning element 122 in a direction parallel to the first extension rod is adjusted by changing a position of the second extension rod relative to the first extension rod, and the position of the visual positioning element 122 in a direction perpendicular to the first extension rod is adjusted by changing a position of the visual positioning element 122 relative to the second extension rod.

Further, in order to facilitate the replacement of the visual positioning element 122 at a later stage, the connection between the visual positioning element 122 and the extension rod 1212 is a detachable connection, for example, the visual positioning element 122 may be detachably connected to the extension rod 1212 through some kind of clamping structure.

The visual positioning element 122 may be removably coupled to the extension rod 1212 at a particular location, for example, the visual positioning element 122 may be coupled to an end of the extension rod 1212 facing away from the main shaft of the drive motor 1211. In order to allow the visual positioning element 122 to have different ranges of movement in a direction parallel to the extension rod 1212 to accommodate the sizes of the different exposure areas 111 of more first masks 110, as shown in fig. 1-2, in some embodiments, the extension rod 1212 has a plurality of (two or more) mounting positions for mounting the visual positioning element 122, and the visual positioning element 122 can be mounted at different mounting positions to achieve a relative change of the positions between the visual positioning element 122 and the extension rod 1212, where the mounting position is a position on the extension rod 1212 for mounting the visual positioning element 122. In this design, by designing a plurality of mounting positions on the extension rod 1212, the visual positioning element 122 can be mounted on different mounting positions according to the actual size of the exposure area 111 of the first mask 110, so that the visual positioning element 122 can adapt to more sizes of the exposure area 111 of the first mask 110, thereby achieving the effect of enhancing the applicability of the exposure module.

Further, the mounting position may be a plurality of clamping members mounted on the extension rod 1212, and the specific structure of the clamping members is not limited herein, for example, the clamping member may include a male buckle and a female buckle, the male buckle is mounted on one of the extension rod 1212 and the visual positioning member 122, and the female buckle is mounted on the other of the extension rod 1212 and the visual positioning member 122. To reduce the difficulty of installing the visual positioning element 122 and the extension rod 1212, please continue to refer to fig. 1-2, in some embodiments, the extension rod 1212 has a plurality of installation holes 1213, and the installation holes 1213 have fasteners 1214 for fixing the visual positioning element 122 and the extension rod 1212. Specifically, the fastener 1214 is a screw, and the visual positioning member 122 has a threaded hole thereon, and the screw passes through the mounting hole 1213 and is threadedly connected with the threaded hole to achieve relative fixation between the visual positioning member 122 and the extension rod 1212.

Further, the plurality of mounting holes 1213 may be randomly arranged along the length of the extender 1212. To reduce the difficulty of installing the visual positioning element 122, in some embodiments, a plurality of installation holes 1213 are uniformly and equally spaced along the length of the extension rod 1212. In this design, since the distance between two adjacent mounting holes 1213 is equal, when the visual positioning element 122 is moved from one mounting hole 1213 to any other mounting hole 1213, the distance that the visual positioning element 122 moves relative to the extension rod 1212 can be known without measurement, and the difficulty in mounting the visual positioning element 122 is reduced.

Further, the number of the first to-be-identified marks 113 may be one, two, three, four or more, considering that there is uncertainty in the direction of the deviation of the first mask 110, that is, the first mask 110 can move arbitrarily in the plane parallel to the exposure area 111 of the first mask 110, in order to enable the visual positioning element 122 to effectively capture the first to-be-identified marks 113, please refer to fig. 1-2, in some embodiments, the number of the first to-be-identified marks 113, the number of the first driving elements 121 and the number of the visual positioning elements 122 are four, the four first to-be-identified marks 113, the four first driving elements 121 and the four visual positioning elements 122 are respectively used for four sides of the corresponding exposure area 111, and one first driving element 121 drives the corresponding visual positioning element 122 to move to identify one first to-be-identified mark 113. In this design, the number of the first to-be-recognized mark 113, the first driving member 121, and the number of the visual positioning members 122 are all set to four, and the first driving member 121, the visual positioning members 122, and the first to-be-recognized mark 113 are disposed in a one-to-one correspondence manner, so that the positioning accuracy of the first mask 110 is improved, and the first to-be-recognized mark 113, the first driving member 121, and the visual positioning members 122 are disposed on four sides of the exposure area 111, so that the shooting viewing angles between the visual positioning members 122 can be prevented from being overlapped with each other.

Further, the first to-be-recognized mark 113 may be disposed adjacent to an edge of the exposure area 111, in order to prevent the first to-be-recognized mark 113 from shielding the pattern formed on the exposure area 111 of the first mask 110, as shown in fig. 3, in some embodiments, the exposure area 111 is rectangular, and four first to-be-recognized marks 113 are disposed adjacent to four corner positions of the exposure area 111, that is, one corner position of the exposure area 111 is disposed with one first to-be-recognized mark 113.

Considering that the visual positioning element 122 obtains an identification result after identifying the first to-be-identified mark 113, and determines whether the first mask 110 is deviated according to the identification result, if the first mask 110 is deviated, a corresponding position adjustment is performed, for example, when the first mask 110 is deviated, the exposure apparatus sends an alarm prompt signal (e.g., a buzzer alarm), and a machine maintenance worker may manually adjust the position at this time.

Referring to fig. 4 to 5, fig. 4 is a schematic structural diagram of a second mask in an embodiment of the present disclosure, and fig. 5 is a schematic structural diagram of an exposure apparatus in another embodiment of the present disclosure.

To achieve the automation of the exposure apparatus and reduce the investment of machine maintenance personnel, in some embodiments, the exposure apparatus further includes a second driving member (not shown) configured to drive the first mask 110 to move and adjust the position of the first mask 110 according to the recognition result of the visual positioning element 122. In this design, the position of the first mask 110 is automatically adjusted by the second driving member, thereby reducing the maintenance difficulty of the exposure apparatus.

In some embodiments, the exposure apparatus further includes a second mask 220 besides the second driving member, and the second mask 220 is fastened to the first mask 110, so that a closed space 222 for carrying the device 130 to be exposed is formed between the first mask 110 and the second mask 220. For example, the first mask 110 may be located above the second mask 220, the first mask 110 may be located below the second mask 220, and the first mask 110 or the second mask 220 located below may be used to support the device 130 to be exposed, which corresponds to the exposure stage. In this design, the enclosed space 222 formed by the first mask 110 and the second mask 220 is close to a vacuum state, which can effectively avoid the influence of the external environment on the device 130 to be exposed.

It should be noted that, when the exposure apparatus does not include the second mask 220, the exposure apparatus should further include an exposure stage for carrying the device 130 to be exposed. The second mask 220 has the same structure and function as the first mask 110, the second mask 220 also has an exposure region 111 and a non-exposure region 112 surrounding the exposure region 111, and also the size of the exposure region 111 of the second mask 220 can be adjusted to fit different sizes of the to-be-exposed device 130 according to the requirement, and the size of the exposure region 111 of the second mask 220 can be adjusted by configuring the exposure device with a plurality of second masks 220 with different sizes of exposure regions 111. In this design, the second mask 220 is used for carrying the device 130 to be exposed, and can expose the other surface of the device 130 to be exposed, which is opposite to the other surface of the device 130 to be exposed, from one side of the second mask 220 through the second mask 220, that is, the exposure apparatus can independently expose a single surface of the device 130 to be exposed, which faces the first mask 110, or expose a single surface of the device 130 to be exposed, which faces the second mask 220, or expose a double surface of the device 130 to be exposed, which faces the first mask 110, and expose a double surface of the device 130 to be exposed, which faces the second mask 220.

Correspondingly, the second driving member is configured to drive at least one of the first mask 110 and the second mask 220 to move, and adjust the relative position between the first mask 110 and the second mask 220 according to the recognition result of the visual positioning member 122. That is, when the first mask 110 is misaligned, the second driving member may only drive the first mask 110 to move to change the relative position between the first mask 110 and the second mask 220, the second driving member may also only drive the second mask 220 to move to change the relative position between the first mask 110 and the second mask 220, and the second driving member may also simultaneously drive the first mask 110 and the second mask 220 to move to change the relative position between the two. In this design, the positions of the first mask 110 and the second mask 220 are automatically adjusted by the second driving member, thereby reducing the maintenance difficulty of the exposure apparatus.

Further, in some embodiments, the second mask 220 has the same number of second to-be-recognized marks 221 as the first to-be-recognized marks 113, and the second driving member is configured to drive at least one of the first mask 110 and the second mask 220 to move so as to align the first to-be-recognized marks 113 with the second to-be-recognized marks 221. Specifically, the second to-be-recognized mark 221 is a target point corresponding to the first to-be-recognized mark 113, and four second to-be-recognized marks 221 are arranged adjacent to four corner positions of the exposure region 111 of the second mask 220 in a one-to-one correspondence. In this design, the second mark 221 to be recognized is equivalent to the standard reference position of the first mask 110, the visual positioning element 122 captures the actual position of the first mark 113 to be recognized, and compares the actual position of the first mark 113 to be recognized with the standard reference position of the second mark 221 to obtain a recognition result, and the second driving element can adjust the position of at least one of the first mask 110 and the second mask 220 according to the recognition result, so as to align the first mark 113 to be recognized with the second mark 221 to be recognized, which is simple to operate.

The same or similar reference numerals in the drawings of the present embodiment correspond to the same or similar components; in the description of the present application, it is to be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of description and simplification of description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only for illustrative purposes and are not to be construed as limitations of the present patent, and specific meanings of the above terms may be understood by those skilled in the art according to specific situations.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. An exposure apparatus, comprising:

the first photomask comprises an exposure area and a non-exposure area arranged on the periphery of the exposure area, the size of the exposure area is adjustable and is used for being matched with the sizes of different elements to be exposed, and the exposure area is provided with a first mark to be identified; and

the visual positioning assembly comprises a first driving piece and a visual positioning piece arranged on the first driving piece, wherein the first driving piece is configured to drive the visual positioning piece to move, so that the visual positioning piece can identify the first to-be-identified marks at different positions corresponding to the exposure area in different sizes.

2. The exposure apparatus according to claim 1,

the number of the first light covers is at least two, and the sizes of the exposure areas of at least two first light covers are different, so that the exposure areas are used for exposing the elements to be exposed with different sizes.

3. The exposure apparatus according to claim 1, wherein the first driving member includes:

a drive motor; and

the extension rod is fixedly connected with the main shaft of the driving motor, and the visual positioning piece is arranged on the extension rod.

4. The exposure apparatus according to claim 3,

the extension rod is provided with a plurality of installation positions for installing the visual positioning piece, and the visual positioning piece can be installed at different installation positions to realize the relative change of the positions between the visual positioning piece and the extension rod.

5. The exposure apparatus according to claim 4,

the extension rod is provided with a plurality of mounting holes, and fasteners for realizing relative fixation between the visual positioning piece and the extension rod are arranged in the mounting holes.

6. The exposure apparatus according to claim 5,

the installation holes are evenly arranged at equal intervals along the length direction of the extension rod.

7. The exposure apparatus according to claim 1,

the first to-be-identified marks, the first driving parts and the visual positioning parts are four in number, the four first to-be-identified marks, the four first driving parts and the four visual positioning parts are respectively used for corresponding to four sides of the exposure area, and one first driving part drives the corresponding visual positioning part to move so as to identify one first to-be-identified mark.

8. The exposure apparatus according to claim 7,

the exposure area is rectangular, and the four first marks to be identified are arranged at the positions adjacent to four corners of the exposure area.

9. The exposure apparatus according to claim 1,

the exposure device also comprises a second light shield, and the second light shield is buckled with the first light shield so as to form a closed space for bearing the element to be exposed between the first light shield and the second light shield.

10. The exposure apparatus according to claim 1,

the exposure device further comprises a second driving piece, wherein the second driving piece is configured to drive the first photomask to move and adjust the position of the first photomask according to the recognition result of the visual positioning piece.

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