CN213845227U

CN213845227U - Device for switching silicon wafer baskets

Info

Publication number: CN213845227U
Application number: CN202022603090.7U
Authority: CN
Inventors: 李汉生; 蔡雪良; 黄建光; 王帅
Original assignee: Kunshan Zhongchen Silicon Crystal Co ltd
Current assignee: Kunshan Zhongchen Silicon Crystal Co ltd; Kunshan Sino Silicon Technology Co Ltd
Priority date: 2020-11-02
Filing date: 2020-11-02
Publication date: 2021-07-30
Anticipated expiration: 2030-11-02

Abstract

The utility model provides a device that silicon wafer basket was switched for silicon wafer shifts basket and receives switching between the basket. The device comprises a base, a vertical plate, a pushing frame, a moving block and a groove device. The base is used for placing the vertical plate, the pushing frame, the moving block and the groove device; the vertical plate is fixed at the head of the base by screws and is fixedly connected with the pushing frame by screws; the pushing frame is used for placing the transfer basket and providing supporting force for the conversion between the transfer basket and the receiving basket; the moving block is placed in the groove device of the base, the receiving basket can be fixed, the receiving basket can be slid to the transfer basket through the sliding moving block, and the silicon wafers in the transfer basket are transferred into the receiving basket through the support force of the push frame of the transfer basket; the groove device is arranged on a base of the device and provides a sliding track for the moving block. Therefore, when the silicon wafer baskets need to be mutually converted, the device can be used for switching the silicon wafer baskets, the conversion efficiency between the silicon wafer transfer basket and the receiving basket can be improved, the damage of the silicon wafer is reduced, and the yield and the production efficiency of products are improved.

Description

Device for switching silicon wafer baskets

Technical Field

The utility model relates to a silicon wafer cleaning process; in particular to a device for switching between a silicon wafer transfer basket and a receiving basket.

Background

The present society has entered the electronic age, the semiconductor industry is in a relatively mature stage, the single crystal silicon material is the basis of the semiconductor industry, the materials mainly based on the silicon material are widely used, and semiconductor materials with other advantages are also being developed and utilized. The industry is a highly technology and capital intensive industry, and the competition is particularly intense.

Semiconductor silicon wafers are the most basic materials among electronic information materials. Single crystal silicon has penetrated into various fields in national economy and national defense technology, and the annual average growth rate of silicon wafers for semiconductors has increased year after year. At present, the production capacity of the silicon wafer for the domestic integrated circuit can not meet the domestic requirement, and a supply gap exists in the world. In order to match the market development direction and increase the business profit of companies, the production efficiency and product yield of companies need to be continuously increased, thereby increasing the competitiveness of companies in the market.

Silicon wafers may be contaminated with certain organic, metal ions, dust, particles on the surface of the silicon wafer during a series of processes due to physical or chemical adsorption, and these potential contaminants must be removed by cleaning to obtain an acceptable product. Because the silicon wafer cleaning process has various modes and cleaning agents used in the cleaning process have diversity, different silicon wafer baskets are used according to different cleaning modes and different cleaning agents when the silicon wafer is cleaned; the silicon wafer basket used is adjusted according to different states of the silicon wafer and different modes of processing the silicon wafer. Generally, the silicon wafer basket is converted by manual operation, the silicon wafer transfer basket is aligned to the silicon wafer receiving basket in a visual calibration mode, and workers manually convert the silicon wafer from the transfer basket to the receiving basket, so that abnormal conditions such as silicon wafer dislocation, silicon wafer pollution, silicon wafer scratch and the like can occur in the operation process, and the quality of products and the yield of the products are influenced; and the efficiency and error rate of manually calibrating the switching position of the silicon wafer basket are high, thereby affecting the yield of the product. Ultimately affecting the competitiveness of the product in the semiconductor silicon wafer market industry.

SUMMERY OF THE UTILITY MODEL

In order to improve the above situation, an object of the present invention is to provide a device for inverting silicon wafer baskets, which is used for switching between a silicon wafer transfer basket and a receiving basket, improving the accuracy of the position of the silicon wafer after switching in the silicon wafer basket, improving the switching efficiency between the silicon wafer baskets, and reducing the damage to the surface of the silicon wafer.

The utility model discloses the technical scheme who adopts: the device comprises a base, a vertical plate, a pushing frame, a moving block and a groove device. The base is used for placing the vertical plate, the pushing frame, the moving block and the groove device; the vertical plate is fixed at the head of the base by screws and is fixedly connected with the pushing frame by screws; the pushing frame is used for placing the transfer basket and providing supporting force for the conversion between the transfer basket and the receiving basket; the moving block is placed in the groove device of the base, the receiving basket can be fixed, the receiving basket can be slid to the transfer basket through the sliding moving block, and the silicon wafers in the transfer basket are transferred into the receiving basket through the support force of the push frame of the transfer basket; the groove device is arranged on a base of the device and provides a sliding track for the moving block. Therefore, when the silicon wafer baskets need to be mutually converted, the device can be used for switching the silicon wafer baskets, the conversion efficiency between the silicon wafer transfer basket and the receiving basket can be improved, the damage of the silicon wafer is reduced, and the yield and the production efficiency of products are improved.

The utility model discloses the technical scheme who adopts: the wafer basket-reversing conversion device is provided with a vertical plate, the vertical plate is fixed on the base by screws and is fixedly connected with the pushing frame by screws so as to provide supporting force for the pushing frame;

the utility model discloses the technical scheme who adopts: the silicon wafer basket reversing device is provided with a pushing frame, a certain gap is reserved between the pushing frame and the base, the pushing frame is used for fixing the silicon wafer transfer basket and providing supporting force for the conversion between the silicon wafer transfer basket and the receiving basket;

the utility model discloses the technical scheme who adopts: the silicon wafer basket reversing device is provided with a moving block, one side of the moving block is provided with a groove for placing a silicon wafer receiving basket, the moving block is placed at the groove device of the base, the silicon wafer receiving basket can be moved to a silicon wafer transferring basket through sliding the moving block, and the silicon wafer baskets are mutually converted by means of the pushing frame;

the utility model discloses the technical scheme who adopts: the silicon wafer basket reversing device is provided with a groove device, the groove device is provided with a bottom plate and a clamping groove, the clamping groove is used for placing the moving block, and the bottom plate is used for fixing the moving block on the base;

the utility model discloses the technical scheme who adopts: the silicon wafer basket reversing device is provided with a groove device which is a track for moving the silicon wafer basket, and the moving track of the silicon wafer basket is fixed to prevent dislocation.

Based on the foregoing, the utility model discloses an advantage and characteristics are easy and simple to handle to keep the accuracy of silicon wafer position when making the conversion of silicon wafer basket, improve the efficiency of conversion between the silicon wafer basket, and reduce silicon wafer surface scratch.

Drawings

Fig. 1 is a front view of a device for inverting silicon wafer baskets.

Fig. 2 is a side view of the device for inverting the silicon wafer basket.

Fig. 3 is a top view of the device for inverting silicon wafer baskets.

Fig. 4 is a top view of the moving block in the device for inverting the silicon wafer basket.

Fig. 5 is a front view of a moving block in the device for inverting the silicon wafer basket.

Fig. 6 is a side view of the moving block in the device for inverting the silicon wafer basket.

The reference numbers illustrate:

1 vertical plate

2 push frame

3 groove device

4 base

5 moving block

6 card slot

7 bottom plate

8 screw

9 bottom plate screw

Detailed Description

In different manufacturing processes of the semiconductor silicon wafer, different silicon wafer baskets are used, so that the silicon wafer baskets are required to be converted into each other, and the silicon wafer baskets corresponding to the manufacturing processes are used. The utility model discloses combine silicon wafer production process technology needs, improve current silicon wafer basket conversion mode, shift the basket with the silicon wafer by original manual work and aim at the silicon wafer through the mode of naked eye calibration and receive the basket, workman's manual operation is from shifting the basket to receiving the basket with the silicon wafer, abnormal conditions such as silicon wafer dislocation, silicon wafer pollution, silicon wafer scratch can appear in the operation process, easily take place the error during switching, and artifical conversion efficiency hangs down and silicon wafer position accuracy is poor, it is right to combine the drawing below the utility model discloses a detailed description is done to embodiment.

The device is provided with a conversion base 4 for bearing the vertical plate 1, the push frame 2 and the moving block 5, and a groove device 3 is arranged in the middle;

the device is provided with a vertical plate 1, which is fixed on a base 4 by a screw 8 and is connected and fixed with a push frame 2 by the screw 8 to provide a supporting force for the push frame 2;

the device is provided with a pushing frame 2, a certain gap is reserved between the pushing frame 2 and a base 4, and the reserved gap can clamp the silicon wafer transfer basket, so that the position of the silicon wafer transfer basket is fixed, and a supporting force is provided for the conversion between the silicon wafer transfer basket and the receiving basket through the pushing frame 2;

the device is provided with a moving block 5, one side of the moving block is provided with a groove for clamping a silicon wafer receiving basket, the position of the silicon wafer receiving basket can be fixed, the moving block 5 is placed at the groove device 3 of the base 4, the silicon wafer receiving basket clamped on the groove of the moving block 5 can be moved to a silicon wafer transferring basket fixed at the pushing frame 2 along the groove device 3 by sliding the moving block 5 on the groove device 3, and the mutual conversion of the silicon wafers between the transferring basket and the receiving basket is completed by the aid of the supporting force of the pushing frame 2;

the device is provided with a groove device 3 which is provided with a bottom plate 7, a bottom plate screw 9 and a clamping groove 6, wherein the clamping groove 6 is used for placing the moving block 5, the moving block 5 is fixed on the base 4 by the bottom plate 7 through the bottom plate screw 9, the groove device 3 is a sliding track provided for moving the silicon wafer basket, and the moving track of the silicon wafer basket is fixed without deviation, so that the silicon wafer is prevented from being misplaced when the transfer basket and the receiving basket are switched;

the utility model discloses a device that silicon wafer basket was switched combines current technology needs, has solved the low and silicon wafer conversion position accuracy subalternation problem of conversion efficiency between the current silicon wafer basket, because silicon wafer basket conversion number of times is many, this device that silicon wafer basket was switched can be used to each processing procedure station separately, and the use degree is high; meanwhile, the wafer basket has the advantage of convenience in use, avoids damage caused by wafer conversion, and improves the conversion efficiency of the wafer basket and the yield of wafers.

Claims

1. A device for inverting a silicon wafer basket, which is used for the interconversion between a silicon wafer transfer basket and a receiving basket, is characterized in that the device for inverting the silicon wafer basket comprises:

the base is used for bearing the vertical plate, the pushing frame, the moving block and the groove device;

the vertical plate is fixed at the head position of the base by screws;

a pushing frame which is connected with the vertical plate by screws;

a moving block, which is arranged in the groove device of the base and is used for fixing the silicon wafer receiving baskets and carrying out inverted basket conversion among the silicon wafer baskets;

and the groove device is arranged on the base and comprises a bottom plate and a clamping groove which are used for placing the moving block and providing a sliding track for the moving block.

2. The device for inverting silicon wafer baskets of claim 1 wherein said device for inverting silicon wafer baskets has an inverting base for carrying the vertical plate, the pushing frame, the moving block and a groove device.

3. The device for inverting silicon wafer baskets of claim 1 wherein said device for inverting silicon wafer baskets has a vertical plate fixed on the base by screws and fixed to the pushing frame by screws.

4. The device for inverting silicon wafer baskets of claim 1 wherein said device for inverting silicon wafer baskets has a pushing frame, the pushing frame and the base have a gap for holding the silicon wafer transfer basket and providing a supporting force for the conversion between the silicon wafer transfer basket and the receiving basket.

5. The device for inverting silicon wafer baskets of claim 1 wherein said device for inverting silicon wafer baskets has a moving block with a groove on one side for placing the silicon wafer receiving basket.

6. The device for inverting silicon wafer baskets of claim 5, wherein the device for inverting silicon wafer baskets comprises a moving block, the moving block is placed at the groove device of the base, the silicon wafer receiving basket can be moved to the silicon wafer transferring basket by sliding the moving block, and the silicon wafer baskets are inverted with each other by means of the pushing frame.

7. The device for inverting silicon wafer baskets of claim 1 wherein said device for inverting silicon wafer baskets has a notch device having a bottom plate and a notch, the notch for placing the moving block, the bottom plate for securing the moving block on the base.

8. The device for inverting silicon wafer baskets of claim 7 wherein said device for inverting silicon wafer baskets has a notch device, the notch device is a track for moving silicon wafer baskets, the moving track of silicon wafer baskets is fixed, preventing dislocation.