CN213827594U - Laser light path polarization detection device and automatic correction device - Google Patents
Laser light path polarization detection device and automatic correction device Download PDFInfo
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- CN213827594U CN213827594U CN202022613654.5U CN202022613654U CN213827594U CN 213827594 U CN213827594 U CN 213827594U CN 202022613654 U CN202022613654 U CN 202022613654U CN 213827594 U CN213827594 U CN 213827594U
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Abstract
The utility model relates to the laser processing field, in particular to a laser light path polarization detection device and an automatic correction device; the laser light path polarization detection device comprises a laser, a light path adjusting component, a light beam sampling mirror, a detection light focusing lens, a ccd module, a focusing objective lens and an objective table; the design detects and corrects the collimation of the light beam by arranging at least two light beam sampling mirrors on the detection light path and adapting to a corresponding ccd module and a light path adjusting component; the utility model discloses a set up two at least light beam sampling mirrors and carry out the multiple spot real-time supervision to the core optical axis, judge through the feedback of ccd module whether the light beam is collimated and drive the light path adjustment component and revise the light beam and ensure the beam excursion situation of two at least observation points, guarantee the light beam collimation nature; the sequential actuation of at least two light path adjusting components is realized by setting the pixel difference of at least two ccd modules, the collimation of the light path is ensured, and the correction accuracy is improved.
Description
Technical Field
The utility model relates to a laser beam machining field, in particular to laser light path analyzer and automatic correction device.
Background
Laser processing is carried out by focusing the energy of light through a lens to achieve high energy density at a focus and relying on the photothermal effect. Compared with the traditional processing technology, the laser processing technology has the advantages of less material waste, obvious cost effect in large-scale production, strong adaptability to processing objects and the like. With the continuous and deep research of laser processing technology, equipment and process, the method has wider application prospect.
CN103170728B, entitled "laser processing apparatus", 2016, 3, 2, discloses a laser processing apparatus having a function of correcting a deviation in an irradiation position of a laser beam oscillated by a laser beam oscillator. The laser processing device comprises a chuck workbench, a laser ray irradiation component and a processing feeding component, wherein the laser ray irradiation component comprises: a laser beam oscillator that oscillates a laser beam; a condenser having a condenser lens for condensing the laser beam and irradiating the laser beam to the workpiece; a light path adjusting member disposed between the laser beam oscillator and the condenser, for adjusting a light path of the laser beam; a reflector that reflects the laser light toward the condenser; a detection light condensing lens for condensing a small amount of detection light transmitted through the reflecting mirror; an imaging means for imaging a light spot of the detection light; and a control member for determining the offset amount and direction of the light spot of the detection light relative to the proper position, and controlling the light path adjusting member according to the offset amount and direction to position the light spot at the proper position.
However, the problem of poor light collimation of the light adjusted by the polarization detection and correction device of the laser processing device affects the positioning accuracy, and the light path cannot be adjusted to a state before calibration by working through a single correction device, so that the collimation of the light path cannot be ensured, and the accuracy is insufficient.
SUMMERY OF THE UTILITY MODEL
Light collimation nature variation can appear in the light after checking partially and correcting device adjustment for solving above-mentioned background art mentions and influence the accurate nature of location, and can't adjust the light path for the state before maring via a single correcting device carries out work, can't guarantee the problem of the correction degree of accuracy, the utility model provides a pair of laser light path checks partially device, including laser instrument, light path adjustment component, light beam sampling mirror, detect light focusing lens, the ccd module, focus objective, objective table.
The light beam emitted by the laser is focused to the objective table through the light beam sampling mirror and the focusing objective lens in sequence by the light path adjusting component;
at least two groups of light beam sampling mirrors are arranged between the light path adjusting component and the focusing objective lens, and each group of light beam sampling mirrors reflects part of light beams to the ccd module through the detection light focusing lens.
Preferably, the light beam emitted by the laser is reflected to the light path adjusting member through a reflection light path; the reflected light path includes at least one set of mirrors.
Preferably, the optical path adjustment member includes a first optical path adjustment member and a second optical path adjustment member which are arranged in this order.
Preferably, the beam sampling mirror comprises a first beam sampling mirror and a second beam sampling mirror which are arranged in sequence;
the first light beam sampling mirror reflects part of light beams to the first ccd module through the first detection light focusing lens;
and the second light beam sampling mirror reflects part of the light beam to the second ccd module through the second detection light focusing lens.
Preferably, a light reduction component is arranged between the beam sampling mirror and the ccd module.
Preferably, the light-reducing member is an attenuation sheet, and the light-reducing member includes a first light-reducing member and a second light-reducing member, which are respectively disposed on the reflection light paths of the first light beam sampling mirror and the second light beam sampling mirror.
Preferably, the reflectivity of the beam sampling mirror is 0.5% -2%.
The utility model also provides an adopt above-mentioned laser light path to examine automatic correction device of partial device, include:
preferably, a driving part is arranged on the optical path adjusting component, and the driving part is in communication connection with the ccd module.
Preferably, the first ccd module and the second ccd module have a pixel difference.
Compared with the prior art, the utility model provides a pair of laser light path analyzer has following advantage: the multi-point real-time monitoring is carried out on the core optical axis by arranging at least two light beam sampling mirrors, whether the light beams are collimated or not is judged through the feedback of the ccd module, and the light path adjusting component is driven to correct the light beams so as to ensure the light beam offset conditions of at least two observation points and ensure the light beam collimation; the sequential actuation of at least two light path adjusting components is realized by setting the pixel difference of at least two ccd modules, the collimation of the light path is ensured, and the correction accuracy is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is the utility model provides a distribution diagram of laser light path analyzer.
Reference numerals:
10. laser 11, reflector 20, and optical path adjusting member
21. First optical path adjustment member 22, second optical path adjustment member 30, and beam sampling mirror
31. First beam sampling mirror 32, second beam sampling mirror 40, focusing objective lens
50. Stage 60, detection light focusing lens 61, first detection light focusing lens
62. Second detection light focusing lens 70, ccd module 71, first ccd module
72. Second ccd module 80, light reduction member 81, first light reduction member
82. Second light-reducing member
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Specific examples are given below.
Referring to fig. 1, a laser optical path analyzer includes a laser 10, an optical path adjusting member 20, a beam sampling mirror 30, a focusing objective lens 40, an objective table 50, a detection light focusing lens 60, and a ccd module 70;
the light beam emitted by the laser 10 is focused to the objective table 50 through the light path adjusting component 20 and the beam sampling mirror 30 and the focusing objective lens 40 in sequence;
at least two groups of light beam sampling mirrors 30 are arranged between the light path adjusting component 20 and the focusing objective lens 40, and each group of light beam sampling mirrors 30 reflects part of light beams to the ccd module 70 through the detection light focusing lens 60; during operation, the light beam sampling mirror 30 carries out multi-point real-time monitoring to the core optical axis, reflects part of the light beam to the ccd module 70 through detecting the light focusing lens 60, judges whether the light beam is collimated or not through the imaging feedback of the ccd module 70, and plays a role in light path deviation detection.
The multi-point real-time monitoring is carried out on the core optical axis by arranging at least two light beam sampling mirrors, whether the light beams are collimated or not is judged through the feedback of the ccd module, and the light path adjusting component is driven to correct the light beams so as to ensure the light beam offset conditions of at least two observation points and ensure the light beam collimation; the sequential actuation of at least two light path adjusting components is realized by setting the pixel difference of at least two ccd modules, the collimation of the light path is ensured, and the correction accuracy is improved. As an embodiment of the present invention, the light beam emitted from the laser 10 is reflected to the light path adjusting member 20 through the reflection light path; preferably, the reflected light path comprises at least one set of mirrors 11; the mirrors 11 are used to change the direction of the light beam emitted by the laser 10, and at least one set of mirrors 11 is used to change the light path to adapt to different devices. As an embodiment of the present invention, the optical path adjusting member 20 includes a first optical path adjusting member 21 and a second optical path adjusting member 22 which are sequentially disposed; the light path adjusting member 20 is used for changing the direction of the light beam to perform an adjusting function, and preferably, the light beam adjusting member 20 is AG-M100D, and can change at least two directions of the light beam.
As an embodiment of the present invention, the light beam sampling mirror 30 includes a first light beam sampling mirror 31 and a second light beam sampling mirror 32, which are sequentially disposed;
the first beam sampling mirror 31 reflects part of the beam to the first ccd module 71 through the first detection light focusing lens 61;
the second beam sampling mirror 32 reflects part of the beam to the second ccd module 72 through the second detection light focusing lens 62; the collimation of the light beam is ensured by detecting two points of the core optical axis.
As an embodiment of the present invention, a light reduction member 80 is disposed between the beam sampling mirror 30 and the ccd module 70; the light reduction member has a function of reducing the intensity of light, and plays a role of protecting the ccd module 70.
As an embodiment of the present invention, the light reduction member 80 is an attenuation sheet, and the light reduction member includes a first light reduction member 81 and a second light reduction member 82, which are respectively disposed on the reflection light paths of the first light beam sampling mirror 31 and the second light beam sampling mirror 32; the plurality of light reduction members 80 are provided in accordance with the number of the ccd modules 70, and function to protect the plurality of the ccd modules 70.
As an embodiment of the present invention, the reflectivity of the light beam sampling mirror 30 is 0.5% -2%, preferably, the reflectivity is 1%; the beam sampling mirror 30 functions to partially reflect the light beam to the ccd module 70 for detection.
The utility model also provides an adopt above-mentioned laser light path to examine automatic correction device of partial device, include:
as an embodiment of the present invention, the optical path adjusting member 20 is provided with a driving member, and the driving member is connected to the ccd module 70 in a communication manner; preferably, the driver is of a type of CONEX-AGAP, and the driver is configured to receive feedback information of the ccd module 70 and drive the optical path adjusting member 20 to perform adjustment according to the information.
As an embodiment of the present invention, there is a pixel difference between the first ccd module 71 and the second ccd module 72; preferably, when any one ccd module 70 is imaged and matched to shift the center, the collected information is fed back to the driving machine to drive the first light path adjusting member 21 after corresponding data processing is performed by the prior art, and then the corresponding data information is fed back to the driving machine to drive the second light path adjusting member 22 by the second ccd module 72 to be repeatedly debugged to adjust the collimation of the light beam, so that the collimation of the light path is ensured and the correction accuracy is improved by sequential actuation of the first light path adjusting member 21 and the second light path adjusting member 22. The control and data transmission feedback involved in the present solution belongs to the prior art, and will not be described herein too much.
After the external optical path is adjusted, the light beam enters a first ccd module 71 and a second ccd module 72 respectively through a first light beam sampling mirror 31 and a second light beam sampling mirror 32 before and after the optical axis to be detected, and the ccd imaging position is finely adjusted to the position where the vision system judges that the state is the center of the center, and then the ccd is fixed; when any one of the ccd modules 70 is imaged and matched to the center and the center is shifted, the first optical path adjusting component 21 is automatically adjusted to the position where the imaging is closest to the center according to the pixel difference, then the second optical path adjusting component 22 is adjusted, the two steps are repeatedly performed until the pixel difference between the imaging and the center is not recognizable, and the light beam is considered to be in a collimation state after the adjustment is finished.
Although terms such as laser, optical path adjusting means, dimming mechanism, beam sampling mirror, detection light focusing lens, ccd module, focusing objective, stage, etc. are used more often herein, the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed in a manner that is inconsistent with the spirit of the invention.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (10)
1. A laser light path polarization analyzing device is characterized in that: the device comprises a laser (10), a light path adjusting component (20), a light beam sampling mirror (30), a focusing objective lens (40), an objective table (50), a detection light focusing lens (60) and a ccd module (70);
the light beam emitted by the laser (10) is focused to the objective table (50) through the light path adjusting component (20) by the light beam sampling mirror (30) and the focusing objective lens (40) in sequence;
at least two groups of light beam sampling mirrors (30) are arranged between the light path adjusting component (20) and the focusing objective lens (40), and each group of light beam sampling mirrors (30) reflects part of light beams to the ccd module (70) through the detection light focusing lens (60).
2. The laser beam path analyzer according to claim 1, wherein: the light beam emitted by the laser (10) is reflected to the light path adjusting component (20) through the reflection light path;
the reflected light path comprises at least one set of mirrors (11).
3. The laser beam path analyzer according to claim 1, wherein: the optical path adjustment member (20) includes a first optical path adjustment member (21) and a second optical path adjustment member (22) which are arranged in this order.
4. The laser beam path analyzer according to claim 1, wherein: the light beam sampling mirror (30) comprises a first light beam sampling mirror (31) and a second light beam sampling mirror (32) which are arranged in sequence;
the first beam sampling mirror (31) reflects part of the beam to a first ccd module (71) through a first detection light focusing lens (61);
the second beam sampling mirror (32) reflects part of the beam to a second ccd module (72) through a second detection light focusing lens (62).
5. The laser beam path analyzer according to claim 1, wherein: and a light reduction component (80) is arranged between the beam sampling mirror (30) and the ccd module (70).
6. The laser beam path analyzer according to claim 5, wherein: the light reduction component (80) is an attenuation sheet, and comprises a first light reduction component (81) and a second light reduction component (82) which are respectively arranged on the reflection light paths of the first light beam sampling mirror (31) and the second light beam sampling mirror (32).
7. The laser beam path analyzer according to claim 1, wherein: the reflectivity of the light beam sampling mirror (30) is 0.5% -2%.
8. The utility model provides a laser light path automatic correction device which characterized in that: the polarization analyzing device of any one of claims 1 to 7 is used.
9. The automatic correction device for laser beam path according to claim 8, characterized in that: and a driving piece is arranged on the light path adjusting component (20), and the driving piece is in communication connection with the ccd module (70).
10. The automatic correction device for laser beam path according to claim 9, characterized in that: the first ccd module (71) and the second ccd module (72) have a pixel difference.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022613654.5U CN213827594U (en) | 2020-11-12 | 2020-11-12 | Laser light path polarization detection device and automatic correction device |
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| CN202022613654.5U CN213827594U (en) | 2020-11-12 | 2020-11-12 | Laser light path polarization detection device and automatic correction device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113751905A (en) * | 2021-10-25 | 2021-12-07 | 吉林建筑科技学院 | Infrared laser spot position detection system and method |
| CN116765643A (en) * | 2023-07-10 | 2023-09-19 | 广州市凯枫智能科技有限公司 | Light beam adjustment and light signal processing method and device based on welding detection light path |
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2020
- 2020-11-12 CN CN202022613654.5U patent/CN213827594U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113751905A (en) * | 2021-10-25 | 2021-12-07 | 吉林建筑科技学院 | Infrared laser spot position detection system and method |
| CN116765643A (en) * | 2023-07-10 | 2023-09-19 | 广州市凯枫智能科技有限公司 | Light beam adjustment and light signal processing method and device based on welding detection light path |
| CN116765643B (en) * | 2023-07-10 | 2024-03-12 | 普希斯(广州)科技股份有限公司 | Light beam adjustment and light signal processing method and device based on welding detection light path |
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Inventor after: Huang Hanjie Inventor after: Yang Linjie Inventor after: Yang Weilin Inventor after: Zhang Xin Inventor after: Wang Can Inventor before: Huang Hanjie Inventor before: Yang Lingjie Inventor before: Fu Le Inventor before: Yang Weilin Inventor before: Zhang Xin Inventor before: Wang Can |