CN213715706U

CN213715706U - Nozzle for developing machine

Info

Publication number: CN213715706U
Application number: CN202023299976.3U
Authority: CN
Inventors: 吴想; 戴文海; 刘惠明
Original assignee: Jiangxi Weiyi Semiconductor Equipment Co ltd
Current assignee: Jiangxi Weiyi Semiconductor Equipment Co ltd
Priority date: 2020-12-31
Filing date: 2020-12-31
Publication date: 2021-07-16
Anticipated expiration: 2030-12-31

Abstract

The utility model relates to a developing machine technical field especially relates to a shower nozzle for developing machine, and it includes the base, fixes locating the fixed nozzle of locating apron one side of apron and several on the base, be equipped with recess and feed liquor through-hole on the base, the recess inside callipers is equipped with the filtration pore board, be equipped with several evenly distributed's outage on the filtration pore board, the opposite side of apron be equipped with the corresponding holding tank of recess, be equipped with on the holding tank with the corresponding liquid outlet of nozzle, the quantity of nozzle are fifteen, have satisfied coverage, have also shortened the time of spouting the developer process, and it is not only the leakproofness strong, and the spray uniformity is good, and the developing effect is strong, and the spray action is simple, and can satisfy the market demand.

Description

Nozzle for developing machine

Technical Field

The utility model relates to a developing machine technical field especially relates to a shower nozzle for developing machine.

Background

In the more important photoetching part of the semiconductor production process, matched glue spreading and developing equipment is required, wherein the process core comprises the processes of glue spreading, exposure, development and the like, and the developing process uniformity plays a decisive role in etching and the subsequent process. However, at present, the exposed chip is developed through a single developing nozzle, developing solution flows into the surface of the rotary chip through the nozzle, and pure water is introduced to wash the product on the surface of the wafer and the residual developing solution, so that the appearance before etching is achieved. The mode and the structure easily cause poor spraying uniformity of the developing solution, poor developing effect and complex spraying action of the chip, and cannot meet market demands.

Disclosure of Invention

In order to overcome the technical defect, the utility model aims at providing a leakproofness is strong, and it is good to spray the homogeneity, and developing effect is strong, sprays the action simply, can satisfy the shower nozzle for the developing machine of market demand.

In order to achieve the purpose, the invention is realized by the following technical scheme:

the utility model provides a shower nozzle for developing machine, includes the base, fixes and locates apron and the fixed nozzle of locating apron one side of several on the base, be equipped with recess and feed liquor through-hole on the base, the recess inside callipers is equipped with the filtration pore board, be equipped with several evenly distributed's outage on the filtration pore board, the opposite side of apron be equipped with the corresponding holding tank of recess, be equipped with on the holding tank with the corresponding liquid outlet of nozzle.

Furthermore, a sealing ring for preventing liquid leakage is fixedly arranged on the outer side wall of the groove.

Furthermore, one side of the filter hole plate is fixedly provided with a limiting block, and a limiting groove used for being matched with the limiting block is formed in the inner side wall of the groove.

Furthermore, the spraying end of the nozzle is downwards fixedly arranged on the cover plate, the nozzle and the mounting surface of the cover plate form a clamping degree B, and the size range of the clamping degree B is 40-50 degrees.

Furthermore, a second mounting hole and a first mounting hole which are used for fixed mounting are respectively and correspondingly arranged on the base and the cover plate.

Furthermore, a second connecting groove and a first connecting groove which are used for fixed connection and installation are respectively and correspondingly arranged on the base and the cover plate.

Furthermore, the base is also provided with positioning holes which are arranged on two sides of the liquid inlet through hole.

Further, the number of the nozzles is fifteen.

To sum up, the utility model has the advantages that: this shower nozzle for developing machine, it includes the base, fixes and locates apron and the fixed nozzle of locating apron one side of several on the base, be equipped with recess and feed liquor through-hole on the base, the recess inside callipers is equipped with the filtration pore board, be equipped with several evenly distributed's outage on the filtration pore board, the opposite side of apron be equipped with the corresponding holding tank of recess, be equipped with on the holding tank with the corresponding liquid outlet of nozzle, the quantity of nozzle are fifteen, have satisfied coverage, have also shortened the time of spouting the developer process, and its not only leakproofness is strong, and it is good to spray the homogeneity, and the developing effect is strong, sprays the action simply, and can satisfy the market demand.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of the present invention;

fig. 2 is an exploded view of an embodiment of the present invention;

FIG. 3 is a schematic front view of FIG. 1;

FIG. 4 is a schematic cross-sectional view taken along line A-A of FIG. 3;

fig. 5 is a schematic structural diagram of a base according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a cover plate according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a filter plate according to an embodiment of the present invention;

the liquid inlet device comprises a base 1, a base 2, a cover plate 3, a nozzle 4, a liquid inlet through hole 5, a groove 6, a filter plate 7, a sealing ring 8, a liquid discharge hole 9, a limiting block 10, a containing groove 11, a liquid outlet 12, a limiting groove 13, a first connecting groove 14, a second connecting groove 15, a first mounting hole 16, a second mounting hole 17 and a positioning hole.

Detailed Description

The invention will be further described with reference to the accompanying drawings and the following detailed description:

as shown in fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6 and fig. 7, a shower nozzle for developing machine, including base 1, fixed locating apron 2 and several on the base 1 are fixed and are located the nozzle 3 of 2 one sides of apron, be equipped with recess 5 and feed liquor through-hole 4 on the base 1, the recess 5 inside callipers is equipped with filter plate 6, be equipped with several evenly distributed's outage 8 on filter plate 6, the opposite side of apron 2 be equipped with the corresponding holding tank 10 of recess 5, be equipped with on the holding tank 10 with the corresponding liquid outlet 11 of nozzle 3. The housing groove 10 is a triangular groove in the cover plate 2, which facilitates the ejection of the developer from the nozzle 3.

Wherein, a sealing ring 7 for preventing liquid leakage is fixedly arranged on the outer side wall of the groove 5. Thereby improving the sealing performance of the nozzle for the developing machine.

Wherein, one side of the filter orifice plate 6 is fixedly provided with a limiting block 9, and the inner side wall of the groove 5 is provided with a limiting groove 12 used for matching the limiting block 9. The filter plate 6 is clamped in the limit groove 12 through the limit block 9 so as to be fixed in the groove 5.

The spraying end of the nozzle 3 is downwards fixedly arranged on the cover plate 2, the nozzle 3 and the mounting surface of the cover plate 2 form a clamping degree B, and the size range of the clamping degree B is 40-50 degrees. The spraying end is inclined downwards by 40-50 degrees, so that the developing solution can be conveniently sprayed out.

The base 1 and the cover plate 2 are respectively and correspondingly provided with a second mounting hole 16 and a first mounting hole 15 for fixed mounting. The second mounting hole 16 and the first mounting hole 15 are correspondingly arranged, so that the base 1 and the cover plate 2 can be fixedly mounted conveniently.

Wherein, the base 1 and the cover plate 2 are respectively and correspondingly provided with a second connecting groove 14 and a first connecting groove 13 for fixed connection and installation. The second connecting groove 14 and the first connecting groove 13 are correspondingly arranged, so that the fixed connection and installation of the base 1 and the cover plate 2 are facilitated.

And the base 1 is also provided with positioning holes 17, and the positioning holes 17 are arranged on two sides of the liquid inlet through hole 4. The positioning hole 17 is used for fixedly mounting a connection pipe for supplying the developing solution.

Wherein the number of the nozzles 3 is fifteen. It satisfies the coverage and shortens the time of the developing solution spraying process.

During the operation use, the developer solution carries out

base

1 and 2 recess 5 of apron through inlet liquid through-hole 4 through the connecting pipe in, the developer solution again respectively through the flowing back hole 8 on the filtration pore plate 6 flow in be triangular holding tank 10 in, again through the liquid outlet 11 spout to the chip in from nozzle 3 can.

In conclusion, the novel developing device has the advantages of being high in sealing performance, good in spraying uniformity, high in developing effect, simple in spraying action and capable of meeting market requirements.

Various other changes and modifications to the above embodiments and concepts will become apparent to those skilled in the art, and all such changes and modifications are intended to be included within the scope of the present invention as defined in the appended claims.

Claims

1. The utility model provides a shower nozzle for developing machine, includes base (1), fixes locating apron (2) and several on base (1) are fixed locates nozzle (3) of apron (2) one side, its characterized in that: be equipped with recess (5) and feed liquor through-hole (4) on base (1), recess (5) inside callipers are equipped with filter plate (6), be equipped with several evenly distributed's outage (8) on filter plate (6), the opposite side of apron (2) be equipped with corresponding holding tank (10) of recess (5), be equipped with on holding tank (10) with corresponding liquid outlet (11) of nozzle (3).

2. The head for a developing machine according to claim 1, characterized in that: and a sealing ring (7) for preventing liquid leakage is fixedly arranged on the outer side wall of the groove (5).

3. The head for a developing machine according to claim 1, characterized in that: one side of the filter hole plate (6) is fixedly provided with a limiting block (9), and a limiting groove (12) used for being matched with the limiting block (9) is formed in the inner side wall of the groove (5).

4. The head for a developing machine according to claim 1, characterized in that: the spray end of the nozzle (3) is downwards fixedly arranged on the cover plate (2), the nozzle (3) and the mounting surface of the cover plate (2) form a clamping degree B, and the size range of the clamping degree B is 40-50 degrees.

5. The head for a developing machine according to claim 1, characterized in that: and a second mounting hole (16) and a first mounting hole (15) which are used for fixed mounting are respectively and correspondingly arranged on the base (1) and the cover plate (2).

6. The head for a developing machine according to claim 1, characterized in that: and a second connecting groove (14) and a first connecting groove (13) which are used for fixed connection and installation are respectively and correspondingly arranged on the base (1) and the cover plate (2).

7. The head for a developing machine according to claim 1, characterized in that: still be equipped with locating hole (17) on base (1), locating hole (17) are located the both sides of feed liquor through-hole (4).

8. The head for a developing machine according to claim 1, characterized in that: the number of the nozzles (3) is fifteen.