CN213459669U - Graphite sheet assembly and graphite boat - Google Patents
Graphite sheet assembly and graphite boat Download PDFInfo
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- CN213459669U CN213459669U CN202021974138.9U CN202021974138U CN213459669U CN 213459669 U CN213459669 U CN 213459669U CN 202021974138 U CN202021974138 U CN 202021974138U CN 213459669 U CN213459669 U CN 213459669U
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- graphite sheet
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a graphite flake subassembly and graphite boat, wherein, this graphite flake subassembly includes the graphite flake body, has the space of placing that is used for placing the silicon chip on the graphite flake body, is provided with the stuck point group on the graphite flake body, and the stuck point group is used for supporting and fixes a position the silicon chip, and the stuck point group includes a plurality of stuck points and includes at least: the first clamping point is arranged on one side of the left and right directions of the placing space; the second clamping point is arranged on the other side of the left and right directions of the placing space and is higher than the first clamping point in the up and down directions; the third clamping point is arranged at the lower part of the placing space and is positioned at one side close to the first clamping point in the left-right direction; and the fourth clamping point is arranged at the lower part of the placing space, is positioned at one side close to the second clamping point in the left-right direction, and is lower than the third clamping point in the up-down direction. According to the graphite sheet assembly of the embodiment, the silicon sheet can be firmly supported and positioned, the silicon sheet can be prevented from falling from the graphite boat, and the silicon sheet is prevented from being plated around to at least a certain extent.
Description
Technical Field
The utility model relates to a solar wafer makes technical field, in particular to graphite flake subassembly and graphite boat.
Background
In the manufacturing process of the solar cell, the silicon wafer surface is plated with the antireflection film, which is an important part in the manufacturing process of the solar cell, and the graphite boat is used as a carrier of the PECVD process and is widely applied in the photovoltaic industry. With the development of the photovoltaic industry, the source silicon wafer is gradually standardized and flaked. However, when the silicon wafer is processed in a known graphite boat as the silicon wafer is made larger and thinner, the silicon wafer may be dropped from the graphite boat due to the carrying of the graphite boat, the warping of the silicon wafer by heating, or the like. In addition, defects in the process such as plating tend to occur due to thermal deformation of the silicon wafer.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to at least one of the problems of the known art. Therefore, the utility model provides a graphite flake subassembly can prevent that the silicon chip from falling the piece from the graphite boat to and prevent to a certain extent at least that the silicon chip from around plating. Furthermore, the utility model discloses graphite boat that has this graphite flake subassembly has still been provided.
According to the utility model discloses graphite flake subassembly of first aspect embodiment, including the graphite flake body, the last space of placing that is used for placing the silicon chip that has of graphite flake body, be provided with the stuck point group on the graphite flake body, the stuck point group is used for supporting and fixing a position the silicon chip, the stuck point group includes at least: the first clamping point is arranged on one side of the placing space in the left-right direction; the second clamping point is arranged on the other side of the placing space in the left-right direction and is higher than the first clamping point in the up-down direction; the third clamping point is arranged at the lower part of the placing space and is positioned at one side close to the first clamping point in the left-right direction; and the fourth clamping point is arranged at the lower part of the placing space, is positioned at one side close to the second clamping point in the left-right direction, and is lower than the third clamping point in the up-down direction.
The graphite sheet assembly according to the embodiment has at least the following advantages: the clamping point group is arranged at the lower part of the placing space for placing the silicon wafer, and is provided with the third clamping point and the fourth clamping point, and the fourth clamping point is lower than the third clamping point in the vertical direction, so that the silicon wafer can be firmly supported and positioned, and the silicon wafer can be prevented from falling from the graphite boat. In addition, because the contact area of the silicon wafer is increased, the silicon wafer can be attached to the clamping point more effectively, and therefore the silicon wafer can be prevented from warping due to heating to generate winding plating during process coating at least to a certain extent.
In some embodiments, the set of clamping points further includes a fifth clamping point, and the fifth clamping point is arranged on the other side of the placing space in the left-right direction and is higher than the second clamping point in the up-down direction.
In some embodiments, the set of checkpoints includes 4 to 8 checkpoints.
In some embodiments, the graphite sheet body is provided with a plurality of positioning grooves, and the fastening points of the fastening point group are respectively embedded into the positioning grooves.
In some embodiments, the holding space and the clamping point group are disposed on both sides of the graphite sheet body in the thickness direction.
In some embodiments, the graphite sheet body is provided with a cavity at the placing space.
In some embodiments, the placement space and the clamping point group are respectively provided in plurality in the left-right direction of the graphite sheet body.
According to the utility model discloses graphite boat of second aspect embodiment includes: a plurality of the graphite sheet assemblies described above, the graphite sheet assemblies being arranged at intervals along the thickness direction of the graphite sheet body; and the first connecting pieces are respectively connected with the graphite sheet assemblies along the thickness direction of the graphite sheet body.
The graphite boat according to the embodiment has at least the following beneficial effects: the graphite sheet assemblies forming the graphite boat are respectively provided with a third clamping point and a fourth clamping point at the lower part of the placing space for placing the silicon sheet, and the fourth clamping point is lower than the third clamping point in the vertical direction, so that the silicon sheet can be firmly supported and positioned, and the silicon sheet can be prevented from falling from the graphite boat.
In some embodiments, the spacing between adjacent two of the graphite sheet assemblies ranges from 10mm to 14 mm.
In some embodiments, the graphite sheet assembly further comprises a plurality of adjusting pieces, wherein the adjusting pieces are respectively arranged between two adjacent graphite sheet assemblies, and the distance between two adjacent graphite sheet assemblies is adjusted.
Drawings
Fig. 1 is a front view of an embodiment of a graphite sheet assembly in accordance with an embodiment of the first aspect of the present invention.
Fig. 2 is a partially enlarged view of a point a in fig. 1.
Fig. 3 is a sectional view at B-B in fig. 2.
Fig. 4 is a plan view of a graphite boat according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, a plurality of means are one or more, a plurality of means are two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.
Fig. 1 is a front view of a graphite sheet assembly 100, fig. 2 is a partial enlarged view of a point a in fig. 1, in fig. 1 and 2, in order to distinguish the graphite sheet assembly 100 from a silicon wafer 102, a silicon wafer 102 is represented by a dotted line, referring to fig. 1 and 2, the graphite sheet assembly 100 according to the embodiment of the first aspect of the present invention includes a graphite sheet body 101, a placing space 103 for placing the silicon wafer 102 is provided on the graphite sheet body 101, a clamping point group 104 is provided on the graphite sheet body 101, the clamping point group 104 is used for supporting and positioning the silicon wafer 102, and the clamping point group 104 at least includes: a first click 105, a second click 106, a third click 107 and a fourth click 108, wherein the first click 105 is disposed on one side (for example, the left side) in the left-right direction of the placing space 103; the second stuck point 106 is disposed on the other side (for example, the right side) in the left-right direction of the placing space 103, and the second stuck point 106 is higher than the first stuck point 105 in the up-down direction; the third click 107 is provided in the lower part of the placing space 103 and is located on a side (e.g., left side) close to the first click 105 in the left-right direction; the fourth click 108 is disposed at a lower portion of the placement space 103, on a side close to the second click 106 in the left-right direction, and lower than the third click 107 in the up-down direction.
In the present embodiment, since the third chuck 107 and the fourth chuck 108 are provided in the chuck group 104 at the lower portion of the placing space 103 for placing the silicon wafer 102, and the fourth chuck 108 is lower than the third chuck 107 in the vertical direction, the silicon wafer 102 can be firmly supported and positioned, and the silicon wafer 102 can be prevented from falling off the graphite boat 200 (see fig. 4, below).
Specifically, the first chuck 105, the second chuck 106, and the third chuck 107 may be configured as a main chuck, the fourth chuck 108 may be configured as an auxiliary chuck, and the fourth chuck 108 is lower than the third chuck 107 in the vertical direction, so that when a robot (not shown) inserts the silicon wafer 102, the silicon wafer 102 is inserted into the placing space 103 in the vertical direction and the silicon wafer 102 rotates in the placing space 103, whereby the lower portion of the silicon wafer 102 is supported by at least two chucks (the third chuck 107 and the fourth chuck 108), and the silicon wafer 102, particularly the silicon wafer 102 having a large size (for example, 156mm to 230mm) can be prevented from being dropped due to the transportation of the graphite boat 200 or the warping of the silicon wafer 102 due to heating. Further, since the silicon wafer 102 is thin and is easily heated and warped during heating, by providing the main clamping point structure and the auxiliary clamping point structure, the contact area of the silicon wafer 102 can be increased, so that the silicon wafer 102 can be more effectively attached to the clamping points, and even if the silicon wafer 102 is large in size, the silicon wafer 102 can be prevented from warping due to heating to generate the wraparound plating during process film plating to at least a certain extent.
It is conceivable that the placement space 103 of the graphite sheet body 101 for placing the silicon wafer 102 is provided, for example, on one side in the thickness direction of the graphite sheet body 101, and the placement space 103 and the silicon wafer 102 are shaped to be a substantially U-shaped space with an upward opening defined by the chucking point group 104.
It is conceivable that, in the present embodiment, the longitudinal direction of the graphite sheet body 101 may be taken as the left-right direction.
It is contemplated that the first stuck point 105 may be disposed at a position lower than the middle of the up-down direction of the placing space 103 such that the first stuck point 105 is located at a position lower than the middle of the up-down direction of the silicon wafer 102 with respect to the silicon wafer 102 after the silicon wafer 102 is placed in the placing space 103. In contrast, the second stuck point 106 may be disposed at a position that is above the middle in the up-down direction of the placing space 103, so that the second stuck point 106 is located at a position that is above the middle in the up-down direction of the silicon wafer 102 with respect to the silicon wafer 102 after the silicon wafer 102 is placed in the placing space 103. This makes it possible to ensure that the lower portion of the silicon wafer 102 can abut against the third chuck 107 and the fourth chuck 108, which is an auxiliary chuck, by slightly inclining the silicon wafer 102 in the vertical direction (for example, slightly inclining the silicon wafer in the clockwise direction in fig. 2) after the silicon wafer 102 is placed in the placement space 103.
It is conceivable that the third stuck point 107 may be disposed at a side close to the first stuck point 105 in the left-right direction because the fourth stuck point 108 is disposed, so that the third stuck point 107 is located at a side in the left-right direction of the lower portion of the silicon wafer 102 with respect to the silicon wafer 102 after the silicon wafer 102 is placed in the placing space 103. Likewise, the fourth stuck point 108 may be disposed at a lower portion of the placing space 103 and at one side close to the third stuck point 107 in the left-right direction, so that the fourth stuck point 108 is located at the other side in the left-right direction of the lower portion of the silicon wafer 102 with respect to the silicon wafer 102 after the silicon wafer 102 is placed in the placing space 103. Therefore, the silicon wafers 102 are not easy to fall off during the movement of the graphite boat 200 and are not easy to warp and deform during the heating process.
In some embodiments, a line connecting the third checkpoint 107 and the fourth checkpoint 108 forms an angle R of, for example, 2 ° to 4 °, and further, for example, 3 °, with respect to the left-right direction of the graphite sheet.
In some embodiments, in order to accommodate the large-sized silicon wafer 102, the set of clamping points 104 further includes a fifth clamping point 109, and the fifth clamping point 109 is disposed on the other side (the right side in fig. 2) of the placing space 103 in the left-right direction and is higher than the second clamping point 106 in the up-down direction. Specifically, the fifth chuck 109 is disposed on the same side as the second chuck 106, and is shifted in the left-right direction with respect to the second chuck 106 in a direction away from the placing space 103 in addition to being higher than the second chuck 106 in the up-down direction, whereby the silicon wafer 102 and the fifth chuck 109 can be prevented from interfering with each other when the silicon wafer 102 is inserted into the placing space 103 by the robot. Further, the robot can be prevented from colliding with the fifth stuck point 109.
In some embodiments, to accommodate different specifications of silicon wafers 102, the set of checkpoints 104 includes 4 to 8 checkpoints. For example, the set of stuck points 104 may further include a sixth stuck point (not shown) disposed on one side of the first stuck point 105 and above the first stuck point 105. Alternatively, the dot group 104 may further include a seventh dot (not shown) and the like disposed between the left and right directions of the third dot 107 and the fourth dot 108.
Further, among the plurality of dots of the dot group 104, for example, the first dot 105, the second dot 106, and the third dot 107 may be set at a predetermined position on the graphite sheet body 101 as a main dot, and the fourth dot 108 or other dots may be set adaptively according to the silicon wafers 102 of different specifications, for example, the position of the fourth dot 108 in the vertical direction or the position in the horizontal direction with respect to the third dot 107 may be adjusted as an auxiliary dot.
Fig. 3 is a cross-sectional view taken along line B-B in fig. 2, referring to fig. 3 and with additional reference to fig. 2, in some embodiments, in order to easily install the clip points and precisely locate the installation positions of the clip points, a plurality of locating slots 110 are provided on the graphite sheet body 101, and the clip points (the first clip point 105, the second clip point 106, the third clip point 107, the fourth clip point 108, etc.) of the clip point set 104 are respectively inserted into the locating slots 110. Specifically, the positioning groove 110 can be formed in the graphite sheet body 101 in advance according to the position and the number of the clamping points to be set.
In some embodiments, the holding space 103 and the clamping point group 104 are disposed on both sides of the graphite sheet body 101 in the thickness direction. Specifically, the click (the third click 107 in fig. 3) may be provided in an axially symmetrical structure, an axial shaft 111 of the click is fitted into the positioning groove 110, a first locking portion 112 and a second locking portion 113 are provided at both axial ends of the click, respectively, and the first locking portion 112 and the second locking portion 113 are exposed on both side surfaces of the graphite sheet body 101 in the thickness direction, respectively, whereby the silicon wafer 102 can be supported on both side surfaces of the graphite sheet body 101 in the thickness direction.
In some embodiments, the graphite sheet body 101 is provided with a cavity 114 at the placement space 103, and the surface of the silicon wafer 102 is coated. Specifically, the cavity portion 114 may be adapted according to the size of the silicon wafer 102 as long as the surface of the silicon wafer 102 can be sufficiently coated.
In some embodiments, in order to improve the loading capacity of the graphite boat 200, the placing space 103 and the chucking point group 104 are provided in plurality in the left-right direction of the graphite sheet body 101. Specifically, the plurality of clamping point groups 104 may be arranged along the length direction of the graphite sheet body 101, so as to form a plurality of groups of placing spaces 103 for placing a plurality of silicon wafers 102.
Fig. 4 is a plan view of a graphite boat, and referring to fig. 4, the graphite sheet assembly 100 of the above embodiment can be used in the graphite boat 200, and specifically, the graphite boat 200 according to the embodiment of the present invention includes: a plurality of the above-described graphite sheet assemblies 100 and a first connecting member 201 connecting the graphite sheet assemblies 100, wherein the graphite sheet assemblies 100 are arranged at intervals in a thickness direction of the graphite sheet body 101; the first connecting members 201 connect the graphite sheet assemblies 100, respectively, in the thickness direction of the graphite sheet body 101.
In the present embodiment, since the graphite sheet assemblies 100 constituting the graphite boat 200 are respectively provided with the third clamping point 107 and the fourth clamping point 108 at the lower portion of the placing space 103 for placing the silicon wafer 102, and the fourth clamping point 108 is lower than the third clamping point 107 in the vertical direction, the silicon wafer 102 can be firmly supported and positioned, and the silicon wafer 102 can be prevented from falling off the graphite boat 200.
In some embodiments, the first connector 201 may be, for example, a ceramic tube, and correspondingly, the graphite sheet body 101 is provided with a plurality of mounting holes 115 for allowing the ceramic tube to pass through.
In some embodiments, the spacing between adjacent graphite sheet assemblies 100 is in the range of 10mm to 14mm for easy insertion of the silicon sheet 102 by a robot or operator. In some embodiments, a plurality of adjusting members 202 are further included, and the adjusting members 202 are respectively disposed between two adjacent graphite sheet assemblies 100 to adjust the distance between the two adjacent graphite sheet assemblies 100. Specifically, for example, the adjustment member 202 may be provided in a ring shape or a block shape, and fitted over the ceramic pipe as the first connection member 201. Further, the length of the adjuster 202 may be set to one of the dimensions, for example, 10mm to 14mm, for example, 13 mm. Thus, different lengths of the adjustment member 202 can be used as desired, thereby adjusting the distance between the graphite sheet assemblies 100.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (9)
1. Graphite flake subassembly, including the graphite flake body, the graphite flake body is last to have the space of placing that is used for placing the silicon chip, its characterized in that, be provided with the stuck point group on the graphite flake body, the stuck point group is used for supporting and location the silicon chip, the stuck point group includes at least:
the first clamping point is arranged on one side of the placing space in the left-right direction;
the second clamping point is arranged on the other side of the placing space in the left-right direction and is higher than the first clamping point in the up-down direction;
the third clamping point is arranged at the lower part of the placing space and is positioned at one side close to the first clamping point in the left-right direction;
the fourth clamping point is arranged at the lower part of the placing space, is positioned at one side close to the second clamping point in the left-right direction, and is lower than the third clamping point in the up-down direction;
the graphite flake body is provided with a plurality of positioning grooves, and the clamping points of the clamping point group are respectively embedded into the positioning grooves.
2. The graphite sheet assembly of claim 1, wherein the set of clamping points further includes a fifth clamping point disposed on the other side of the placing space in the left-right direction and higher than the second clamping point in the up-down direction.
3. The graphite sheet assembly of claim 1, wherein the set of checkpoints includes 4 to 8 checkpoints.
4. The graphite sheet assembly according to claim 1, wherein the holding space and the set of locking points are provided on both sides in a thickness direction of the graphite sheet body.
5. The graphite sheet assembly according to claim 1, wherein the graphite sheet body is opened with a cavity at the housing space.
6. The graphite sheet assembly according to any one of claims 1 to 5, wherein the placement space and the chucking point group are provided in plurality in the left-right direction of the graphite sheet body, respectively.
7. Graphite boat, its characterized in that includes:
a plurality of graphite sheet assemblies according to any one of claims 1 to 6, the graphite sheet assemblies being arranged at intervals in the thickness direction of the graphite sheet body;
and the first connecting pieces are respectively connected with the graphite sheet assemblies along the thickness direction of the graphite sheet body.
8. The graphite boat of claim 7, wherein the spacing between adjacent two of said graphite sheet assemblies is in the range of 10mm to 14 mm.
9. The graphite boat according to claim 8, further comprising a plurality of adjusting members respectively disposed between two adjacent graphite sheet assemblies for adjusting a distance between the two adjacent graphite sheet assemblies.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021974138.9U CN213459669U (en) | 2020-09-10 | 2020-09-10 | Graphite sheet assembly and graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021974138.9U CN213459669U (en) | 2020-09-10 | 2020-09-10 | Graphite sheet assembly and graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213459669U true CN213459669U (en) | 2021-06-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021974138.9U Active CN213459669U (en) | 2020-09-10 | 2020-09-10 | Graphite sheet assembly and graphite boat |
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|---|---|
| CN (1) | CN213459669U (en) |
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- 2020-09-10 CN CN202021974138.9U patent/CN213459669U/en active Active
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