CN213424942U - Novel wafer cleaning workbench - Google Patents
Novel wafer cleaning workbench Download PDFInfo
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- CN213424942U CN213424942U CN202022915683.7U CN202022915683U CN213424942U CN 213424942 U CN213424942 U CN 213424942U CN 202022915683 U CN202022915683 U CN 202022915683U CN 213424942 U CN213424942 U CN 213424942U
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- workbench
- gear
- auxiliary wheel
- connecting rod
- water outlet
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Abstract
The utility model discloses a novel wafer cleaning workbench, which comprises a workbench, wherein the surface center of the workbench is provided with a placing table, the surface center of the placing table is provided with a second rotating shaft, the outer part of the second rotating shaft is provided with a sucker, the outer part of the placing table is provided with a fixing clamp distributed in the circumferential direction, the outer part of the fixing clamp is provided with a water receiving groove, the inner side wall of the workbench is rotatably connected with a water outlet rod, the surface of the workbench is symmetrically provided with a baffle plate, the edge of the water receiving groove is provided with a guide groove, the inner side wall of the workbench is positioned at the opposite side of the water outlet rod and is rotatably connected with an air outlet rod, the output end of a motor is provided with a first connecting rod, the surface of the first connecting rod is provided with a first auxiliary wheel and a second auxiliary wheel, the surface of the first auxiliary wheel is meshed with a first gear, the surface of the second auxiliary wheel is meshed with a second gear, and simultaneously, the first, the surface of the wafer is ensured to be cleaned more thoroughly, and the service life of the wafer is greatly prolonged.
Description
Technical Field
The utility model relates to a wafer cleaning equipment technical field, concrete field is a novel wafer cleaning workbench.
Background
A wafer refers to a substrate (also called a substrate) from which semiconductor transistors or integrated circuits are fabricated. Since it is a crystalline material, it is called a wafer because it is circular in shape. The substrate material of the wafer comprises silicon, germanium and the like, the silicon is most commonly used, if the crystal material is not particularly indicated, the silicon wafer is commonly used, the surface of the earth crust is provided with inexhaustible silicon dioxide, silicon dioxide ore is refined by an electric arc furnace, hydrochloric acid is used for chlorination, and the silicon dioxide ore is distilled to prepare high-purity polycrystalline silicon.
At present, when the existing wafer cleaning machine is used and cleaned, the surface of a wafer cannot be accurately cleaned well, the time spent on the surface of the wafer is short, chemical substances are remained on the surface, and the cleaning is not thorough, so that the novel wafer cleaning workbench is particularly important.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a novel wafer cleaning work platform to current wafer cleaning machine who proposes in solving above-mentioned background art is when using, when wasing, can not accurate washing wafer surface, and the time that stops on wafer surface is shorter, has chemical to remain on the surface, leads to abluent not thorough problem.
In order to achieve the above object, the utility model provides a following technical scheme: a novel wafer cleaning workbench comprises a workbench, wherein a first rotating shaft is arranged on the rear surface of the workbench, a cover plate is fixedly connected to the upper surface of the workbench through the first rotating shaft, a placing table is arranged at the surface center of the workbench, a second rotating shaft is arranged at the surface center of the placing table, a sucker is arranged outside the second rotating shaft, a fixing clamp is circumferentially distributed outside the placing table, a water receiving groove is formed in the outer portion of the fixing clamp, a water outlet rod is rotatably connected to the inner side wall of the workbench, baffles are symmetrically arranged on the surface of the workbench, guide grooves are formed in the edges of the water receiving groove, an air outlet rod is rotatably connected to the inner side wall of the workbench and positioned on the opposite side of the water outlet rod, a motor is arranged inside the workbench, a first connecting rod is arranged at the output end of the motor, a first auxiliary wheel and a second auxiliary wheel are arranged on the surface of the first connecting rod, a first gear is meshed with the surface of the first, the surface of the second auxiliary wheel is engaged with a second gear, a second connecting rod is arranged between the first gear and the second gear, the second connecting rod is connected with the water outlet rod, and a water outlet is formed in the outer side wall of the workbench.
Preferably, the first gear, the second connecting rod and the water outlet rod are of an integrated structure.
Preferably, the first gear surface is provided with first gear teeth, the second gear surface is provided with second gear teeth, and the first gear teeth and the second gear teeth are arranged in a staggered mode.
Preferably, the diameter of the first gear tooth is smaller than the diameter of the second gear tooth.
Compared with the prior art, the beneficial effects of the utility model are that: a novel wafer cleaning workbench has the following advantages:
the utility model discloses, through external controller starter motor, drive the first auxiliary wheel and the second auxiliary wheel rotation on second connecting rod surface, drive first gear and second gear motion to drive out the water pole and do the circulation swing on the wafer surface, guarantee abluent more thoroughly, can prolong the cleaner through the cooperation of first gear and second gear simultaneously and stop the time on the wafer surface, guarantee wafer surface cleaning more thoroughly, prolong the life of wafer greatly.
Drawings
Fig. 1 is a schematic top view of the present invention;
FIG. 2 is a schematic structural view of the connection between the motor and the water outlet rod of the present invention;
fig. 3 is a schematic structural diagram of the first gear of the present invention;
fig. 4 is a schematic structural diagram of the second gear of the present invention.
In the figure: 1-workbench, 2-first rotating shaft, 3-cover plate, 4-placing table, 5-second rotating shaft, 6-sucker, 7-fixing clamp, 8-water receiving tank, 9-water outlet rod, 10-baffle, 11-guide groove, 12-air outlet rod, 13-motor, 14-first connecting rod, 15-first auxiliary wheel, 16-second auxiliary wheel, 17-first gear, 18-second gear, 19-second connecting rod, 20-water outlet, 21-first gear tooth and 22-second gear tooth.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a novel wafer cleaning workbench 1 comprises a workbench 1, wherein a first rotating shaft 2 is arranged on the rear surface of the workbench 1, a cover plate 3 is fixedly connected on the upper surface of the workbench 1 through the first rotating shaft 2, a placing table 4 is arranged at the surface center of the workbench 1, a second rotating shaft 5 is arranged at the surface center of the placing table 4, a motor corresponding to the second rotating shaft 5 is arranged inside the workbench 1, a sucking disc 6 is arranged outside the second rotating shaft 5, fixing clamps 7 are circumferentially distributed outside the placing table 4, a water receiving groove 8 is arranged outside the fixing clamps 7, a water outlet rod 9 is rotatably connected on the inner side wall of the workbench 1, the water outlet rod 9 is connected with an external water source, a baffle plate 10 is symmetrically arranged on the surface of the workbench 1, the baffle plate 10 is set for limiting the movement of the water outlet rod 9, a guide groove 11 is arranged at the edge of the water receiving groove 8, guide slot 11 is used for accepting unnecessary sanitizer, prevents the sanitizer 1 inside wall of workstation just is located the offside rotation of water outlet rod 9 and is connected with out gas pole 12, the inside of workstation 1 is equipped with motor 13, the output of motor 13 is equipped with first connecting rod 14, first connecting rod 14 surface is equipped with first assistance and second auxiliary wheel 16, the meshing of first auxiliary wheel 15 surface has first gear 17, the meshing of second auxiliary wheel 16 surface has second gear 18, be equipped with second connecting rod 19 between first gear 17 and the second gear 18, second connecting rod 19 and water outlet rod 9 are connected, the lateral wall of workstation 1 is equipped with delivery port 20.
The control mode of the present application is automatically controlled by a controller, the control circuit of the controller can be realized by simple programming by those skilled in the art, and the present application is common knowledge in the field, and the present application mainly protects the mechanical device, so the control mode and the circuit connection are not explained in detail in the present application.
Specifically, the first gear 17, the second gear 18, the second link 19 and the water outlet rod 9 are integrated, so that the water outlet rod 9 can rotate circularly.
Specifically, the surface of the first gear 17 is provided with first gear teeth 21, the surface of the second gear 18 is provided with second gear teeth 22, and the first gear teeth 21 and the second gear teeth 22 are staggered, so that the rotation speed of the water outlet rod 9 when moving to the upper surface of the wafer is lower than the movement of the water outlet rod when moving away from the surface of the wafer, and the effective cleaning of the wafer is ensured.
Specifically, the diameter of the first gear tooth 21 is smaller than that of the second gear tooth 22, so that the residence time of the water outlet rod 9 on the surface of the wafer is prolonged, and the cleanliness of the surface of the wafer is improved.
The working principle is as follows: when in use, the cover plate 3 is rotated through the first rotating shaft 2 to place the wafer on the surface of the placing table 4, then the wafer is adsorbed by the sucker 6 and clamped by the fixing clamp 7, then the second rotating shaft 5 is driven by an external controller to rotate the wafer, then the motor 13 is started to drive the first auxiliary wheel 15 and the second auxiliary wheel 16 on the surface of the second connecting rod 19 to rotate, meanwhile, the first gear 21 and the second gear 22 are meshed to drive the first gear 17 and the second gear 18 to rotate, the water outlet rod 9 rotates, the diameters of the first gear 21 and the second gear 22 are different and are staggered, the speed of the water outlet rod 9 moving to the surface of the wafer is reduced, meanwhile, when the water outlet rod 9 touches the baffle, the rotating direction is switched, when the water outlet rod 9 is far away from the surface of the wafer, the redundant liquid for cleaning the surface of the wafer is collected through the guide groove 11, the liquid in the water receiving groove 8 is discharged from the water outlet 20 through the guide groove 11 and the water receiving groove 8, and then the wafer is dried through the air outlet rod 12, and finally taken out to finish cleaning.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and can include, for example, fixed or removable connections or integral, mechanical or electrical connections or direct or indirect connections via an intermediate medium, communication between two elements, or an interaction between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model discloses the standard part that uses all can purchase from the market, and dysmorphism piece all can be customized according to the description with the record of drawing of description, and the concrete connection mode of each part all adopts conventional means such as ripe bolt, rivet, welding among the prior art, and machinery, part and equipment all adopt prior art, and conventional model, including circuit connection adopts conventional connection mode among the prior art, does not detailed here again.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A novel wafer cleaning workbench comprises a workbench (1), and is characterized in that: the rear surface of the workbench (1) is provided with a first rotating shaft (2), the upper surface of the workbench (1) is fixedly connected with a cover plate (3) through the first rotating shaft (2), the surface center of the workbench (1) is provided with a placing table (4), the surface center of the placing table (4) is provided with a second rotating shaft (5), the outer part of the second rotating shaft (5) is provided with a sucker (6), the outer part of the placing table (4) is provided with a fixing clamp (7) in a circumferential distribution manner, the outer part of the fixing clamp (7) is provided with a water receiving groove (8), the inner side wall of the workbench (1) is rotatably connected with a water outlet rod (9), the surface of the workbench (1) is symmetrically provided with a baffle (10), the edge of the water receiving groove (8) is provided with a guide groove (11), the inner side wall of the workbench (1) and the opposite side of the water outlet rod (9) are rotatably connected with an, the inside of workstation (1) is equipped with motor (13), the output of motor (13) is equipped with first connecting rod (14), first connecting rod (14) surface is equipped with first auxiliary wheel (15) and second auxiliary wheel (16), first auxiliary wheel (15) surface toothing has first gear (17), second auxiliary wheel (16) surface toothing has second gear (18), be equipped with second connecting rod (19) between first gear (17) and second gear (18), second connecting rod (19) and play water pole (9) are connected, the lateral wall of workstation (1) is equipped with delivery port (20).
2. A novel wafer cleaning station as claimed in claim 1, wherein: the first gear (17), the second gear (18), the second connecting rod (19) and the water outlet rod (9) are of an integrated structure.
3. A novel wafer cleaning station as claimed in claim 1, wherein: the surface of the first gear (17) is provided with first gear teeth (21), the surface of the second gear (18) is provided with second gear teeth (22), and the first gear teeth (21) and the second gear teeth (22) are arranged in a staggered mode.
4. A novel wafer cleaning station as claimed in claim 3, wherein: the diameter of the first gear teeth (21) is smaller than the diameter of the second gear teeth (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022915683.7U CN213424942U (en) | 2020-12-08 | 2020-12-08 | Novel wafer cleaning workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022915683.7U CN213424942U (en) | 2020-12-08 | 2020-12-08 | Novel wafer cleaning workbench |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213424942U true CN213424942U (en) | 2021-06-11 |
Family
ID=76253194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022915683.7U Active CN213424942U (en) | 2020-12-08 | 2020-12-08 | Novel wafer cleaning workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213424942U (en) |
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2020
- 2020-12-08 CN CN202022915683.7U patent/CN213424942U/en active Active
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