CN213304108U - Multi-layer composite nano-porous evaporator - Google Patents
Multi-layer composite nano-porous evaporator Download PDFInfo
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- CN213304108U CN213304108U CN202021002684.6U CN202021002684U CN213304108U CN 213304108 U CN213304108 U CN 213304108U CN 202021002684 U CN202021002684 U CN 202021002684U CN 213304108 U CN213304108 U CN 213304108U
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Abstract
A multi-layer composite nano porous evaporator belongs to the technical field of microelectronic device cooling. Generally consisting of an upper silicon structure, a middle nanoporous structure and a lower silicon structure. The upper silicon structure includes seven manifold channels, an inlet reservoir, an outlet reservoir, and a plurality of vapor channels. The middle layer nano porous structure is obtained by etching processing on the upper layer silicon surface, and the nano hole arrays are uniformly distributed on the film. The lower silicon structure comprises a liquid inlet, a liquid outlet, parallel ribs and micro-channels among the ribs, and is connected with the upper layer by a bonding technology. The device utilizes the thin film evaporation heat dissipation of liquid in the nanometer holes, has the characteristics of stable operation, uniform temperature distribution, high strength of the nanometer film, less required working medium, low pumping power consumption and the like, and solves the problems of high heat flow density and multi-heat-area distribution of microelectronic devices.
Description
Technical Field
The utility model relates to a novel porous evaporimeter of multilayer combined type nanometer belongs to microelectronic device cooling technology field.
Background
In recent years, with the rapid development of the electronic chip manufacturing industry, the military industry, the new energy application technology and the aerospace field, new requirements of miniaturization, high integration and high power are put forward for electronic devices in engineering application, and therefore microelectronic devices such as gallium nitride (GaN) High Electron Mobility Transistors (HEMTs) and the like are widely applied in various fields. However, the output power of the microelectronic device is greatly limited by the heat dissipation problem on the local hot spot, and researches show that the heat flow density generated on a part of a sub-millimeter region of the GaN-based HEMT device is as high as 5kW/cm2. Therefore, how to effectively dissipate heat to improve the power of the microelectronic device and prolong the service life of the microelectronic device becomes an urgent problem to be solved. At present, the traditional heat dissipation scheme for high heat flux density electronic devices at home and abroad mainly comprises: the high heat conductivity solid soaking material (copper, tungsten copper, diamond and the like) or thermal interface material (soldering tin, heat conducting silicone grease, epoxy resin and the like) is combined with an air cooling or liquid cooling plate, so that the purpose of heat dissipation is achieved. However, due to the existence of thermal contact resistance, the junction temperature cannot be effectively reduced by the conventional heat dissipation method, and the safe and stable operation of the device is seriously threatened. In order to solve the problem, researchers propose a novel embedded cooling scheme for electronic devices, wherein heat is directly dissipated from a substrate of the electronic device instead of being dissipated at the packaging level of the electronic device, so that the use of interface materials is reduced, and the junction temperature of the device is greatly reduced. And insulating dielectric liquid is used as a cooling working medium, so that a working area of the device does not generate a magnetic field, and the running performance of the electronic device is further guaranteed.
Recently, NEMS (Nano-electrical System) technology has been rapidly developed, and the problem of heat transfer in the nanometer scale has become the leading science in the field of heat transfer science. Numerous studies have demonstrated that phase transitions on nanoporous films can consume large amounts of heat, and thus the use of nanoporous films for embedded heat dissipation in high heat flux density microelectronic devices has received much attention from many researchers. The deep research results provide the following standards for high-performance nano-porous evaporation equipment: (1) low thermal resistance to heat transfer from the substrate to the liquid-gas interface; (2) can generate larger capillary force to transport and evaporate the required working medium; (3) an efficient liquid supply structure that minimizes pressure drop; (4) a high efficiency vapor transport channel. However, how to achieve the above standards in the design level troubles people, and the problems of the nano-porous heat dissipation devices at home and abroad at present mainly include: poor mechanical strength of the nanofilm; the liquid supply by utilizing the flow channel is easy to cause the blockage of the nano-pores; the absence of a separate vapor passage makes gas-liquid separation inefficient, etc.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to the not enough of above-mentioned prior art, a novel multilayer combined type nanometer porous evaporator is provided.
In order to solve the technical problem, the utility model discloses the technical scheme who takes is: a multilayer composite nano porous evaporator is composed of three layers of structures, namely an upper layer silicon structure, a middle layer nano porous membrane structure and a lower layer silicon structure; wherein the middle layer nano porous membrane structure is directly processed on the lower surface of the upper layer silicon structure, and the lower layer silicon structure is connected with the middle layer nano porous membrane structure through bonding.
The upper layer silicon structure comprises N steam channels, N +1 manifold channels, an inlet liquid storage tank and an outlet liquid storage tank; the N steam channels are a plurality of parallel independent rectangular channels, and two ends of each rectangular channel in the length direction are sealed; n +1 manifold channels are formed between the N steam channels and on two side surfaces of the two outermost steam channels; the two ends of the N steam channels in the length direction are correspondingly provided with an inlet liquid storage tank and an outlet liquid storage tank; the manifold channel is respectively communicated with the inlet liquid storage tank and the outlet liquid storage tank, so that the liquid working medium can flow from the inlet liquid storage tank to the outlet liquid storage tank through the manifold channel; the plurality of steam channels are distributed among the N +1 manifold channels in parallel, so that the steam generated by evaporation can be transported efficiently; only N steam channels are exposed on the upper surface of the upper-layer silicon structure, and the N +1 manifold channels, the inlet liquid storage tank and the outlet liquid storage tank are all closed;
the middle layer nano porous membrane structure is obtained by etching the lower surface of the upper layer silicon, and an independent nano porous membrane with nano holes is arranged at the lower port of each steam channel; the positions of the N nano porous membranes correspond to the N steam channels in the upper silicon structure, so that the formed nano-pore arrays are uniformly distributed on the N nano porous membranes, and the aperture of a single nano-pore is about 200 nm.
Preferably, each nanoporous membrane is consistent in size with the corresponding lower port of the vapor channel; the corresponding positions of an inlet liquid storage tank, an outlet liquid storage tank and a manifold channel in the middle-layer nano porous membrane structure are all vacant and have no corresponding membrane;
the lower silicon structure comprises ribs arranged in parallel, micro-channels among the ribs, a liquid inlet and a liquid outlet; the liquid inlet and the liquid outlet are of a symmetrical structure and are correspondingly communicated with the inlet liquid storage tank and the outlet liquid storage tank in the upper-layer silicon structure, so that liquid working media can enter and exit the inlet liquid storage tank and the outlet liquid storage tank from the liquid inlet and the liquid outlet; the upper surface of the lower layer silicon structure is provided with ribs and micro-channels among the ribs; the top of the rib is contacted with the nano porous membrane at the middle layer to provide a supporting function for the nano porous membrane, and meanwhile, liquid in the micro channel supplies liquid for the evaporation process by utilizing strong capillary force in the nano pores.
The length direction of the ribs is perpendicular to the length direction of the nanoporous membrane.
Two rows of nano-pores are arranged on each nano-porous membrane.
The cross sections of the inlet liquid storage tank and the outlet liquid storage tank are both trapezoidal structure cavities, and the cross sections are parallel to the structure of the middle layer nano porous membrane; the long bottom surface of the trapezoid structure is parallel to the end part of the corresponding steam channel, and the other short bottom surface is far away from the end part of the steam channel.
N is a number from 4 to 10.
The lower surface of the lower layer silicon structure is provided with ribs and micro-channels between the ribs, the micro-channels between the ribs do not penetrate through the lower surface of the lower layer silicon structure, and the hot zone corresponding to the lower surface of the lower layer silicon structure is a plane structure.
The utility model has the advantages that:
in the novel multilayer composite nano-porous evaporator, a heat source is positioned at the bottom of the evaporator so that heat can be directly dissipated on a substrate of an electronic device, and the novel multilayer composite nano-porous evaporator belongs to an embedded cooling scheme. Compared with the traditional heat dissipation mode of an external radiator, the use of interface materials is reduced, so that the contact thermal resistance is greatly reduced, the junction temperature of the device is greatly reduced, and the safe and stable operation of the electronic device is ensured. The design that a plurality of nano porous membranes and the manifold are arranged in a staggered and parallel mode can maximize the evaporation area and simultaneously ensure the mechanical strength of a single nano porous membrane. The separated design that the manifold is used as a flow channel and the micro-channel is used as a liquid supply channel not only ensures the liquidity of the liquid, but also avoids the problems of nanopore blockage and the like caused by the liquid flow. The micro-channels in the structure provide mechanical support for the nanoporous membrane to again increase the strength of the membrane, and the ribs also conduct heat to the phase change interface. Meanwhile, sufficient liquid supply is realized by utilizing the capillary force liquid absorption function of the nano holes, the pumping power consumption in the traditional liquid cooling scheme is greatly reduced, the evaporation process is limited in a thin film evaporation area, and the gas-liquid separation is effectively completed through a plurality of steam channels. The layered structure of the flow channels within the device also helps to reduce flow resistance. The phase change mode of the liquid in the structure combines the advantages of pool boiling and flow boiling, can meet the heat dissipation and cooling requirements of high heat flux density, avoids instability, and is an ideal cooling mode.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic diagram of the overall structure of the present invention.
Fig. 3 is a schematic diagram of the overall structure of the present invention for back explosion.
Fig. 4 is a front schematic view of the upper silicon structure of the present invention.
Fig. 5 is a schematic back view of the upper silicon structure of the present invention.
Fig. 6 is a schematic diagram of the middle layer nanoporous structure of the present invention.
Fig. 7 is a front view of the lower silicon structure of the present invention.
Fig. 8 is a schematic view of the back side of the lower silicon structure of the present invention.
Fig. 9 is a workflow demonstration diagram of the present invention.
In the figure, 1, an upper silicon structure; 1.1, a steam channel; 1.2, manifold channels; 1.3, an inlet liquid storage tank; 1.4, an outlet liquid storage tank; 2. a middle layer nanoporous structure; 2.1, nano porous membrane; 2.2, nanopores; 3. a lower silicon structure; 3.1, micro-channels; 3.2, ribs; 3.3, a liquid inlet; 3.4, a liquid outlet; 3.5, hot zone.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings, but the present invention is not limited to the following embodiments.
Example 1
As shown in fig. 1, 2, 3, 4, 5, 6, 7, and 8, a novel multi-layer composite nanoporous evaporator comprises an upper silicon structure 1, a middle nanoporous membrane structure 2, and a lower silicon structure 3. The upper silicon structure is a flow module consisting of six steam channels 1.1, seven manifold channels 1.2, an inlet liquid storage tank 1.3 and an outlet liquid storage tank 1.4. The middle layer nano porous structure is an evaporation module and consists of six nano porous membranes 2.1 which are uniformly distributed in an array of nano holes 2.2. The lower silicon structure is a liquid supply module, which is composed of liquid inlets 3.3, liquid outlets 3.4, ribs 3.2 and micro-channels 3.1 which are arranged in a staggered manner.
The steam channels 1.1 and the manifold channels 1.2 are arranged in a staggered mode, and two sides of each manifold channel 1.2 are communicated with an inlet liquid storage tank and an outlet liquid storage tank which are of symmetrical structures; the middle layer nano porous structure 2 is an evaporation module, nano hole 2.2 arrays are uniformly distributed on a plurality of nano porous membranes 2.1, and the position of each membrane corresponds to each steam channel 1.1 of the upper layer; the lower silicon structure 3 is a liquid supply module, a liquid inlet 3.3 is communicated with an inlet liquid storage tank 1.3 on the upper layer, a liquid outlet 3.4 is communicated with an outlet liquid storage tank 1.4 on the upper layer, and micro-channels 3.1 with the same volume are formed among ribs 3.2 which are distributed in parallel in the central area. The middle layer nano porous membrane structure 2 is directly obtained by etching the surface of the upper layer silicon structure 1 and is connected with the lower layer silicon structure 3 through bonding.
The composite membrane is formed by compounding three layers of structures with different functions, namely an upper layer silicon structure 1, a middle layer nano porous membrane structure 2 and a lower layer silicon structure 3, and the shapes and the sizes of the outer edges of contact surfaces between the layers are the same.
Six steam channels 1.1 and seven manifolds 1.2 are arranged in parallel in a staggered mode in the central area, the steam channels 1.1 penetrate through the upper layer silicon structure 1, and the horizontal area of the steam channels is equal to the area of a single nano porous membrane 2.1.
The nanopore 2.2 arrays are respectively and uniformly arranged on six membranes, and the diameter of a single nanopore is about 200 nm.
The area of the whole micro-channel area corresponds to and is equal to the area of the whole nano porous membrane area of the middle layer and the area of the upper layer steam channel and the manifold area.
The six nanoporous membranes 2.1 are positioned to correspond to the six vapor channels 1.1 in the vertical direction, respectively, such that each nanoporous membrane 2.1 has an independent vapor channel 1.1.
The liquid inlet and outlet are positioned at the lower layer, and the inlet and outlet liquid storage tanks and the manifold channel 1.2 are positioned at the upper layer, so that the fluid can complete the flowing process from bottom to top and then flows out from bottom to top.
The manifold channel 1.2 and the micro-channel 3.1 have different functions and are independent from each other, so that the separated design of a flow channel and a liquid supply channel is realized.
From a top view, the manifold channel 1.2 is arranged vertically rather than horizontally with respect to the microchannel 3.1, which facilitates an even distribution of the liquid in the microchannel 3.1.
It is assumed that the novel multilayer composite nanoporous evaporator is mounted on a microelectronic device such that the evaporator bottom is in contact with the hot zone 3.5. As shown in fig. 9, the liquid working medium flows from the liquid inlet 1.3 into the inlet reservoir 3.3 through the external liquid supply tube, and when passing through the seven manifold channels 1.2, a part of the liquid enters the micro-channels 3.1 of the lower silicon structure 3, and the other part of the liquid flows into the outlet reservoir 1.4 and flows out from the liquid outlet 3.4.
The nano porous membrane 2.1 is positioned above the micro channel 3.1, the liquid working medium in the micro channel 3.1 can be stably supplied into the nano hole 2.2 under the action of strong capillary force in the nano hole 2.2, and meanwhile, the ribs 3.2 conduct heat generated by the hot area 3.5 of the microelectronic device at the bottom surface to the six nano porous membranes 2.1, so that the liquid can realize stable film evaporation in the nano hole 2.2, and then gas-liquid separation is effectively finished through the six independent steam channels 1.1.
Claims (8)
1. A multilayer composite nano porous evaporator is characterized in that the evaporator generally comprises three layers of structures, namely an upper layer silicon structure (1), a middle layer nano porous membrane structure (2) and a lower layer silicon structure (3); wherein the middle layer nano porous membrane structure (2) is directly processed on the lower surface of the upper layer silicon structure (1), and the lower layer silicon structure (3) is connected with the middle layer nano porous membrane structure (2) through bonding;
the layered silicon structure comprises N steam channels (1.1), N +1 manifold channels (1.2), an inlet liquid storage tank (1.3) and an outlet liquid storage tank (1.4); the N steam channels (1.1) are a plurality of parallel independent rectangular channels, and two ends of each rectangular channel in the length direction are closed; n +1 manifold channels (1.2) are formed among the N steam channels (1.1) and on two side faces of the two outermost steam channels (1.1); an inlet liquid storage tank (1.3) and an outlet liquid storage tank (1.4) are correspondingly arranged at two ends of the N steam channels (1.1) in the length direction; the manifold channel (1.2) is respectively communicated with the inlet liquid storage tank (1.3) and the outlet liquid storage tank (1.4), so that the liquid working medium can flow from the inlet liquid storage tank (1.3) to the outlet liquid storage tank (1.4) through the manifold channel (1.2); the plurality of steam channels (1.1) are distributed among the N +1 manifold channels (1.2) in parallel, so that the steam generated by evaporation can be transported efficiently; only N steam channels (1.1) are exposed on the upper surface of the upper-layer silicon structure, and the N +1 manifold channels (1.2), the inlet liquid storage tank (1.3) and the outlet liquid storage tank (1.4) are all closed;
the middle layer nano porous membrane structure (2) is obtained by etching the lower surface of the upper layer silicon structure (1), and an independent nano porous membrane (2.1) with nano holes (2.2) is arranged at the lower port of each steam channel (1.1); the positions of the N nano porous membranes (2.1) correspond to the N steam channels (1.1) in the upper silicon structure (1), so that the formed nano porous membrane (2.2) array is uniformly distributed on the N nano porous membranes (2.1);
the lower layer silicon structure (3) comprises ribs (3.2) which are arranged in parallel, micro-channels (3.1) among the ribs, a liquid inlet (3.3) and a liquid outlet (3.4); the liquid inlet (3.3) and the liquid outlet (3.4) are of a symmetrical structure and are correspondingly communicated with the inlet liquid storage tank (1.3) and the outlet liquid storage tank (1.4) in the upper-layer silicon structure (1), so that liquid working media can enter and exit the inlet liquid storage tank (1.3) and the outlet liquid storage tank (1.4) from the liquid inlet (3.3) and the liquid outlet (3.4); the upper surface of the lower layer silicon structure (3) is provided with ribs (3.2) and micro-channels (3.1) among the ribs; the micro-channels (3.1) are formed between the parallel ribs (3.2) and are arranged in parallel, the tops of the ribs (3.2) are in contact with the nano-porous membrane (2.1) in the middle layer, so that a supporting effect is provided for the nano-porous membrane (2.1), and meanwhile, liquid in the micro-channels (3.1) supplies liquid for an evaporation process by utilizing strong capillary force in the nano-pores (2.2);
n is 4-10.
2. The multi-layer composite nanoporous evaporator according to claim 1, wherein each nanoporous membrane (2.1) is in conformity with the size of the lower port of the corresponding vapor channel (1.1); the positions of the inlet liquid storage tank (1.3), the outlet liquid storage tank (1.4) and the manifold channel (1.2) which correspond to the middle layer nano porous membrane structure (2) are all vacant and have no corresponding membrane.
3. A multi-layer composite nanoporous evaporator according to claim 1, wherein the length direction of the ribs (3.2) is perpendicular to the length direction of the nanoporous membrane (2.1).
4. The multi-layer composite nanoporous evaporator according to claim 1, wherein two rows of nanopores (2.2) are provided per nanoporous membrane (2.1).
5. The multi-layer composite nano-porous evaporator according to claim 1, characterized in that the corresponding ribs (3.2) on the lower surface of the lower silicon structure (3) and the micro-channels (3.1) between the ribs correspond to the hot zones (3.5), and the micro-channels (3.1) between the ribs do not penetrate through the lower surface of the lower silicon structure (3), so that the hot zones corresponding to the lower surface of the lower silicon structure (3) are a planar structure.
6. The multi-layer composite nano-porous evaporator as recited in claim 1, characterized in that the cross-sections of the inlet reservoir (1.3) and the outlet reservoir (1.4) are both trapezoidal structure cavities, and the cross-section is parallel to the middle layer nano-porous membrane structure (2); the long bottom surface of the trapezoid structure is parallel to the end part of the steam channel (1.1), and the other short bottom surface is far away from the end part of the steam channel (1.1).
7. The multi-layer composite nanoporous evaporator according to claim 1, wherein the plurality of vapor channels (1.1) is six vapor channels (1.1), and the pore size of the single nanopore is 200 nm.
8. The multi-layer composite nanoporous evaporator according to claim 1, wherein the upper silicon structure (1), the middle nanoporous membrane structure (2) and the lower silicon structure (3) have the same shape and size of the outer edge of the contact surface between each layer;
the steam channels (1.1) and the manifolds (1.2) are arranged in parallel in a staggered mode in the central area, the steam channels (1.1) penetrate through the upper layer silicon structure (1), and the horizontal area of the steam channels is equal to that of a single nano porous membrane (2.1);
the area of the whole micro-channel area corresponds to and is equal to the area of the whole nano porous membrane area of the middle layer and the areas of the upper steam channel and the manifold area;
the nano porous membranes (2.1) are respectively positioned corresponding to the steam channels (1.1) in the vertical direction, so that each nano porous membrane (2.1) is provided with an independent steam channel (1.1);
from the top view, the manifold channel (1.2) and the micro channel (3.1) are arranged vertically instead of horizontally.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115993065A (en) * | 2022-03-18 | 2023-04-21 | 山东大学 | Fishbone-shaped micro-channel evaporator and loop heat pipe thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115993065A (en) * | 2022-03-18 | 2023-04-21 | 山东大学 | Fishbone-shaped micro-channel evaporator and loop heat pipe thereof |
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