CN213276256U

CN213276256U - Photoresist coating device for processing 4H-SiC rectifier bridge

Info

Publication number: CN213276256U
Application number: CN202022673593.1U
Authority: CN
Inventors: 蔡明挽
Original assignee: Guangdong Shenke Electronics Co ltd
Current assignee: Guangdong Shenke Electronics Co ltd
Priority date: 2020-11-18
Filing date: 2020-11-18
Publication date: 2021-05-25
Anticipated expiration: 2030-11-18

Abstract

A photoresist coating device for processing a 4H-SiC rectifier bridge comprises a base, wherein a support and a support are fixedly connected to the upper end of the base, the front end of a conveying shaft is connected with a transmission assembly, a conveying crawler belt is in transmission connection with a conveying roller, a stretching assembly is arranged on a supporting plate, a spring is arranged between a lifting plate and a fixing plate, a cleaning assembly is arranged on the lifting plate, and a glue spraying head is arranged at the lower end of a connecting rod; drive tray and substrate intermittent type nature through drive assembly and turn right the transport, it is convenient to carry the substrate, drive the brush cleaner contact substrate through tensile subassembly, make the brush cleaner clean the substrate through cleaning the subassembly simultaneously, the condition that the various dust foreign matters of being infected with on the substrate lead to coating photoresist rear surface unevenness is even has been avoided, it is even with the photoresist knife coating on the substrate through the scraper blade, the coating effect of substrate has been improved, this device is processing a plurality of substrates at the same time, it coats to have avoided the artifical loading and unloading one by one of present needs, time saving and labor saving just greatly improved the photoresist coating efficiency of substrate.

Description

Photoresist coating device for processing 4H-SiC rectifier bridge

Technical Field

The utility model relates to a photoresist coating equipment technical field specifically is a photoresist coating device is used in processing of 4H-SiC rectifier bridge.

Background

The rectifier bridge is formed by sealing a rectifier tube in a shell and is divided into a full bridge and a half bridge. The full bridge seals four diodes of the connected bridge rectification circuit together. The half-bridge is to seal the two halves of the four diode bridge-type commutations together, and two half-bridges can form a bridge-type rectifying circuit, and one half-bridge can also form a full-wave rectifying circuit with a center tap of the transformer, and the rectifying circuit and the working voltage need to be considered when the rectifying bridge is selected. The rectifier bridge is used as a power component and is very extensive. The method is applied to various power supply devices. 4H is a common crystal type of silicon carbide, and in the production and processing process of the 4H-SiC rectifier bridge, a wafer substrate needs to be coated with a photoresist before photoetching, and the quality of the coating directly influences the performance of the 4H-SiC rectifier bridge.

At present, when a 4H-SiC rectifier bridge is coated, a substrate is generally placed on a tray manually and is coated, and then a device is closed to load and unload the next substrate, so that a plurality of stations are controlled to start and stop, the working strength is high, the photoresist coating efficiency is low, and the method is not suitable for carrying out larger workload; in addition, the existing coated substrate is very easy to be stained with various dust and foreign matters in the process of carrying, loading and unloading, and the surface of the substrate to be coated after being coated with photoresist is uneven and uniform, so that various adverse conditions are caused, and the coating quality requirement of the 4H-SiC rectifier bridge cannot be met.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a 4H-SiC is photoresist coating device for rectifier bridge processing to solve the problem that appears among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a photoresist coating device for 4H-SiC rectifier bridge processing comprises a base, wherein a support and a support are fixedly connected to the upper end of the base, a conveying shaft is rotatably connected to the upper side of the support, a transmission assembly is connected to the front end of the conveying shaft, a conveying roller is fixedly connected to the outer wall of the conveying shaft, a conveying crawler belt is movably connected to the conveying roller, a plurality of connecting columns are fixedly connected to the outer wall of the conveying crawler belt uniformly, a tray is fixedly connected to the other ends of the connecting columns, a fixed plate, a sliding rail and a supporting plate are fixedly connected to the left end of the support, a stretching assembly is arranged on the supporting plate, a sliding block is slidably connected to the left end of the sliding rail, a lifting plate is fixedly connected to the left end of the sliding block, a spring is arranged between the lifting plate and the fixed plate, a cleaning assembly is arranged on the lifting plate, a connecting rod is, two through grooves are formed in the support.

Preferably, a processing of 4H-SiC rectifier bridge is with photoetching glue coating device, drive assembly includes first motor, first motor sets up in the base upper end, first motor output rigid coupling has first band pulley, the conveying axle front end rigid coupling has the second band pulley, the transmission is connected with first belt between second band pulley and the first band pulley.

Preferably, a 4H-SiC rectifier bridge processing is with photoetching glue coating device, tensile subassembly includes second motor and mount pad, second motor and mount pad set up in the backup pad upper end, the back wall rotates before the mount pad and is connected with the bull stick, the bull stick rear end rigid coupling is in the second motor output, the bull stick outer wall is provided with the rope winding wheel, the winding has the haulage rope on the rope winding wheel, haulage rope other end rigid coupling is in the lifter plate lower extreme.

Preferably, a 4H-SiC rectifier bridge processing is with photoetching glue coating device, clean the subassembly and include first pivot, first pivot swivelling joint is in the lifter plate left side, first pivot middle part rigid coupling has first spur gear, the lifter plate lower extreme is provided with the third motor, third motor output rigid coupling has the second straight-tooth gear, second straight-tooth gear and the transmission of first straight-tooth gear meshing, the brush of cleaning is installed to first pivot lower extreme.

Preferably, a 4H-SiC rectifier bridge processing is with photoetching glue coating device, the lifter plate middle part is rotated and is connected with the second pivot, second pivot and first pivot upper end rigid coupling respectively have third band pulley and fourth band pulley, the transmission is connected with the second belt between three band pulleys and the fourth band pulley, the scraper blade is installed to second pivot lower extreme.

Preferably, a holding groove is formed in the upper end of the tray.

The utility model has the advantages that:

1. the utility model has the advantages of reasonable design, start first motor and pass through first band pulley, first belt, second band pulley, conveying axle, transfer roller and conveying track cooperation, drive tray and substrate intermittent type nature and turn right the transport, carry the convenience to the substrate, can only single loading and unloading when having avoided artifical single coating, labour saving and time saving not only, coating efficiency is high moreover.

2. The second motor drives the lifting plate and the cleaning assembly to descend through the cooperation of the rotating rod, the rope winding wheel and the traction rope, the cleaning brush is in contact with the substrate, meanwhile, the third motor drives the cleaning brush to rotate through the cooperation of the second straight gear, the first straight gear and the first rotating shaft to clean the substrate, the condition that the surface of the substrate is uneven and uniform after photoresist is coated due to various dust foreign matters stained on the substrate is avoided, the coating effect of the substrate is improved, and the production quality of the 4H-SiC rectifier bridge is improved.

3. The first rotating shaft rotates and simultaneously drives the second rotating shaft and the scraper to rotate through the cooperation of the fourth belt wheel, the second belt and the third belt wheel, photoresist on the substrate is uniformly coated through the scraper, the coating effect of the substrate is improved, and the quality of the 4H-SiC rectifier bridge is further improved.

4. This device is processing a plurality of substrates at the same time, for example this device is cleaning the coated substrate of next treating to spout glue through the brush cleaner when spouting the coating of glue to the substrate, has avoided present needs artifical loading and unloading one by one to coat, and labour saving and time saving not only has greatly improved the photoresist coating efficiency of substrate moreover, and the practicality is strong.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used for describing the embodiments are briefly introduced below, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the structure of the transmission assembly of the present invention;

fig. 3 is a left side view structural schematic diagram of the stretching assembly of the present invention;

fig. 4 is the schematic structural view of the cleaning assembly of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1-base, 2-support, 3-support, 4-transmission shaft, 5-transmission assembly, 501-first motor, 502-first belt wheel, 503-second belt wheel, 504-first belt, 6-transmission roller, 7-transmission crawler belt, 8-connecting column, 9-tray, 10-fixing plate, 11-sliding rail, 12-supporting plate, 13-stretching assembly, 1301-second motor, 1302-mounting seat, 1303-rotating rod, 1304-rope winding wheel, 1305-traction rope, 14-sliding block, 15-lifting plate, 16-cleaning assembly, 1601-first rotating shaft, 1602-first straight gear, 1603-third motor, 1604-second straight gear, 1605-cleaning brush, 17-connecting rod, 18-glue spraying head, 19-glue spraying hose, 20-spring, 21-second rotating shaft, 22-third belt wheel, 23-fourth belt wheel, 24-second belt, 25-scraper and 26-placing groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Referring to fig. 1-4, the embodiment is a photoresist coating device for processing a 4H-SiC rectifier bridge, including a base 1, a support 2 and a bracket 3 are fixedly connected to the upper end of the base 1, a conveying shaft 4 is rotatably connected to the upper side of the support 2, a transmission assembly 5 is connected to the front end of the conveying shaft 4, a conveying roller 6 is fixedly connected to the outer wall of the conveying shaft 4, a conveying crawler 7 is movably connected to the conveying roller 6, a plurality of connecting columns 8 are uniformly and fixedly connected to the outer wall of the conveying crawler 7, a tray 9 is fixedly connected to the other end of the connecting columns 8, a fixed plate 10, a slide rail 11 and a support plate 12 are fixedly connected to the left end of the bracket 3, a stretching assembly 13 is arranged on the support plate 12, a slide block 14 is slidably connected to the left end of the slide rail 11, a lifting plate 15 is fixedly connected to the left end of the slide block 14, a, the lower end of the connecting rod 17 is provided with a glue spraying head 18, the upper end of the glue spraying head 18 is communicated with a glue spraying hose 19, and the support 3 is provided with two through grooves.

The transmission assembly 5 comprises a first motor 501, the first motor 501 is arranged at the upper end of the base 1, the output end of the first motor 501 is fixedly connected with a first belt wheel 502, the front end of the transmission shaft 4 is fixedly connected with a second belt wheel 503, and a first belt 504 is connected between the second belt wheel 503 and the first belt wheel 502 in a transmission manner.

The stretching assembly 13 comprises a second motor 1301 and a mounting seat 1302, the second motor 1301 and the mounting seat 1302 are arranged at the upper end of the supporting plate 12, a rotating rod 1303 is rotatably connected to the front wall and the rear wall of the mounting seat 1302, the rear end of the rotating rod 1303 is fixedly connected to the output end of the second motor 1301, a rope winding wheel 1304 is arranged on the outer wall of the rotating rod 1303, a traction rope 1305 is wound on the rope winding wheel 1304, and the other end of the traction rope 1305 is fixedly connected to the lower end of the lifting plate 15.

Cleaning assembly 16 includes first pivot 1601, and first pivot 1601 rotates and connects in lifter plate 15 left side, and first pivot 1601 middle part rigid coupling has first spur gear 1602, and lifter plate 15 lower extreme is provided with third motor 1603, and third motor 1603 output rigid coupling has second spur gear 1604, and second spur gear 1604 and first spur gear 1602 meshing transmission, and the brush 1605 is installed to first pivot 1601 lower extreme.

A second rotating shaft 21 is rotatably connected to the middle of the lifting plate 15, a third belt wheel 22 and a fourth belt wheel 23 are fixedly connected to the upper ends of the second rotating shaft 21 and the first rotating shaft 1601 respectively, a second belt 24 is connected between the third belt wheel 22 and the fourth belt wheel 23 in a transmission manner, and a scraper 25 is installed at the lower end of the second rotating shaft 21; the first rotating shaft 1601 rotates and simultaneously drives the second rotating shaft 21 and the scraper 25 to rotate through the cooperation of the fourth belt wheel 23, the second belt 24 and the third belt wheel 22, and the scraper 25 uniformly scrapes photoresist on the substrate, so that the coating effect of the substrate is improved, and the quality of the 4H-SiC rectifier bridge is further improved.

The upper end of the tray 9 is provided with a placing groove 26, so that the substrate can be placed in the placing groove 26, and the substrate can be better limited.

The utility model discloses a theory of operation does:

when using this device, at first place each substrate of treating coating photoresist on tray 9 respectively, then start first motor 501 intermittent type nature and drive first band pulley 502 and rotate, drive second band pulley 503 and conveying shaft 4 through first belt 504 and rotate, and then drive transfer roller 6 and rotate and make the conveying track 7 turn right and carry out intermittent type nature and remove, thereby drive tray 9 and substrate and turn right and carry, it is convenient to carry the substrate, can only single loading and unloading when having avoided artifical single coating, time saving and labor saving not only, and coating efficiency is high.

The conveyor belt 7 will bring the tray 9 and the substrate to stay for a period of time directly under the cleaning assembly 16, the glue-spraying head 18 and the scraper 25, when the substrate on the tray 9 moves under the sweeping assembly 16, the second motor 1301 drives the rotating rod 1303 and the rope winding wheel 1304 to rotate, thereby driving the traction rope 1305 to be tensioned, thereby bringing the lifting plate 15 to descend along the slide rail 11 through the slider 14 and stretching the spring 20, and further drives the cleaning assembly 16 to descend, the cleaning brush 1605 contacts the substrate, and simultaneously the third motor 1603 drives the second spur gear 1604 to rotate, so that the first spur gear 1602 drives the first rotary shaft 1601 and the sweeper brush 1605 to rotate, the substrate is cleaned by the cleaning brush 1605, the condition that the surface is uneven and even after the photoresist is coated due to various dust foreign matters on the substrate is avoided, the coating effect of the substrate is improved, and the production quality of the 4H-SiC rectifier bridge is improved.

After cleaning, the second motor 1301 reverses to release the traction rope 1305, the lifting plate 15 rises to the initial position through the action of the spring 20, then the conveying crawler 7 drives the tray 9 and the substrate to continuously move to the position under the glue spraying head 18 to stop again, at the moment, the second motor 1301 tightens the traction rope 1305 again to enable the lifting plate 15 to drive the glue spraying head 18 to descend, and external photoresist is guided into the glue spraying head 18 through the glue spraying hose 19 and sprayed out to the substrate to be coated.

After the photoresist is sprayed on the substrate through the photoresist spraying head 18, the photoresist spraying head 18 rises again, at the moment, the conveying crawler belt 7 can drive the tray 9 and the substrate to continuously move to the position under the scraper 25 to stop again, then the stretching assembly 13 drives the scraper 25 to descend and contact the substrate again, the first rotating shaft 1601 rotates and drives the second rotating shaft 21 and the scraper 25 to rotate through the cooperation of the fourth belt wheel 23, the second belt 24 and the third belt wheel 22, the photoresist on the substrate is uniformly coated through the scraper 25, the coating effect of the substrate is improved, and the quality of the 4H-SiC rectifier bridge is further improved.

This device is spraying glue the coating to the substrate and the brush cleaner 1605 is also cleaning the coated substrate of next treating to spout glue, and this device is processing a plurality of substrates the same time, has avoided present needs artifical loading and unloading one by one to coat, and labour saving and time saving not only has greatly improved the photoresist coating efficiency of substrate moreover, and the practicality is strong.

The electrical components are externally connected with a power supply, and the control mode is common knowledge, so that the detailed description is omitted in the specification.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Although the present description is described in terms of embodiments, not every embodiment includes only a single embodiment, and such description is for clarity only, and those skilled in the art should be able to integrate the description as a whole, and the embodiments can be appropriately combined to form other embodiments as will be understood by those skilled in the art.

Claims

1. The utility model provides a 4H-SiC rectifier bridge processing is with photoetching glue coating device, includes base (1), its characterized in that: the automatic conveying device is characterized in that a support (2) and a support (3) are fixedly connected to the upper end of the base (1), a conveying shaft (4) is rotatably connected to the upper side of the support (2), a transmission assembly (5) is connected to the front end of the conveying shaft (4), a conveying roller (6) is fixedly connected to the outer wall of the conveying shaft (4), a conveying crawler (7) is movably connected to the upper side of the conveying roller (6), a plurality of connecting columns (8) are fixedly connected to the outer wall of the conveying crawler (7), a tray (9) is fixedly connected to the other end of each connecting column (8), a fixed plate (10), a sliding rail (11) and a supporting plate (12) are fixedly connected to the left end of the support (3), a stretching assembly (13) is arranged on the supporting plate (12), a sliding block (14) is slidably connected to the left end of the sliding rail (11), a lifting plate (15) is fixedly connected to the, be provided with on lifter plate (15) and clean subassembly (16), lifter plate (15) lower extreme rigid coupling has connecting rod (17), connecting rod (17) lower extreme is installed and is spouted gluey head (18), it has gluey hose (19) to spout gluey head (18) upper end intercommunication, two logical grooves have been seted up on support (3).

2. The photoresist coating device for 4H-SiC rectifier bridge processing according to claim 1, wherein: drive assembly (5) include first motor (501), first motor (501) set up in base (1) upper end, first motor (501) output rigid coupling has first band pulley (502), conveying shaft (4) front end rigid coupling has second band pulley (503), the transmission is connected with first belt (504) between second band pulley (503) and first band pulley (502).

3. The photoresist coating device for 4H-SiC rectifier bridge processing according to claim 1, wherein: tensile subassembly (13) include second motor (1301) and mount pad (1302), second motor (1301) and mount pad (1302) set up in backup pad (12) upper end, the wall rotates before mount pad (1302) and is connected with bull stick (1303), bull stick (1303) rear end rigid coupling is in second motor (1301) output, bull stick (1303) outer wall is provided with around rope sheave (1304), it has haulage rope (1305) to twine on rope sheave (1304), haulage rope (1305) other end rigid coupling in lifter plate (15) lower extreme.

4. The photoresist coating device for 4H-SiC rectifier bridge processing according to claim 1, wherein: clean subassembly (16) including first pivot (1601), first pivot (1601) rotate to be connected in lifter plate (15) left side, first pivot (1601) middle part rigid coupling has first spur gear (1602), lifter plate (15) lower extreme is provided with third motor (1603), third motor (1603) output rigid coupling has second spur gear (1604), second spur gear (1604) and first spur gear (1602) meshing transmission, sweeper brush (1605) is installed to first pivot (1601) lower extreme.

5. The photoresist coating device for 4H-SiC rectifier bridge processing according to claim 4, wherein: lifter plate (15) middle part is rotated and is connected with second pivot (21), second pivot (21) and first pivot (1601) upper end rigid coupling respectively have third band pulley (22) and fourth band pulley (23), the transmission is connected with second belt (24) between third band pulley (22) and fourth band pulley (23), scraper blade (25) are installed to second pivot (21) lower extreme.

6. The photoresist coating device for 4H-SiC rectifier bridge processing according to claim 1, wherein: the upper end of the tray (9) is provided with a placing groove (26).