CN209222544U - A kind of heating rotary platform device - Google Patents
A kind of heating rotary platform device Download PDFInfo
- Publication number
- CN209222544U CN209222544U CN201821971600.2U CN201821971600U CN209222544U CN 209222544 U CN209222544 U CN 209222544U CN 201821971600 U CN201821971600 U CN 201821971600U CN 209222544 U CN209222544 U CN 209222544U
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- CN
- China
- Prior art keywords
- hollow rotating
- connecting flange
- heating
- fixed frame
- rotating platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model belongs to glue spraying field in manufacture of semiconductor, specifically a kind of heating rotary platform device, including unit platforms, heating dish, connecting flange, hollow rotating motor, fixed frame and hollow rotating platform, fixed frame is fixed in unit platforms, hollow rotating motor is mounted on fixed frame, hollow rotating platform is rotatably arranged on fixed frame, and is rotated by hollow rotating motor driven；One end of connecting flange is connected with hollow rotating platform, and the other end is passed through by unit platforms and be connected with heating dish, the heater strip electric wire and vacuum tube in heating dish by inside connecting flange, hollow rotating platform passes through.The utility model solves the trouble that the prior art needs regular manual calibration, and has banned the use of perishable conducting slip ring.It facilitates manual operation and provides working efficiency.
Description
Technical field
The utility model belongs to glue spraying field in manufacture of semiconductor, specifically a kind of heating rotary platform device.
Background technique
Traditional glue spraying machine equipment, unit is interior substantially to drive heating disk body rotation by motor pulley；Because of belt
The case where having loosening under long time running needs manually periodically to carry out calibration phase angle.In addition, being driven by motor pulley
The structure of heated rotary discs body needs to connect using heater strip of the conducting slip ring to disk body with electricity piece, due to the sheet of glue sprayer
Body technological reason, the dust particles in glue spraying unit are more, it will usually conducting slip ring be caused to damage and no power.
Utility model content
The above problem caused by order to solve because of the application limitation of existing pulley electric motor, the purpose of this utility model is that
A kind of heating rotary platform device is provided.The heating rotary platform device solves the fiber crops that the prior art needs regular manual calibration
It is tired, and banned the use of perishable conducting slip ring.It facilitates manual operation and provides working efficiency.
The purpose of this utility model is achieved through the following technical solutions:
The utility model includes unit platforms, heating dish, connecting flange, hollow rotating motor, fixed frame and hollow rotating
Platform, wherein fixed frame is fixed in unit platforms, and the hollow rotating motor is mounted on fixed frame, and hollow rotating platform can
It is arranged on fixed frame in relative rotation, and is rotated by the hollow rotating motor driven；One end of the connecting flange is in
Empty rotating platform is connected, and the other end is passed through by the unit platforms and be connected with heating dish, the heater strip electric wire in the heating dish
And vacuum tube by inside the connecting flange, hollow rotating platform passes through；
Wherein: the connecting flange is hollow structure, and both ends are affixed with the bottom surface of hollow rotating platform and heating dish respectively；
Through-hole is offered in the unit platforms, the connecting flange is passed through by the through-hole, the through-hole diameter be greater than or
Equal to the outer diameter of connecting flange；
One end of the heater strip electric wire is connected with heating dish, and the other end sequentially passes through connecting flange, hollow rotating platform
It is connect afterwards with the heating electricity piece for being located at the unit platforms lower part；
One end of the vacuum tube is connected with heating dish, and the other end leads to after sequentially passing through connecting flange, hollow rotating platform
It crosses vacuum line and is connected with the negative pressure source for being located at the unit platforms lower part.
The advantages of the utility model and good effect are as follows:
The utility model drives the power form of heated rotary discs body instead of motor pulley, and it is manually fixed to effectively prevent
Phase calibrates the tightness of belt pulley and the operation at phase angle, provides working efficiency, saves maintenance time, and covert improving is set
Standby production capacity.Meanwhile because the probability that conducting slip ring damages in glue spraying environment is relatively high, the heating rotating platform of the utility model
Device has banned the use of conducting slip ring, so saving cost accordingly.
Detailed description of the invention
Fig. 1 is the schematic perspective view of the utility model；
Fig. 2 is the structural side view of the utility model；
Fig. 3 is the structure top view of the utility model；
Fig. 4 is that the utility model removes the front sectional view after fixed frame；
Wherein: 1 is unit platforms, and 2 be heating dish, and 3 be connecting flange, and 4 be hollow rotating motor, and 5 be fixed frame, and 6 are
Hollow rotating platform, 7 be heater strip electric wire, and 8 be vacuum tube.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawing.
As shown in figures 1-4, the utility model include unit platforms 1, heating dish 2, connecting flange 3, hollow rotating motor 4,
Fixed frame 5 and hollow rotating platform 6, wherein fixed frame 5 is in inverted " u "-shaped, and the two sides of the " u "-shaped open end are fixed in list
The lower surface of first platform 1.Hollow rotating motor 4 is fixed on fixed frame 5, and hollow rotating platform 6 is rotatably arranged in
On fixed frame 5, and is driven and rotated by hollow rotating motor 4；The hollow rotating platform 6 of the present embodiment is commercially available hollow rotating electricity
What machine 4 carried, therefore details are not described herein.
Connecting flange 3 is hollow structure, and one end and hollow rotating platform 6 are affixed, and the other end is passed through, simultaneously by unit platforms 1
It is connected to the bottom surface of heating dish 2.Through-hole is offered in unit platforms 1, connecting flange 3 is passed through by the through-hole, and through-hole diameter is greater than
Or the outer diameter equal to connecting flange 3.
Heater strip electric wire 7 and vacuum tube 8 in heating dish 2 by inside connecting flange 3, hollow rotating platform 6 passes through.Heating
One end of silk electric wire 7 is connected with heating dish 2, and the other end sequentially passes through after connecting flange 3, hollow rotating platform 6 and positioned at unit
The heating electricity piece of 1 lower part of platform connects.One end of vacuum tube 8 is connected with heating dish 2, the other end sequentially pass through connecting flange 3,
It is connected by vacuum line with the negative pressure source for being located at 1 lower part of unit platforms after hollow rotating platform 6.
The application method of the utility model are as follows:
When carrying out spray-bonding craft operation, when front and back two panels wafer carries out same process, in the driving of hollow rotating motor 4
Empty rotating platform 6 rotates, and then connecting flange 3 and heating dish 2 is driven to rotate, which rotates clockwise setting process corner
Degree, until rotation to wafer technique is finished；When lower wafer carry out glue spraying operation when, heating dish 2 current location again
Setting technological angle is rotated counterclockwise by the driving of hollow rotating motor 4, and until rotating back to original position, this wafer technique is also made
Industry is completed.
When front and back two panels wafer carries out different process, after preceding wafer technique is finished, heating dish 2 passes through hollow rotating
The driving of motor 4 is kept in the center, and is then carried out down the wafer of a piece of different process operation again, is passed through the drive of hollow rotating motor 4
The dynamic setting technological angle of rotation counterclockwise, until rotation to lower wafer technique is finished.
The hollow Wiring structure of the utility model can ban the use of conducting slip ring, side in conjunction with the above operation form completely
Often maintenance and the operation of replacement slip ring, both having saved the manually-operated time also saves cost.Meanwhile former belt pulley
The rotary power for driving heating disk body, also periodically needs the tight belt pulley in artificial school and calibrates its phase angle, is greatly saved artificial
Operating time improves work efficiency, and correspondinglys increase equipment capacity.
Claims (5)
1. a kind of heating rotary platform device, it is characterised in that: including unit platforms (1), heating dish (2), connecting flange (3),
Hollow rotating motor (4), fixed frame (5) and hollow rotating platform (6), wherein fixed frame (5) is fixed on unit platforms (1),
The hollow rotating motor (4) is mounted on fixed frame (5), and fixed frame is rotatably arranged in hollow rotating platform (6)
(5) it on, and is driven and is rotated by the hollow rotating motor (4)；One end and hollow rotating platform (6) of the connecting flange (3)
It is connected, the other end is passed through by the unit platforms (1) and is connected with heating dish (2), the heater strip electric wire in the heating dish (2)
(7) and vacuum tube (8) is passed through by the connecting flange (3) inside, hollow rotating platform (6).
2. heating rotary platform device according to claim 1, it is characterised in that: the connecting flange (3) is hollow knot
Structure, both ends are affixed with the bottom surface of hollow rotating platform (6) and heating dish (2) respectively.
3. heating rotary platform device according to claim 1, it is characterised in that: offered on the unit platforms (1)
Through-hole, the connecting flange (3) are passed through by the through-hole, and the through-hole diameter is greater than or equal to the outer diameter of connecting flange (3).
4. heating rotary platform device according to claim 1, it is characterised in that: one end of the heater strip electric wire (7)
It is connected with heating dish (2), the other end sequentially passes through connecting flange (3), hollow rotating platform (6) afterwards and positioned at the unit platforms
(1) the heating electricity piece connection of lower part.
5. heating rotary platform device according to claim 1, it is characterised in that: one end of the vacuum tube (8) with plus
Hot plate (2) is connected, and the other end sequentially passes through connecting flange (3), hollow rotating platform (6) afterwards by vacuum line and positioned at described
The negative pressure source of unit platforms (1) lower part is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821971600.2U CN209222544U (en) | 2018-11-27 | 2018-11-27 | A kind of heating rotary platform device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821971600.2U CN209222544U (en) | 2018-11-27 | 2018-11-27 | A kind of heating rotary platform device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209222544U true CN209222544U (en) | 2019-08-09 |
Family
ID=67505043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821971600.2U Active CN209222544U (en) | 2018-11-27 | 2018-11-27 | A kind of heating rotary platform device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209222544U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111215295A (en) * | 2018-11-27 | 2020-06-02 | 沈阳芯源微电子设备股份有限公司 | Heating rotary platform device and using method thereof |
-
2018
- 2018-11-27 CN CN201821971600.2U patent/CN209222544U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111215295A (en) * | 2018-11-27 | 2020-06-02 | 沈阳芯源微电子设备股份有限公司 | Heating rotary platform device and using method thereof |
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