CN213172549U

CN213172549U - Reciprocating magnetic control sputtering vacuum coating machine with multiple processing tables

Info

Publication number: CN213172549U
Application number: CN202022004382.9U
Authority: CN
Inventors: 林卫良
Original assignee: Wenling Huahang Electronic Technology Co ltd
Current assignee: Wenling Huahang Electronic Technology Co ltd
Priority date: 2020-09-14
Filing date: 2020-09-14
Publication date: 2021-05-11
Anticipated expiration: 2030-09-14

Abstract

The utility model provides a reciprocating type magnetron sputtering vacuum coating machine of many processing platforms belongs to coating equipment technical field. It has solved the problem that current vacuum coating machine machining efficiency is low. The reciprocating magnetron sputtering vacuum coating machine with the multiple processing tables comprises an outer shell, wherein the outer shell is provided with a hollow inner cavity, a magnetron sputtering mechanism and a moving mechanism matched with the magnetron sputtering mechanism and used for placing plates are arranged in the inner cavity, the moving mechanism is arranged at the lower end of the magnetron sputtering mechanism, an upper moving plate and a lower moving plate which are layered up and down and can move transversely are arranged on the moving mechanism, one moving plate is matched with the magnetron sputtering mechanism and used for processing, the other moving plate is used for placing the plates, and the side part of the outer shell is provided with an openable moving door matched with the moving mechanism. The utility model has the advantage of high efficiency.

Description

Reciprocating magnetic control sputtering vacuum coating machine with multiple processing tables

Technical Field

The utility model belongs to the technical field of coating equipment, a reciprocating type magnetron sputtering vacuum coating machine of many processing platforms is related to.

Background

The vacuum coating machine mainly refers to a coating film needing to be carried out under a higher vacuum degree, and specifically comprises a plurality of types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, the main idea is to divide the vacuum ion evaporation and sputtering into two types, a substrate needing to be coated is formed, a coated material is formed into a target material, the substrate and the target material are in a vacuum chamber, the evaporation coating is generally to heat the target material to evaporate surface components in a radical or ion form and settle the surface components on the surface of the substrate, a film is formed through a film forming process (scattered point-island structure-fan structure-layered growth), the sputtering coating can be simply understood as bombarding the target material by using electrons or high-energy laser, and the surface components are sputtered out in a radical or ion form and finally deposited on the surface of the substrate to undergo a film forming process, finally, a film is formed.

Most of the existing vacuum coating machines are processed in a single station, the coating machines firstly place products on a processing table when working, then carry out coating processing on the products after the products are installed, and after the products are processed, the products are disassembled, and then the next product is installed, so that the problem of low working efficiency exists.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the above problem and provides a reciprocating magnetron sputtering vacuum coating machine with multiple processing tables.

In order to achieve the above purpose, the utility model adopts the following technical proposal:

the utility model provides a reciprocating type magnetron sputtering vacuum coating machine of many processing platforms, includes the outer casing, the outer casing hollow inner chamber has, the inner chamber in be provided with magnetron sputtering mechanism and with magnetron sputtering mechanism matched with be used for placing the moving mechanism of panel, moving mechanism set up in magnetron sputtering mechanism's lower extreme, but and moving mechanism is last to have upper and lower layering and lateral shifting's movable plate and lower movable plate, one of them movable plate and magnetron sputtering mechanism cooperate and be used for adding man-hour, another movable plate is used for placing of panel, the lateral part of outer casing is provided with the removal door that can open and shut with moving mechanism matched with.

In the multi-processing-table reciprocating magnetron sputtering vacuum coating machine, the moving mechanism comprises a moving rack arranged at the bottom end of the outer machine shell, sliding grooves for guiding and moving the upper moving plate and the lower moving plate are arranged on two sides of the moving rack, and a driving structure connected to the upper moving plate and the lower moving plate in a driving mode is arranged on the moving rack.

In the reciprocating magnetron sputtering vacuum coating machine with multiple processing tables, the driving structure comprises a driver and a chain wheel assembly in driving connection with the driver, the upper moving plate is connected to the upper side of the chain wheel assembly, and the lower moving plate is connected to the lower side of the chain wheel assembly.

In the reciprocating magnetron sputtering vacuum coating machine with multiple processing tables, the chain wheel assembly comprises a transmission chain disc and a driven chain disc which are transversely erected on the movable rack, the transmission chain disc is arranged on one side close to the driver and connected with the driver, the driven chain disc is arranged on one side of the movable rack far away from the driver, and a chain is connected between the transmission chain disc and the driven chain disc.

In the multi-processing-table reciprocating magnetron sputtering vacuum coating machine, each sliding groove is internally provided with a sliding structure for assisting in guiding and sliding.

In the multi-processing-table reciprocating magnetron sputtering vacuum coating machine, the sliding structure comprises a plurality of rotating wheels arranged in the sliding groove, and the plurality of rotating wheels are distributed along the length direction of the sliding groove and can rotate in the circumferential direction relative to the sliding groove.

In the reciprocating magnetron sputtering vacuum coating machine with multiple processing tables, each sliding groove is internally provided with a wheel groove which is sunken downwards and is used for accommodating the rotating wheel, and a rotating shaft is connected between the rotating wheel and the wheel groove.

In the multi-processing-table reciprocating magnetron sputtering vacuum coating machine, the diameter of the rotating wheel is larger than the height of the wheel groove, the lower end of the rotating wheel is in rolling contact with the bottom of the wheel groove, and the upper end of the rotating wheel is positioned outside the wheel groove.

In the multi-processing-table reciprocating magnetron sputtering vacuum coating machine, gaps are formed between two side parts of the rotating wheel and two inner side surfaces of the wheel groove, and clamping grooves for the rotating wheel to be clamped are formed in the positions, corresponding to the rotating wheel, of the lower end parts of the upper moving plate and the lower moving plate.

In the multi-processing-table reciprocating magnetron sputtering vacuum coating machine, the moving mechanism is provided with a first sensor matched with the upper moving plate and a second sensor matched with the lower moving plate.

Compared with the prior art, the utility model has the advantages of:

1. the utility model discloses a but moving mechanism is last to have upper and lower layering and lateral shifting's last movable plate and move down the movable plate, and wherein a movable plate cooperatees with magnetron sputtering mechanism and is used for adding man-hour, and another movable plate is used for placing of panel, and the biplate is worked in turn with this and is improved the machining efficiency of coating machine.

2. The utility model discloses a sliding groove is provided with the sliding construction who is used for supplementary direction to slide, promotes the stability of movable plate motion through sliding construction.

3. The utility model discloses the both sides portion of rotating the wheel has the clearance with two inboard surfaces of race, and the draw-in groove installation of the lower tip of convenient movable plate and lower movable plate is fixed.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a schematic structural diagram of the middle moving mechanism of the present invention.

Fig. 3 is a partial structural sectional view of the moving mechanism of the present invention.

In the figure, 1, an outer casing; 2. an inner cavity; 3. a magnetron sputtering mechanism; 4. a moving mechanism; 5. moving the plate upwards; 6. a lower moving plate; 7. a movable door; 8. moving the frame; 9. a sliding groove; 10. a drive structure; 11. a driver; 12. a sprocket assembly; 13. a drive chain plate; 14. a driven chain wheel; 15. a chain; 16. a sliding structure; 17. a rotating wheel; 18. a wheel groove; 19. a rotating shaft; 20. a gap; 21. a card slot; 22. a first sensor; 23. a second sensor.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings.

As shown in fig. 1, a reciprocating magnetron sputtering vacuum coating machine with multiple processing stations comprises an outer casing 1, wherein the outer casing 1 is provided with a hollow inner cavity 2, a magnetron sputtering mechanism 3 and a moving mechanism 4 matched with the magnetron sputtering mechanism 3 and used for placing plates are arranged in the inner cavity 2, the moving mechanism 4 is arranged at the lower end of the magnetron sputtering mechanism 3, an upper moving plate 5 and a lower moving plate 6 which are layered up and down and can move transversely are arranged on the moving mechanism 4, one of the moving plates is matched with the magnetron sputtering mechanism 3 for processing, the other moving plate is used for placing plates, and a movable door 7 matched with the moving mechanism 4 and capable of opening and closing is arranged on the side part of the outer casing 1.

In this embodiment, the moving mechanism 4 is provided with an upper moving plate 5 and a lower moving plate 6 which are layered up and down and can move transversely, one of the moving plates is matched with the magnetron sputtering mechanism 3 for processing, the other moving plate is used for placing plates, and the two plates work alternately to improve the processing efficiency of the coating machine.

It should be understood by those skilled in the art that the magnetron sputtering mechanism 3 is one of the mechanisms in the magnetron sputtering apparatus on the market, which is relatively easily available on the market and is relatively mature prior art, and since the magnetron sputtering mechanism 3 is not the main improvement point of the technical solution, the structure thereof will not be described in detail.

In this embodiment, the moving mechanism 4 includes a moving frame 8 disposed at the bottom end of the outer casing 1, sliding grooves 9 for guiding the upper moving plate 5 and the lower moving plate 6 to move are disposed at two sides of the moving frame 8, and a driving structure 10 is disposed on the moving frame 8 and is drivingly connected to the upper moving plate 5 and the lower moving plate 6.

Preferably, the driving structure 10 includes a driver 11 and a sprocket assembly 12 drivingly connected to the driver 11, the upper moving plate 5 is connected to an upper side of the sprocket assembly 12, and the lower moving plate 6 is connected to a lower side of the sprocket assembly 12. The drive 11 may be a motor.

In more detail, the sprocket assembly 12 includes a driving chain disk 13 and a driven chain disk 14 transversely erected on the movable frame 8, the driving chain disk 13 is disposed on one side close to the driver 11 and connected to the driver 11, the driven chain disk 14 is disposed on one side of the movable frame 8 away from the driver 11, and a chain 15 is connected between the driving chain disk 13 and the driven chain disk 14.

Preferably, a sliding structure 16 for assisting the guiding sliding is arranged in each sliding groove 9.

In further detail, the sliding structure 16 includes a plurality of rotating wheels 17 disposed in the sliding slot 9, and the plurality of rotating wheels 17 are distributed along the length direction of the sliding slot 9 and can rotate in the circumferential direction relative to the sliding slot 9.

In order to improve the connection stability of the rotating wheel 17, a wheel groove 18 which is recessed downwards and is used for accommodating the rotating wheel 17 is formed in each sliding groove 9, and a rotating shaft 19 is connected between the rotating wheel 17 and the wheel groove 18.

Preferably, the diameter of the rotating wheel 17 is larger than the height of the wheel groove 18, the lower end of the rotating wheel 17 is in rolling contact with the bottom of the wheel groove 18, and the upper end of the rotating wheel 17 is positioned outside the wheel groove 18.

Gaps 20 are formed between two side parts of the rotating wheel 17 and two inner side surfaces of the wheel groove 18, and clamping grooves 21 for clamping the rotating wheel 17 are formed in the positions, corresponding to the rotating wheel 17, of the lower end parts of the upper moving plate 5 and the lower moving plate 6. The upper moving plate 5 and the lower moving plate 6 are convenient to install and fix in the clamping groove 21 at the lower end part.

The moving mechanism 4 is provided with a first sensor 22 engaged with the upper moving plate 5 and a second sensor 23 engaged with the lower moving plate 6. The first sensor 22 and the second sensor 23 are commercially available infrared sensors or collision sensors, and when the moving plate moves to a limited position, the sensors can transmit an electric signal to the driver 11, and the driver 11 can stop rotating or drive reversely.

The utility model discloses a theory of operation does: when the film coating machine works, the driver 11 drives the transmission chain disc 13 to rotate, the transmission chain disc 13 drives the driven chain disc 14 to rotate through the chain 15, so that the upper moving plate 5 and the lower moving plate 6 move, since the upper moving plate 5 is fixed to the upper portion of the chain 15, the lower moving plate 6 is fixed to the lower portion of the chain 15, when the upper moving plate 5 moves towards one side close to the magnetron sputtering mechanism 3, the product on the upper moving plate 5 is subjected to film coating treatment under the magnetron sputtering mechanism 3, the lower moving plate 6 is subjected to installation or disassembly of the product towards one side far away from the magnetron sputtering mechanism 3, when the product on the upper moving plate 5 is processed, the driver 11 is reversed, the upper moving plate 5 is upward far away from the magnetron sputtering mechanism 3 to install or disassemble the product, the product on the lower moving plate 6 enters the magnetron sputtering mechanism 3 to be processed, and the double plates work alternately to improve the processing efficiency of the film plating machine.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Although the terms of the outer housing 1, the inner cavity 2, the magnetron sputtering mechanism 3, the moving mechanism 4, the upper moving plate 5, the lower moving plate 6, the moving door 7, the moving frame 8, the sliding slot 9, the driving structure 10, the driver 11, the sprocket assembly 12, the driving sprocket 13, the driven sprocket 14, the chain 15, the sliding structure 16, the rotating wheel 17, the wheel slot 18, the rotating shaft 19, the gap 20, the card slot 21, the first sensor 22, the second sensor 23, etc. are used more herein, the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention and should not be interpreted as imposing any additional limitations that are contrary to the spirit of the present invention.

Claims

1. The utility model provides a reciprocating type magnetron sputtering vacuum coating machine of many processing platforms, includes outer casing (1), outer casing (1) hollow inner chamber (2) has, its characterized in that, inner chamber (2) in be provided with magnetron sputtering mechanism (3) and with magnetron sputtering mechanism (3) matched with be used for placing moving mechanism (4) of panel, moving mechanism (4) set up in the lower extreme of magnetron sputtering mechanism (3), and moving mechanism (4) are gone up and have upper moving plate (5) and lower moving plate (6) that upper and lower layering and lateral shifting just can be used for adding man-hour, another moving plate is used for placing of panel, the lateral part of outer casing (1) is provided with the removal door (7) that can open and shut with moving mechanism (4) matched with.

2. The reciprocating magnetron sputtering vacuum coating machine of claim 1, wherein the moving mechanism (4) comprises a moving frame (8) arranged at the bottom end of the outer casing (1), sliding grooves (9) for guiding the upper moving plate (5) and the lower moving plate (6) to move are arranged at two sides of the moving frame (8), and a driving structure (10) which is connected to the upper moving plate (5) and the lower moving plate (6) in a driving way is arranged on the moving frame (8).

3. The multi-stage reciprocating magnetron sputtering vacuum coater according to claim 2, wherein said driving structure (10) comprises a driver (11) and a sprocket assembly (12) drivingly connected to the driver (11), said upper moving plate (5) is connected to the upper side of the sprocket assembly (12), and said lower moving plate (6) is connected to the lower side of the sprocket assembly (12).

4. The multi-worktable reciprocating type magnetron sputtering vacuum coating machine according to claim 3, wherein the chain wheel assembly (12) comprises a driving chain disc (13) and a driven chain disc (14) which are transversely erected on the movable frame (8), the driving chain disc (13) is arranged on one side close to the driver (11) and connected with the driver (11), the driven chain disc (14) is arranged on one side of the movable frame (8) far away from the driver (11), and a chain (15) is connected between the driving chain disc (13) and the driven chain disc (14).

5. The multi-stage reciprocating magnetron sputtering vacuum coater according to claim 2, wherein each of said slide grooves (9) is provided with a slide structure (16) for assisting guide sliding.

6. The multi-worktable reciprocating type magnetron sputtering vacuum coating machine according to claim 5, wherein the sliding structure (16) comprises a plurality of rotating wheels (17) arranged in the sliding groove (9), and the plurality of rotating wheels (17) are distributed along the length direction of the sliding groove (9) and can rotate in the circumferential direction relative to the sliding groove (9).

7. The multi-worktable reciprocating type magnetron sputtering vacuum coating machine according to claim 6, wherein each sliding groove (9) is internally provided with a wheel groove (18) which is concave downwards and is used for accommodating the rotating wheel (17), and a rotating shaft (19) is connected between the rotating wheel (17) and the wheel groove (18).

8. The multi-stage reciprocating magnetron sputtering vacuum coater according to claim 7, wherein the diameter of the rotating wheel (17) is larger than the height of the wheel groove (18), the lower end of the rotating wheel (17) is in rolling contact with the bottom of the wheel groove (18), and the upper end of the rotating wheel (17) is positioned outside the wheel groove (18).

9. The multi-stage reciprocating magnetron sputtering vacuum coater according to claim 8, wherein gaps (20) are formed between the two side parts of the rotating wheel (17) and the two inner side surfaces of the wheel groove (18), and clamping grooves (21) for the rotating wheel (17) to be clamped are formed in the positions, corresponding to the rotating wheel (17), of the lower end parts of the upper moving plate (5) and the lower moving plate (6).

10. The multi-stage reciprocating magnetron sputtering vacuum coater according to claim 1, wherein the moving mechanism (4) is provided with a first sensor (22) which is engaged with the upper moving plate (5) and a second sensor (23) which is engaged with the lower moving plate (6).