CN213170346U - Silicon wafer discharging machine - Google Patents
Silicon wafer discharging machine Download PDFInfo
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- CN213170346U CN213170346U CN202022229930.8U CN202022229930U CN213170346U CN 213170346 U CN213170346 U CN 213170346U CN 202022229930 U CN202022229930 U CN 202022229930U CN 213170346 U CN213170346 U CN 213170346U
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- Prior art keywords
- horizontal linear
- linear conveyor
- silicon wafer
- conveyor
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 53
- 239000010703 silicon Substances 0.000 title claims abstract description 53
- 238000007599 discharging Methods 0.000 title claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 244000309464 bull Species 0.000 claims description 6
- 230000007306 turnover Effects 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract description 35
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to the technical field of silicon chip unloading equipment and specifically relates to silicon chip unloading machine. The wafer discharging machine comprises a rack, an initial-section horizontal linear conveyor, an intermediate-section horizontal linear conveyor, a final-section upper-layer horizontal linear conveyor, a final-section lower-layer horizontal linear conveyor, a silicon wafer turning mechanism, a lifting mechanism and a basket positioning mechanism, wherein the initial-section horizontal linear conveyor, the intermediate-section horizontal linear conveyor, the final-section upper-layer horizontal linear conveyor and the final-section lower-layer horizontal linear conveyor are mounted on the rack. The utility model discloses a horizontal linear conveyor of initial segment and horizontal linear conveyor of interlude convey the silicon chip forward. The lifting mechanism drives the flower basket to move up and down, so that the flower basket filled with the silicon wafers is conveyed to the upper-layer horizontal linear conveyor at the tail section or the lower-layer horizontal linear conveyor at the tail section. This application has improved the efficiency that the silicon chip went into the basket conveying.
Description
Technical Field
The utility model belongs to the technical field of silicon chip unloading equipment and specifically relates to silicon chip unloading machine.
Background
During the production and processing of the silicon wafers, the silicon wafers are required to be moved into a silicon wafer basket one by one in a preset orientation for loading. However, the prior silicon wafers are moved into the basket with low working efficiency.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem described in the background art, the utility model provides a silicon wafer discharging machine. The silicon wafers are conveyed forwards through the initial section horizontal linear conveyor and the middle section horizontal linear conveyor. The lifting mechanism drives the flower basket to move up and down, so that the flower basket filled with the silicon wafers is conveyed to the upper-layer horizontal linear conveyor at the tail section or the lower-layer horizontal linear conveyor at the tail section. This application has improved the efficiency that the silicon chip went into the basket conveying.
The utility model provides a technical scheme that its technical problem adopted is:
a silicon wafer discharging machine comprises a rack, a first-stage horizontal linear conveyor, a middle-stage horizontal linear conveyor, a last-stage upper-layer horizontal linear conveyor, a last-stage lower-layer horizontal linear conveyor, a silicon wafer turning mechanism, a lifting mechanism and a basket positioning mechanism, wherein the rack is provided with the first-stage horizontal linear conveyor, the middle-stage horizontal linear conveyor, the last-stage upper-layer horizontal linear conveyor, the last-stage lower-layer horizontal linear conveyor, the silicon wafer turning mechanism and the lifting mechanism, the first-stage horizontal linear conveyor, the middle-stage horizontal linear conveyor and the last-stage upper-layer horizontal linear conveyor are sequentially connected end to form a horizontal linear conveying line, the last-stage lower-layer horizontal linear conveyor is positioned below the last-stage upper-layer horizontal linear conveyor, the last-stage upper-layer horizontal linear conveyor is parallel to the last-stage lower-layer horizontal linear conveyor, the lifting mechanism is positioned between the middle-stage horizontal linear conveyor and the last-stage upper-layer horizontal linear conveyor, a horizontal linear conveyor and a flower basket positioning mechanism are mounted on a sliding seat of the lifting mechanism, and the flower basket positioning mechanism is located above the horizontal linear conveyor.
Specifically, the initial-stage horizontal linear conveyor, the middle-stage horizontal linear conveyor, the final-stage upper-layer horizontal linear conveyor and the final-stage lower-layer horizontal linear conveyor are all double-belt conveyors.
Specifically, silicon chip turn-over mechanism comprises motor, plectane, and the organism of motor is fixed in the frame, is fixed with the bull stick on the output shaft of motor, is fixed with two plectanes on the bull stick, and two plectanes are located the horizontal linear transporter of interlude about both ends respectively, and the bull stick passes the horizontal linear transporter of interlude, and evenly distributed has the several embedded groove that is used for placing the silicon chip on the plectane.
Specifically, the lifting mechanism is a linear module.
Specifically, basket of flowers positioning mechanism comprises locating plate and location cylinder, and the cylinder body of location cylinder is fixed on elevating system's slide, and the locating plate is fixed on the piston rod of location cylinder.
The utility model has the advantages that: the utility model provides a silicon chip discharging machine. The silicon wafers are conveyed forwards through the initial section horizontal linear conveyor and the middle section horizontal linear conveyor. The lifting mechanism drives the flower basket to move up and down, so that the flower basket filled with the silicon wafers is conveyed to the upper-layer horizontal linear conveyor at the tail section or the lower-layer horizontal linear conveyor at the tail section. This application has improved the efficiency that the silicon chip went into the basket conveying.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of the present invention;
in the figure, 1, a rack, 2, a first-stage horizontal linear conveyor, 3, a middle-stage horizontal linear conveyor, 4, a horizontal linear conveyor, 5, a last-stage upper-layer horizontal linear conveyor, 6, a last-stage lower-layer horizontal linear conveyor, 7, a silicon wafer overturning mechanism, 8, a lifting mechanism, 9, a basket positioning mechanism, 71, a motor and 72, a circular plate are arranged.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic drawings and illustrate the basic structure of the present invention only in a schematic manner, and thus show only the components related to the present invention.
Fig. 1 is a schematic structural diagram of the present invention.
A silicon wafer discharging machine comprises a rack 1, a first-stage horizontal linear conveyor 2, a middle-stage horizontal linear conveyor 3, a horizontal linear conveyor 4, a last-stage upper-layer horizontal linear conveyor 5, a last-stage lower-layer horizontal linear conveyor 6, a silicon wafer overturning mechanism 7, a lifting mechanism 8 and a basket positioning mechanism 9, wherein the first-stage horizontal linear conveyor 2, the middle-stage horizontal linear conveyor 3, the last-stage upper-layer horizontal linear conveyor 5, the last-stage lower-layer horizontal linear conveyor 6, the silicon wafer overturning mechanism 7 and the lifting mechanism 8 are arranged on the rack 1, the first-stage horizontal linear conveyor 2, the middle-stage horizontal linear conveyor 3 and the last-stage upper-layer horizontal linear conveyor 5 are sequentially connected end to form a horizontal linear conveying line, the last-stage lower-layer horizontal linear conveyor 6 is positioned below the last-stage upper-layer horizontal linear conveyor 5, and the last-stage upper-layer horizontal linear conveyor 5 is parallel to the last-stage lower-layer horizontal linear conveyor 6, the lifting mechanism 8 is positioned between the middle section horizontal linear conveyor 3 and the end section upper layer horizontal linear conveyor 5, the horizontal linear conveyor 4 and the flower basket positioning mechanism 9 are installed on a sliding seat of the lifting mechanism 8, and the flower basket positioning mechanism 9 is positioned above the horizontal linear conveyor 4.
The initial section horizontal linear conveyor 2, the middle section horizontal linear conveyor 3, the horizontal linear conveyor 4, the end section upper layer horizontal linear conveyor 5 and the end section lower layer horizontal linear conveyor 6 are all double-belt conveyors.
The silicon wafer turnover mechanism 7 comprises a motor 71 and circular plates 72, wherein the body of the motor 71 is fixed on the frame 1, a rotating rod is fixed on an output shaft of the motor 71, two circular plates 72 are fixed on the rotating rod, the two circular plates 72 are respectively positioned at the left end and the right end of the middle section horizontal linear conveyor 3, the rotating rod penetrates through the middle section horizontal linear conveyor 3, and a plurality of embedded grooves for placing silicon wafers are uniformly distributed on the circular plates 72.
The silicon wafer turnover mechanism 7 works in such a way that the motor 71 can drive the rotating rod and the two circular plates 72 on the rotating rod to rotate, firstly, the openings of the embedded grooves on the two circular plates 72 are rotated to be flush with the belt conveying surface of the middle section horizontal linear conveyor 3, and then when the belt of the middle section horizontal linear conveyor 3 conveys the silicon wafer forwards, the silicon wafer can move into the embedded grooves of the two circular plates 72. The two circular plates 72 are then rotated 180 degrees so that the entire wafer is facing upside down and finally the wafer is replaced on the belt of the intermediate horizontal linear conveyor 3 and removed.
The lifting mechanism 8 is a linear module.
The flower basket positioning mechanism 9 is composed of a positioning plate and a positioning cylinder, the cylinder body of the positioning cylinder is fixed on the sliding seat of the lifting mechanism 8, and the positioning plate is fixed on the piston rod of the positioning cylinder.
As shown in the attached figure 1, the working mode of the silicon wafer horizontal conveying device is that silicon wafers are placed on a belt of a first-stage horizontal linear conveyor 2 one by one to be conveyed horizontally. The initial horizontal linear conveyor 2 conveys the silicon wafers to a belt of the middle horizontal linear conveyor 3 to continue to convey horizontally forwards. In the process of conveying, the silicon wafer overturning mechanism 7 overturns the silicon wafer by 180 degrees, so that the original bottom surface of the silicon wafer faces upwards. And then the middle section horizontal linear conveyor 3 horizontally conveys the overturned silicon chips into a flower basket on the horizontal linear conveyor 4. The positioning cylinder of the flower basket positioning mechanism 9 drives the positioning plate to move downwards, so that the flower basket is pressed on the horizontal linear conveyor 4. After a silicon wafer is filled in the flower basket, the flower basket is driven by the lifting mechanism 8 to move upwards or downwards for a certain distance until the second vacant bearing position is aligned with the discharge hole of the middle section horizontal linear conveyor 3 to receive the silicon wafer until the flower basket is filled. And then the lifting mechanism 8 drives the full-load flower basket to move up and down, the flower basket is moved into the last upper layer horizontal linear conveyor 5 or the last lower layer horizontal linear conveyor 6, and the flower basket is horizontally moved to a discharging position by the last upper layer horizontal linear conveyor 5 or the last lower layer horizontal linear conveyor 6. And finally, the basket positioning mechanism 9 releases the basket and takes away the basket.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (5)
1. A silicon wafer discharging machine is characterized in that: comprises a frame (1), an initial horizontal linear conveyor (2), a middle horizontal linear conveyor (3), a horizontal linear conveyor (4), a final upper horizontal linear conveyor (5), a final lower horizontal linear conveyor (6), a silicon wafer turning mechanism (7), a lifting mechanism (8) and a basket positioning mechanism (9), wherein the initial horizontal linear conveyor (2), the middle horizontal linear conveyor (3), the final upper horizontal linear conveyor (5), the final lower horizontal linear conveyor (6), the silicon wafer turning mechanism (7) and the lifting mechanism (8) are arranged on the frame (1), the initial horizontal linear conveyor (2), the middle horizontal linear conveyor (3) and the final upper horizontal linear conveyor (5) are sequentially connected end to form a horizontal linear conveying line, and the final lower horizontal linear conveyor (6) is positioned below the final upper horizontal linear conveyor (5), horizontal linear conveyor (5) of end upper strata and horizontal linear conveyor (6) of end lower floor parallel, elevating system (8) are located between horizontal linear conveyor (3) of interlude and horizontal linear conveyor (5) of end upper strata, install horizontal linear conveyor (4) and basket of flowers positioning mechanism (9) on the slide of elevating system (8), and basket of flowers positioning mechanism (9) are located horizontal linear conveyor (4) top.
2. The silicon wafer loading machine of claim 1, wherein: the primary horizontal linear conveyor (2), the middle horizontal linear conveyor (3), the horizontal linear conveyor (4), the end upper horizontal linear conveyor (5) and the end lower horizontal linear conveyor (6) are double-belt conveyors.
3. The silicon wafer loading machine of claim 1, wherein: silicon chip turn-over mechanism (7) comprise motor (71), plectane (72), and the organism of motor (71) is fixed on frame (1), is fixed with the bull stick on the output shaft of motor (71), is fixed with two plectanes (72) on the bull stick, and two plectanes (72) are located the horizontal linear transporter in interlude (3) respectively and control both ends, and the bull stick passes horizontal linear transporter in interlude (3), and evenly distributed has the embedded groove that the several is used for placing the silicon chip on plectane (72).
4. The silicon wafer loading machine of claim 1, wherein: the lifting mechanism (8) is a linear module.
5. The silicon wafer loading machine of claim 1, wherein: the flower basket positioning mechanism (9) is composed of a positioning plate and a positioning cylinder, the cylinder body of the positioning cylinder is fixed on the sliding seat of the lifting mechanism (8), and the positioning plate is fixed on the piston rod of the positioning cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022229930.8U CN213170346U (en) | 2020-10-09 | 2020-10-09 | Silicon wafer discharging machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022229930.8U CN213170346U (en) | 2020-10-09 | 2020-10-09 | Silicon wafer discharging machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213170346U true CN213170346U (en) | 2021-05-11 |
Family
ID=75778240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022229930.8U Expired - Fee Related CN213170346U (en) | 2020-10-09 | 2020-10-09 | Silicon wafer discharging machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213170346U (en) |
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2020
- 2020-10-09 CN CN202022229930.8U patent/CN213170346U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210511 |