CN213150747U - Automatic wafer box uncapping machine in duplex position - Google Patents
Automatic wafer box uncapping machine in duplex position Download PDFInfo
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- CN213150747U CN213150747U CN202022644782.6U CN202022644782U CN213150747U CN 213150747 U CN213150747 U CN 213150747U CN 202022644782 U CN202022644782 U CN 202022644782U CN 213150747 U CN213150747 U CN 213150747U
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- frame
- fixedly connected
- wafer box
- electric putter
- wafer
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Abstract
The utility model discloses an automatic wafer box uncapping machine in duplex position, its technical scheme is: including two conveyer belts, still include shell subassembly, shell subassembly includes the frame, the equal fixedly connected with transparent glass in lateral wall and the top of frame, the lower extreme fixedly connected with switch board of frame, two slide rails of the inner wall fixedly connected with of frame, this kind of automatic wafer box uncapping machine beneficial effect of duplex position is: through setting up the shell subassembly, can utilize frame cooperation transparent glass, thereby protect the wafer, can avoid when opening the wafer box and open the wafer box after, the dust in the air pollutes the wafer, on the other hand, through setting up the mechanism of uncapping, utilize a plurality of electric putter's cooperation, with the artifical wafer box of opening of mechanical replacement, degree of automation is higher, can cooperate the high-speed production of assembly line, and improved production efficiency, and not fragile wafer box makes things convenient for recycling of wafer box.
Description
Technical Field
The utility model relates to a semiconductor processing equipment field, concretely relates to automatic wafer box uncapping machine in duplex position.
Background
The cassettes are used primarily for the placement and transport of wafers in semiconductor manufacturing, and are used by chip manufacturers to handle and store wafers for ease of transport and to minimize the risk of contamination.
When a semiconductor in a wafer box is subjected to deep processing, the wafer box needs to be opened to take out the wafer inside, in the prior art, the wafer box is usually opened manually by a worker, the opening mode is complex in operation, dust in the air is polluted by the wafer in the opening process, and on the other hand, the wafer box is easily damaged by manual operation, so that the wafer box is not beneficial to reutilization of the wafer box.
Therefore, the invention is necessary to invent the double-station automatic wafer box cover opener.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model provides an automatic wafer box uncapping machine in duplex position through setting up the mechanism of uncapping, utilizes a plurality of electric putter's cooperation to the wafer box is opened to mechanical replacement manual work, opens the wafer box with manual the opening of solution manual work, and the operation is comparatively loaded down with trivial details, opens the problem that the dust that the in-process leads to in the air caused the condition of pollution to the wafer.
In order to achieve the above object, the present invention provides the following technical solutions: the utility model provides an automatic wafer box uncapping machine in duplex position, includes two conveyer belts, still includes:
the shell assembly comprises a frame, transparent glass is fixedly connected to the side wall and the top of the frame, a control cabinet is fixedly connected to the lower end of the frame, two sliding rails are fixedly connected to the inner wall of the frame, a cover opening mechanism is slidably connected to the upper surfaces of the sliding rails, a control panel is embedded into one side of the frame, and the control panel is electrically connected with the control cabinet;
mechanism of uncapping includes two support frames, two one side curb plate fixedly connected with slide bar of support frame, and slide bar and slide rail sliding connection set up, one of them the first electric putter of one side fixedly connected with of slide rail, and first electric putter and support frame fixed connection, the inner wall fixedly connected with second electric putter of support frame, and second electric putter's lower extreme fixedly connected with door font support, every the third electric putter that two symmetries of lower extreme fixedly connected with of door font support set up, and the equal fixedly connected with plectrum of one end that two third electric putter are close to each other.
Preferably, two rows of parallel limiting grooves are formed in the upper surface of the conveying belt, and the conveying belt is electrically connected with the control cabinet through a conducting wire.
Preferably, one side of the frame is fixedly connected with a receiving plate, and the receiving plate is arranged close to the cover opening mechanism.
Preferably, the frame is made of aluminum profiles, and the transparent glass is made of tempered glass.
Preferably, one side fixedly connected with alarm lamp of frame, and alarm lamp passes through wire and switch board electric connection.
The utility model has the advantages that:
1. the utility model discloses in, through setting up the shell subassembly, can utilize frame cooperation transparent glass to protect the wafer, can avoid when opening the wafer box and open the wafer box after, the dust pollution wafer in the air, on the other hand, through setting up the mechanism of uncapping, utilize a plurality of electric putter's cooperation, with the artifical wafer box of opening of mechanical substitution, degree of automation is higher, can cooperate the high-speed production of assembly line, production efficiency is improved, and not fragile wafer box makes things convenient for recycling of wafer box.
2. The utility model discloses in, through setting up the spacing groove, can carry on spacingly to the wafer box that the conveyer belt is hindered to better cooperation mechanism of uncapping opens the operation of wafer box, connects the flitch through the setting for accept the wafer box lid, thereby retrieve the lid, convenient reuse reduces the waste of unnecessary and reduces wafer packaging cost.
Drawings
Fig. 1 is a schematic view of the overall structure provided by the present invention;
fig. 2 is a schematic view of a partial structure provided by the present invention;
fig. 3 is a schematic view of the front view structure provided by the present invention;
FIG. 4 is an enlarged schematic view of the structure at A in FIG. 3;
in the figure: 1. a conveyor belt; 2. a frame; 3. transparent glass; 4. a slide rail; 5. a control panel; 6. a support frame; 7. a slide bar; 8. a first electric push rod; 9. a second electric push rod; 10. a bracket shaped like a Chinese character 'men'; 11. a third electric push rod; 12. a shifting sheet; 13. a material receiving plate; 14. an alarm lamp; 15. a wafer cassette; 16. a control cabinet.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
Embodiment 1, refer to fig. 1-4, the utility model provides an automatic wafer box uncapping machine in duplex position, including two conveyer belts 1, still include:
the shell assembly comprises a frame 2, transparent glass 3 is fixedly connected to the side wall and the top of the frame 2, a control cabinet 16 is fixedly connected to the lower end of the frame 2, two slide rails 4 are fixedly connected to the inner wall of the frame 2, a cover opening mechanism is slidably connected to the upper surfaces of the slide rails 4, a control panel 5 is embedded in one side of the frame 2, and the control panel 5 is electrically connected with the control cabinet 16;
mechanism of uncapping includes two support frames 6, two one side curb plate fixedly connected with slide bar 7 of support frame 6, and slide bar 7 and slide rail 4 sliding connection set up, one of them slide rail 4's one side fixedly connected with first electric putter 8, and first electric putter 8 and support frame 6 fixed connection, the inner wall fixedly connected with second electric putter 9 of support frame 6, and the lower extreme fixedly connected with door font support 10 of second electric putter 9, every the third electric putter 11 that two symmetries of lower extreme fixedly connected with of door font support 10 set up, and the equal fixedly connected with plectrum 12 of one end that two third electric putter 11 are close to each other.
Further, two rows of parallel arrangement's spacing grooves are seted up to the upper surface of conveyer belt 1, and conveyer belt 1 passes through wire and 16 electric connection of switch board, and the spacing groove is used for fixing a position wafer box 15 to the cooperation uncap mechanism operation guarantees that uncap mechanism can be accurate open the lid of wafer box 15.
Further, one side fixedly connected with of frame 2 connects flitch 13, and connects flitch 13 to be close to the mechanism setting of uncapping, after opening the lid of wafer box 15, uncapping the mechanism and can move the lid of wafer box 15 to connect on the flitch 13 under the drive of first electric putter 8 to collect and reuse the lid of wafer box 15.
Further, the frame 2 is made of an aluminum profile material, and the transparent glass 3 is made of tempered glass.
Further, one side fixedly connected with alarm lamp 14 of frame 2, and alarm lamp 14 passes through wire and 16 electric connection of switch board, through setting up alarm lamp 14, can cooperate the automation equipment operation in the switch board 16, when the wafer box uncapping machine breaks down, in time sends out the police dispatch newspaper.
The utility model discloses a use as follows: when the utility model is used, firstly, the wafer box 15 is placed on the two conveyer belts 1 in sequence, the cover opening machine of the wafer box is started, the two conveyer belts 1 alternately run, after one conveyer belt 1 conveys the wafer box 15 to the lower part of the cover opening mechanism, the control cabinet 16 controls the first electric push rod 8 to stretch and contract to drive the support frame 6 to move to the upper part of the wafer box 15, then the second electric push rod 9 extends to move the two plectrums 12 to the lower part of the cover of the wafer box 15, then the two third electric push rods 11 extend to move the third electric push rod 11 to the position of the cover of the wafer box 15, then the second electric push rod 9 is controlled to contract in short distance to enable the plectrum 12 to abut against one side of the clamping blocks at the two sides of the cover of the wafer box 15, then the third electric push rod 11 is controlled to contract, at this time, the plectrum 12 drives the clamping blocks at the two sides of the cover of the wafer box, thereby with the box body separation of 15 lid of wafer box and wafer box 15, then control the shrink of second electric putter 9 to the flow has been uncapped in the completion, first electric putter 8 drives support frame 6 and removes to connecing flitch 13 top afterwards, controls the shrink of third electric putter 11 again. At this moment, the cover of the wafer box 15 drops on the material receiving plate 13 under the action of gravity, meanwhile, the two conveying belts 1 continue to alternately operate, the wafer box 15 is moved to the position below the supporting frame 6, so that the cover opening efficiency is improved, the double-station automatic wafer box cover opening machine is simple to operate, the automation degree is high, the production efficiency is high, the double-station automatic wafer box cover opening machine has great practicability, and the double-station automatic wafer box cover opening machine can be convenient for a semiconductor enterprise to produce.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art may modify the present invention or modify it into an equivalent technical solution by using the technical solutions described above. Therefore, any simple modifications or equivalent replacements made according to the technical solution of the present invention belong to the scope of the claimed invention as far as possible.
Claims (5)
1. The utility model provides an automatic wafer box uncapping machine in duplex position, includes two conveyer belts (1), its characterized in that: further comprising:
the shell assembly comprises a frame (2), transparent glass (3) is fixedly connected to the side wall and the top of the frame (2), a control cabinet (16) is fixedly connected to the lower end of the frame (2), two sliding rails (4) are fixedly connected to the inner wall of the frame (2), a cover opening mechanism is slidably connected to the upper surfaces of the sliding rails (4), a control panel (5) is embedded into one side of the frame (2), and the control panel (5) is electrically connected with the control cabinet (16);
mechanism uncaps includes two support frames (6), two one side curb plate fixedly connected with slide bar (7) of support frame (6), and slide bar (7) and slide rail (4) sliding connection set up, one of them one side fixedly connected with first electric putter (8) of slide rail (4), and first electric putter (8) and support frame (6) fixed connection, the inner wall fixedly connected with second electric putter (9) of support frame (6), and the lower extreme fixedly connected with door font support (10) of second electric putter (9), every third electric putter (11) that the lower extreme fixedly connected with of door font support (10) two symmetries set up, and the equal fixedly connected with plectrum (12) of one end that two third electric putter (11) are close to each other.
2. The double-station automatic wafer cassette lid opener according to claim 1, characterized in that: two rows of limiting grooves which are arranged in parallel are formed in the upper surface of the conveying belt (1), and the conveying belt (1) is electrically connected with the control cabinet (16) through a conducting wire.
3. The double-station automatic wafer cassette lid opener according to claim 1, characterized in that: one side fixedly connected with of frame (2) connects flitch (13), and connects flitch (13) to be close to the mechanism setting of uncapping.
4. The double-station automatic wafer cassette lid opener according to claim 1, characterized in that: the frame (2) is made of an aluminum profile material, and the transparent glass (3) is made of toughened glass.
5. The double-station automatic wafer cassette lid opener according to claim 1, characterized in that: one side fixedly connected with alarm lamp (14) of frame (2), and alarm lamp (14) pass through wire and switch board (16) electric connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022644782.6U CN213150747U (en) | 2020-11-16 | 2020-11-16 | Automatic wafer box uncapping machine in duplex position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022644782.6U CN213150747U (en) | 2020-11-16 | 2020-11-16 | Automatic wafer box uncapping machine in duplex position |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213150747U true CN213150747U (en) | 2021-05-07 |
Family
ID=75722630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022644782.6U Active CN213150747U (en) | 2020-11-16 | 2020-11-16 | Automatic wafer box uncapping machine in duplex position |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213150747U (en) |
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2020
- 2020-11-16 CN CN202022644782.6U patent/CN213150747U/en active Active
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