CN212848329U - Nozzle air flue cleaning jig - Google Patents

Abstract

The utility model provides a nozzle air flue cleaning jig, which comprises a jig body, wherein the jig body comprises an upper water passing part, a lower bearing part and a water filling port arranged on the upper water passing part, a spray head to be cleaned is placed between the upper water passing part and the lower bearing part in a limiting way, and a cleaning solution is introduced into and flows through an air hole of the spray head through the water filling port for cleaning; through setting up the tool body of compriseing last logical water portion and lower accepting portion, both form an open installation space through demountable installation, and set up the water filling port on last logical water portion, will treat abluent shower nozzle and install the back in tool body space and through utilizing ultrapure water to force the air pocket, reach the clear purpose of air flue, and then effectively get rid of the micronic dust particle in the air flue, reduction in production cost improves product quality, the shower nozzle air flue that exists has been solved among the prior art can't wash, need frequently scrap the technical problem of changing.

Description

Nozzle air flue cleaning jig

Technical Field

The utility model relates to a semiconductor manufacturing field, concretely relates to nozzle air flue washs tool.

Background

The MESA model belongs to one of the semiconductor manufacturing rings, is mainly used in the field of dry plasma etchers, and is widely used in processes below 16 nm. The 16nm process belongs to the most advanced process field in China, and has fine process requirements due to the process miniaturization, so that the jet head part in an MESA machine type has high cleanliness requirements.

Chinese utility model patent application No. CN201280026355.7 discloses a gas distribution showerhead for an inductively coupled plasma etching reactor, a processing chamber in which a semiconductor substrate is processed; a substrate support on which a semiconductor substrate is supported during semiconductor substrate processing; and an antenna operable to generate and maintain a plasma in the processing chamber. The ceramic showerhead forms a dielectric window of the chamber and the gas delivery system is operable to alternately supply an etching gas and a deposition gas to the plenum of the showerhead and to replace the etching gas in the plenum with the deposition gas within 200 milliseconds.

However, the air passage (especially in the air hole part) in the existing spray head part gradually accumulates impurities due to the increase of the using time, when the impurities are accumulated to a certain degree, the instability of production is greatly increased, most users choose to discard and replace the impurities as a main means, most parts of production equipment related to the integrated circuit are imported abroad at a low price, and frequent discard and replacement are a high cost burden for the users.

SUMMERY OF THE UTILITY MODEL

To above problem, the utility model provides a nozzle air flue washs tool, through setting up the tool body of being constituteed by last logical water portion and lower accepting portion, both form an open installation space through demountable installation, and set up the water filling port on last logical water portion, will treat abluent shower nozzle and install and flow through the gas pocket through utilizing ultrapure water compulsory after this internal space of tool, reach the clear purpose of air flue, and then effectively get rid of the micronic dust particle in the air flue, the production cost is reduced, the product quality is improved, the shower nozzle air flue that exists among the prior art can't wash, need frequently scrap the technical problem of changing is solved.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides a nozzle air flue washs tool, includes the tool body, the tool body include go up water portion, lower accepting portion and set up in go up the water filling port in the water portion, treat that abluent shower nozzle is spacing place in go up between water portion and the lower accepting portion, the washing liquid by the water filling port lets in and flows through wash in the gas pocket of shower nozzle.

Preferably, an open space for accommodating the head is formed between the upper water passage part and the lower receiving part, and a drain port is provided at the center of the bottom of the lower receiving part.

Preferably, the upper water passing part comprises a top cover matched with the appearance size of the spray head and a mounting seat integrally formed with the bottom of the top cover, and the top limiting cover of the spray head is arranged in the top cover.

Preferably, the center of the lower bearing part is provided with an installation groove matched with the external dimension of the spray head, and the bottom of the spray head is limited and placed in the installation groove.

Preferably, the cleaning liquid is ultrapure water.

Preferably, the upper water passage part and the lower receiving part are detachably connected.

Preferably, the upper water passage portion and the lower receiving portion are fixedly connected by screws.

Preferably, four corners of the bottom surface of the upper water passing part are provided with bolts, and four corners of the top surface of the lower bearing part are correspondingly provided with jack columns for inserting the bolts.

Preferably, the water injection port is provided to penetrate through a center of the upper water passage.

Preferably, the jig body is made of PP materials.

The beneficial effects of the utility model reside in that:

(1) the utility model discloses a set up the tool body that comprises last portion of logical water and lower portion of accepting, both form an open installation space through demountable installation to set up the water filling port on last portion of logical water, will wait to wash the shower nozzle install in tool body space back through utilizing ultrapure water to force to flow through the gas pocket, reach the clear purpose of air flue, and then effectively get rid of the micronic dust particle in the air flue, reduction in production cost improves product quality, has solved the technical problem that the shower nozzle air flue that exists in the prior art can't wash, need frequently scrap the change;

(2) the utility model forms an open space for installing the spray head after the upper water-passing part and the lower bearing part are fixedly connected through the structural arrangement of the upper water-passing part and the lower bearing part, and the whole structure is favorable for the outflow of the cleaning liquid through the drainage port arranged at the bottom center of the lower bearing part;

(3) through adopting the utility model discloses a after the cleaning jig washs, utilize liquid micronic dust particle counter as the tester, the micronic dust particle content in the ultrapure water of shower nozzle is flowed in the real-time test, through 2 hours's test, can reach the effect that the maximum particle size of micronic dust particle reduces to 0.2 micron and micronic dust particle content is by exceeding 10000 and falling to 10.

Drawings

FIG. 1 is a schematic view of the cleaning jig and the nozzle mounting structure according to the present invention;

FIG. 2 is a schematic structural view of the lower receiving portion of the present invention;

fig. 3 is a schematic structural view of the upper water inlet portion of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Example one

As shown in fig. 1-2, a nozzle airway cleaning jig comprises a jig body 100, wherein the jig body 100 comprises an upper water passing portion 1, a lower receiving portion 2 and a water injection port 3 arranged on the upper water passing portion 1, a nozzle 4 to be cleaned is placed between the upper water passing portion 1 and the lower receiving portion 2 in a limited manner, and a cleaning solution is introduced from the water injection port 3 and flows through an air hole 40 of the nozzle 4 for cleaning.

Because the material of the nozzle body is ceramic, the air outlet part is coated with the alumina coating, and the coating of the alumina coating cannot be treated by a chemical soaking or physical grinding mode. In this embodiment, through setting up the tool body 100 of compriseing last logical water portion 1 and lower accepting part 2, both form an open installation space through demountable installation, and set up water filling port 3 on last logical water portion 1, but treat abluent shower nozzle 4 spacing installation in tool body space, let in ultrapure water by water filling port 3 again, utilize ultrapure water to force to flow through gas pocket 40, reach the clear purpose of air flue, and then effectively get rid of the micronic dust particle in the air flue, and the production cost is reduced, and the product quality is improved simultaneously.

It is worth to be noted that, after the cleaning fixture described in this embodiment is used for cleaning, the liquid particle counter is used as a tester to test the content of the particles in the ultrapure water flowing through the nozzle in real time, and after 2 hours of testing, the effects that the maximum particle size of the particles is reduced to 0.2 micron and the content of the particles is reduced from more than 10000 particles to 10 can be achieved, and the use verification of the client can meet the production requirements of customers.

Preferably, an open space for placing the spray head 4 is formed between the upper water passing part 1 and the lower receiving part 2, and a liquid discharge port 21 is provided at the center of the bottom of the lower receiving part 2.

In the embodiment, the upper water passing part 1 and the lower receiving part 2 are arranged to form an open space for mounting the spray head 4 after being fixedly connected, and the whole structure is beneficial to flowing out the cleaning liquid by arranging the liquid discharge through hole 21 at the bottom center of the lower receiving part 2.

Preferably, as shown in fig. 3, the upper water inlet 1 includes a top cover 11 adapted to the outer dimension of the head 4 and a mounting seat 12 integrally formed with the bottom of the top cover 11, and the top stopper cover of the head 4 is provided in the top cover 11.

Preferably, a mounting groove 41 matched with the outer dimension of the spray head 4 is formed in the center of the lower bearing part 2, and the bottom of the spray head 4 is limited and placed in the mounting groove 41.

Preferably, the cleaning liquid is ultrapure water.

Preferably, the upper water passing part 1 and the lower receiving part 2 are detachably connected.

Preferably, the water injection port 3 is provided through the center of the upper water passage portion 1.

Preferably, the jig body 100 is made of PP to prevent the nozzle from being damaged due to excessive hardness of the jig.

Example two

For simplicity, only the differences between the second embodiment and the first embodiment will be described below; the second embodiment is different from the first embodiment in that:

preferably, the upper water passing part 1 and the lower receiving part 2 are fixedly connected by screws.

EXAMPLE III

For simplicity, only the differences between the third embodiment and the first embodiment will be described below; the third embodiment is different from the first embodiment in that:

preferably, as shown in fig. 2-3, four corners of the bottom surface of the upper water passing part 1 are provided with pins 10, and four corners of the top surface of the lower receiving part 2 are correspondingly provided with jack posts 20 for inserting the pins 10.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. The utility model provides a nozzle air flue washs tool, includes tool body (100), its characterized in that, tool body (100) include logical water portion (1), lower accepting part (2) and set up in water filling port (3) on last logical water portion (1), treat abluent shower nozzle (4) spacing place in go up logical water portion (1) and between accepting part (2) down, the washing liquid by water filling port (3) let in and flow through wash in gas pocket (40) of shower nozzle (4).

2. The nozzle airway cleaning jig according to claim 1, characterized in that an open space for placing the spray head (4) is formed between the upper water supply part (1) and the lower receiving part (2), and a liquid discharge port (21) is arranged at the center of the bottom of the lower receiving part (2).

3. The nozzle air flue cleaning jig according to claim 1, wherein the upper water inlet part (1) comprises a top cover (11) matched with the outer dimension of the spray head (4) and a mounting seat (12) integrally formed with the bottom of the top cover (11), and the top limiting cover of the spray head (4) is arranged in the top cover (11).

4. The nozzle airway cleaning jig according to claim 1, wherein a mounting groove (41) matched with the outer dimension of the spray head (4) is formed in the center of the lower bearing part (2), and the bottom of the spray head (4) is placed in the mounting groove (41) in a limiting manner.

5. The nozzle air passage cleaning jig according to claim 1, wherein the cleaning liquid is ultrapure water.

6. The nozzle airway cleaning jig according to claim 1, wherein the upper water-passing part (1) and the lower bearing part (2) are detachably connected.

7. The nozzle airway cleaning jig according to claim 5, wherein the upper water passing part (1) and the lower bearing part (2) are fixedly connected through screws.

8. The nozzle airway cleaning jig according to claim 5, wherein four corners of the bottom surface of the upper water-passing part (1) are provided with pins (10), and four corners of the top surface of the lower bearing part (2) are correspondingly provided with jack posts (20) for inserting the pins (10).

9. The nozzle airway cleaning jig according to claim 1, wherein the water injection port (3) is arranged through the center of the upper water-passing portion (1).

10. The nozzle airway cleaning fixture as claimed in claim 1, wherein the fixture body (100) is made of PP.

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