CN212830821U - Silicon wafer conveying equipment - Google Patents
Silicon wafer conveying equipment Download PDFInfo
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- CN212830821U CN212830821U CN202020998322.0U CN202020998322U CN212830821U CN 212830821 U CN212830821 U CN 212830821U CN 202020998322 U CN202020998322 U CN 202020998322U CN 212830821 U CN212830821 U CN 212830821U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a silicon wafer conveying device, which comprises a first conveying mechanism, a second conveying mechanism, a first supporting part, a second supporting part and a spacing adjusting part; the first conveying mechanism comprises a first conveying belt and a first conveying belt supporting frame, and the second conveying mechanism comprises a second conveying belt and a second conveying belt supporting frame; the first conveying belt supporting frame and the second conveying belt supporting frame are arranged at intervals; the first support part is provided with a first guide rail, the second support part is provided with a second guide rail, and the first conveying belt support frame and the second conveying belt support frame are slidably arranged on the first guide rail through a first sliding block and are slidably arranged on the second guide rail through a second sliding block; the interval adjustment portion is through adjusting the interval between two first sliders to drive the interval between first conveyer belt support frame of adjustment and the second conveyer belt support frame, and then realize the interval adjustment between first conveyer belt and the second conveyer belt. The utility model discloses interval between two adjustable conveyer belts, compatible silicon chip of carrying multiple specification.
Description
Technical Field
The utility model relates to a solar cell production facility, specifically speaking are silicon chip conveying equipment.
Background
In the production of silicon wafers, a conveyor belt is generally used to convey the silicon wafers. The silicon wafers have different specifications, and the common conveying belt mainly aims at the silicon wafers with specific sizes and cannot be compatible with the conveying of the silicon wafers with different sizes.
In order to convey silicon wafers with different specifications, different conveying belts are required to be prepared in a silicon wafer production factory, so that the production cost is increased, a plurality of fields of a production workshop are occupied, and the management cost is increased.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to the problem that current conveyer belt can not compatible carry multiple specification silicon chip, provide a silicon chip conveying equipment that can compatible carry multiple specification silicon chip.
The utility model provides a silicon chip conveying equipment's technical scheme as follows: a silicon wafer conveying device comprises a first conveying mechanism, a second conveying mechanism, a first supporting part, a second supporting part and a distance adjusting part; wherein: the first conveying mechanism comprises a first conveying belt and a first conveying belt supporting frame, and the second conveying mechanism comprises a second conveying belt and a second conveying belt supporting frame; the first conveying belt supporting frame and the second conveying belt supporting frame are arranged in parallel at intervals, the first conveying belt is sleeved on the first conveying belt supporting frame and advances along the extending direction of the first conveying belt supporting frame, and the second conveying belt is sleeved on the second conveying belt supporting frame and advances along the extending direction of the second conveying belt supporting frame; a first guide rail is arranged on the first supporting part, a second guide rail is arranged on the second supporting part, the first end of the first conveyer belt supporting frame and the first end of the second conveyer belt supporting frame are respectively and slidably mounted on the first guide rail through a first sliding block, and the second end of the first conveyer belt supporting frame and the second end of the second conveyer belt supporting frame are respectively and slidably mounted on the second guide rail through a second sliding block; the interval adjustment portion is through adjusting the interval between two first sliders to drive the interval between first conveyer belt support frame of adjustment and the second conveyer belt support frame, and then realize the interval adjustment between first conveyer belt and the second conveyer belt.
The silicon wafer conveying equipment adopts the distance adjusting part to adjust the distance between the two conveying belts, so that the silicon wafers of various specifications can be conveyed compatibly.
Optionally, the distance adjusting part comprises a driving mechanism and a link mechanism, and the driving mechanism is respectively connected with the two first sliding blocks through two sets of link mechanisms; the driving mechanism drives the two first sliding blocks to slide oppositely or oppositely on the first guide rail through the connecting rod mechanism, so that the distance between the two first sliding blocks is reduced or increased.
The distance adjusting part is matched with the slide block and the guide rail through the driving mechanism and the connecting rod mechanism, so that the distance between the two supporting parts for bearing the two conveying belts can be adjusted, and the silicon wafers of various specifications can be conveyed compatibly.
Optionally, the link mechanism includes a first link and a second link, one end of the first link is connected to the driving mechanism, the other end of the first link is hinged to one end of the second link, and the other end of the second link is connected to the first slider.
The connecting rod mechanism adopts two connecting rods which are hinged together, and the action is flexible.
Furthermore, the distance adjusting part also comprises a guide mechanism, the guide mechanism is arranged between the driving mechanism and the connecting rod mechanisms, the guide mechanism comprises a slide rail and an adjusting block which is in sliding fit with the slide rail, a movable part of the driving mechanism is connected to the adjusting block, and the adjusting block is connected with one end of each of the two sets of connecting rod mechanisms; the driving mechanism drives the adjusting block to slide up and down on the slide rail and drives the connecting rod mechanism to act.
The guide mechanism is arranged, so that the action of the connecting rod mechanism is stable and reliable.
Optionally, the spacing adjustment part further includes a positioning mechanism mounted on the first support part and/or the second support part and disposed at both ends of the first guide rail and/or the second guide rail.
The positioning mechanism is arranged, so that the positions of the two conveying belts can be better fixed after the distance between the two conveying belts is adjusted, the positioning mechanism is used for conveying silicon wafers with corresponding specifications, and the adaptability is good.
Optionally, the silicon wafer conveying equipment further comprises a transmission mechanism and conveying wheel sets, the two conveying wheel sets are respectively installed on the first conveying belt support frame and the second conveying belt support frame, the first conveying belt and the second conveying belt are respectively wound on the two conveying wheel sets, and the transmission mechanism is respectively connected with the two conveying wheel sets and drives the two conveying belts to synchronously operate.
The conveying belt is operated through the transmission mechanism and the conveying wheel set, the structure is simple, and the cost is low.
Optionally, the conveying wheel set comprises a driving wheel and a driven wheel, the conveying belt is wound on the driving wheel and the driven wheel, and the driving wheel is connected with the transmission mechanism and is driven by the transmission mechanism to rotate.
The conveying wheel set of the conveying belt adopts a driving wheel and a driven wheel, and the structure is simple and reliable.
Optionally, the conveying wheel set further comprises a tension wheel and a transition wheel, the tension wheel is arranged on the inner side of the conveying belt, the transition wheel is arranged on the outer side of the conveying belt, and the conveying belt sequentially passes through the driving wheel, the driven wheel, the tension wheel and the transition wheel.
The conveying wheel set is also provided with a tensioning wheel, so that the conveying belt can be tensioned to prevent the conveying belt from slipping.
Optionally, the transmission mechanism includes a motor, a synchronous belt mechanism and a rotating shaft, the driving wheel of the first conveying mechanism and the driving wheel of the second conveying mechanism are respectively mounted on the rotating shaft in an axially movable manner, and the motor rotates to drive the rotating shaft to rotate through the synchronous belt mechanism.
The transmission mechanism adopts a synchronous belt mechanism, so that the two conveying belts can synchronously run, and the silicon wafers are stably conveyed.
Optionally, linear bearings are respectively installed between the driving wheel of the first conveying mechanism and the driving wheel and the rotating shaft of the second conveying mechanism.
Through setting up linear bearing, can reduce the frictional force between conveyer belt action wheel and the pivot when the interval adjustment.
Drawings
Fig. 1 is a schematic perspective view of an embodiment of the present invention.
Fig. 2 is a schematic perspective view of fig. 1 from another angle.
Fig. 3 is a top view of fig. 1.
Fig. 4 is a schematic perspective view of the rotating shaft of the present invention.
In fig. 1 to 4, the silicon wafer conveying apparatus includes a silicon wafer conveying device 1, a first conveying mechanism 10, a first conveying belt 11, a first conveying belt support frame 12, a second conveying mechanism 20, a second conveying belt 21, a second conveying belt support frame 22, a first support portion 30, a first guide rail 31, a first slider 32, a second support portion 40, a second guide rail 41, a second slider 42, a distance adjusting portion 50, a driving mechanism 51, a link mechanism 52, a first link 521, a second link 522, a guide mechanism 53, a slide rail 531, an adjusting block 532, a positioning mechanism 54, a floating joint 55, a transmission mechanism 60, a motor 61, a synchronous belt mechanism 62, a rotating shaft 63, a pulley 64, a conveying pulley set 70, a driving pulley 71, a driven pulley 72, a tension pulley 73, and a transition pulley 74.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
The utility model relates to a silicon chip conveying equipment can compatible silicon chip of carrying multiple specification.
Fig. 1 to 3 show an alternative embodiment of a silicon wafer conveying apparatus, fig. 1 is a perspective view from one perspective of the apparatus, fig. 2 is a perspective view from another perspective of the apparatus, and fig. 3 is a plan view of the apparatus.
As shown in fig. 1 to 3, the silicon wafer conveying apparatus 1 includes a first conveying mechanism 10, a second conveying mechanism 20, a first support 30, a second support 40, and a pitch adjusting unit 50.
The first conveying mechanism 10 includes a first conveyor belt 11 and a first conveyor belt supporting frame 12, and the second conveying mechanism 20 includes a second conveyor belt 21 and a second conveyor belt supporting frame 22.
The first conveyor belt support frame 12 and the second conveyor belt support frame 22 are disposed in parallel at an interval, the first conveyor belt 11 is sleeved on the first conveyor belt support frame 12 and advances along the extending direction of the first conveyor belt support frame 12, and the second conveyor belt 21 is sleeved on the second conveyor belt support frame 22 and advances along the extending direction of the second conveyor belt support frame 22.
The first support part 30 is provided with a first guide rail 31, the second support part 40 is provided with a second guide rail 41, the first end of the first conveyor belt support frame 12 and the first end of the second conveyor belt support frame 22 are respectively slidably mounted on the first guide rail 31 through a first slider 32, and the second end of the first conveyor belt support frame 12 and the second end of the second conveyor belt support frame 22 are respectively slidably mounted on the second guide rail 41 through a second slider 42. The first rail 31 and the second rail 41 are fixed to the bracket by mounting plates, respectively.
The distance adjusting portion 50 adjusts the distance between the first slide blocks 32 to drive and adjust the distance between the first conveyor belt support frame 12 and the second conveyor belt support frame 22, so as to adjust the distance between the first conveyor belt 11 and the second conveyor belt 21.
The silicon wafer conveying equipment 1 adopts the distance adjusting part 50 to adjust the distance between the two conveying belts, thereby being capable of compatibly conveying silicon wafers with various specifications.
An embodiment of first conveyor support frame 12 and second conveyor support frame 22 includes a conveyor support plate, a side support plate, and a retaining plate, wherein the two conveyors are mounted in the conveyor support plate, the conveyor support plate is fixed in the side support plate, the side support plate is fixed in the retaining plate, and the retaining plate is fixed in first slide 32 or second slide 42.
An alternative embodiment of the spacing adjustment portion 50 includes a driving mechanism 51 and a link mechanism 52, and the driving mechanism 51 is connected to the two first sliders 32 through two sets of link mechanisms 52. The driving mechanism 51 drives the two first sliders 32 to slide on the first guide rail 31 toward or away from each other through the link mechanism 52, so that the distance between the two first sliders 32 is reduced or increased. The driving mechanism 51 generally employs an air cylinder.
The spacing adjustment part 50 is matched with the slide block and the guide rail through the driving mechanism 51 and the link mechanism 52, so that the spacing between the two supporting parts bearing the two conveyer belts can be adjusted, the spacing between the first conveyer belt 1 and the second conveyer belt 2 is changed, and silicon wafers of various specifications can be compatibly conveyed.
An alternative embodiment of the link mechanism 52 includes a first link 521 and a second link 522, wherein one end of the first link 521 is connected to the driving mechanism 51, the other end of the first link 521 is hinged to one end of the second link 522, and the other end of the second link 522 is connected to the first slider 32.
The link mechanism 52 adopts two connecting rods hinged together, and the action is flexible.
Optionally, the spacing adjustment portion 50 further includes a guide mechanism 53, and the guide mechanism 53 is installed between the driving mechanism 51 and the link mechanism 52. The guide mechanism 53 comprises a slide rail 531 and an adjusting block 532 which is in sliding fit with the slide rail 531, the movable part of the driving mechanism 51 is connected to the adjusting block 532 through a floating joint 55, and the adjusting block 532 is connected with one end of the two sets of link mechanisms 52. The driving mechanism 51 drives the adjusting block 532 to slide up and down on the slide rail 531 and drives the link mechanism 52 to act.
The guide mechanism 53 is provided to make the operation of the link mechanism 52 smooth and reliable.
After the distance between the conveyor belts is adjusted by the distance adjusting portion 50, the driving mechanism 51 fixes the two adjusted supporting portions at corresponding positions by the holding force thereof, in order to increase the positioning strength of the two supporting portions, the distance adjusting portion 50 further includes a positioning mechanism 54, and an optional embodiment of the positioning mechanism 54 is a bolt and nut structure, and the positioning is performed by abutting the bolts on the sliding blocks of the supporting portions.
Alternatively, the positioning mechanisms 54 are mounted on the first support part 30 and disposed at both ends of the first rail 31.
Alternatively, the positioning mechanisms 54 are mounted on the second support portion 40, and are disposed at both ends of the second rail 41.
Alternatively, the positioning mechanisms 54 are mounted on the first and second support portions 30 and 40, and are disposed at both ends of the first and second rails 31 and 41.
Optionally, the silicon wafer conveying apparatus 1 further comprises a transmission mechanism 60 and a conveying wheel set 70. The transmission mechanism 60 is one, and each conveying mechanism is provided with one conveying wheel set 70. The two conveying wheel sets 70 are respectively installed on the first conveying belt support frame 12 and the second conveying belt support frame 22, the first conveying belt 11 and the second conveying belt 21 are respectively wound on the two conveying wheel sets 70, and the transmission mechanism 60 is respectively connected with the two conveying wheel sets 70 and drives the two conveying belts to synchronously operate.
The conveyer belt is operated through the transmission mechanism 60 and the conveyer wheel set 70, the structure is simple, and the cost is low.
Alternatively, the conveying wheel set 70 includes a driving wheel 71 and a driven wheel 72, the conveying belt is wound around the driving wheel 71 and the driven wheel 72, and the driving wheel 71 is connected to the transmission mechanism 60 and is driven by the transmission mechanism 60 to rotate.
The conveying wheel set 70 of the conveying belt adopts a driving wheel 71 and a driven wheel 72, and the structure is simple and reliable.
Optionally, the conveying wheel set 70 further comprises a tension wheel 73 and a transition wheel 74, the tension wheel 73 is arranged on the inner side of the conveying belt, the transition wheel 74 is arranged on the outer side of the conveying belt, and the conveying belt passes through the driving wheel 71, the driven wheel 72, the tension wheel 73 and the transition wheel 74 in sequence.
The conveyor train 70 is also provided with a tensioning wheel 73 to tension the belt and prevent the belt from slipping.
Alternatively, the transmission mechanism 60 includes a motor 61, a timing belt mechanism 62 and a rotating shaft 63, the driving pulley 71 of the first conveying mechanism 10 and the driving pulley 71 of the second conveying mechanism 20 are respectively axially movably mounted on the rotating shaft 63, and the motor 61 rotates to drive the rotating shaft 63 to rotate through the timing belt mechanism 62.
The transmission mechanism 60 adopts a synchronous belt mechanism 62, so that the two conveying belts can synchronously run, and the silicon wafers can be conveyed stably.
The motor 61 is typically a servo motor, and the timing belt mechanism 62 includes a timing belt and two pulleys 64, one pulley 64 is mounted on the output shaft of the motor 61, and the other pulley 64 is mounted on the rotating shaft 63, as shown in fig. 4.
One embodiment of the shaft 63 is a flat shaft. The rotating shaft 63 is a flat shaft, so that the structure is simple, and the radial rotation of the rotating shaft 63 and the axial movement of the driving wheel 71 of the conveying belt on the rotating shaft 63 can be realized.
Optionally, linear bearings are respectively installed between the driving wheel 71 of the first conveying mechanism 10 and the driving wheel 71 of the second conveying mechanism 20 and the rotating shaft 63.
By providing the linear bearing, the friction force between the belt driving wheel 71 and the rotating shaft 63 can be reduced during the distance adjustment.
The invention has been described above with a certain degree of particularity and detail. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that may be made without departing from the true spirit and scope of the present invention are intended to be within the scope of the present invention. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.
Claims (10)
1. The silicon wafer conveying equipment is characterized by comprising a first conveying mechanism, a second conveying mechanism, a first supporting part, a second supporting part and a distance adjusting part; wherein:
the first conveying mechanism comprises a first conveying belt and a first conveying belt supporting frame, and the second conveying mechanism comprises a second conveying belt and a second conveying belt supporting frame;
the first conveyor belt support frames and the second conveyor belt support frames are arranged in parallel at intervals, the first conveyor belt is sleeved on the first conveyor belt support frames and advances along the extending direction of the first conveyor belt support frames, and the second conveyor belt is sleeved on the second conveyor belt support frames and advances along the extending direction of the second conveyor belt support frames;
a first guide rail is arranged on the first supporting part, a second guide rail is arranged on the second supporting part, a first end of the first conveyor belt supporting frame and a first end of the second conveyor belt supporting frame are respectively and slidably mounted on the first guide rail through a first sliding block, and a second end of the first conveyor belt supporting frame and a second end of the second conveyor belt supporting frame are respectively and slidably mounted on the second guide rail through a second sliding block;
the distance adjusting part is used for driving and adjusting the distance between the first conveying belt supporting frame and the second conveying belt supporting frame by adjusting the distance between the two first sliding blocks, so that the distance between the first conveying belt and the second conveying belt can be adjusted.
2. The silicon wafer conveying apparatus according to claim 1, wherein the pitch adjustment part comprises a driving mechanism and a link mechanism, and the driving mechanism is connected to the two first sliders through two sets of the link mechanisms;
the driving mechanism drives the two first sliding blocks to slide oppositely or oppositely on the first guide rail through the connecting rod mechanism, so that the distance between the two first sliding blocks is reduced or increased.
3. The silicon wafer conveying equipment as claimed in claim 2, wherein the link mechanism comprises a first link and a second link, one end of the first link is connected with the driving mechanism, the other end of the first link is hinged with one end of the second link, and the other end of the second link is connected with the first slide block.
4. The silicon wafer conveying equipment according to claim 2, wherein the spacing adjustment part further comprises a guide mechanism, the guide mechanism is installed between the driving mechanism and the link mechanism, the guide mechanism comprises a slide rail and an adjusting block which is in sliding fit with the slide rail, a movable part of the driving mechanism is connected to the adjusting block, and the adjusting block is connected with one end of each of the two sets of the link mechanisms; the driving mechanism drives the adjusting block to slide up and down on the slide rail and drives the connecting rod mechanism to act.
5. The silicon wafer conveying apparatus according to claim 1, wherein the pitch adjustment part further comprises a positioning mechanism that is mounted on the first support part and/or the second support part and is disposed at both ends of the first guide rail and/or the second guide rail.
6. The silicon wafer conveying equipment according to claim 1, further comprising a transmission mechanism and conveying wheel sets, wherein the two conveying wheel sets are respectively mounted on the first conveying belt support frame and the second conveying belt support frame, the first conveying belt and the second conveying belt are respectively wound on the two conveying wheel sets, and the transmission mechanism is respectively connected with the two conveying wheel sets and drives the two conveying belts to synchronously operate.
7. The silicon wafer conveying equipment as claimed in claim 6, wherein the conveying wheel set comprises a driving wheel and a driven wheel, the conveying belt is wound on the driving wheel and the driven wheel, and the driving wheel is connected with the transmission mechanism and is driven by the transmission mechanism to rotate.
8. The silicon wafer conveying apparatus according to claim 7, wherein the conveying wheel set further comprises a tension wheel and a transition wheel, the tension wheel is disposed inside the conveying belt, the transition wheel is disposed outside the conveying belt, and the conveying belt passes through the driving wheel, the driven wheel, the tension wheel and the transition wheel in sequence.
9. The silicon wafer conveying equipment according to claim 6, wherein the transmission mechanism comprises a motor, a synchronous belt mechanism and a rotating shaft, the driving wheel of the first conveying mechanism and the driving wheel of the second conveying mechanism are respectively mounted on the rotating shaft in an axially movable manner, and the motor rotates to drive the rotating shaft to rotate through the synchronous belt mechanism.
10. The silicon wafer conveying equipment as claimed in claim 9, wherein linear bearings are respectively installed between the driving wheel of the first conveying mechanism and the driving wheel of the second conveying mechanism and the rotating shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020998322.0U CN212830821U (en) | 2020-06-03 | 2020-06-03 | Silicon wafer conveying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020998322.0U CN212830821U (en) | 2020-06-03 | 2020-06-03 | Silicon wafer conveying equipment |
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| Publication Number | Publication Date |
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| CN212830821U true CN212830821U (en) | 2021-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020998322.0U Active CN212830821U (en) | 2020-06-03 | 2020-06-03 | Silicon wafer conveying equipment |
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| CN (1) | CN212830821U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113390260A (en) * | 2021-06-30 | 2021-09-14 | 陕西矿智云智能自动化有限公司 | Double-row filling machine |
| CN114148682A (en) * | 2022-01-12 | 2022-03-08 | 青岛星图智能装备有限公司 | Flexible sheet conveyer belt easy to adjust width |
-
2020
- 2020-06-03 CN CN202020998322.0U patent/CN212830821U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113390260A (en) * | 2021-06-30 | 2021-09-14 | 陕西矿智云智能自动化有限公司 | Double-row filling machine |
| CN114148682A (en) * | 2022-01-12 | 2022-03-08 | 青岛星图智能装备有限公司 | Flexible sheet conveyer belt easy to adjust width |
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