CN212830916U - Silicon wafer conveying device - Google Patents
Silicon wafer conveying device Download PDFInfo
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- CN212830916U CN212830916U CN202021063936.6U CN202021063936U CN212830916U CN 212830916 U CN212830916 U CN 212830916U CN 202021063936 U CN202021063936 U CN 202021063936U CN 212830916 U CN212830916 U CN 212830916U
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Abstract
The utility model relates to a silicon wafer conveying device, which comprises a first conveying frame, a second conveying frame, a conveying belt, a first conveying wheel set, a second conveying wheel set, a conveying belt transmission mechanism and a conveying belt length adjusting mechanism; the conveyor belt length adjusting mechanism is positioned between the first conveyor frame and the second conveyor frame; the conveying belt is wound on the first conveying wheel set, the second conveying wheel set and the conveying belt length adjusting mechanism; the conveying belt transmission mechanism is arranged on the first conveying rack or the second conveying rack and connected with the conveying belt, and the conveying belt transmission mechanism drives the conveying belt to run; the conveyor belt length adjustment mechanism is configured to move between the first conveyor frame and the second conveyor frame to change the relative lengths of the conveyor belts on the first conveyor frame and on the second conveyor frame. The utility model discloses the relative length of adjustable conveyer belt on two transport racks to can the compatible silicon chip of carrying multiple specification.
Description
Technical Field
The utility model relates to a silicon chip check out test set in the solar cell production facility, specifically speaking are silicon chip conveyor.
Background
When detecting the silicon wafer, the silicon wafer is generally conveyed to a detection position by a conveying belt. The silicon wafers have different specifications, and the common conveying belt mainly aims at the silicon wafers with specific sizes and cannot be compatible with the conveying of the silicon wafers with different sizes.
In order to detect silicon wafers with different specifications, different conveying belts are required to be prepared in a silicon wafer production factory, so that the production cost is increased, a plurality of fields of a production workshop are occupied, and the management cost is increased.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to the problem that current conveyer belt can not compatible carry multiple specification silicon chip, provide a silicon chip conveyor that can compatible carry multiple specification silicon chip.
The utility model provides a silicon chip conveyor's technical scheme as follows: a silicon wafer conveying device comprises a first conveying rack, a second conveying rack, a conveying belt, a first conveying wheel set, a second conveying wheel set, a conveying belt transmission mechanism and a conveying belt length adjusting mechanism; wherein: the conveyor belt length adjusting mechanism is positioned between the first conveyor frame and the second conveyor frame; the first conveying wheel set and the second conveying wheel set are respectively arranged on the first conveying rack and the second conveying rack; the conveying belt is wound on the first conveying wheel set, the second conveying wheel set and the conveying belt length adjusting mechanism; the conveying belt transmission mechanism is arranged on the first conveying rack or the second conveying rack and connected with the conveying belt, and the conveying belt transmission mechanism drives the conveying belt to run; the conveyor belt length adjustment mechanism is configured to move between the first conveyor frame and the second conveyor frame to change the relative lengths of the conveyor belts on the first conveyor frame and on the second conveyor frame.
The silicon wafer conveying device adopts a conveying belt length adjusting mechanism, and the relative length of the conveying belt on the two conveying racks can be adjusted, so that silicon wafers of various specifications can be conveyed compatibly.
Optionally, the conveying belt length adjusting mechanism comprises an adjusting bracket, an adjusting wheel set and a guide part; wherein: the adjusting wheel set comprises an upper adjusting wheel set and a lower adjusting wheel set; the upper adjusting wheel set and the lower adjusting wheel set are respectively arranged on the adjusting bracket; the conveying belt sequentially surrounds the first conveying wheel set, the upper adjusting wheel set, the second conveying wheel set and the lower adjusting wheel set; the guide part is arranged below the adjusting bracket, and the adjusting bracket is in sliding fit with the guide part.
The length adjusting mechanism of the conveying belt is matched with the guide part through the adjusting wheel set, so that the relative length of the conveying belt on the two conveying racks can be adjusted, and silicon wafers of various specifications can be conveyed compatibly; the conveying belt length adjusting mechanism is connected into the conveying belt through an upper adjusting wheel set and a lower adjusting wheel set, so that the relative length of the conveying belts on two sides of the conveying belt length adjusting mechanism is changed.
Optionally, the first conveying wheel set comprises a driving wheel and at least one first driven wheel, and the second conveying wheel set comprises at least one second driven wheel; the upper adjusting wheel set comprises at least two upper transition wheels and at least one tension wheel, a gap is arranged between the two upper transition wheels, and the tension wheel is positioned below the gap; the lower adjusting wheel set comprises at least one lower transition wheel, and the lower transition wheel is positioned below the tension wheel of the upper adjusting wheel set; the conveying belt sequentially passes through the first driven wheel, one of the upper transition wheels, the tension wheel of the upper adjusting wheel set, the other upper transition wheel, the second driven wheel, the lower transition wheel, the driving wheel and the first driven wheel; the upper surfaces of the conveying belts passing through the first driven wheel and the upper transition wheel close to the first driven wheel and the upper surfaces of the conveying belts passing through the upper transition wheel close to the second driven wheel and the second driven wheel are positioned on the same horizontal plane; the driving wheel is connected with the conveying belt transmission mechanism and is driven to rotate by the conveying belt transmission mechanism.
The conveying wheel group of the conveying belt adopts a driving wheel and a driven wheel, and the structure is simple and reliable; the upper transition wheel, the lower transition wheel and the tension wheel are arranged in opposite positions, so that the conveyer belt cannot interfere with the conveyer belt length adjusting mechanism.
Optionally, the upper adjusting wheel set comprises two upper transition wheels and two tensioning wheels, and the two upper transition wheels and the two tensioning wheels are distributed in an isosceles trapezoid shape with a narrow top and a wide bottom; the lower adjusting wheel group comprises two lower transition wheels and two tensioning wheels, the tensioning wheels are positioned above the lower transition wheels, and the two tensioning wheels and the two lower transition wheels are distributed in an isosceles trapezoid shape with a narrow upper part and a wide lower part.
The trapezoidal layout of four wheels in the upper adjusting wheel set can form an accommodating space, and some detection devices are convenient to arrange.
Optionally, the first conveying wheel set and/or the second conveying wheel set further comprise a tensioning wheel and/or a transition wheel, the tensioning wheel being arranged inside the conveying belt, and the transition wheel being arranged outside the conveying belt.
The conveying wheel set is also provided with a tensioning wheel which can tension the conveying belt to prevent the conveying belt from slipping; the conveying wheel set is also provided with a transition wheel, so that a better supporting effect on the conveying belt can be achieved.
Optionally, the conveyor belt length adjusting mechanism further includes at least two auxiliary supporting blocks fixedly connected to the adjusting bracket, and the two auxiliary supporting blocks are respectively located on one sides of the two transition wheels of the upper adjusting wheel set, which are far away from the gap.
The auxiliary supporting blocks are arranged to support the conveying belt, so that the bearing capacity of the conveying belt can be increased.
Optionally, the conveyor belt length adjusting mechanism further comprises a first locking mechanism, the first locking mechanism comprises a connecting piece, an adjusting slider, a handle, a guide shaft, a locking block and a fixed seat, the guide shaft is mounted on the fixed seat, the adjusting slider is in sliding fit with the guide shaft, the connecting piece is mounted on the adjusting slider and connected with the adjusting bracket, the handle is mounted on the locking block, and the locking block is mounted on the adjusting slider; when the adjusting slide block slides to a set position along the guide shaft, the handle is pressed down to fix the adjusting slide block on the guide shaft through the locking block.
The position of the conveying belt length adjusting mechanism is fixed through the first locking mechanism, so that the relative length of the conveying belts above the two conveying racks is locked, and the conveying mechanism is suitable for conveying silicon wafers of corresponding specifications.
Optionally, the guide part comprises a sliding block and a guide rail which are in sliding fit with each other, and the adjusting bracket is fixedly connected to the sliding block; the guide part is provided with a second locking mechanism, the second locking mechanism comprises an adjusting plate and a knob, and the knob penetrates through the adjusting plate and abuts against the sliding block.
The guide part adopts a slide block and a guide rail, so that the structure is simple and the cost is low; and a second locking mechanism arranged on the guide part and used for eliminating the gap between the guide rail and the slide block and preventing the slide block from slightly deviating from the guide rail when the slide block slides or is fixed.
Optionally, the cross-section of the guide rail is in the shape of a double-circular groove, and comprises two opposite semicircles connected by a straight line segment, and the surface formed by the semicircles is a sliding surface.
The guide rail adopts double circular cross sections, and the guidance quality is good.
Optionally, the two conveyor belts are arranged in parallel on the first conveyor frame, the conveyor belt length adjusting mechanism and the second conveyor frame.
The two conveying belts are adopted, so that the silicon wafer conveying action is stable and reliable.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic perspective view of another viewing angle of the present invention.
Fig. 3 is a schematic perspective view of the conveyor belt length adjusting mechanism of the present invention.
Fig. 4 is a schematic perspective view of the adjusting wheel set of fig. 3 without a set of adjusting wheels.
In fig. 1 to 2, the silicon wafer conveying device includes a silicon wafer conveying device 1, a first conveying frame 10, a second conveying frame 20, a conveying belt 30, a first conveying wheel set 40, a driving wheel 41, a first driven wheel 42, a second conveying wheel set 50, a second driven wheel 51, a conveying belt transmission mechanism 60, a conveying belt length adjusting mechanism 70, an adjusting bracket 71, an upper adjusting wheel set 72, an upper transition wheel 721, a lower adjusting wheel set 73, a lower transition wheel 731, a guide portion 74, a slider 741, a guide rail 742, a tensioning wheel, an auxiliary support block 76, a first locking mechanism 77, a connecting member 771, an adjusting slider 772, a handle 773, a guide shaft 751, a locking block 775, a fixed seat 776, a second locking mechanism 78, an adjusting plate 781 and a knob 782.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
The utility model relates to a silicon chip conveyor 1 for carry the silicon chip that detects.
Fig. 1 to 2 show an alternative embodiment of a wafer transfer apparatus 1, fig. 1 being a perspective view from one perspective of the apparatus, and fig. 2 being a perspective view from another perspective of the apparatus.
The silicon wafer conveying device 1 comprises a first conveying rack 10, a second conveying rack 20, a conveying belt 30, a first conveying wheel set 40, a second conveying wheel set 50, a conveying belt transmission mechanism 60 and a conveying belt length adjusting mechanism 70.
The conveyor belt 30 may be a single belt, and the first conveyor wheel set 40 and the second conveyor wheel set 50 are respectively provided in one set. Alternatively, there are two conveyor belts 30, and accordingly, there are two sets of the first conveyor wheel assembly 40 and the second conveyor wheel assembly 50. The two conveyor belts 30 are arranged in parallel on the first conveyor frame 10, the conveyor belt length adjustment mechanism 70, and the second conveyor frame 20. The two conveying belts 30 are adopted, so that the silicon wafer conveying action is stable and reliable. The silicon wafer conveying apparatus 1 shown in fig. 1 and 2 is an embodiment using two conveying belts 30.
The first conveyor frame 10 and the second conveyor frame 20 are arranged at intervals along the conveying direction of the silicon wafer, and the conveyor belt length adjusting mechanism 70 is located between the first conveyor frame 10 and the second conveyor frame 20. The first conveying wheel set 40 and the second conveying wheel set 50 are respectively arranged on the first conveying rack 10 and the second conveying rack 20; the belt 30 is looped around the first and second conveying wheel sets 40, 50 and the belt length adjusting mechanism 70.
The belt transmission mechanism 60 is mounted on the first conveyor frame 10 or the second conveyor frame 20 and connected to the belt 30, and in this embodiment, the belt transmission mechanism 60 is mounted on the first conveyor frame 10. The belt drive 60 drives the belt 30.
The conveyor belt length adjustment mechanism 70 is configured to move between the first conveyor frame 10 and the second conveyor frame 20 to change the relative lengths of the conveyor belts 30 on the first conveyor frame 10 and on the second conveyor frame 20.
The silicon wafer conveying device 1 adopts the conveying belt length adjusting mechanism 70, and the relative length of the conveying belt 30 on the two conveying racks can be adjusted, so that silicon wafers of various specifications can be conveyed compatibly.
An alternative embodiment of the first conveying wheel set 40 and the second conveying wheel set 50: the first conveying wheel set 40 includes a driving wheel 41 and at least one first driven wheel 42, and the second conveying wheel set 50 includes at least one second driven wheel 51. The conveying wheel set of the conveying belt 30 adopts a driving wheel 41 and a driven wheel, and the structure is simple and reliable.
Optionally, the first conveying wheel set 40 and/or the second conveying wheel set 50 further comprise a tensioning wheel 751 and/or a transition wheel, the tensioning wheel 751 is arranged at the outer side of the conveying belt 30, and the transition wheel is arranged at the inner side of the conveying belt 30, wherein the outer side of the conveying belt refers to the outer part of the closed conveying belt loop, and the inner side of the conveying belt refers to the inner part of the closed conveying belt loop.
Specifically, the scheme that the first conveying wheel set 40 and/or the second conveying wheel set 50 further include a tensioning wheel 751 and/or a transition wheel includes the following steps: 1. the first conveying wheel set 40 includes a tensioning wheel 751; 2. the first conveying wheel set 40 comprises a transition wheel; 3. the first conveying wheel set 40 includes a tension wheel 751 and a transition wheel; 4. the second conveying wheel set 50 includes a tensioning wheel 751; 5. the second conveying wheel set 50 comprises a transition wheel; 6. the second conveying wheel set 50 includes a tension wheel 751 and a transition wheel; 7. the first conveying wheel set 40 and the second conveying wheel set 50 each comprise a tensioning wheel 751; 8. the first conveying wheel set 40 and the second conveying wheel set 50 each comprise a transition wheel; 9. the first conveying wheel set 40 and the second conveying wheel set 50 each include a tension wheel 751 and a transition wheel.
The conveying wheel set is also provided with a tensioning wheel 751 which can tension the conveying belt 30 and prevent the conveying belt 30 from slipping; the conveying wheel set is also provided with a transition wheel, so that the conveying belt 30 can be better supported.
Fig. 3-4 illustrate an alternative embodiment of a conveyor length adjustment mechanism 70, with fig. 3 being a perspective view of the mechanism and fig. 4 being a perspective view of the mechanism with one set of adjustment wheels removed.
The belt length adjusting mechanism 70 includes an adjusting bracket 71, an adjusting wheel set, and a guide portion 74.
The adjusting bracket 71 is used for mounting an adjusting wheel set of the conveyor belt length adjusting mechanism 70. The adjusting bracket 71 comprises a bottom plate and a side plate; when only one conveying belt 30 is provided, only one side plate is provided, and the side plates are arranged on the bottom plate; when there are two conveyor belts 30, there are two side plates, and the two side plates are installed on the bottom plate in parallel. In the embodiment shown in fig. 3 and 4, the side plates are two.
The adjusting wheel set comprises an upper adjusting wheel set 72 and a lower adjusting wheel set 73; the upper adjusting wheel set 72 and the lower adjusting wheel set 73 are respectively installed on the side plates of the adjusting bracket 71. When only one conveying belt 30 is provided, the adjusting wheel set comprises an upper adjusting wheel set 72 and a lower adjusting wheel set 73; when there are two belts 30, the adjusting wheel sets include two upper adjusting wheel sets 72 and two lower adjusting wheel sets 73. The conveyor belt 30 is sequentially wound around the corresponding first conveying wheel set 40, the upper adjusting wheel set 72, the second conveying wheel set 50 and the lower adjusting wheel set 73.
The guide portion 74 is mounted below the adjustment bracket 71, and the bottom plate of the adjustment bracket 71 is slidably fitted on the guide portion 74.
An alternative embodiment of the guiding portion 74 comprises a sliding block 741 and a guiding rail 742, which are slidably engaged with each other, and the adjusting bracket 71 is fixedly connected to the sliding block 741. The guide part 74 adopts a slide block 741 and a guide rail 742, and has simple structure and low cost.
Alternatively, the cross-section of the guide rail 742 is a double-circular groove shape, and includes two opposite semicircles connected by a straight line, and the surface formed by the semicircles is a sliding surface. The guide rail 742 has a double circular cross section, and has good guidance quality.
Optionally, a second locking mechanism 78 is further mounted on the guiding portion 74, the second locking mechanism 78 includes an adjusting plate 781 and a knob 782, and the knob 782 is passed through the adjusting plate 781 and abutted against the slider 741.
When the slide block 741 slides or is fixed, a slight deviation may occur with the guide rail 742, which may cause the adjusting bracket to deflect, thereby affecting the conveying smoothness of the conveying belt. To overcome this slight deviation, a second locking mechanism 78 may be mounted on the guide portion 74 for eliminating a gap between the guide rail 742 and the slider 741.
The conveyor belt length adjusting mechanism 70 enables the relative length of the conveyor belt 30 on the two conveyor frames to be adjustable through the matching of the adjusting wheel set and the guide part 74, so that silicon wafers with various specifications can be conveyed compatibly. The conveyor belt length adjustment mechanism 70 is connected to the conveyor belt 30 through the upper adjustment wheel set 72 and the lower adjustment wheel set 73, so that the relative lengths of the conveyor belt 30 on both sides of the conveyor belt length adjustment mechanism 70 are changed.
A first embodiment of the adjusting wheel set is as follows:
the upper adjusting wheel set 72 comprises at least two upper transition wheels 721 and at least one tension wheel 751, a gap is arranged between the two upper transition wheels 721, and the tension wheel 751 is positioned below the gap; at this time, the two upper transition wheels 721 and the one tension wheel 751 form a V-shape. The lower adjustment wheel set 73 includes at least one lower transition wheel 731, the lower transition wheel 731 being located below the tensioning wheel 751 of the upper adjustment wheel set 72.
At this time, the conveying belt 30 passes through the first driven wheel 42, one of the upper transition wheels 721, the tension wheel 751 of the upper adjusting wheel set 72, the other upper transition wheel 721, the second driven wheel 51, the lower transition wheel 731, the driving wheel 41 and the first driven wheel 42 in sequence; the upper surface of the conveyor belt 30 passing through the first driven wheel 42 and the upper transition wheel 721 adjacent to the first driven wheel 42, and the upper surface of the conveyor belt 30 passing through the upper transition wheel 721 adjacent to the second driven wheel 51 and the second driven wheel 51 are on the same horizontal plane; the driving wheel 41 is connected to the conveying belt transmission mechanism 60 and is driven to rotate by the conveying belt transmission mechanism 60.
The upper transition wheel 721, the lower transition wheel 731 and the tension wheel 751 are disposed at positions opposite to each other so that the conveyor belt 30 does not interfere with the conveyor belt length adjusting mechanism 70.
A second embodiment of the adjusting wheel set is as follows:
the upper adjusting wheel set 72 includes two upper transition wheels 721 and two tension wheels 751, and the two upper transition wheels 721 and the two tension wheels 751 are distributed in an isosceles trapezoid shape with a narrow top and a wide bottom. The lower adjusting wheel set 73 includes two lower transition wheels 731 and two tensioning wheels 751, the tensioning wheels 751 are located above the lower transition wheels 731, and the two tensioning wheels 751 and the two lower transition wheels 731 are distributed in an isosceles trapezoid shape with a narrow top and a wide bottom.
The trapezoidal layout of four wheels in the upper adjusting wheel set 72 can form an accommodating space, which is convenient for arranging some detection devices.
Optionally, the conveyor belt length adjusting mechanism 70 further includes at least two auxiliary supporting blocks 76, the auxiliary supporting blocks 76 are fixedly connected to the adjusting bracket 71, and the two auxiliary supporting blocks 76 are respectively located on one side of the two transition wheels of the upper adjusting wheel set 72, which is far away from the gap.
The auxiliary support block 76 is provided to support the conveyor belt 30, which can increase the load-bearing capacity of the conveyor belt 30.
Optionally, the conveyor belt length adjustment mechanism 70 further comprises a first locking mechanism 77.
The first locking mechanism 77 comprises a connecting piece 771, an adjusting slider 772, a handle 773, a guide shaft 774, a locking block 775 and a fixed seat 776, the guide shaft 774 is installed on the fixed seat 776, the adjusting slider 772 is in sliding fit on the guide shaft 774, the connecting piece 771 is installed on the adjusting slider 772 and is connected with the adjusting support 71, the handle 773 is installed on the locking block 775, and the locking block 775 is installed on the adjusting slider 772. When the adjustment slider 772 slides along the guide shaft 774 to a set position, the pressing handle 773 fixes the adjustment slider 772 to the guide shaft 774 through the locking block 775.
The position of the conveyor belt length adjusting mechanism 70 is fixed by the first locking mechanism 77, so that the relative length of the conveyor belts 30 above the two conveyor frames is locked, and the conveyor is suitable for conveying silicon wafers with corresponding specifications.
The invention has been described above with a certain degree of particularity and detail. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that may be made without departing from the true spirit and scope of the present invention are intended to be within the scope of the present invention. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.
Claims (10)
1. The silicon wafer conveying device is characterized by comprising a first conveying rack, a second conveying rack, a conveying belt, a first conveying wheel set, a second conveying wheel set, a conveying belt transmission mechanism and a conveying belt length adjusting mechanism; wherein:
the conveyor belt length adjusting mechanism is positioned between the first conveyor frame and the second conveyor frame;
the first conveying wheel set and the second conveying wheel set are respectively arranged on the first conveying rack and the second conveying rack;
the conveying belt is wound on the first conveying wheel set, the second conveying wheel set and the conveying belt length adjusting mechanism;
the conveying belt transmission mechanism is arranged on the first conveying rack or the second conveying rack and connected with the conveying belt, and the conveying belt transmission mechanism drives the conveying belt to run;
the conveyor belt length adjustment mechanism is configured to move between the first conveyor frame and the second conveyor frame to change the relative lengths of the conveyor belts on the first conveyor frame and on the second conveyor frame.
2. The silicon wafer conveying device according to claim 1, wherein the conveyor belt length adjusting mechanism comprises an adjusting bracket, an adjusting wheel set and a guide part; wherein:
the adjusting wheel set comprises an upper adjusting wheel set and a lower adjusting wheel set; the upper adjusting wheel set and the lower adjusting wheel set are respectively arranged on the adjusting bracket; the conveying belt sequentially surrounds the first conveying wheel set, the upper adjusting wheel set, the second conveying wheel set and the lower adjusting wheel set;
the guide part is arranged below the adjusting bracket, and the adjusting bracket is in sliding fit with the guide part.
3. The silicon wafer conveying device as claimed in claim 2, wherein the first conveying wheel set comprises a driving wheel and at least one first driven wheel, and the second conveying wheel set comprises at least one second driven wheel; the upper adjusting wheel set comprises at least two upper transition wheels and at least one tension wheel, a gap is formed between the two upper transition wheels, and the tension wheel is positioned below the gap; the lower adjusting wheel set comprises at least one lower transition wheel, and the lower transition wheel is positioned below a tension wheel of the upper adjusting wheel set;
the conveying belt sequentially passes through the first driven wheel, one of the upper transition wheels, a tension wheel of the upper adjusting wheel set, the other upper transition wheel, the second driven wheel, the lower transition wheel, the driving wheel and the first driven wheel; the upper surfaces of the conveying belt passing through the first driven wheel and the upper transition wheel close to the first driven wheel and the upper surfaces of the conveying belt passing through the upper transition wheel close to the second driven wheel and the second driven wheel are positioned on the same horizontal plane; the driving wheel is connected with the conveying belt transmission mechanism and is driven to rotate by the conveying belt transmission mechanism.
4. The silicon wafer conveying apparatus according to claim 3, wherein the upper regulating wheel set comprises two upper transition wheels and two tension wheels, and the two upper transition wheels and the two tension wheels are distributed in an isosceles trapezoid shape with a narrow top and a wide bottom; the lower adjusting wheel set comprises two lower transition wheels and two tensioning wheels, the tensioning wheels are located above the lower transition wheels, and the two tensioning wheels and the two lower transition wheels are distributed in an isosceles trapezoid shape with a narrow upper part and a wide lower part.
5. The silicon wafer conveying apparatus according to claim 3, wherein the first conveying wheel set and/or the second conveying wheel set further comprises a tension wheel and/or a transition wheel, the tension wheel is disposed inside the conveying belt, and the transition wheel is disposed outside the conveying belt.
6. The silicon wafer conveying device according to claim 3, wherein the conveyor belt length adjusting mechanism further comprises at least two auxiliary support blocks fixedly connected to the adjusting bracket, and the two auxiliary support blocks are respectively located on one side of the two transition wheels of the upper adjusting wheel set away from the gap.
7. The silicon wafer conveying device according to claim 3, wherein the conveyor belt length adjusting mechanism further comprises a first locking mechanism, the first locking mechanism comprises a connecting piece, an adjusting slider, a handle, a guide shaft, a locking block and a fixed seat, the guide shaft is mounted on the fixed seat, the adjusting slider is slidably fitted on the guide shaft, the connecting piece is mounted on the adjusting slider and connected with the adjusting bracket, the handle is mounted on the locking block, and the locking block is mounted on the adjusting slider; when the adjusting slide block slides to a set position along the guide shaft, the handle is pressed down, and the adjusting slide block is fixed on the guide shaft through the locking block.
8. The silicon wafer conveying device according to claim 2, wherein the guide part comprises a slide block and a guide rail which are in sliding fit with each other, and the adjusting bracket is fixedly connected to the slide block; the guide part is provided with a second locking mechanism, the second locking mechanism comprises an adjusting plate and a knob, and the knob penetrates through the adjusting plate and abuts against the sliding block.
9. The silicon wafer conveying apparatus according to claim 8, wherein the guide rail has a double-circular groove shape in cross section, and comprises two opposite semicircles connected by a straight line section, and the surface formed by the semicircles is a sliding surface.
10. The silicon wafer conveying apparatus according to claim 1, wherein the two conveying belts are arranged in parallel on the first conveying frame, the conveying belt length adjusting mechanism, and the second conveying frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021063936.6U CN212830916U (en) | 2020-06-10 | 2020-06-10 | Silicon wafer conveying device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021063936.6U CN212830916U (en) | 2020-06-10 | 2020-06-10 | Silicon wafer conveying device |
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| CN212830916U true CN212830916U (en) | 2021-03-30 |
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| CN202021063936.6U Active CN212830916U (en) | 2020-06-10 | 2020-06-10 | Silicon wafer conveying device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104618A (en) * | 2021-12-22 | 2022-03-01 | 安徽百特机电工程有限公司 | Tension adjusting device for conveying chain of elevator |
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2020
- 2020-06-10 CN CN202021063936.6U patent/CN212830916U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104618A (en) * | 2021-12-22 | 2022-03-01 | 安徽百特机电工程有限公司 | Tension adjusting device for conveying chain of elevator |
| CN114104618B (en) * | 2021-12-22 | 2023-12-22 | 安徽百特机电工程有限公司 | Tension adjusting device for conveyer chain of elevator |
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