CN212810344U

CN212810344U - Spin coating device for perovskite solar cell preparation

Info

Publication number: CN212810344U
Application number: CN202021750369.1U
Authority: CN
Inventors: 李璠; 王晓峰; 夏雪峰; 王腾逸
Original assignee: Nanchang University
Current assignee: Nanchang University
Priority date: 2020-08-20
Filing date: 2020-08-20
Publication date: 2021-03-26
Anticipated expiration: 2030-08-20

Abstract

The utility model discloses a spin coating device for perovskite solar cell preparation, the device comprises a device main body, bottom bolted connection has first rotating electrical machines in the device main part, and the case that thoughtlessly glues is installed in the device main part top outside, the output end fixedly connected with objective table of first rotating electrical machines, the wafer has been placed on the objective table, be provided with the backup pad directly over the objective table, backup pad lower extreme mid-mounting has the rubber drip tube, and the hot-light lamp is installed to the backup pad lower extreme left and right sides, the rubber drip tube loops through coupling hose and goes out rubber tube and the incasement portion of thoughtlessly gluing and is linked together, the utility model discloses combine photoresist preparation, coating and stoving three processes as an organic whole, improved work efficiency on the one hand, on the other hand has practiced.

Description

Spin coating device for perovskite solar cell preparation

Technical Field

The utility model relates to a semiconductor material processing technology field, concretely relates to spin coating device for perovskite solar cell preparation.

Background

Perovskite solar cells (perovskite solar cells) are solar cells using an organic metal halide semiconductor of perovskite as a light absorbing material, and belong to the third generation solar cells, which are also called new concept solar cells.

In the preparation process of the perovskite solar cell, photoresist needs to be coated on the surface of a wafer rotating at a high speed in a spinning mode to form a thin film, then the coated thin film is placed on a hot table to be heated, in the prior art, photoresist preparation, coating and drying operations are carried out in three processes, the photoresist is prepared in one process, then the prepared photoresist is injected into a coating device to coat the wafer, and then the coated photoresist is transferred into a drying process, so that the back-and-forth operation is very troublesome and the working efficiency is low.

SUMMERY OF THE UTILITY MODEL

The utility model provides a spin coating device for perovskite solar cell preparation for solve the problem that proposes in the background art.

The technical scheme of the utility model is that: a spin coating device for preparing a perovskite solar cell comprises a device main body, wherein a first rotating motor is connected to the bottom of the device main body through a bolt, a glue mixing box is installed on the outer side of the top of the device main body, an objective table is fixedly connected to the output end of the first rotating motor, a wafer is placed on the objective table, the objective table is of a hollow structure, a through groove communicated with an inner cavity is formed in the upper end of the objective table, a vacuum pump is installed at the lower end of the right side of the objective table and communicated with the inner cavity of the objective table through an air suction pipe, a support plate is arranged right above the objective table, a glue dripping pipe is installed in the middle of the lower end of the support plate, hot light lamps are installed on the left side and the right side of the lower end of the support plate, a, one end threaded connection that the booster pump was kept away from to the coupling hose has the glue outlet pipe, the one end that the coupling hose was kept away from to the glue outlet pipe runs through device main part roof after with mix the incasement portion and be linked together, device main part right side wall mounting has control panel, the inside controller that is provided with of control panel, and the control panel front surface is provided with control switch.

In this embodiment: mix gluey case top left and right sides and all install into the rubber tube, mix gluey case right side wall outside and install the second rotating electrical machines, the output fixedly connected with (mixing) shaft of second rotating electrical machines, the one end that the case was glued to the (mixing) shaft was kept away from mixes the case extends to the inside left side of mixing gluey case, is provided with stirring paddle leaf on the (mixing) shaft.

In this embodiment: electric telescopic handle is installed to device main part roof lower extreme left and right sides symmetry, electric telescopic handle's flexible end and backup pad fixed connection.

In this embodiment: and the rubber outlet pipe is provided with an electromagnetic valve.

In this embodiment: the control switch is electrically connected to the input end of the controller, and the output end of the controller is electrically connected with the second rotating motor, the electromagnetic valve, the electric telescopic rod, the hot light lamp, the vacuum pump and the first rotating motor respectively.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a second rotating electrical machines, the (mixing) shaft, stirring paddle leaf mutually support, realize the high-efficient mixture of photoresist and diluent, the photoresist after mixing passes through out in the rubber tube entering device main part, it is rotatory that the first rotating electrical machines in device main part bottom drives the objective table, the wafer on the objective table is adsorbed on the objective table under the effect of pressure, the photoresist in the play rubber tube loops through coupling hose, booster pump and rubber tube drip are dripped on the wafer, realize that the photoresist coats uniformly on the wafer, rethread starts the hot light lamp, the hot light sends the hot light and shines on the wafer surface, solvent in the photoresist volatilizees with higher speed, the utility model discloses combine photoresist preparation, coating and stoving three processes as an organic whole, improved work efficiency on the one hand, on the other hand has practiced thrift investment cost.

Description of the drawings:

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a block diagram of the electrical control principle of the present invention;

reference numerals: the device comprises a device main body 1, a first rotating motor 2, a vacuum pump 3, a control panel 4, a control switch 5, a booster pump 6, a connecting hose 7, an electromagnetic valve 8, a glue outlet pipe 9, a second rotating motor 10, a stirring paddle 11, a glue inlet pipe 12, a stirring shaft 13, a glue mixing box 14, an electric telescopic rod 15, a support plate 16, a hot light lamp 17, a glue dripping pipe 18, a through groove 19, a wafer 20, a suction pipe 21, an objective table 22 and a controller 23.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings, as shown in fig. 1, a spin coating apparatus for perovskite solar cell preparation comprises an apparatus main body 1, a first rotating electrical machine 2 is bolted on the bottom of the apparatus main body 1, a glue mixing box 14 is installed on the outer side of the top of the apparatus main body 1, an objective table 22 is fixedly connected to the output end of the first rotating electrical machine 2, a wafer 20 is placed on the objective table 22, the objective table 22 is of a hollow structure, a through groove 19 communicated with the inner cavity is formed at the upper end of the objective table 22, a vacuum pump 3 is installed at the lower end of the right side of the objective table 22, the vacuum pump 3 is communicated with the inner cavity of the objective table 22 through an air suction pipe 21, after the wafer 20 is placed on the objective table 22, the vacuum pump 3 is started, the vacuum pump 3 vacuums the inner cavity of the objective table 22, and adsorbs the, a supporting plate 16 is arranged right above the object stage 22, a dripping rubber tube 18 is arranged in the middle of the lower end of the supporting plate 16, hot light lamps 17 are arranged on the left side and the right side of the lower end of the supporting plate 16, the hot light lamps 17 are used for heating the wafer 20 after being coated with photoresist to accelerate solvent volatilization in the photoresist, a booster pump 6 is arranged in the middle of the upper end of the supporting plate 16, the output end of the booster pump 6 is fixedly connected with the top end of the rubber dripping pipe 18, the input end of the booster pump 6 is connected with the connecting hose 7 in a threaded manner, one end of the connecting hose 7 far away from the booster pump 6 is connected with a rubber outlet pipe 9 in a threaded manner, one end of the rubber outlet pipe 9 far away from the connecting hose 7 penetrates through the top wall of the device main body 1 and then is communicated with the interior of the rubber mixing box 14, a control panel 4 is installed on the right side wall of the device body 1, a controller 23 is arranged inside the control panel 4, and a control switch 5 is arranged on the front surface of the control panel 4.

In this embodiment: mix gluey 14 top left and right sides of case and all install into rubber tube 12, mix gluey 14 right side walls outside of case and install second rotating electrical machines 10, the output fixedly connected with (mixing) shaft 13 of second rotating electrical machines 10, the one end that gluey case 14 was kept away from to (mixing) shaft 13 extends to the inside left side of mixing gluey case 14, is provided with stirring paddle leaf 11 on the (mixing) shaft 13, and it is rotatory to drive stirring paddle leaf 11 on the (mixing) shaft 13 through second rotating electrical machines 10, realizes the high-efficient mixing of diluent and photoresist.

In this embodiment: electric telescopic handle 15 is installed to device main part 1 roof lower extreme left and right sides symmetry, electric telescopic handle 15's flexible end and backup pad 16 fixed connection, electric telescopic handle 15 can drive backup pad 16 and reciprocate, adjusts the distance between backup pad 16 and the wafer 20, prevents to splash when the photoresist drips, makes hot-light lamp 17 be close to wafer 20 simultaneously, is favorable to the solvent rapid evaporation in the photoresist, realizes wafer 20's rapid draing.

In this embodiment: the rubber outlet pipe 9 is provided with an electromagnetic valve 8, and the electromagnetic valve 8 controls the opening and closing and the on-off of the rubber outlet pipe 9.

In this embodiment: the control switch 5 is electrically connected to an input end of a controller 23, and an output end of the controller 23 is electrically connected to the second rotating motor 10, the electromagnetic valve 8, the electric telescopic rod 15, the thermo-optic lamp 17, the vacuum pump 3 and the first rotating motor 2 respectively.

The utility model discloses a theory of operation is: adding a xylene diluent and a photoresist into a glue mixing box 14 through glue inlet pipes 12 arranged on the left side and the right side of the top end of the glue mixing box 14, starting a second rotating motor 10 through a control switch 5, driving a stirring paddle blade 11 to rotate by the second rotating motor 10, stirring the xylene diluent and the photoresist uniformly by the stirring paddle blade 11, placing a wafer 20 to be coated with the photoresist on an objective table 22, starting a vacuum pump 3 through the control switch 5, adsorbing the wafer 20 on the objective table 22 through the matching of a through groove 19 and an air suction pipe 21, starting a first rotating motor 2 through the control switch 5, driving the wafer 20 on the objective table 22 to rotate rapidly by the first rotating motor 2, then starting an electric telescopic rod 15 to drive a support plate 16 to move downwards to enable the bottom end of a glue dripping pipe 18 to be close to the wafer 20, then opening an electromagnetic valve 8, starting a booster pump 6, and enabling the photoresist to sequentially pass through a glue outlet pipe 9, The connecting hose 7 and the glue dripping tube 18 are dripped on the wafer 20 and then uniformly dispersed on the surface of the wafer 20, after the surface of the wafer 20 is coated with the photoresist, the first rotating motor 2 drives the wafer 20 to continue rotating, and meanwhile, the hot light lamp 17 is turned on, the hot light lamp 17 emits hot light to irradiate on the surface of the wafer 20, so that the volatilization of the solvent in the photoresist is accelerated, and finally, a worker can take down the wafer 20 after the photoresist is homogenized.

The above list is only one of the specific embodiments of the present invention. Obviously, the present invention is not limited to the above embodiments, and many similar variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the invention should be considered within the scope of the invention.

Claims

1. A spin coating apparatus for perovskite solar cell fabrication, comprising an apparatus body (1), characterized in that: the device is characterized in that a first rotating motor (2) is connected to the bottom of the device body (1) through a bolt, a glue mixing box (14) is installed on the outer side of the top of the device body (1), an objective table (22) is fixedly connected to the output end of the first rotating motor (2), a wafer (20) is placed on the objective table (22), the objective table (22) is of a hollow structure, a through groove (19) communicated with an inner cavity is formed in the upper end of the objective table (22), a vacuum pump (3) is installed at the lower end of the right side of the objective table (22), the vacuum pump (3) is communicated with the inner cavity of the objective table (22) through an air suction pipe (21), a support plate (16) is arranged right above the objective table (22), a glue dripping pipe (18) is installed in the middle of the lower end of the support plate (16), hot light lamps (17) are installed, the output of booster pump (6) and the top fixed connection of rubber dripping pipe (18), the input threaded connection of booster pump (6) has coupling hose (7), one end threaded connection that booster pump (6) were kept away from in coupling hose (7) has rubber outlet pipe (9), the one end that coupling hose (7) were kept away from in rubber outlet pipe (9) runs through behind device main part (1) roof and thoughtlessly glues case (14) inside and is linked together, device main part (1) right side wall mounting has control panel (4), control panel (4) inside is provided with controller (23), and control panel (4) front surface is provided with control switch (5).

2. The spin coating apparatus according to claim 1, wherein the spin coating apparatus comprises: mix gluey case (14) top left and right sides and all install into rubber tube (12), mix gluey case (14) right side wall outside and install second rotating electrical machines (10), the output fixedly connected with (mixing) shaft (13) of second rotating electrical machines (10), the one end that mixes gluey case (14) was kept away from in (mixing) shaft (13) extends to mixing gluey case (14) inside left side, is provided with stirring paddle leaf (11) on (mixing) shaft (13).

3. The spin coating apparatus according to claim 1, wherein the spin coating apparatus comprises: electric telescopic rods (15) are symmetrically installed on the left side and the right side of the lower end of the top wall of the device main body (1), and the telescopic ends of the electric telescopic rods (15) are fixedly connected with a supporting plate (16).

4. The spin coating apparatus according to claim 1, wherein the spin coating apparatus comprises: and the rubber outlet pipe (9) is provided with an electromagnetic valve (8).

5. The spin coating apparatus according to claim 1, wherein the spin coating apparatus comprises: the control switch (5) is electrically connected to the input end of the controller (23), and the output end of the controller (23) is electrically connected with the second rotating motor (10), the electromagnetic valve (8), the electric telescopic rod (15), the thermo-optic lamp (17), the vacuum pump (3) and the first rotating motor (2) respectively.