CN212727582U

CN212727582U - Copper deposition system for high-frequency microwave

Info

Publication number: CN212727582U
Application number: CN202021904576.8U
Authority: CN
Inventors: 郭红樟
Original assignee: Sichuan Yilaiteng Electronic Technology Co ltd
Current assignee: Sichuan Yilaiteng Electronic Technology Co ltd
Priority date: 2020-09-03
Filing date: 2020-09-03
Publication date: 2021-03-16
Anticipated expiration: 2030-09-03

Abstract

The utility model discloses a copper deposition system for high-frequency microwave, which comprises a fixed frame, a plurality of reaction tanks, an upper frame and a plurality of feeding pipes, wherein the fixed frame is a rectangular structural frame, the reaction tanks are arranged on the fixed frame, the upper frame is arranged on the fixed frame, a sliding and grabbing mechanism is arranged on the upper frame, and one sides of the reaction tanks are respectively connected with the feeding pipes; the utility model relates to a heavy copper system technical field, this a heavy copper system for high frequency microwave simple structure, convenient operation, power device and arm components of a whole that can function independently are connected, adopt the lead screw module as power to with the lift of electric mode control stores pylon, make when arranging the stores pylon of multiunit, can effectively avoid the complicated problem of circuit, adopt the modularized design, the stores pylon system divides the system with driving system, convenient the connection, also convenient the dismantlement is overhauld, the multiunit is arranged and is effectively improved equipment's whole work efficiency.

Description

Copper deposition system for high-frequency microwave

Technical Field

The utility model relates to a heavy copper system technical field specifically is a heavy copper system for high frequency microwave.

Background

In the high-frequency microwave equipment, a plurality of electronic components need to be subjected to copper deposition operation during processing, wherein the copper deposition adopts a method of depositing a layer of chemical thin copper on an originally non-conductive base material (hole wall) and a copper surface, in the processing process, along with the development of an electronic process at the present stage, a plurality of reaction tanks are generally distributed below a transversely moving slide rail and respectively comprise a copper deposition tank, a cleaning tank and the like, the grabbing and moving of the base material are completed through a sliding mechanical arm and a hanging rack, in the existing copper deposition system, the used moving equipment is generally a hydraulic power sliding module in the moving process of the hanging rack, although the moving mode has high speed, the connecting pipeline is complex, the maintenance cost is high, and the number of the hanging racks in a single system is limited due to the complexity of the connecting pipeline, the production efficiency is limited, therefore, the problems are deeply researched, the method is used for generating the same.

SUMMERY OF THE UTILITY MODEL

The utility model provides a not enough to prior art, the utility model provides a heavy copper system for high frequency microwave has solved its stores pylon of present heavy copper system and is removing the in-process, and the mobile device that uses all is hydraulic power's slip module usually, and this kind of action mode is very fast, but connecting line is complicated, and the maintenance cost is high, and because connecting line's complicacy, has restricted the quantity of stores pylon in the single system, has restricted production efficiency's problem.

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: a copper deposition system for high-frequency microwaves comprises a fixing frame, a plurality of reaction tanks, a top frame and a plurality of feeding pipes, wherein the fixing frame is a rectangular structural frame, the reaction tanks are arranged on the fixing frame, the top frame is arranged on the fixing frame, a sliding and grabbing mechanism is arranged on the top frame, and one sides of the reaction tanks are respectively connected with the feeding pipes;

the slip grabbing mechanism comprises: the device comprises a pair of fixed seats, a screw rod, a sliding block, a mounting plate, a ball nut, a connecting plate, a driving motor, a driving gear and a driven gear;

the utility model discloses a quick-witted top of roof, including roof-rack top, sliding block, mounting panel, ball nut, connecting plate, driving motor, bearing nut, mounting panel, bearing nut.

Preferably, the hanger assembly comprises: the device comprises a connecting rod, a sliding sleeve, a fixed rod, a vertical plate, a linear screw rod module and a hanging frame;

the improved sliding block structure is characterized in that a through groove is formed in the center of the sliding groove, a connecting rod penetrates through the through groove and is arranged on the bottom surface of the sliding block, a sliding sleeve is arranged at the bottom end of the connecting rod, a fixing rod is arranged on the fixing frame, the sliding sleeve is arranged on the fixing rod in a sleeved mode, a vertical plate extends out of the bottom surface of the mounting plate and is parallel to the connecting rod, the linear lead screw module is mounted on the vertical plate, and.

Preferably, the connecting plate is an inverted L-shaped structure, and a pair of fastening bolts is arranged on the connecting plate and connected with the sliding block.

Preferably, a plurality of discharging pipes are communicated with the bottom surface of the reaction tank, a plurality of sub-control valves are respectively arranged on the plurality of discharging pipes, and a main exhaust pipe is arranged at the bottom ends of the plurality of discharging pipes for communication.

Preferably, the connecting rod is provided with a plurality of cross rods connected with the vertical plate.

Preferably, the fixing seat is provided with a slot matched with the width of the end part of the screw rod, the end part of the screw rod is inserted into the slot, and the slot is provided with a positioning bolt connected with the end part of the screw rod.

Advantageous effects

The utility model provides a heavy copper system for high frequency microwave. The method has the following beneficial effects: this a heavy copper system for high frequency microwave simple structure, convenient operation, power device and arm components of a whole that can function independently are connected, adopt the lead screw module as power to with the lift of electric mode control stores pylon, make when arranging the stores pylon of multiunit, can effectively avoid the problem that the circuit is complicated, adopt the modularized design, stores pylon system and driving system divide the system, conveniently connect, also conveniently dismantle the maintenance, the multiunit is arranged and can effectively improve equipment's whole work efficiency.

Drawings

Fig. 1 is a schematic structural view of a copper deposition system for high-frequency microwave according to the present invention.

Fig. 2 is a schematic side view of the copper deposition system for high frequency microwave according to the present invention.

Fig. 3 is a schematic top view of the copper deposition system for high frequency microwave according to the present invention.

Fig. 4 is a schematic view of a side view of a copper deposition system for high frequency microwave according to the present invention.

In the figure: 1. a fixed mount; 2. a reaction tank; 3. a top frame; 4. a feed pipe; 5. a fixed seat; 6. a screw rod; 7. a slider; 8. mounting a plate; 9. a ball nut; 10. a connecting plate; 11. a drive motor; 12. A drive gear; 13. a driven gear; 14. a connecting rod; 15. a sliding sleeve; 16. fixing the rod; 17. a vertical plate; 18. a linear screw rod module; 19. a hanger; 20. fastening a bolt; 21. a discharging pipe; 22. a sub-control valve; 23. a main calandria; 24. a cross bar; 25. and (6) positioning the bolt.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

All the electrical components in the present application are connected with the power supply adapted to the electrical components through a wire, and an appropriate controller and an appropriate encoder should be selected according to actual conditions to meet control requirements, and specific connection and control sequences should be obtained.

Example (b): according to the attached figures 1-4 of the specification, the copper deposition system for high-frequency microwave comprises a fixing frame 1, a plurality of reaction tanks 2, a top frame 3 and a plurality of feeding pipes 4, wherein the fixing frame 1 is a rectangular structural frame, the reaction tanks 2 are arranged on the fixing frame 1, the top frame 3 is arranged on the fixing frame 1, a sliding grabbing mechanism is arranged on the top frame 3, one sides of the reaction tanks 2 are respectively connected with the feeding pipes 4, in the specific implementation process, the reaction tanks 2 are fixed through the fixing frame 1, the reaction tanks 2 are divided into a plurality of tank positions such as a copper deposition tank and a cleaning tank, a hanging frame 19 is carried by the sliding grabbing mechanism fixed through the top frame 3, a base material is moved by the hanging frame 19 and is respectively placed into different tanks, and the feeding pipes 4 are used for feeding materials in the reaction tanks 2;

as can be seen from the accompanying drawings 1-4 of the specification, the slip grabbing mechanism comprises: a pair of fixed seats 5, a screw 6, a sliding block 7, an installation plate 8, a ball nut 9, a connecting plate 10, a driving motor 11, a driving gear 12 and a driven gear 13, wherein the connection relationship and the position relationship are as follows;

a pair of fixing seats 5 are arranged on two sides of the top end of the top frame 3, a screw rod 6 is fixed on the pair of fixing seats 5, a sliding groove is formed in the top surface of the top frame 3 and located on one side of the screw rod 6, a sliding block 7 is assembled in the sliding groove, a mounting plate 8 extends out of the sliding block 7 towards the upper portion of the reaction tank 2, a ball nut 9 is assembled on the screw rod 6, a connecting plate 10 is sleeved on the ball nut 9, one end of the connecting plate 10 is connected with the sliding block 7, a driving motor 11 is arranged on the connecting plate 10, a driving gear 12 is sleeved on the driving end of the driving motor 11, a driven gear 13 is;

in the concrete implementation process, fixing base 5 through the 3 tip of roof-rack fixes lead screw 6, driving motor 11 drives drive gear 12 and driven gear 13 meshing, and then drive ball nut 9 rotates, because ball nut 9 outside cover establishes connecting plate 10 and sliding block 7 rigid connection, sliding block 7 makes ball nut 9 can only carry out linear motion on lead screw 6, ball nut 9 drives sliding block 7 through connecting plate 10 and slides, sliding block 7 drives mounting panel 8 and slides when gliding in the spout, and then drive 19 subassemblies of stores pylon and carry out linear motion, switch between each reaction tank 2.

Preferably, as further shown in fig. 1-4 of the specification, the hanger 19 assembly comprises: the connecting rod 14, the sliding sleeve 15, the fixing rod 16, the vertical plate 17, the linear screw rod 6 module and the hanging rack 19 are connected in the following relation and position relation;

a through groove is formed in the center of the sliding groove, a connecting rod 14 penetrating through the through groove is arranged on the bottom surface of the sliding block 7, a sliding sleeve 15 is arranged at the bottom end of the connecting rod 14, a fixed rod 16 is arranged on the fixed frame 1, the sliding sleeve 15 is sleeved on the fixed rod 16, a vertical plate 17 extends from the bottom surface of the mounting plate 8 and is parallel to the connecting rod 14, the linear screw rod 6 module is mounted on the vertical plate 17, and the hanging frame 19 is assembled on the sliding;

in the concrete implementation process, the hanging rack 19 is driven by the linear screw rod 6 module to complete up-and-down sliding, the linear screw rod 6 module is arranged in the direction perpendicular to the horizontal direction and is fixed through the vertical plate 17, the vertical plate 17 is connected with the mounting plate 8 and slides synchronously, the sliding sleeve 15 is movably mounted between the connecting rod 14 and the fixing rod 16, the sliding block 7 is fixed through the connecting rod 14, the sliding block is more stable when the sliding block is made to slide, and meanwhile the connecting rod 14 is connected with the vertical plate 17 to support the vertical plate 17.

As preferred scheme, still further, connecting plate 10 is the type of falling L structure, and is equipped with a pair of fastening bolt 20 on connecting plate 10 and is connected with sliding block 7 for carry on driving motor 11 as power connecting plate 10 and sliding block 7 components of a whole that can function independently and be connected, make things convenient for the dismouting to overhaul, quick replacement avoids influencing production when the trouble, can install the connecting plate 10 of multiunit as power on same lead screw 6 simultaneously, and set up multiunit sliding block 7, conveniently arrange multiunit work arm and improve work efficiency.

Preferably, the bottom surfaces of the reaction tanks 2 are communicated with a plurality of discharge pipes 21, the discharge pipes 21 are respectively provided with a plurality of sub-control valves 22, the bottom ends of the discharge pipes 21 are communicated with a main discharge pipe 23, and the main discharge pipe 23 is used for discharging the deposition liquid in each reaction tank 2.

Preferably, the connecting rod 14 is further provided with a plurality of crossbars 24 connected with the vertical plates 17.

As a preferred scheme, furthermore, the fixing seat 5 is provided with a slot matched with the width of the end part of the screw rod 6, the end part of the screw rod 6 is inserted into the slot, the slot is provided with a positioning bolt 25 connected with the end part of the screw rod 6, and the screw rod 6 can be detached and replaced.

In conclusion, the copper deposition system for high-frequency microwaves is simple in structure and convenient to operate, the power device is connected with the mechanical arm in a split mode, the lead screw 6 module is used as power, and the lifting of the hanging rack 19 is controlled in an electric mode, so that when the hanging racks 19 of multiple groups are arranged, the problem of complex circuits can be effectively avoided, the modular design is adopted, the hanging rack 19 system and the power system are divided, the connection is convenient, the disassembly and the maintenance are also convenient, and the overall working efficiency of the equipment can be effectively improved due to the arrangement of the multiple groups.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation. The use of the phrase "comprising one of the elements does not exclude the presence of other like elements in the process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A copper deposition system for high-frequency microwaves comprises a fixing frame (1), a plurality of reaction tanks (2), a top frame (3) and a plurality of feeding pipes (4), and is characterized in that the fixing frame (1) is a rectangular structural frame, the reaction tanks (2) are arranged on the fixing frame (1), the top frame (3) is arranged on the fixing frame (1), a sliding and grabbing mechanism is arranged on the top frame (3), and one sides of the reaction tanks (2) are respectively connected with the feeding pipes (4);

the slip grabbing mechanism comprises: the device comprises a pair of fixed seats (5), a screw rod (6), a sliding block (7), a mounting plate (8), a ball nut (9), a connecting plate (10), a driving motor (11), a driving gear (12) and a driven gear (13);

a pair of fixed seats (5) are arranged on two sides of the top end of the top frame (3), the screw rod (6) is fixed on the pair of fixed seats (5), a sliding groove is arranged on the top surface of the top frame (3) and on one side of the screw rod (6), the sliding block (7) is assembled in the sliding groove, the sliding block (7) extends out of the mounting plate (8) to the upper part of the reaction tank (2), the lead screw (6) is provided with a ball nut (9), the ball nut (9) is sleeved with a connecting plate (10), one end of the connecting plate (10) is connected with the sliding block (7), a driving motor (11) is arranged on the connecting plate (10), a driving gear (12) is sleeved on the driving end of the driving motor (11), the end part of the ball nut (9) is provided with a driven gear (13) which is meshed with a driving gear (12), and the lower wall surface of the mounting plate (8) is provided with a rack component.

2. The system of claim 1, wherein the hanger assembly comprises: the device comprises a connecting rod (14), a sliding sleeve (15), a fixing rod (16), a vertical plate (17), a linear screw rod (6) module and a hanging rack (19);

the spout center has been seted up and has been led to the groove, sliding block (7) bottom surface is equipped with connecting rod (14) and runs through logical groove, connecting rod (14) bottom is equipped with and slides cover (15), be equipped with dead lever (16) on mount (1), slide cover (15) cover is located on dead lever (16), mounting panel (8) bottom surface extends riser (17) and is parallel with connecting rod (14), sharp lead screw (6) module is installed on riser (17), stores pylon (19) are assembled on the slip of sharp lead screw (6) module and are served.

3. The electroless copper plating system for high-frequency microwaves as claimed in claim 1, wherein the connecting plate (10) is of an inverted L-shaped structure, and a pair of fastening bolts (20) are arranged on the connecting plate (10) and connected with the sliding block (7).

4. The copper deposition system for high-frequency microwaves according to claim 1, wherein a plurality of blanking pipes (21) are communicated with the bottom surfaces of the reaction tanks (2), a plurality of sub-control valves (22) are respectively arranged on the plurality of blanking pipes (21), and a main discharge pipe (23) is communicated with the bottom ends of the plurality of blanking pipes (21).

5. The electroless copper plating system for high-frequency microwaves as claimed in claim 2, wherein the connecting rods (14) are provided with a plurality of cross rods (24) connected with the vertical plates (17).

6. The copper deposition system for high-frequency microwaves according to claim 1, wherein the fixing seat (5) is provided with a slot matching with the width of the end of the screw rod (6), the end of the screw rod (6) is inserted into the slot, and the slot is provided with a positioning bolt (25) connected with the end of the screw rod (6).