CN212648262U - Groove type texturing equipment - Google Patents

Abstract

The utility model relates to a groove type texturing equipment, be in including cell body and connection the overflow pipe in the cell body outside, wherein, the overflow pipe has the body and the overflow plate that sets up with the body cooperation, set up a plurality of overflow hole that supplies the texturing liquid to flow through the body on the overflow plate. According to the groove type wool making equipment, the speed of the wool making liquid flowing through the overflow pipe can be effectively controlled through the overflow hole in the overflow plate, the mixing time of the wool making solution is prolonged, the loss of the wool making liquid medicine can be effectively reduced, and the production cost is saved; the device has simple structure, obvious effect and easy popularization.

Description

Groove type texturing equipment

Technical Field

The utility model relates to a solar cell production facility field especially relates to a groove type texturing equipment.

Background

The process flow of black silicon texturing in the photovoltaic industry is generally completed by utilizing groove type texturing equipment, the conventional groove type texturing equipment generally comprises a main groove for silicon wafer reaction, an auxiliary groove outside the main groove, when a flower basket filled with silicon wafers is placed into the main groove, the solution in the main groove overflows to the auxiliary groove, along with the increase of the liquid level of the auxiliary groove, redundant solution can be discharged along an overflow pipe, and because the density of a texturing reaction solvent is low, the texturing reaction solvent is easy to float on the surface of the solution, therefore, the overflowing solution contains a large amount of reaction solvent, the waste of the reaction solvent is caused, the proportion of the reaction solvent participating in the reaction is reduced, and the texturing quality is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model provides a new-type slot type texturing equipment solves the above-mentioned problem.

In order to achieve the above object, the present invention provides the following technical solutions:

the utility model provides a groove type texturing equipment, includes the cell body and connects the overflow pipe in the cell body outside, wherein, the overflow pipe has the body and cooperates the overflow plate that sets up with the body, set up a plurality of overflow hole that supplies the texturing liquid to flow through the body on the overflow plate.

Further, the inner diameter of the overflow hole is 2mm to 4 mm.

Further, the overflow plate is provided with an overflow plate body covering the inner hole of the pipe body, the overflow plate body is provided with a flow blocking part and an overflow part connected above the flow blocking part, and the area of the flow blocking part accounts for 20% -80% of the area of the overflow plate body.

Further, the overflow holes are distributed on the overflow part, the overflow part comprises an upper area and a lower area which are connected up and down, and the total area of the upper area occupied by the overflow holes is smaller than the total area of the lower area occupied by the overflow holes.

Further, the aperture of the overflow holes is the same, and the number of the overflow holes in the upper area is smaller than that in the lower area.

Furthermore, the number of the overflow holes is the same, and the aperture of the overflow holes in the upper area is smaller than that in the lower area.

Further, the total area of the overflow holes accounts for 7 to 20 percent of the area of the overflow plate body.

Further, the body is including connecting the first section of cell body, the second section of connecting the first section, the overflow plate sets up between first section and second section, the overflow plate is still including connecting the fixed part in the overflow plate body outside.

Further, the tank body comprises a main tank and an auxiliary tank arranged on the outer side of the main tank, and the overflow pipe is connected to the outer side of the auxiliary tank.

Furthermore, the groove type texture surface making equipment further comprises a liquid supplementing pipe arranged on the inner side of the auxiliary groove, a liquid outlet arranged at the bottom of the auxiliary groove, a liquid inlet arranged at the bottom of the main groove, and a circulating system arranged outside the groove body and used for communicating the liquid inlet and the liquid outlet.

Compared with the prior art, the beneficial effects of the utility model reside in that: the groove type texturing equipment of the utility model controls the speed of the texturing liquid flowing through the overflow pipe through the overflow hole on the overflow plate, increases the mixing time of the texturing solution, can effectively reduce the loss of the texturing liquid medicine and the texturing reaction solvent, and saves the production cost; the device has simple structure, obvious effect and easy popularization.

Drawings

FIG. 1 is a schematic view of the structure of the groove-type texturing apparatus of the present invention.

Fig. 2 is a partially enlarged view of a in fig. 1.

Fig. 3 is a schematic structural view of the overflow plate in the embodiment of fig. 1.

Fig. 4 is a schematic view of the overflow plate and the tube body in the embodiment of fig. 1.

Fig. 5 is an overflow graph illustrating the control of overflow flow rate using the overflow plate of the present invention.

The device comprises a groove body 10, a main groove 11, a liquid inlet 111, a supporting part 112, an auxiliary groove 12, a liquid outlet 121, an overflow pipe 20, a pipe body 21, a first section 211, a second section 212, a nut 213, an overflow plate 22, an overflow plate body 221, a flow blocking part 2211, an overflow part 2212, a fixing part 222, an overflow hole 23, a liquid supplementing pipe 30, a flower basket 40 and a silicon wafer 41.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

It should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only used for convenience of simplifying the description of the present invention, and do not indicate or imply that the indicated devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the scope of the present invention. Specifically, the opening direction of the groove-type texturing equipment is upward.

In the various drawings of the present invention, certain dimensions of structures or portions may be exaggerated relative to other structural portions for ease of illustration and, thus, are provided only to illustrate the basic structure of the subject matter of the present invention.

As shown in fig. 1 to 4, the utility model provides a trough type texture etching device, include the cell body 10 and connect the overflow pipe 20 in the cell body 10 outside, wherein, the overflow pipe 20 has the body 21 and cooperates the overflow plate 22 that sets up with the body 21, set up a plurality of overflow hole 23 that supplies texture etching liquid to flow through the body 21 on the overflow plate 22. The utility model discloses a speed that the overflow hole 23 controlled the making herbs into wool liquid and flowed through overflow pipe 20 to reduce the loss of making herbs into wool liquid medicine, practice thrift manufacturing cost.

In the present invention, the tank body 10 includes a main tank 11 and an auxiliary tank 12 disposed outside the main tank 11. The main groove 11 is used for silicon wafer texturing. Before the wool making, the proper wool making solution is prepared in the main tank 11 according to the requirement, the silicon wafer 41 is arranged in the flower basket 40 and is placed in the main tank 11, so that the solution in the main tank 11 overflows into the auxiliary tank 12, and the wool making liquid in the auxiliary tank 12 rises to the position of the overflow pipe 20 and is discharged along the overflow pipe 20.

Further, the bottom of the main tank 11 is provided with a liquid inlet 111 for supplying a liquid medicine required for texturing the silicon wafer 41, because the texturing liquid is formed by mixing several different liquid medicines, the liquid medicine is supplied from the bottom of the main tank 11, so that the liquid medicine can be more uniformly mixed in the main tank 11.

The utility model discloses in, be equipped with the supporting part 112 that is used for supporting basket of flowers 40 on the inner diapire of main trough 11, the making herbs in-process basket of flowers 40 with the inner diapire of main trough 11 not direct contact, silicon chip 41 in the basket of flowers 40 is fully surrounded by the solution of making herbs into wool for silicon chip 41 is more abundant with the reaction of the solution of making herbs into wool, and then promotes the homogeneity of silicon chip 41 making herbs into wool.

The auxiliary tank 12 is used for temporarily storing the liquid medicine overflowed from the edge of the main tank 11 and the new supplemented liquid medicine. Specifically, a liquid outlet 121 is disposed at the bottom of the auxiliary tank 12, and the liquid medicine in the auxiliary tank 12 enters the main tank 11 through the liquid outlet 121. The liquid outlet 121 is disposed at the bottom of the sub tank 12 mainly to allow the solution in the sub tank 12 to completely enter the main tank 11, thereby achieving sufficient mixing of the chemical solution.

Generally, as the texturing process of the silicon wafer 41 proceeds, the concentration of the texturing solution in the main tank 11 is decreased, and a liquid replenishment operation is performed so as not to decrease the effect of texturing the silicon wafer. Specifically, the groove type texturing apparatus further includes a fluid replenishment pipe 30 connected to an inner side of the sub-groove 12, and new chemical fluid is introduced into the sub-groove 12 through the fluid replenishment pipe 30 and then replenished from the sub-groove 12 to the main groove 11.

As a preferred embodiment of the present invention, the groove-type texture etching apparatus further includes a circulation system (not shown) disposed outside the groove body 10 and used for communicating the liquid inlet 111 and the liquid outlet 121, wherein the circulation system is used for guiding the solution from the auxiliary groove 12 to the main groove 11.

In the utility model, the overflow pipe 20 is connected in the outside of the auxiliary tank 12 for adjusting the liquid level of the solution in the auxiliary tank 12. The inner diameter of the overflow pipe 20 is set to 4 cm, and thus, the overflow pipe 20 adjusts the overflow speed of the solution by providing an overflow plate 22 in the pipe body 21. Specifically, the pipe body 21 includes a first section 211 connected to the tank body 10 and a second section 212 connected to the first section 211, and the overflow plate 22 is disposed between the first section 211 and the second section 212, and preferably, the overflow plate 22 is vertically disposed at an interface between the first section 211 and the second section 212 to limit a flow rate of the texturing solution.

Further, the overflow plate 22 has an overflow plate body 221 covering the inner hole of the pipe body 21, and a fixing portion 222 connected to the outer side of the overflow plate body 221. The utility model discloses in, fixed part 222 with overflow plate body 221 is on the coplanar, fixed part 222 be used for with overflow plate 22 is fixed on the body 21, specifically, fixed part 222 is restricted between first section 211, the second section 212, two sides of fixed part 222 respectively with the cross-section contact of first section 211 and second section 212 pipe wall, then utilize nut 213 to fix the kneck of first section 211 and second section 212, make overflow plate 22 is firmly blocked in the body 21.

Of course, the fixing portion 222 may also be disposed perpendicular to the overflow plate body 221, that is, the fixing portion 222 is consistent with the extending direction of the pipe body 21, the fixing portion 222 may be fixedly attached to the inner wall of the pipe body 21 near the interface, and the overflow plate 22 may be fixed by being attached to the inner wall of the first section 211 or the second section 212.

It will be appreciated that the overflow plate 22 may also be fixed to the end of the tube 21, also for the purpose of regulating the flow rate of the liquid.

Further, the overflow plate body 221 has a flow blocking portion 2211 and an overflow portion 2212 connected above the flow blocking portion 2211, the flow blocking portion 2211 can block a part of the solution in the auxiliary tank 12 from being discharged along the tube body 21, so as to raise the liquid level of the solution in the auxiliary tank 12, so that enough texturing solution can reenter the main tank 11 through a circulating system, thereby adapting to the texturing of large-size silicon wafer products, enabling the whole texturing process to be more continuous, and saving the production time.

Preferably, the area of the flow blocking portion 2211 occupies 20 to 80 percent of the area of the overflow plate body 221. The liquid level of the auxiliary tank 12 can be effectively raised by 1 cm to 3 cm.

Further, the overflow holes 23 are distributed on the overflow portion 2212 for controlling the overflow speed of the solution, as shown in fig. 5, wherein curve a is the total overflow flow rate curve of the overflow pipe when the existing overflow plate is used; curve B is the overflow flow rate curve of the solution on the surface layer of the overflow pipe when the existing overflow plate is used; the curve C is the total overflow flow velocity curve of the overflow pipe when the overflow plate of the utility model is used; curve D is the overflow flow velocity curve of the surface solution when using the overflow plate of the utility model. The utility model discloses in, the internal diameter of overflow hole 23 is 2mm to 4mm, and less overflow hole 23 has reduced the speed that solution discharged in the auxiliary tank 12 has increased the time of overflow for silicon chip 41 making herbs into wool in-process overflow arrives the solution that has participated in the making herbs into wool reaction in the auxiliary tank 12 and the abundant mixture of solution in the auxiliary tank 12, consequently, follow increased the proportion of the solution that has participated in the making herbs into wool reaction in the mixed solution of overflow hole 23 exhaust, that is to say, contain a large amount of solutions that have not participated in the making herbs into wool reaction in the surplus solution in the auxiliary tank 12, recycle extremely in the main tank 11 participates in the making herbs into wool reaction, has avoided the waste of solution, has reduced manufacturing cost.

Under general conditions, the reaction solvent density of making herbs into wool in the solution of making herbs into wool is lower, easily floats on the surface of the mixed liquid of making herbs into wool, the utility model discloses in, the less aperture in overflow hole 23 can make solution in the auxiliary tank 12 can not in time pass through at the in-process that the liquid level rose overflow hole 23 discharges, thereby makes liquid level in the auxiliary tank 12 surpasss overflow hole 23. Then the total area of the overflow holes 23 is controlled to control the discharging speed of the solution below the liquid level in the auxiliary tank 12, so as to reduce the loss of the wool making reactant on the surface layer of the solution in the auxiliary tank 12. Specifically, the overflow portion 2212 includes an upper area and a lower area which are connected up and down, and the total area occupied by the overflow holes 23 in the upper area is smaller than the total area occupied by the lower area. That is, the arrangement of the overflow holes 23 can effectively reduce the overflow flow rate of the surface layer solution in the auxiliary tank 12, thereby reducing the loss of the low-density texturing reactant.

As a preferred embodiment of the present invention, the aperture of the overflow holes 23 is the same, the number of the overflow holes 23 in the upper region is smaller than the number of the lower region, the arrangement of the overflow holes 23 increases the total area of the overflow holes 23 in the lower region, so as to effectively control the overflow speed of the solution in the sub-tank 12 at the surface layer of the solution and below the liquid level.

As a preferred embodiment of the present invention, the number of the overflow holes 23 is the same, and the aperture of the overflow holes 23 in the upper region is smaller than that in the lower region. By changing the aperture size of the overflow holes 23, the total area of the overflow holes 23 in the lower area is increased, and the overflow speed of the solution on the surface layer and below the liquid level in the auxiliary tank 12 is controlled.

The utility model discloses in, the total area of overflow hole 23 accounts for 7% to 20% of overflow plate body 221 area, the overflow rate that can effective control solution.

As an example of the best embodiment of the present invention, the aperture of the overflow hole 23 is set to be 2mm, the flow blocking portion 2211 occupies 80% of the area of the overflow plate body 221, the total area of the overflow hole 23 occupies 7% of the area of the overflow plate body 221, as shown in fig. 4, so that the overflow time is prolonged by 75s, the amount of the texturing liquid is saved by 20% compared with the amount of the peak value, and the amount of the texturing reactant is reduced by 30% compared with the amount of the peak value.

It can be understood that the overflow speed and the overflow curve are set according to the capacity of the trough body 10, and the overflow flow speed and the overflow curve of the trough body 10 are realized by the total area of the overflow holes 23 and the matching area of the flow blocking portion 2211.

To sum up, the utility model discloses a slot type making herbs into wool equipment controls the speed that the overflow pipe 20 was flowed through to the making herbs into wool liquid through the size and the total area of the overflow hole 23 on the control overflow plate 22, increases the time that the making herbs into wool solution mixes, can effectively reduce the loss of making herbs into wool liquid medicine, saves manufacturing cost.

It should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art will be able to make the description as a whole, and the embodiments may be appropriately combined to form other embodiments as will be appreciated by those skilled in the art.

The above detailed description of a series of embodiments is only for the purpose of illustration, and is not intended to limit the scope of the invention, which is intended to include all equivalent embodiments or modifications that do not depart from the spirit of the invention.

Claims (10)

1. The utility model provides a groove type texturing equipment, includes the cell body and connects the overflow pipe in the cell body outside, its characterized in that: the overflow pipe is provided with a pipe body and an overflow plate which is matched with the pipe body, and a plurality of overflow holes for allowing the wool making liquid to flow through the pipe body are formed in the overflow plate.

2. The trough type texturing apparatus of claim 1, wherein: the inner diameter of the overflow hole is 2mm to 4 mm.

3. The trough type texturing apparatus of claim 1, wherein: the overflow plate is provided with an overflow plate body covering the inner hole of the pipe body, the overflow plate body is provided with a flow blocking part and an overflow part connected above the flow blocking part, and the area of the flow blocking part accounts for 20-80% of the area of the overflow plate body.

4. The trough type texturing apparatus of claim 3, wherein: the overflow hole distributes on the overflow portion, the overflow portion includes upper region and lower region of connecting from top to bottom, the overflow hole occupies that the total area in upper region is less than the total area who occupies lower region.

5. The trough type texturing apparatus of claim 4, wherein: the aperture of the overflow holes is the same, and the number of the overflow holes in the upper area is smaller than that in the lower area.

6. The trough type texturing apparatus of claim 4, wherein: the number of the overflow holes is the same, and the aperture of the overflow holes in the upper area is smaller than that in the lower area.

7. The trough type texturing apparatus of claim 3, wherein: the total area of the overflow holes accounts for 7 to 20 percent of the area of the overflow plate body.

8. The trough type texturing apparatus of claim 3, wherein: the body is including connecting the first section of cell body, the second section of connecting the first section, the overflow plate sets up between first section and second section, the overflow plate is still including connecting the fixed part in the overflow plate body outside.

9. The groove-type etching equipment as claimed in any one of claims 1 to 8, wherein the groove body comprises a main groove, a sub groove disposed outside the main groove, and the overflow pipe is connected to the outside of the sub groove.

10. The trough type texturing apparatus of claim 9, wherein: the liquid replenishing device further comprises a liquid replenishing pipe arranged on the inner side of the auxiliary groove, a liquid outlet arranged at the bottom of the auxiliary groove, a liquid inlet arranged at the bottom of the main groove and a circulating system arranged outside the groove and used for communicating the liquid inlet and the liquid outlet.

Images