CN212644263U - Switching control device for uninterrupted gas supply of gas cylinder - Google Patents
Switching control device for uninterrupted gas supply of gas cylinder Download PDFInfo
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Abstract
The utility model relates to a switching control device for uninterrupted gas supply of a gas cylinder, which comprises a gas supply device body, wherein the gas supply device body comprises a main gas supply cylinder and a secondary gas supply cylinder, one end of a pipeline system, which is far away from the main gas supply cylinder, is communicated with a middle main gas inlet pipe, a main control valve is arranged on the middle main gas inlet pipe, one end of the pipeline system, which is far away from the secondary gas supply cylinder, is provided with a middle secondary gas inlet pipe, one end of the middle secondary gas inlet pipe, which is close to the pipeline system, is provided with a secondary control valve, the end parts of the middle main gas inlet pipe and the middle secondary; the middle secondary air inlet pipe is provided with a buffer tank and a buffer control valve, the buffer tank is provided with an exhaust pipe, the exhaust pipe is provided with an exhaust control valve, the buffer tank is provided with a buffer pressure sensor, and the collecting pipe is provided with a collecting pressure sensor. The velocity of flow when this application has the gas of main air feed bottle and time air feed bottle to collect the collector pipe is the same, and the air current is roughly even gets into reaction system, is favorable to guaranteeing reaction system normal clear effect.
Description
Technical Field
The application relates to the field of gas supply equipment, in particular to a switching control device for uninterrupted gas supply of a gas cylinder.
Background
With the rapid development of the semiconductor industry, gas supply equipment is increasingly applied to projects such as IC chip production, plating, laboratory scientific research and the like.
The prior Chinese utility model with publication number CN203927403U discloses an uninterrupted gas supply type gas cylinder cabinet, which comprises a shell, wherein a cylinder group I and a cylinder group II are arranged in the shell, and the cylinder group I and the cylinder group II are converged to the same confluence output pipe through an automatic switching valve; the bottom of the shell is provided with a first weighing platform and a second weighing platform, and the first weighing platform and the second weighing platform can output electric signals to the controller. The gas cylinder cabinet has the advantages that main gas and standby gas are stored and sequentially output, and the uninterrupted efficiency of gas output is guaranteed; meanwhile, the device has the effects of remotely monitoring the weight of the bottle group, judging the gas storage state and ensuring uninterrupted gas supply; and possess the gaseous leakage trouble of remote monitoring gas cylinder cabinet interior to ventilate and dilute the gas that leaks, avoid the efficiency that dangerous accident takes place.
In view of the above-mentioned related technologies, the inventor believes that there is a defect that when the gas supply of the first bottle group and the second bottle group is switched, the flow rates of the gas in the first bottle group and the second bottle group collected to the confluence output pipe are different, which causes the gas flow to be disturbed, and is not beneficial to the reaction system.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the related problems, the application provides a switching control device for uninterrupted gas supply of a gas cylinder.
The application provides a switching control device for incessant air feed of gas cylinder adopts following technical scheme:
a switching control device for uninterrupted gas supply of a gas cylinder comprises a gas supply device body, wherein the gas supply device body comprises a main gas supply cylinder and a secondary gas supply cylinder, one end of the main gas supply cylinder is provided with a pipeline system through an initial main gas inlet pipe, one end of the secondary gas supply cylinder and the pipeline system are arranged through an initial secondary gas inlet pipe, one end of the pipeline system, far away from the main gas supply cylinder, is communicated with a middle main gas inlet pipe, one end, close to the pipeline system, of the middle main gas inlet pipe is provided with a main control valve, one end, far away from the secondary gas supply cylinder, of the pipeline system is provided with a middle secondary gas inlet pipe, one end, close to the pipeline system, of the middle secondary gas inlet pipe is provided with a secondary control valve, the end parts of the middle main; the middle secondary air inlet pipe is communicated with a buffer tank and a buffer control valve, the buffer tank is located at one end, away from the pipeline system, of the secondary control valve, the buffer control valve is located at one end, away from the secondary control valve, of the buffer tank, an exhaust pipe is arranged on the buffer tank, an exhaust control valve is arranged on the exhaust pipe, a buffer pressure sensor is arranged on the buffer tank, and a confluence pressure sensor is arranged on the confluence pipe.
By adopting the technical scheme, when the switching control device for uninterrupted gas supply of the gas cylinder is used, the gas in the main gas supply cylinder enters the pipeline system through the initial main gas inlet pipe by opening the main control valve, enters the middle main gas inlet pipe through the pipeline system, further enters the collecting pipe through the middle main gas inlet pipe, enters the reaction system through the collecting pipe, when the pressure sensor for collecting the gas detects that the pressure in the collecting pipe is reduced, the main gas supply cylinder is about to run out, the secondary control valve and the gas exhaust control valve are opened, the gas in the secondary gas supply cylinder enters the pipeline system through the initial secondary gas inlet pipe, further enters the middle secondary gas inlet pipe through the pipeline system, enters the buffer box through the middle secondary gas inlet pipe, the gas in the secondary gas supply cylinder exhausts the air in the buffer box through the gas exhaust pipe, the gas exhaust control valve is closed after the air is exhausted, the gas is continuously introduced into the buffer box, and the, when the pressure values of the buffer pressure sensor and the confluence pressure sensor are the same, the buffer control valve is opened, and gas enters the confluence pipe through the middle secondary air inlet pipe from the buffer tank and then enters the reaction system through the confluence pipe. So set up, the velocity of flow that the gas of main air feed bottle and inferior air feed bottle converged the collector pipe is the same, and the air current is roughly even gets into reaction system, is favorable to guaranteeing reaction system's normal clear.
Preferably, a weighing device is arranged at one end, far away from the initial main air inlet pipe, of the main air supply bottle.
Through adopting above-mentioned technical scheme, when the main gas supply bottle is constantly supplying gas, weighing device is favorable to the accurate gas surplus that detects in the main gas supply bottle, is favorable to clearly mastering the gas output progress in the main gas supply bottle.
Preferably, a flow velocity sensor is arranged on the collecting pipe.
Through adopting above-mentioned technical scheme, when gaseous when passing through the collecting pipe, velocity of flow sensor is favorable to accurate gaseous velocity of flow that detects, and then is favorable to controlling gaseous velocity of flow through main control valve and secondary control valve.
Preferably, a temperature control mechanism for controlling the temperature of the gas in the collecting pipe is arranged at one end of the collecting pipe close to the reaction system.
Through adopting above-mentioned technical scheme, when gaseous when passing through the collecting pipe, the temperature-control mechanism is favorable to regulating and control the gas temperature in the collecting pipe according to reaction system's temperature, is favorable to improving the application nature of the incessant for the air feed switching control device of gas cylinder.
Preferably, the temperature control mechanism comprises a temperature control meter, a temperature control element and a temperature controller for controlling the temperature of the temperature control element, the temperature control element is sleeved at one end of the collecting pipe close to the reaction system, and the temperature control meter is arranged on the temperature controller.
Through adopting above-mentioned technical scheme, when gaseous when passing through the collecting pipe, the temperature controller adjusts the temperature of temperature control spare, and then the temperature control spare is controlled the gas temperature in the collecting pipe, is favorable to regulating and control the gas temperature in the collecting pipe according to reaction system's temperature, is favorable to improving the application of the incessant for the gas feed switching control device of gas cylinder, and the temperature control spare cover is established on the collecting pipe simultaneously, is favorable to regulating and control roughly evenly to the gas temperature in the collecting pipe.
Preferably, a protective shell is arranged outside the air supply device body.
Through adopting above-mentioned technical scheme, the protective housing is favorable to preventing that external factors from causing the damage to the air feeder body, is favorable to protecting the incessant for the air feed switching control device of gas cylinder.
Preferably, the initial main air inlet pipe, the initial secondary air inlet pipe, the middle main air inlet pipe, the middle secondary air inlet pipe and the collecting pipe are all sleeved with protective sleeves.
Through adopting above-mentioned technical scheme, the protective sheath is favorable to preventing that initial main intake pipe, initial time intake pipe, middle main intake pipe, middle time intake pipe and collecting pipe from causing the erosive wear when being in moist environment, is favorable to protecting initial main intake pipe, initial time intake pipe, middle main intake pipe, middle time intake pipe and collecting pipe
Preferably, the initial main air inlet pipe, the initial secondary air inlet pipe, the middle main air inlet pipe, the middle secondary air inlet pipe and the collecting pipe are all provided with airflow directing signs.
Through adopting above-mentioned technical scheme, when the incessant for the air feed switching control device of gas cylinder when using, the directional sign of air current is favorable to clear instruction gas in initial main intake pipe, initial time intake pipe, middle main intake pipe, middle time intake pipe and the flow direction of collecting pipe, is convenient for understand and operate.
In summary, the present application includes at least one of the following beneficial technical effects:
1. when the switching control device for uninterrupted gas supply of the gas cylinder is used, the gas in the main gas supply cylinder enters a pipeline system through an initial main gas inlet pipe by opening a main control valve, enters a middle main gas inlet pipe through the pipeline system, further enters a collecting pipe through the middle main gas inlet pipe, enters a reaction system through the collecting pipe, when a pressure sensor for collecting the gas detects that the pressure in the collecting pipe is reduced, the gas in the main gas supply cylinder is about to run out, a secondary control valve and a gas exhaust control valve are opened, the gas in the secondary gas supply cylinder enters the pipeline system through the initial secondary gas inlet pipe, further enters a middle secondary gas inlet pipe through the pipeline system, enters a buffer box through the middle secondary gas inlet pipe, the gas in the secondary gas supply cylinder exhausts the air in the buffer box through a gas exhaust pipe, the gas exhaust control valve is closed after the air is exhausted, the gas is introduced into the buffer box, when the pressure values of the buffer pressure sensor and the confluence pressure sensor are approximately the same, the buffer control valve is opened, and gas enters the confluence pipe through the middle secondary air inlet pipe by the buffer tank and then enters the reaction system through the confluence pipe. Due to the arrangement, the flow rates of the gas collected by the collecting pipe are the same, and the gas flow enters the reaction system approximately and uniformly, so that the normal operation of the reaction system is ensured;
2. when the main gas supply bottle supplies gas continuously, the weighing device is favorable for accurately detecting the gas allowance in the main gas supply bottle and clearly mastering the gas output progress in the main gas supply bottle;
3. when gas passes through the collecting pipe, the temperature of temperature control spare is adjusted to the temperature controller, and then the temperature control spare is controlled the gas temperature in the collecting pipe, is favorable to regulating and control the gas temperature in the collecting pipe according to reaction system's temperature, is favorable to improving the application of switching control device for the incessant air feed of gas cylinder, and the temperature control spare cover is established on the collecting pipe simultaneously, is favorable to regulating and control roughly evenly to the gas temperature in the collecting pipe.
Drawings
FIG. 1 is a schematic view of the overall structure of embodiment 1 of the present application;
fig. 2 is a schematic view of the overall structure of embodiment 2 of the present application.
Description of reference numerals: 1. a gas supply device body; 2. a main air supply bottle; 3. a secondary air supply bottle; 4. an initial main air inlet pipe; 5. a piping system; 6. an initial secondary air inlet pipe; 7. a weighing device; 8. A middle main air inlet pipe; 9. a main control valve; 10. a middle secondary air inlet pipe; 11. a secondary control valve; 12. a collector pipe; 13. a reaction system; 14. a buffer tank; 15. a buffer control valve; 16. an exhaust pipe; 17. an exhaust control valve; 18. a buffer pressure sensor; 19. a confluence pressure sensor; 20. a flow rate sensor; 21. a protective shell; 22. a temperature control mechanism; 221. a temperature control member; 222. a temperature control meter; 223. a temperature controller; 23. a protective sleeve; 24. the airflow is directed at the sign.
Detailed Description
The present application is described in further detail below with reference to figures 1-2.
The embodiment of the application discloses a switching control device for uninterrupted gas supply of a gas cylinder.
Example 1
Referring to fig. 1, a switching control device for uninterrupted gas supply of a gas cylinder comprises a gas supply device body 1, wherein the gas supply device body 1 comprises a main gas supply cylinder 2 and a secondary gas supply cylinder 3 which are cylindrical, one end of the main gas supply cylinder 2 is communicated with an initial main gas inlet pipe 4 which is circular in cross section through a pipeline, and a pipeline system 5 is arranged at one end of the main gas supply cylinder 2 and can be a gas cylinder chamber gas pipeline system in a laboratory gas pipeline detection locking alarm system in the patent publication No. CN 208983012U. One end of the secondary air supply bottle 3 is communicated with the pipeline system 5 through an initial secondary air inlet pipe 6 with a circular pipeline section.
The end of the main air supply bottle 2 remote from the initial main air inlet pipe 4 is provided with a weighing device 7, and the weighing device 7 can be an electronic scale. When the main gas supply bottle 2 is continuously supplying gas, the weighing device 7 is beneficial to accurately detecting the gas surplus in the main gas supply bottle 2 and is beneficial to clearly mastering the gas output progress in the main gas supply bottle 2.
The one end intercommunication that pipe-line system 5 kept away from main air supply bottle 2 is provided with the pipeline cross-section and is the middle main intake pipe 8 of circular shape, and the one end that is close to pipe-line system 5 on the middle main intake pipe 8 is provided with main control valve 9, and main control valve 9 of this embodiment can be the solenoid valve, and main control valve 9 is used for controlling the circulation of middle main intake pipe 8. An intermediate secondary air inlet pipe 10 with a circular pipeline section is arranged at one end of the pipeline system 5 far away from the secondary air supply bottle 3, a secondary control valve 11 is arranged at one end of the intermediate secondary air inlet pipe 10 close to the pipeline system 5, the secondary control valve 11 can be an electromagnetic valve in the embodiment, and the secondary control valve 11 is used for controlling the circulation of the intermediate secondary air inlet pipe 10. The end portion intercommunication of middle main intake pipe 8 and middle secondary intake pipe 10 is provided with pipeline cross-section for circular shape collecting pipe 12, and the one end intercommunication that main intake pipe 8 in the middle was kept away from to collecting pipe 12 is provided with reaction system 13, and reaction system 13 can be reaction equipment for the production of IC chip.
The middle secondary air inlet pipe 10 is provided with a rectangular buffer tank 14 and a buffer control valve 15 in a communicating manner, the buffer control valve 15 is used for controlling the circulation of air in the buffer tank 14, and the buffer control valve 15 in this embodiment may be an electromagnetic valve. The buffer tank 14 is located at one end of the secondary control valve 11 away from the pipeline system 5, the buffer control valve 15 is located at one end of the buffer tank 14 away from the secondary control valve 11, an exhaust pipe 16 with a circular exhaust cross section is arranged on the buffer tank 14, an exhaust control valve 17 is arranged on the exhaust pipe 16, and the exhaust control valve 17 is used for controlling the circulation of the exhaust pipe 16, and the exhaust control valve 17 may be an electromagnetic valve in this embodiment. A buffer pressure sensor 18 is provided on the buffer tank 14, and the buffer pressure sensor 18 is used to detect the pressure in the buffer tank 14. The manifold 12 is provided with a confluence pressure sensor 19, and the confluence pressure sensor 19 is used for detecting the pressure in the manifold 12.
A flow rate sensor 20 is provided on the manifold 12. Flow rate sensor 20 facilitates accurate detection of the flow rate of the gas as it passes through manifold 12, thereby facilitating control of the flow rate of the gas through primary control valve 9 and secondary control valve 11.
The outside of the gas supply device body 1 is provided with a cabinet-shaped protective shell 21, and the protective shell 21 is favorable for preventing external factors from damaging the gas supply device body 1 and protecting the switching control device for uninterrupted gas supply of the gas cylinder.
Implementation principle of example 1: when the switching control device for uninterrupted gas supply of the gas cylinder is used, firstly, the gas in a main gas supply cylinder 2 enters a pipeline system 5 through an initial main gas inlet pipe 4 by opening a main control valve 9, enters a middle main gas inlet pipe 8 through the pipeline system 5, then enters a collecting pipe 12 through the middle main gas inlet pipe 8, enters a reaction system 13 through the collecting pipe 12, and simultaneously, the flow velocity of a flow velocity sensor 20 in the collecting pipe 12 is detected; when the confluence pressure sensor 19 detects that the pressure in the confluence pipe 12 is reduced, at the moment, the main gas supply bottle 2 is about to run out, the secondary control valve 11 and the gas exhaust control valve 17 are opened, gas in the secondary gas supply bottle enters the pipeline system 5 through the initial secondary gas inlet pipe 6, then enters the intermediate secondary gas inlet pipe 10 through the pipeline system 5, enters the buffer tank 14 through the intermediate secondary gas inlet pipe 10, the gas in the secondary gas supply bottle 3 exhausts the air in the buffer tank 14 through the gas exhaust pipe 16, the gas exhaust control valve 17 is closed after the air is exhausted, the gas is continuously introduced into the buffer tank 14, the pressure in the buffer tank 14 is continuously increased, when the pressure values of the buffer pressure sensor 18 and the confluence pressure sensor 19 are approximately the same, the buffer control valve 15 is opened, the gas enters the confluence pipe 12 through the intermediate secondary gas inlet pipe 10 from the buffer tank 14, and then enters the reaction system 13 through the confluence. With the arrangement, the flow rate of the gas collected by the collecting pipe 12 is the same for the main gas supply bottle and the secondary gas supply bottle, and the gas flow enters the reaction system 13 approximately uniformly, which is beneficial to ensuring the normal operation of the reaction system 13.
Example 2
Referring to fig. 2, the present embodiment is different from embodiment 1 in that: and a temperature control mechanism 22 for controlling the temperature of the gas in the collecting pipe 12 is arranged at one end of the collecting pipe 12 close to the reaction system 13. The temperature control mechanism 22 comprises a temperature control piece 221 in a spiral pipe shape, a temperature control meter 222 and a temperature controller 223 for controlling the temperature of the temperature control piece 221, the temperature control piece 221 is sleeved at one end of the collecting pipe 12 close to the reaction system 13, and a medium in the temperature control piece 221 can flow back into the temperature controller 223; the temperature controller 223 comprises a resistance heater for heating, a condenser for cooling and a circulating pump for controlling the medium in the temperature control element 221 to flow back; the temperature control meter 222 is provided on the temperature controller 223. When gas passes through the collecting pipe 12, the temperature controller 223 adjusts the temperature of the temperature control part 221, and then the temperature control part 221 controls the gas temperature in the collecting pipe 12, so that the gas temperature in the collecting pipe 12 can be controlled according to the temperature of the reaction system 13, the applicability of the switching control device for the uninterrupted gas supply of the gas cylinder can be improved, meanwhile, the temperature control part 221 is sleeved on the collecting pipe 12, and the gas temperature in the collecting pipe 12 can be controlled to be approximately uniform.
All the cover is equipped with on initial main intake pipe 4, initial time intake pipe 6, middle main intake pipe 8, middle time intake pipe 10 and the collecting pipe 12 and is cylindric protective sheath 23, and the material of this embodiment protective sheath 23 can be silica gel. Protective sheath 23 is favorable to preventing that initial main intake pipe 4, initial inferior intake pipe 6, middle main intake pipe 8, middle inferior intake pipe 10 and collecting pipe 12 from causing corrosive wear when being in humid environment, is favorable to protecting initial main intake pipe 4, initial inferior intake pipe 6, middle main intake pipe 8, middle inferior intake pipe 10 and collecting pipe 12.
The initial main air inlet pipe 4, the initial secondary air inlet pipe 6, the middle main air inlet pipe 8, the middle secondary air inlet pipe 10 and the collecting pipe 12 are all provided with arrow-shaped airflow direction indication signs 24. When the switching control device for uninterrupted gas supply of the gas cylinder is used, the airflow direction indicator 24 is favorable for clearly indicating the flow direction of the gas in the initial main gas inlet pipe 4, the initial secondary gas inlet pipe 6, the middle main gas inlet pipe 8, the middle secondary gas inlet pipe 10 and the collecting pipe 12, and is convenient to understand and operate.
The implementation principle of the embodiment 2 is as follows: when gas passes through the collecting pipe 12, the temperature controller 223 adjusts the temperature of the temperature control part 221, and then the temperature control part 221 controls the gas temperature in the collecting pipe 12, so that the gas temperature in the collecting pipe 12 can be controlled according to the temperature of the reaction system 13, the applicability of the switching control device for the uninterrupted gas supply of the gas cylinder can be improved, meanwhile, the temperature control part 221 is sleeved on the collecting pipe 12, and the gas temperature in the collecting pipe 12 can be controlled to be approximately uniform.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (8)
1. The utility model provides a incessant air feed of gas cylinder is with switching control device which characterized in that: comprises a gas supply device body (1), the gas supply device body (1) comprises a main gas supply bottle (2) and a secondary gas supply bottle (3), one end of the main gas supply bottle (2) is communicated with a pipeline system (5) through an initial main gas inlet pipe (4), one end of the secondary gas supply bottle (3) and the pipeline system (5) are communicated with each other through an initial secondary gas inlet pipe (6), one end of the pipeline system (5) far away from the main gas supply bottle (2) is communicated with a middle main gas inlet pipe (8), one end of the middle main gas inlet pipe (8) close to the pipeline system (5) is provided with a main control valve (9), one end of the pipeline system (5) far away from the secondary gas supply bottle (3) is provided with a middle secondary gas inlet pipe (10), one end of the middle secondary gas inlet pipe (10) close to the pipeline system (5) is provided with a secondary control valve (11), the end parts of the middle main gas inlet pipe (, one end of the collecting pipe (12) far away from the middle main air inlet pipe (8) is communicated with a reaction system (13); the middle secondary air inlet pipe (10) is communicated with a buffer tank (14) and a buffer control valve (15), the buffer tank (14) is located at one end, away from the pipeline system (5), of the secondary control valve (11), the buffer control valve (15) is located at one end, away from the secondary control valve (11), of the buffer tank (14), an exhaust pipe (16) is arranged on the buffer tank (14), an exhaust control valve (17) is arranged on the exhaust pipe (16), a buffer pressure sensor (18) is arranged on the buffer tank (14), and a confluence pressure sensor (19) is arranged on the confluence pipe (12).
2. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 1, characterized in that: and a weighing device (7) is arranged at one end, far away from the initial main air inlet pipe (4), of the main air supply bottle (2).
3. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 1, characterized in that: and a flow velocity sensor (20) is arranged on the collecting pipe (12).
4. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 1, characterized in that: and a temperature control mechanism (22) for controlling the temperature of the gas in the collecting pipe (12) is arranged at one end of the collecting pipe (12) close to the reaction system (13).
5. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 4, characterized in that: the temperature control mechanism (22) comprises a temperature control meter (222), a temperature control piece (221) and a temperature controller (223) used for controlling the temperature of the temperature control piece (221), the temperature control piece (221) is sleeved at one end, close to the reaction system (13), of the collecting pipe (12), and the temperature control meter (222) is arranged on the temperature controller (223).
6. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 1, characterized in that: the air supply device body (1) is externally provided with a protective shell (21).
7. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 1, characterized in that: all overlap on initial main intake pipe (4), initial time intake pipe (6), middle main intake pipe (8), middle time intake pipe (10) and collecting pipe (12) and be equipped with protective sheath (23).
8. A switching control device for uninterrupted gas supply to a gas cylinder according to claim 1, characterized in that: and the initial main air inlet pipe (4), the initial secondary air inlet pipe (6), the middle main air inlet pipe (8), the middle secondary air inlet pipe (10) and the collecting pipe (12) are all provided with air flow direction indication signs (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202021510932.8U CN212644263U (en) | 2020-07-27 | 2020-07-27 | Switching control device for uninterrupted gas supply of gas cylinder |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021510932.8U CN212644263U (en) | 2020-07-27 | 2020-07-27 | Switching control device for uninterrupted gas supply of gas cylinder |
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| CN212644263U true CN212644263U (en) | 2021-03-02 |
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| CN202021510932.8U Active CN212644263U (en) | 2020-07-27 | 2020-07-27 | Switching control device for uninterrupted gas supply of gas cylinder |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113251313A (en) * | 2021-06-02 | 2021-08-13 | 安徽展创实验设备有限公司 | Laboratory gas cylinder cabinet |
| CN113375048A (en) * | 2021-04-23 | 2021-09-10 | 北京环宇京辉京城气体科技有限公司 | Hydrogen-returning device for hydrogen production by natural gas and hydrogen-returning process using same |
| CN114151730A (en) * | 2021-12-13 | 2022-03-08 | 拓荆科技股份有限公司 | Gas supply system providing gas switching and method of gas switching |
-
2020
- 2020-07-27 CN CN202021510932.8U patent/CN212644263U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113375048A (en) * | 2021-04-23 | 2021-09-10 | 北京环宇京辉京城气体科技有限公司 | Hydrogen-returning device for hydrogen production by natural gas and hydrogen-returning process using same |
| CN113251313A (en) * | 2021-06-02 | 2021-08-13 | 安徽展创实验设备有限公司 | Laboratory gas cylinder cabinet |
| CN114151730A (en) * | 2021-12-13 | 2022-03-08 | 拓荆科技股份有限公司 | Gas supply system providing gas switching and method of gas switching |
| CN114151730B (en) * | 2021-12-13 | 2023-09-29 | 拓荆科技股份有限公司 | Gas supply system for providing gas switching and gas switching method |
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