CN201133715Y - Hot blast heater - Google Patents
Hot blast heater Download PDFInfo
- Publication number
- CN201133715Y CN201133715Y CNU2007200159437U CN200720015943U CN201133715Y CN 201133715 Y CN201133715 Y CN 201133715Y CN U2007200159437 U CNU2007200159437 U CN U2007200159437U CN 200720015943 U CN200720015943 U CN 200720015943U CN 201133715 Y CN201133715 Y CN 201133715Y
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- China
- Prior art keywords
- temperature
- air
- heater
- airtight cavity
- gas
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Abstract
The utility model relates to a device for heating air to supply, in particular to a hot air heating device which solves the problem that the temperature of the air in the prior art is suddenly high or low and can not keep constant; the device can be adopted to stably supply the heated air for a long time; besides, the temperature is maintained in a pointed temperature range; the temperature, the flow and the pressure of the supplied air can all be adjusted; the device is provided with a seal cavity, an air conductive pipeline, a heater and an exhaust pipeline; the heater is arranged in the seal cavity; the air conductive pipeline is twisted on the heater and an air inlet of the air conductive pipeline extends to the outside of the seal cavity; an outlet of the air conductive pipeline is arranged in the seal cavity; an air exhaust opening of an exhaust pipeline extends in the seal cavity. The utility model is suitable for the units on a semi-conductor device and can be used on a plurality of different techniques like on a thermal plate unit or the drying of a washing technique.
Description
Technical field
The utility model relates to the device with gas heating supply, is specially a kind of hot air heating apparatus.
Background technology
At present, in the known semiconductor technology, there are a lot of steps will use the supply of heated air, or dry up or toast or keep local space temperature stabilization or the like.But, existing gas-heating apparatus, it is fluctuated to occur gas temperature sometimes, can not keep constant, or the flow of heated gas, pressure etc. can not keep stable, thereby brings unnecessary trouble to production technology.
The utility model content
In order to overcome above-mentioned all deficiencies, the utility model provides a kind of hot air heating apparatus, and it is fluctuated to solve the heated air temperature that exists in the prior art, can not keep problem such as constant.Adopt this device heated gas can stablize supply for a long time, and temperature remains in the temperature range of appointment, the temperature of the gas of supply, flow, pressure all can be adjusted.
The technical solution of the utility model is:
A kind of hot air heating apparatus, this device is provided with airtight cavity, air guide pipeline, heater, discharge line, heater is arranged in the airtight cavity, the air guide pipeline is wound on the heater, it is external that the gas feed of air guide pipeline extends closed chamber, the outlet of air guide pipeline is located in the airtight cavity, and the gas discharge outlet of discharge line extends in the airtight cavity.
Described hot air heating apparatus, this device outside is provided with temperature indicator, is provided with the temperature sensor that links to each other with temperature indicator in the airtight cavity.
Described hot air heating apparatus, the outside temperature controller that links to each other with heater that is provided with of this device.
Described hot air heating apparatus, the external side of closed chamber is provided with outer insulative layer.
Pipeline before the described hot air heating apparatus, gas feed is provided with pressure regulator valve, unidirectional conducting valve.
Described hot air heating apparatus, discharge line is provided with flowmeter.
Advantage of the present utility model and beneficial effect are:
1, the utility model adopts fast dense being wrapped on the heater of air guide pipeline of heat conduction, be installed in airtight inside cavity then, gas supplied is discharged in the airtight cavity of constant temperature after heating by the air guide pipeline, the temperature of air guide pipeline is providing by the heater heating, the heating of gas is to heat by the air guide pipeline heat conduction that is wrapped on the heater, by heating, circulation, gas in the airtight cavity is through fully mixing, temperature reaches setting value, be discharged to the place that needs supply by pipeline again, can guarantee the constant, accurate of temperature.
2, the temperature of the utility model device heated air is that temperature sensor by gas outlet directly detects, and its temperature detection is accurate; The temperature of the airtight cavity of constant temperature is controlled by temperature controller, and heated gas emits after by airtight cavity thermostatic control.When temperature is higher or lower than the scope of design temperature, temperature sensor sends signal and gives temperature controller, temperature controller drives heater work or quits work, the heating frequency of heater is controlled by temperature controller, and then control is heated the temperature of gas, thereby ensure the temperature constant of discharging gas, it is simple to operate flexibly, is convenient to the technology adjustment.
3, the thermal insulation layer protection is arranged between the airtight cavity of the present utility model and the external world, avoided influence external environment condition.
4, the discharge capacity of the utility model gas can detect, adjust by flowmeter, and the size that is heated the pressure of gas and flow is by pressure regulator valve and unidirectional conducting valve adjustment, and is accurately convenient.
5, the utility model is applicable to the unit on the semiconductor equipment, can on multiple different process, use, as on the heat-transfer sheet modules, the drying up of cleaning, or the like.
Description of drawings
Fig. 1 is the generalized section of the utility model hot air heating apparatus.
Wherein, 1, outer insulative layer; 2, airtight cavity; 3, temperature sensor; 4, gas discharge outlet; 5, air guide pipeline; 6, heater; 7, gas feed; 8, temperature controller; 9, discharge line; 10, temperature indicator; 11, pressure regulator valve; 12, flowmeter; 13, unidirectional conducting valve.
The specific embodiment
Below in conjunction with accompanying drawing this device is described in detail.
As shown in Figure 1, the utility model device consists of the following components: outer insulative layer 1, airtight cavity 2, temperature sensor 3, gas discharge outlet 4, air guide pipeline 5, heater 6, temperature controller 8, temperature indicator 10, pressure regulator valve 11, flowmeter 12, unidirectional conducting valve 13 etc. are partly formed.Airtight cavity 2 outsides are provided with outer insulative layer 1, heater 6 is arranged in the airtight cavity 2, air guide pipeline 5 is wound on the heater 6, the gas feed 7 of air guide pipeline 5 extends outside the airtight cavity 2, the outlet of air guide pipeline 5 is located in the airtight cavity 2, and the gas discharge outlet 4 of discharge line 9 extends in the airtight cavity 2.This device outside is provided with temperature indicator 10, is provided with the temperature sensor 3 that links to each other with temperature indicator 10 in the airtight cavity 2, the outside temperature controller 8 that links to each other with heater 6 that also is provided with of this device.Pipeline before the gas feed 7 is provided with pressure regulator valve 11, unidirectional conducting valve 13, and discharge line 9 is provided with flowmeter 12, and flowmeter 12 is placed in the rear portion of discharge line 9.In the present embodiment, the heat-barrier material of outer insulative layer 1 can be asbestos; Air guide pipeline 5 can conduct good metal tube etc. for heat; Heater 6 can be heating rod etc.
During installation, heat is conducted 5 dense being wrapped on the heater 6 of fast air guide pipeline, be installed in airtight cavity 2 inside then, airtight cavity 2 is isolated by outer insulative layer 1 with extraneous; When gas during by air guide pipeline 5, air guide pipeline 5 is given gas by heater with thermal energy conduction, owing to be dense winding, gas can be heated fully, after being heated, gas is discharged into airtight cavity 2 inside, airtight cavity 2 temperature inside are also provided by heater 6, gas temperature is constant in airtight cavity 2 inner maintenances, airtight cavity 2 temperature inside are detected by the temperature sensor 3 of gas outlet, when temperature is higher or lower than the scope of design temperature, temperature sensor 3 sends signal and gives temperature controller 8, driving heater 6 stops or working, the pressure of gas is by pressure regulator valve 11 that is provided with on the air inlet pipeline and 13 controls of unidirectional conducting valve, and flow is detected by flowmeter 12.
During work, set the temperature of supply gas by temperature indicator 10, after the temperature signal that temperature sensor 3 detects is passed to temperature controller 8, drive heater 6 work, supply gas enters from gas feed 7 after by pressure regulation, conducting good air guide pipeline 5 in the heat of dense winding passes through, heat conduction air guide pipeline 5 well is through after the heating of heater 6, heat energy is passed to gas in the pipeline, gas is discharged into airtight cavity 2 inside after heating, internal gas is fully mixed, and temperature keeps evenly; Discharge supply by gas discharge outlet 4 then, temperature sensor 3 detects the temperature of discharging gas constantly, if any change, adjusts for temperature controller 8 with regard to sending signal at once.The discharge capacity of gas is regulated control by the flowmeter 12 at discharge line 9 rear portions, and outer thermal insulation layer 1 of airtight cavity 2 temperature inside isolated insulation with the external world.
Claims (6)
1, a kind of hot air heating apparatus, it is characterized in that: this device is provided with airtight cavity (2), air guide pipeline (5), heater (6), discharge line (9), heater (6) is arranged in the airtight cavity (2), air guide pipeline (5) is wound on the heater (6), the gas feed (7) of air guide pipeline (5) extends outside the airtight cavity (2), the outlet of air guide pipeline (5) is located in the airtight cavity (2), and the gas discharge outlet (4) of discharge line (9) extends in the airtight cavity (2).
2, according to the described hot air heating apparatus of claim 1, it is characterized in that: this device outside is provided with temperature indicator (10), is provided with the temperature sensor (3) that links to each other with temperature indicator (10) in the airtight cavity (2).
3, according to the described hot air heating apparatus of claim 1, it is characterized in that: this device outside is provided with the temperature controller (8) that links to each other with heater (6).
4, according to the described hot air heating apparatus of claim 1, it is characterized in that: airtight cavity (2) outside is provided with outer insulative layer (1).
5, according to the described hot air heating apparatus of claim 1, it is characterized in that: gas feed (7) pipeline before is provided with pressure regulator valve (11), unidirectional conducting valve (13).
6, according to the described hot air heating apparatus of claim 1, it is characterized in that: discharge line (9) is provided with flowmeter (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200159437U CN201133715Y (en) | 2007-11-16 | 2007-11-16 | Hot blast heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200159437U CN201133715Y (en) | 2007-11-16 | 2007-11-16 | Hot blast heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201133715Y true CN201133715Y (en) | 2008-10-15 |
Family
ID=40061985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200159437U Expired - Lifetime CN201133715Y (en) | 2007-11-16 | 2007-11-16 | Hot blast heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201133715Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101435626B (en) * | 2007-11-16 | 2010-06-02 | 沈阳芯源微电子设备有限公司 | Hot air heating apparatus |
| CN107950258A (en) * | 2017-10-11 | 2018-04-24 | 佛山汇众森泰科技有限公司 | A kind of sterilising soil by steam device |
-
2007
- 2007-11-16 CN CNU2007200159437U patent/CN201133715Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101435626B (en) * | 2007-11-16 | 2010-06-02 | 沈阳芯源微电子设备有限公司 | Hot air heating apparatus |
| CN107950258A (en) * | 2017-10-11 | 2018-04-24 | 佛山汇众森泰科技有限公司 | A kind of sterilising soil by steam device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20081015 Effective date of abandoning: 20071116 |