CN101435626B - Hot air heating apparatus - Google Patents
Hot air heating apparatus Download PDFInfo
- Publication number
- CN101435626B CN101435626B CN2007101583197A CN200710158319A CN101435626B CN 101435626 B CN101435626 B CN 101435626B CN 2007101583197 A CN2007101583197 A CN 2007101583197A CN 200710158319 A CN200710158319 A CN 200710158319A CN 101435626 B CN101435626 B CN 101435626B
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- China
- Prior art keywords
- gas
- temperature
- heater
- guide pipeline
- airtight cavity
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Abstract
The invention relates to a gas heating and supplying device, in particular to a hot blast heater, which solves the problems in the prior art that the temperature of heating gas is suddenly high and suddenly low and can not be kept constant, etc.. By adoption of the device, the heating gas can be stably supplied for a long time, the temperature of the heating gas can be kept within a given temperature range, and the temperature, the flow rate and the pressure of supplied gas can be adjusted. The device is provided with a closed cavity, a gas-guide pipeline, a heater and an exhaust pipe, whereinthe heater is arranged inside the closed cavity; the gas-guide pipeline is winded on the heater; a gas inlet of the gas-guide pipeline is extended out of the closed cavity, and an outlet of the gas-guide pipeline is arranged inside the closed cavity; and a gas exhaust outlet of the exhaust pipe is extended into the closed cavity. The hot blast heater is suitable for a unit on a semiconductor device and can be used in a plurality of different technologies, such as a hot-plate unit and blow drying of the cleaning technology.
Description
Technical field
The present invention relates to device, be specially a kind of hot air heating apparatus gas heating supply.
Background technology
At present, in the known semiconductor technology, there are a lot of steps will use the supply of heated air, or dry up or toast or keep local space temperature stabilization or the like.But, existing gas-heating apparatus, it is fluctuated to occur gas temperature sometimes, can not keep constant, or the flow of heated gas, pressure etc. can not keep stable, thereby brings unnecessary trouble to production technology.
Summary of the invention
In order to overcome above-mentioned all deficiencies, the invention provides a kind of hot air heating apparatus, it is fluctuated to solve the heated air temperature that exists in the prior art, can not keep problem such as constant.Adopt this device heated gas can stablize supply for a long time, and temperature remains in the temperature range of appointment, the temperature of the gas of supply, flow, pressure all can be adjusted.
Technical scheme of the present invention is:
A kind of hot air heating apparatus, this device is provided with airtight cavity, air guide pipeline, heater, discharge line, heater is arranged in the airtight cavity, the air guide pipeline is wound on the heater, it is external that the gas feed of air guide pipeline extends closed chamber, the outlet of air guide pipeline is located in the airtight cavity, and the gas access of discharge line extends in the airtight cavity.
Described hot air heating apparatus, this device outside is provided with temperature indicator, is provided with the temperature sensor that links to each other with temperature indicator in the airtight cavity.
Described hot air heating apparatus, the outside temperature controller that links to each other with heater that is provided with of this device.
Described hot air heating apparatus, the external side of closed chamber is provided with outer insulative layer.
Pipeline before the described hot air heating apparatus, gas feed is provided with pressure regulator valve, unidirectional conducting valve.
Described hot air heating apparatus, discharge line is provided with flowmeter.
Advantage of the present invention and beneficial effect are:
1, the present invention adopts fast dense being wrapped on the heater of air guide pipeline of heat conduction, be installed in airtight inside cavity then, gas supplied is discharged in the airtight cavity of constant temperature after heating by the air guide pipeline, the temperature of air guide pipeline is providing by the heater heating, the heating of gas is to heat by the air guide pipeline heat conduction that is wrapped on the heater, by heating, circulation, gas in the airtight cavity is through fully mixing, temperature reaches setting value, be discharged to the place that needs supply by pipeline again, can guarantee the constant, accurate of temperature.
2, the temperature of apparatus of the present invention heated air is that temperature sensor by gas outlet directly detects, and its temperature detection is accurate; The temperature of the airtight cavity of constant temperature is controlled by temperature controller, and heated gas emits after by airtight cavity thermostatic control.When temperature is higher or lower than the scope of design temperature, temperature sensor sends signal and gives temperature controller, temperature controller drives heater work or quits work, the heating frequency of heater is controlled by temperature controller, and then control is heated the temperature of gas, thereby ensure the temperature constant of discharging gas, it is simple to operate flexibly, is convenient to the technology adjustment.
3, the thermal insulation layer protection is arranged between the airtight cavity of the present invention and the external world, avoided influence external environment condition.
4, the discharge capacity of gas of the present invention can detect, adjust by flowmeter, and the size that is heated the pressure of gas and flow is by pressure regulator valve and unidirectional conducting valve adjustment, and is accurately convenient.
5, the present invention is applicable to the unit on the semiconductor equipment, can on multiple different process, use, as on the heat-transfer sheet modules, the drying up of cleaning, or the like.
Description of drawings
Fig. 1 is the generalized section of hot air heating apparatus of the present invention.
Wherein, 1, outer insulative layer; 2, airtight cavity; 3, temperature sensor; 4, gas access; 5, air guide pipeline; 6, heater; 7, gas feed; 8, temperature controller; 9, discharge line; 10, temperature indicator; 11, pressure regulator valve; 12, flowmeter; 13, unidirectional conducting valve.
The specific embodiment
Below in conjunction with accompanying drawing this device is described in detail.
As shown in Figure 1, apparatus of the present invention consist of the following components: outer insulative layer 1, airtight cavity 2, temperature sensor 3, gas access 4, air guide pipeline 5, heater 6, temperature controller 8, temperature indicator 10, pressure regulator valve 11, flowmeter 12, unidirectional conducting valve 13 etc. are partly formed.Airtight cavity 2 outsides are provided with outer insulative layer 1, heater 6 is arranged in the airtight cavity 2, air guide pipeline 5 is wound on the heater 6, the gas feed 7 of air guide pipeline 5 extends outside the airtight cavity 2, the outlet of air guide pipeline 5 is located in the airtight cavity 2, and the gas access 4 of discharge line 9 extends in the airtight cavity 2.This device outside is provided with temperature indicator 10, is provided with the temperature sensor 3 that links to each other with temperature indicator 10 in the airtight cavity 2, the outside temperature controller 8 that links to each other with heater 6 that also is provided with of this device.Pipeline before the gas feed 7 is provided with pressure regulator valve 11, unidirectional conducting valve 13, and discharge line 9 is provided with flowmeter 12, and flowmeter 12 is placed in the rear portion of discharge line 9.In the present embodiment, the heat-barrier material of outer insulative layer 1 can be asbestos; Air guide pipeline 5 can conduct good metal tube etc. for heat; Heater 6 can be heating rod etc.
During installation, heat is conducted 5 dense being wrapped on the heater 6 of fast air guide pipeline, be installed in airtight cavity 2 inside then, airtight cavity 2 is isolated by outer insulative layer 1 with extraneous; When gas during by air guide pipeline 5, air guide pipeline 5 is given gas by heater with thermal energy conduction, owing to be dense winding, gas can be heated fully, after being heated, gas is discharged into airtight cavity 2 inside, airtight cavity 2 temperature inside are also provided by heater 6, gas temperature is constant in airtight cavity 2 inner maintenances, airtight cavity 2 temperature inside are detected by the temperature sensor 3 of gas outlet, when temperature is higher or lower than the scope of design temperature, temperature sensor 3 sends signal and gives temperature controller 8, driving heater 6 stops or working, the pressure of gas is by pressure regulator valve 11 that is provided with on the air inlet pipeline and 13 controls of unidirectional conducting valve, and flow is detected by flowmeter 12.
During work, set the temperature of supply gas by temperature indicator 10, after the temperature signal that temperature sensor 3 detects is passed to temperature controller 8, drive heater 6 work, supply gas enters from gas feed 7 after by pressure regulation, conducting good air guide pipeline 5 in the heat of dense winding passes through, heat conduction air guide pipeline 5 well is through after the heating of heater 6, heat energy is passed to gas in the pipeline, gas is discharged into airtight cavity 2 inside after heating, internal gas is fully mixed, and temperature keeps evenly; Discharge supply by gas access 4 then, temperature sensor 3 detects the temperature of discharging gas constantly, if any change, adjusts for temperature controller 8 with regard to sending signal at once.The discharge capacity of gas is regulated control by the flowmeter 12 at discharge line 9 rear portions, and outer thermal insulation layer 1 of airtight cavity 2 temperature inside isolated insulation with the external world.
Claims (6)
1. hot air heating apparatus, it is characterized in that: this device is provided with airtight cavity (2), air guide pipeline (5), heater (6), discharge line (9), heater (6) is arranged in the airtight cavity (2), air guide pipeline (5) is wound on the heater (6), the gas feed (7) of air guide pipeline (5) extends outside the airtight cavity (2), the outlet of air guide pipeline (5) is located in the airtight cavity (2), and the gas access (4) of discharge line (9) extends in the airtight cavity (2).
2. according to the described hot air heating apparatus of claim 1, it is characterized in that: this device outside is provided with temperature indicator (10), is provided with the temperature sensor (3) that links to each other with temperature indicator (10) in the airtight cavity (2).
3. according to the described hot air heating apparatus of claim 1, it is characterized in that: this device outside is provided with the temperature controller (8) that links to each other with heater (6).
4. according to the described hot air heating apparatus of claim 1, it is characterized in that: airtight cavity (2) outside is provided with outer insulative layer (1).
5. according to the described hot air heating apparatus of claim 1, it is characterized in that: gas feed (7) pipeline before is provided with pressure regulator valve (11), unidirectional conducting valve (13).
6. according to the described hot air heating apparatus of claim 1, it is characterized in that: discharge line (9) is provided with flowmeter (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101583197A CN101435626B (en) | 2007-11-16 | 2007-11-16 | Hot air heating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101583197A CN101435626B (en) | 2007-11-16 | 2007-11-16 | Hot air heating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101435626A CN101435626A (en) | 2009-05-20 |
| CN101435626B true CN101435626B (en) | 2010-06-02 |
Family
ID=40710194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101583197A Expired - Fee Related CN101435626B (en) | 2007-11-16 | 2007-11-16 | Hot air heating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101435626B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106091376A (en) * | 2016-08-05 | 2016-11-09 | 湖南玉丰真空科学技术有限公司 | The broken empty heat blower of vacuum glass equipment |
| CN107520002A (en) * | 2017-08-30 | 2017-12-29 | 苏州兮然工业设备有限公司 | Crush dry integrated machine |
| CN112179080A (en) * | 2020-09-30 | 2021-01-05 | 刘海燕 | Chinese-medicinal material drying device turn over stir-fry mechanism |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2172413Y (en) * | 1993-02-23 | 1994-07-20 | 姚映 | Multifunction heating stove |
| CN201133715Y (en) * | 2007-11-16 | 2008-10-15 | 沈阳芯源微电子设备有限公司 | Hot blast heater |
-
2007
- 2007-11-16 CN CN2007101583197A patent/CN101435626B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2172413Y (en) * | 1993-02-23 | 1994-07-20 | 姚映 | Multifunction heating stove |
| CN201133715Y (en) * | 2007-11-16 | 2008-10-15 | 沈阳芯源微电子设备有限公司 | Hot blast heater |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101435626A (en) | 2009-05-20 |
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Granted publication date: 20100602 Termination date: 20141116 |
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| EXPY | Termination of patent right or utility model |