CN212625535U - Semiconductor substrate box clamping mechanism - Google Patents

Semiconductor substrate box clamping mechanism Download PDF

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Publication number
CN212625535U
CN212625535U CN202022018363.1U CN202022018363U CN212625535U CN 212625535 U CN212625535 U CN 212625535U CN 202022018363 U CN202022018363 U CN 202022018363U CN 212625535 U CN212625535 U CN 212625535U
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China
Prior art keywords
baffle
splint
gear rack
gear
sliding chute
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CN202022018363.1U
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Chinese (zh)
Inventor
林知微
郭宵
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Haben Automation Technology Jiangsu Co ltd
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Haben Automation Technology Jiangsu Co ltd
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Priority to CN202022018363.1U priority Critical patent/CN212625535U/en
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Abstract

The utility model relates to a clamping mechanism of a semiconductor substrate box, wherein a right clamping plate and a left clamping plate are positioned on a pair of left and right opposite side edges of a supporting plate, and a baffle plate is positioned on the rear side edge; the inner side surface of the baffle is provided with a baffle gear rack supporting leg; the inner side surface of the right clamping plate is provided with a right clamping plate gear rack supporting leg; the inner side surface of the left clamping plate is provided with a left clamping plate gear rack supporting leg; the supporting plate is provided with a baffle sliding chute, a right sliding chute and a left sliding chute; the baffle gear rack supporting leg moves along the baffle sliding groove, and the right clamping plate gear rack supporting leg moves along the right sliding groove; the left splint gear rack supporting leg moves along the left sliding groove; all be equipped with the gear train on baffle spout, right side spout and the left side spout, baffle gear rack landing leg, right splint gear rack landing leg, left splint gear rack landing leg form synchronous drive mechanism with the gear engagement that the gear train corresponds respectively. The utility model discloses base plate box clamping device simple structure, the structure is reliable, and is swift convenient.

Description

Semiconductor substrate box clamping mechanism
Technical Field
The utility model belongs to the technical field of be used for pressing from both sides tight fixed substrate box technique and specifically relates to a semiconductor substrate box clamping mechanism is related to.
Background
The IC chip is connected with the substrate, so that the chip can be protected from or less influenced by the external environment, and a good working condition is provided for the chip. Since the chip is connected to an external circuit through the package substrate, the circuit of the package substrate is first tested. In the process of testing the substrate, the substrate is loaded in a substrate cassette and transported to a designated position to be transferred by a robot arm, and the substrate cassette is clamped and fixed in the process. There is therefore a need for a substrate cassette clamping mechanism.
SUMMERY OF THE UTILITY MODEL
In view of this, an object of the present invention is to provide a mechanism for clamping and fixing a substrate cassette.
In order to solve the technical problem, the technical scheme of the utility model as follows:
a clamping mechanism of a semiconductor substrate box comprises a supporting plate, a cover plate, a right clamping plate, a left clamping plate, a baffle plate and a gear set;
the right clamping plate and the left clamping plate are positioned on a pair of left and right opposite side edges of the supporting plate, and the baffle plate is positioned on the rear side edge;
the inner side surface of the baffle is vertically connected with a baffle gear rack supporting leg, and a baffle limiting hole is formed in the baffle gear rack supporting leg;
the inner side surface of the right clamping plate is vertically connected with a right clamping plate gear rack supporting leg;
the inner side surface of the left clamping plate is vertically connected with a left clamping plate gear rack supporting leg;
the supporting plate is provided with a baffle sliding chute, a right sliding chute and a left sliding chute, the right sliding chute and the left sliding chute are parallel to each other, the baffle sliding chute and the right sliding chute are perpendicular to each other, and the baffle sliding chute, the right sliding chute and the left sliding chute are staggered up and down;
the baffle gear rack supporting legs move along the baffle sliding grooves, and the moving direction of the baffle is perpendicular to the rear side edge of the supporting plate where the baffle is located;
the right splint gear bar supporting leg moves along the right sliding groove;
the left splint gear rack supporting leg moves along the left sliding groove;
all be equipped with the gear groove on baffle spout, right side spout and the left side spout, the gear inslot is equipped with the gear train, baffle gear rack landing leg, right splint gear rack landing leg, left splint gear rack landing leg form synchronous drive mechanism with the gear engagement that the gear train corresponds respectively.
Furthermore, the inner side surface of the right clamping plate is also vertically connected with a right clamping plate supporting leg, and the inner side surface of the left clamping plate is also vertically connected with a left clamping plate supporting leg; still be equipped with the supplementary spout in right side and the supplementary spout in left side in the backup pad that corresponds, the right splint landing leg forms the sliding pair at the supplementary spout in right side, and the left splint landing leg forms the sliding pair at the supplementary spout in left side.
Furthermore, a positioning block is arranged in the baffle sliding groove and is opposite to the baffle limiting hole.
Compared with the prior art, the utility model discloses technical scheme's beneficial effect is:
the utility model discloses clamping mechanism does not use the spring so do not have the spring problem of becoming invalid, simple structure, and convenient to use has very big marketing prospect.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a schematic structural view of a cross section of the present invention;
fig. 3 is a schematic structural view of the support plate of the present invention;
fig. 4 is a schematic structural view of the left splint of the present invention;
fig. 5 is a schematic structural diagram of the baffle of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments:
the drawings are for illustrative purposes only and are not to be construed as limiting the patent; to better illustrate the present embodiments, some components of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, so to speak, as communicating between the two elements. The specific meaning of the above terms in the present invention can be understood in specific cases for those skilled in the art. The technical solution of the present invention will be further explained with reference to the accompanying drawings and examples.
As shown in fig. 1 to 5, a semiconductor substrate cassette clamping mechanism includes a support plate 1, a cover plate 2, a right clamp plate 3, a left clamp plate 4, a baffle plate 5, and a gear set 6;
the right clamping plate 3 and the left clamping plate 4 are positioned on a pair of left and right opposite side edges of the supporting plate 1, and the baffle 5 is positioned on the rear side edge;
the inner side surface of the baffle 5 is vertically connected with a baffle gear bar supporting leg 51, and a baffle limiting hole 52 is formed in the baffle gear bar supporting leg 51;
the inner side surface of the right clamping plate 3 is vertically connected with a right clamping plate gear rack supporting leg 32;
the inner side surface of the left splint 4 is vertically connected with a left splint gear rack supporting leg 42;
the supporting plate 1 is provided with a baffle sliding chute 12, a right sliding chute 13 and a left sliding chute 16, the right sliding chute 13 and the left sliding chute 16 are parallel to each other, the baffle sliding chute 12 and the right sliding chute 13 are vertical to each other, and the baffle sliding chute 12, the right sliding chute 13 and the left sliding chute 16 are staggered up and down;
the baffle gear bar supporting legs 51 move along the baffle sliding grooves 12, and the moving direction of the baffle 5 is vertical to the rear side edge of the supporting plate 1 where the baffle 5 is positioned;
the right cleat gear bar leg 32 moves along the right runner 13;
the left cleat gear bar leg 42 moves along the left runner 16;
all be equipped with gear groove 17 on baffle spout 12, right side spout 13 and the left side spout 16, be equipped with gear train 6 in the gear groove 17, baffle gear rack landing leg 51, right splint gear rack landing leg 32, left splint gear rack landing leg 42 form synchronous drive mechanism with the gear engagement that gear train 6 corresponds respectively.
The baffle 5 and the baffle rack supporting leg 51 are both provided with racks, the racks on the two sides are meshed with the gears on the two sides, and the racks on the two sides are respectively directly or indirectly meshed with the right splint rack supporting leg 32 and the left splint rack supporting leg 42 to form a gear and rack transmission structure, so that the baffle 5, the right splint 3 and the left splint 4 can be synchronously clamped or loosened through the matching of the gear set 6.
The inner side surface of the right clamping plate 3 is also vertically connected with a right clamping plate supporting leg 31, and the inner side surface of the left clamping plate 4 is also vertically connected with a left clamping plate supporting leg 41; the corresponding support plate 1 is also provided with a right auxiliary sliding groove 14 and a left auxiliary sliding groove 15, the right splint support leg 31 forms a sliding pair at the right auxiliary sliding groove 14, and the left splint support leg 41 forms a sliding pair at the left auxiliary sliding groove 15. The right splint leg 31 and the left splint leg 41 play a role in fixation.
The baffle chute 12 is internally provided with a positioning block 11 opposite to the baffle limiting hole 52. For limiting the stroke of the shutter 5.
The utility model discloses the part that does not relate to all is the same with prior art or can adopt prior art to realize. In the drawings, the positional relationship is described for illustrative purposes only and is not to be construed as limiting the present patent; it is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not limitations to the embodiments of the present invention. Other variations and modifications in light of the above teachings may occur to those skilled in the art. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (3)

1. A semiconductor substrate cassette clamping mechanism characterized in that: comprises a supporting plate (1), a cover plate (2), a right clamping plate (3), a left clamping plate (4), a baffle (5) and a gear set (6);
the right clamping plate (3) and the left clamping plate (4) are positioned on a pair of left and right opposite side edges of the supporting plate (1), and the baffle (5) is positioned on the rear side edge;
the inner side surface of the baffle (5) is vertically connected with a baffle gear rack supporting leg (51);
the inner side surface of the right splint (3) is vertically connected with a right splint gear rack supporting leg (32);
the inner side surface of the left splint (4) is vertically connected with a left splint gear rack supporting leg (42);
the supporting plate (1) is provided with a baffle sliding chute (12), a right sliding chute (13) and a left sliding chute (16), the right sliding chute (13) and the left sliding chute (16) are parallel to each other, the baffle sliding chute (12) and the right sliding chute (13) are perpendicular to each other, and the baffle sliding chute (12), the right sliding chute (13) and the left sliding chute (16) are staggered up and down;
the baffle gear bar supporting legs (51) move along the baffle sliding grooves (12), and the moving direction of the baffle (5) is vertical to the rear side edge of the supporting plate (1) where the baffle (5) is located;
the right splint gear rack supporting leg (32) moves along the right sliding groove (13);
the left splint gear rack leg (42) moves along the left sliding groove (16);
all be equipped with gear groove (17) on baffle spout (12), right side spout (13) and left side spout (16), be equipped with gear train (6) in gear groove (17), baffle gear rack landing leg (51), right splint gear rack landing leg (32), left splint gear rack landing leg (42) form synchronous drive mechanism with the gear engagement that gear train (6) correspond respectively.
2. The semiconductor substrate cassette clamping mechanism of claim 1, wherein: the inner side surface of the right splint (3) is also vertically connected with a right splint supporting leg (31), and the inner side surface of the left splint (4) is also vertically connected with a left splint supporting leg (41); the corresponding support plate (1) is also provided with a right auxiliary sliding groove (14) and a left auxiliary sliding groove (15), the right splint support leg (31) forms a sliding pair in the right auxiliary sliding groove (14), and the left splint support leg (41) forms a sliding pair in the left auxiliary sliding groove (15).
3. The semiconductor substrate cassette clamping mechanism according to claim 1 or 2, wherein: the baffle gear rack supporting leg (51) is provided with a baffle limiting hole (52), and a positioning block (11) is arranged in the baffle sliding groove (12) and is opposite to the baffle limiting hole (52).
CN202022018363.1U 2020-09-15 2020-09-15 Semiconductor substrate box clamping mechanism Active CN212625535U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022018363.1U CN212625535U (en) 2020-09-15 2020-09-15 Semiconductor substrate box clamping mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022018363.1U CN212625535U (en) 2020-09-15 2020-09-15 Semiconductor substrate box clamping mechanism

Publications (1)

Publication Number Publication Date
CN212625535U true CN212625535U (en) 2021-02-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022018363.1U Active CN212625535U (en) 2020-09-15 2020-09-15 Semiconductor substrate box clamping mechanism

Country Status (1)

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CN (1) CN212625535U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113358828A (en) * 2021-08-11 2021-09-07 广元市产品质量监督检验所 Furniture formaldehyde detection device and detection method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113358828A (en) * 2021-08-11 2021-09-07 广元市产品质量监督检验所 Furniture formaldehyde detection device and detection method thereof

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