CN212443728U - High-power laser beam high-efficiency coupling water-guide laser structure - Google Patents

High-power laser beam high-efficiency coupling water-guide laser structure Download PDF

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Publication number
CN212443728U
CN212443728U CN202020679653.8U CN202020679653U CN212443728U CN 212443728 U CN212443728 U CN 212443728U CN 202020679653 U CN202020679653 U CN 202020679653U CN 212443728 U CN212443728 U CN 212443728U
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China
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nozzle
module
energy transmission
laser beam
water
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CN202020679653.8U
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Chinese (zh)
Inventor
龙芋宏
黄宇星
梁恩
张光辉
刘清原
周嘉
焦辉
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Abstract

The utility model discloses a high-power laser beam high-efficiency coupling water-guided laser structure, wherein the upper end of an energy transmission module is connected with a high-power energy transmission optical fiber, and the lower end of the energy transmission module is provided with a self-focusing lens for transmitting the laser beam; the energy transmission fixing module comprises a centering block coaxially mounted with the energy transmission module, the centering block is coaxially mounted in the connecting body, the bottom of the connecting body is provided with a flow blocking block coaxially mounted on the centering block, and a sealing ring is arranged between the flow blocking block and the connecting body; the nozzle module comprises a nozzle seat arranged below the energy transmission fixing module, and a nozzle coaxial with the lower end of the energy transmission module is arranged on the nozzle seat; the coupling liquid cavity module comprises a low-pressure steady flow liquid layer arranged between the flow blocking block and the nozzle seat, and the low-pressure steady flow liquid layer is sprayed out from the nozzle to form a water jet; the lower end of the energy transfer module is suspended in the low-pressure steady flow liquid layer at the bottom of the centering block or the lower end of the energy transfer module extends into and is fixed in a spray hole of the nozzle so as to couple the laser beam into the water jet to form the water beam optical fiber.

Description

High-power laser beam high-efficiency coupling water-guide laser structure
Technical Field
The utility model relates to a high-precision machining technique of laser specifically is a high-power laser beam high efficiency coupling water guide laser structure.
Background
The water-guided laser utilizes micron-sized water beam optical fibers formed by a nozzle in a coupling cavity to conduct laser beams, and the laser is totally reflected and limited in a water beam after meeting the total reflection critical condition of an air-water beam interface of the water beam optical fibers. The laser beam is transmitted to the surface of the workpiece to be processed along the water beam optical fiber due to the total reflection action to burn the material of the workpiece, and meanwhile, the water beam impacts and cools the surface of the workpiece, so that the high-precision processing of the workpiece is completed.
In the water guide laser processing, the water beam optical fiber is used for guiding the laser beam, so that the problem that the traditional laser processing needs real-time focusing because the defocusing phenomenon of the focused beam along with the processing process occurs can be solved, and the precise processing of the thick plate can be realized. The multi-mode effect formed by the water beam fiber has a homogenizing effect on the energy density distribution of the coupled focused laser beam, and the parallel cutting groove can be realized. In addition, due to the impact and cooling effect of the micro water jet, molten substances and chips generated by laser ablation can be removed, a heat affected zone can be reduced, the formation and expansion of microcracks are reduced, a recast layer formed on the surface of a machined part is reduced, and the machining quality is remarkably improved. Therefore, the water guided laser processing technology is widely used in aerospace, biomedical, rail transportation, new energy, IC, MEMS, and the technology is also industrially applied to Synova SA (shanxi knofa company, switzerland), Avonisys AG (avonices AG, switzerland), shibiu (japan astringent valley industrial co-ltd).
However, the existing water-guided laser processing technology has certain defects;
1. the diameter of the water beam optical fiber formed by the nozzle is small (dozens of microns), the laser beam is coupled with the water beam optical fiber through focusing, the water beam-light beam coupling adjustment is difficult, the focusing light beam and the center of the nozzle are centered and deviated, the nozzle is burnt, and the coupling transmission fails.
2. The laser beam reaches the end face of the nozzle after being focused by a focusing lens, air, a glass window and a liquid layer, and the calculation and adjustment of the focusing process of the laser beam are complex; the optical transmission cavity of the coupling cavity has larger size, the sealing and bearing requirements of the coupling cavity are high, and the structure is relatively complex.
The technical defects limit the better popularization and application of the water-guide laser processing technology.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to provide a reduce the water beam-light beam coupling degree of difficulty, reduce coupling cavity structure size to utilize the high power laser beam to improve machining efficiency's high-efficient coupling water guide laser structure of high power laser beam.
Can solve above-mentioned technical problem's high power laser beam high efficiency coupling water guide laser structure, its technique is including passing can module, passing can fixed module, coupling liquid chamber module and nozzle module, and the institute is different:
1. the upper end of the energy transmission module is connected with a high-power energy transmission optical fiber, and the lower end of the energy transmission module is provided with an energy transmission optical fiber head, a self-focusing lens or a diamond joint for transmitting laser beams.
2. The energy transmission fixing module comprises a centering block coaxially mounted with the energy transmission module, the centering block is coaxially mounted in the connecting body, a flow blocking block coaxially mounted on the centering block is arranged at the bottom of the connecting body, and a sealing ring is arranged between the flow blocking block and the connecting body.
3. The nozzle module comprises an energy transmission module and a nozzle seat arranged below the energy transmission fixing module, and a nozzle coaxial with the lower end of the energy transmission module is arranged on the nozzle seat.
4. The coupling liquid cavity module comprises a low-pressure steady flow liquid layer arranged between the flow blocking block and the nozzle seat, and the low-pressure steady flow liquid layer is sprayed out from the nozzle to form a water jet (water beam).
5. The lower end of the energy transfer module is suspended in the low-pressure steady flow liquid layer at the bottom of the centering block or the lower end of the energy transfer module extends into and is fixed in a spray hole of the nozzle so as to couple the laser beam into the water jet to form a water beam optical fiber.
When the energy transmission module adopts a tail end suspension type structure, the circular spray hole of the nozzle is matched with the excircle of the lower end of the energy transmission module.
When the energy transfer module adopts a tail end fixed structure, the lower end of the energy transfer module is internally tangent to a regular hexagon spray hole, a regular pentagon spray hole, a square spray hole, a regular triangle spray hole, an oval spray hole or a petal-shaped spray hole of the nozzle.
When the energy transfer module adopts a tail end fixed structure, the circular spray hole of the nozzle is internally provided with a concentric ring sleeve through thin ribs with uniform circumference, and the lower end of the energy transfer module is positioned in the ring sleeve.
The nozzle can be made of tool steel, sapphire or stainless steel and is manufactured by high-precision machining or high-precision 3D printing.
The utility model has the advantages that:
1. the utility model discloses utilize to pass the energy module and carry out the transmission focus of laser beam to form water beam optical fiber with the water beam coupling that the nozzle formed, reduced the alignment of water beam-light beam coupling in-process and adjusted the precision, reduced the coupling degree of difficulty.
2. The utility model discloses utilize compact biography energy module to carry out the direct transmission focus of laser beam, reduced optical transmission's in the coupling cavity optical cavity size, further reduced the overall dimension of coupling cavity, improved the sealing performance and the bearing capacity of cavity.
3. The utility model discloses an biography can the module carry out the direct transmission focus of high power laser beam and form the water beam optic fibre in the coupling water beam, has improved the machining precision and the efficiency of water-jet guided laser.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention, wherein the energy transmission module is a terminal suspension structure.
Fig. 2 is a schematic structural view of another embodiment of the present invention, wherein the end of the energy transmission module is a fixed structure.
Fig. 3 is an alignment chart of the energy transfer module and the circular orifice of the nozzle in the embodiment of fig. 1.
Fig. 4(a) is an alignment chart of the energy transfer module and the regular hexagonal nozzle holes of the nozzle in the embodiment of fig. 2.
Fig. 4(b) is an alignment chart of the energy transfer module and the regular pentagonal nozzle hole of the nozzle in the embodiment of fig. 2.
Fig. 4(c) is a diagram illustrating alignment of the energy transfer module and the square nozzle hole of the nozzle in the embodiment of fig. 2.
Fig. 5(a) is an alignment chart of the energy transfer module and the regular triangle nozzle holes of the nozzle in the embodiment of fig. 2.
Fig. 5(b) is an alignment chart of the energy transfer module and the elliptical orifice of the nozzle in the embodiment of fig. 2.
Fig. 6 is a block diagram of a nozzle employing a ribbed sheet in the embodiment of fig. 2.
Fig. 7 is a structural diagram of an energy transfer module in the embodiment of fig. 1 and 2.
And (3) identifying the figure number: 1. an energy transfer module; 1-1, energy transmission optical fiber; 1-2, optical fiber cladding; 2. a self-focusing lens; 3. centering blocks; 4. a linker; 5. a flow blocking block; 6. a nozzle holder; 7. a nozzle; 7-1, spraying holes in a regular hexagon shape; 7-2, spraying a regular pentagonal orifice; 7-3, square spray holes; 7-4, spraying holes in a regular triangle shape; 7-5, elliptical spray holes; 8. a low-pressure steady flow liquid layer; 9. a water beam optical fiber; 10. a laser beam; 11. thin ribs; 12. sleeving a ring; 13. and (5) sealing rings.
Detailed Description
The technical solution of the present invention will be further explained with reference to the embodiments shown in the drawings.
The utility model discloses high-efficient coupling water of high power laser beam leads laser structure, including biography ability module 1, biography ability fixed module, coupling sap cavity module and nozzle module, the biography ability is fixed the module and is fixed a position between two parties and passes ability module 1, biography ability fixed module below is located to the nozzle module, coupling sap cavity module is located and is passed ability module 1, passes between ability fixed module and the nozzle module, biography ability module 1 carries out direct guide transmission back coupling to the nozzle module with the high power laser beam and forms water beam optical fiber 9.
The upper end of an energy transmission module 1 which is packaged and molded into a cylinder is connected with a high-power energy transmission optical fiber 1-1, the outer layer of the energy transmission optical fiber 1-1 is an optical fiber cladding 1-2, and the lower end of the energy transmission module 1 is provided with an energy transmission optical fiber head, or a self-focusing lens 2, or a diamond joint for transmitting a laser beam 10, as shown in fig. 1, 2 and 7.
The energy transmission fixing module comprises a centering block 3 coaxially mounted with the energy transmission module 1, the centering block 3 is coaxially mounted in a connecting body 4, a flow blocking block 5 coaxially mounted on the centering block 3 is arranged at the bottom of the connecting body 4, a sealing ring 13 is arranged between the flow blocking block 5 and the connecting body 4, and the lower end of the energy transmission module 1 is suspended at the bottom of the centering block 3, as shown in fig. 1 and 2.
The nozzle module includes nozzle holder 6, set up nozzle mounting hole or the nozzle screw hole that link up on the nozzle holder 6, the embedding has in the nozzle mounting hole and passes the coaxial nozzle 7 of energy module 1 lower extreme, or the spiral has closed the coaxial nozzle 7 of passing the energy module 1 lower extreme on the nozzle screw hole, nozzle 7 has following multiform:
1. the circular spray hole of the nozzle 7 has an inner diameter matched with the outer circle of the lower end of the energy transmission module 1, as shown in fig. 3.
2. A concentric ring sleeve 12 is arranged in a circular spray hole of the nozzle 7, three radial thin fins 11 are uniformly distributed on the circumference between the ring sleeve 12 and the inner wall of the circular spray hole to support the ring sleeve 12, and an inner hole of the ring sleeve 12 is matched with the outer circle of the lower end of the energy transmission module 1, as shown in fig. 6.
3. The regular hexagonal shaped orifices 7-1 of the nozzle 7 are shown in fig. 4 (a).
4. The regular pentagon of the nozzle 7 is jetted out of the orifice 7-2 as shown in fig. 4 (b).
5. The square orifice 7-3 of the nozzle 7 is shown in fig. 4 (c).
6. Regular triangular shaped orifices 7-4 of the nozzle 7 are shown in fig. 5 (a).
7. The elliptical orifice 7-5 of the nozzle 7 is shown in fig. 5 (b).
The coupling liquid cavity module comprises a low-pressure liquid stabilizing layer 8 arranged between the lower end of the flow blocking block 5, the centering block 3 and the energy transfer module 1 and the nozzle seat 6, wherein the low-pressure liquid stabilizing layer 8 flows from outside to inside and is sprayed out downwards through a spray hole of the nozzle 7 to form a water jet (water beam), as shown in fig. 1 and 2.
As shown in fig. 1 and 3, the lower end of the energy transfer module 1 is suspended from the low-pressure steady fluid layer 8, and the outer diameter of the lower end of the energy transfer module 1 is matched with the circular spray hole of the nozzle 7.
As shown in fig. 2, the lower end of the energy transfer module 1 passes through the low-pressure liquid stabilizer layer 8 and extends into the nozzle hole of the nozzle 7 to be fixed, and the following modes are provided:
1. the lower end of the energy transfer module 1 extends into a ring sleeve 12 in the spray hole of the nozzle 7 and is fixed, as shown in fig. 6.
2. The lower end of the energy transfer module 1 extends into a regular hexagon nozzle hole 7-1 of the nozzle 7 to be internally tangent and fixed, as shown in fig. 4 (a).
3. The lower end of the energy transfer module 1 extends into a regular pentagonal jet hole 7-2 of the nozzle 7 to be internally tangent and fixed, as shown in fig. 4 (b).
4. The lower end of the energy transfer module 1 extends into a square spray hole 7-3 of the nozzle 7 for internally cutting and fixing, as shown in fig. 4 (c).
5. The lower end of the energy transfer module 1 extends into a regular triangle spray hole 7-4 of the nozzle 7 for internally tangent fixation, as shown in fig. 5 (a).
6. The lower end of the energy transfer module 1 extends into an oval spray hole 7-5 of the nozzle 7 to be internally tangent and fixed, as shown in fig. 5 (b).
In a preferred embodiment, the diameter d of the core of the energy transmission optical fiber 1-1cThe range is selected from 20 μm to 200 μm, depending on the diameter d of the water jet formed by the nozzle 7jMatching (d)c<dj) So as to be coupled; the wavelength of the laser beam 10 is selected to be 532nm or 1064nm, preferably 532 nm; the laser working form can adopt quasi-continuous or pulse laser, and when adopting pulse laser, the pulse width is 5ns &50ns, power of 200W-2000W, and frequency range of 20 kHz-200 kHz.
When the lower end of the energy transmission module 1 shown in fig. 1 is suspended, the depth of the energy transmission module 1 inserted into the low-pressure steady flow liquid layer 8 needs to meet the corresponding coupling conditions for matching, and the specific requirements are as follows: h is less than or equal to (d)j-dc)/{2tan[arcsin(NA/nw)]H is the distance from the lower end of the energy transfer module 1 to the nozzle 7, djDiameter of the formed water bundle fiber 9, dcFor the diameter of the energy-transmitting fiber 1-1, NA is the numerical aperture of the fiber in air, nwTo form the liquid refractive index of the water bundle fiber 9.
The high-power laser beam 10 transmitted by the energy transmission optical fiber 1-1 is coupled with the water jet of the nozzle 7 to form the water beam optical fiber 9, so that the purpose of guiding the laser beam 10 by the water beam is achieved, and the high-efficiency, high-precision and low-damage processing of the material by the high-efficiency coupled water-guided laser of the high-power laser beam 10 is further realized.
Adopt the utility model discloses the scheme step of high-efficient coupling water of high power laser beam leads laser structure coupling water beam optic fibre 9 is:
1. the high pressure liquid supply module is started to form a low pressure steady flow liquid layer 8 coupled with the liquid cavity module, and the low pressure steady flow liquid layer 8 is downwards ejected from the nozzle 7 to form a stable water jet (water beam).
2. Selective coupling mode
Firstly, the lower end of the energy transmission module 1 is suspended in the low-pressure steady flow liquid layer 8, and the fiber core diameter d of the energy transmission module 1 is matchedcWater jet diameter djThe wavelength, the power and the frequency of the laser beam 10, the depth of the lower end of the energy transmission module 1 inserted into the low-pressure steady flow liquid layer 8, and the nozzle distance from the lower end of the energy transmission module 1 to the nozzle 7.
And the lower end of the energy transfer module 1 extends into the nozzle of the nozzle 7 and is fixed in position.
3. And starting the laser emitter, transmitting the high-power laser beam 10 to the energy transmission optical fiber head or the self-focusing lens 2 or the diamond joint through the energy transmission optical fiber 1-1, and emitting the laser beam 10 downwards after being focused by the energy transmission optical fiber head or the self-focusing lens 2 or the diamond joint.
4. The laser beam 10 is guided to couple into the water jet to form a water beam fiber 9, provided that total reflection is satisfied.

Claims (5)

1. High power laser beam high efficiency coupling water guide laser structure, including biography can module (1), biography can fixed module, coupling liquid chamber module and nozzle module, its characterized in that:
the upper end of the energy transmission module (1) is connected with a high-power energy transmission optical fiber (1-1), and the lower end of the energy transmission module (1) is provided with an energy transmission optical fiber head, a self-focusing lens (2) or a diamond joint for transmitting laser beams;
the energy transmission fixing module comprises a fixed middle block (3) coaxially mounted with the energy transmission module (1), the fixed middle block (3) is coaxially mounted in a connecting body (4), a flow blocking block (5) coaxially mounted on the fixed middle block (3) is arranged at the bottom of the connecting body (4), and a sealing ring (13) is arranged between the flow blocking block (5) and the connecting body (4);
the nozzle module comprises a nozzle seat (6) arranged below the energy transfer module (1) and the energy transfer fixing module, and a nozzle (7) coaxial with the lower end of the energy transfer module (1) is arranged on the nozzle seat (6);
the coupling liquid cavity module comprises a low-pressure steady flow liquid layer (8) arranged between the flow blocking block (5) and the fixed and middle block (3) and the nozzle seat (6), and the low-pressure steady flow liquid layer (8) is sprayed out from the nozzle (7) to form water jet;
the lower end of the energy transfer module (1) is suspended in the low-pressure steady flow liquid layer (8) at the bottom of the centering block (3) or the lower end of the energy transfer module (1) extends into and is fixed in a spray hole of the nozzle (7) so as to couple the laser beam (10) into the water jet to form a water beam optical fiber (9).
2. The high power laser beam high efficiency coupling water-guided laser structure of claim 1, characterized in that: and a circular spray hole of the nozzle (7) is matched with the excircle of the lower end of the energy transmission module (1).
3. The high power laser beam high efficiency coupling water-guided laser structure of claim 2, characterized in that: the lower end of the energy transfer module (1) is internally tangent to a regular hexagon spray hole (7-1), a regular pentagon spray hole (7-2), a square spray hole (7-3), a regular triangle spray hole (7-4), an oval spray hole (7-5) or a petal-shaped spray hole of the nozzle (7).
4. The high power laser beam high efficiency coupling water-guided laser structure of claim 2, characterized in that: the concentric ring sleeve (12) is supported in the circular spray hole of the nozzle (7) through thin ribs with uniform circumference, and the extending end of the energy transfer module (1) is positioned in the ring sleeve (12).
5. The high-power laser beam high-efficiency coupling water-guided laser structure according to any one of claims 1 to 4, characterized in that: the material of the nozzle (7) is selected from tool steel, sapphire or stainless steel and is manufactured by high-precision machining or high-precision 3D printing.
CN202020679653.8U 2020-04-28 2020-04-28 High-power laser beam high-efficiency coupling water-guide laser structure Expired - Fee Related CN212443728U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111408837A (en) * 2020-04-28 2020-07-14 桂林电子科技大学 High-power laser beam efficient coupling water-guided laser structure and method
CN115042451A (en) * 2022-05-09 2022-09-13 中国科学院沈阳自动化研究所 Water-guided laser wall-aligning protection device and method based on transparent filler with stress

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111408837A (en) * 2020-04-28 2020-07-14 桂林电子科技大学 High-power laser beam efficient coupling water-guided laser structure and method
CN115042451A (en) * 2022-05-09 2022-09-13 中国科学院沈阳自动化研究所 Water-guided laser wall-aligning protection device and method based on transparent filler with stress
CN115042451B (en) * 2022-05-09 2024-05-07 中国科学院沈阳自动化研究所 Water-guiding laser opposite-wall protection device and method based on transparent filler with stress

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