CN212412424U - All-solid-state quasi-three-level 228.5nm laser based on V-shaped cavity and annular cavity - Google Patents
All-solid-state quasi-three-level 228.5nm laser based on V-shaped cavity and annular cavity Download PDFInfo
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- CN212412424U CN212412424U CN202020959056.0U CN202020959056U CN212412424U CN 212412424 U CN212412424 U CN 212412424U CN 202020959056 U CN202020959056 U CN 202020959056U CN 212412424 U CN212412424 U CN 212412424U
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Abstract
The utility model discloses a quasi three energy level 228.5nm laser of full solid state based on V die cavity and annular chamber structure, this laser includes along the light path direction in proper order: the device comprises a pumping source, a first coupling optical system, a V-shaped cavity and an annular cavity; wherein: the V-shaped cavity comprises: the lens M comprises a first sub-arm, a second sub-arm and a lens M at the intersection of the first sub-arm and the second sub-arm; the first sub-arm is provided with a laser crystal; and the second sub-arm is sequentially provided with a lens M2 and an LBO frequency doubling crystal. The laser utilizes the V-shaped cavity to carry out intracavity frequency doubling on the fundamental frequency light, improves the power density and the frequency doubling efficiency of the fundamental frequency light, simultaneously utilizes the annular cavity to carry out intracavity resonance frequency quadrupling on the frequency doubling light, improves the power density and the frequency doubling efficiency of the frequency doubling light in a frequency doubling crystal, simultaneously utilizes the annular cavity as a traveling wave cavity, is favorable for single-frequency laser to resonate in the cavity, improves the frequency doubling efficiency, and finally obtains the high-power 228.5nm deep ultraviolet laser.
Description
Technical Field
The utility model relates to a three energy level laser technical field of full solid state, more specifically say so and relate to a 228.5nm laser of three energy levels of full solid state based on V die cavity and annular chamber structure.
Background
At present, with the increasing demand of people on deep ultraviolet lasers with different wave bands, an all-solid-state quasi-three-level deep ultraviolet laser becomes the key point of research in the field of lasers, and as compared with the laser performance of a four-level system, quasi-three-level spectral lines have the disadvantages of reabsorption, small stimulated emission cross section and the like, the frequency doubling efficiency in the deep ultraviolet all-solid-state laser adopting a conventional straight cavity structure is low, the quasi-three-level laser system is difficult to realize deep ultraviolet output, and the actual demand cannot be met.
Therefore, how to provide an all-solid-state quasi-three-level deep ultraviolet laser capable of outputting high-power deep ultraviolet laser is a problem that needs to be solved urgently by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a quasi three-energy level 228.5nm laser of full solid state based on V die cavity and annular chamber structure, this laser adopt V die cavity and annular chamber connection structure, can improve fundamental frequency light output and frequency doubling and quadruple's efficiency, and it is lower to have solved the frequency doubling efficiency among the deep ultraviolet all solid-state laser of conventional straight chamber structure, and quasi three-energy level laser system hardly realizes the problem of deep ultraviolet output.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an all-solid-state quasi-three-level 228.5nm laser based on a V-shaped cavity and ring cavity structure sequentially comprises the following components in the optical path direction: the device comprises a pumping source, a first coupling optical system, a V-shaped cavity and an annular cavity;
wherein: the V-shaped cavity comprises: the lens M comprises a first sub-arm, a second sub-arm and a lens M at the intersection of the first sub-arm and the second sub-arm; the first sub-arm is provided with a laser crystal; the second sub-arm is sequentially provided with a lens M2 and an LBO frequency doubling crystal;
the pump source emits pump light, and the pump light is shaped by the first coupling optical system; incident on the laser crystal to generate a spectral line; oscillating the spectral line in the V-shaped cavity, and performing double frequency treatment on the spectral line by the LBO frequency doubling crystal to obtain double frequency laser; the double-frequency laser is input into the annular cavity, resonance quadruple frequency processing is carried out in the annular cavity, and 228.5nm pulse laser is output.
The utility model has the advantages that: this laser instrument utilizes the V die cavity to carry out intracavity frequency doubling to the fundamental frequency light, has improved the power density and the frequency doubling efficiency of fundamental frequency light, utilizes the annular chamber to carry out intracavity resonance quadruple frequency to frequency doubling light simultaneously, has improved the power density and the frequency doubling efficiency of frequency doubling light in the frequency doubling crystal, and the annular chamber is the travelling wave chamber simultaneously, does benefit to single-frequency laser and resonates in the intracavity, has improved frequency doubling efficiency, has finally obtained high power 228.5nm deep ultraviolet laser.
Further, the above all-solid-state quasi-three-level 228.5nm laser based on the V-cavity and ring cavity structure further includes a filter shaping component, and the filter shaping component is disposed between the V-cavity and the ring cavity;
the filtering and shaping component sequentially comprises the following components in the direction of the light path: the double-frequency laser filters stray light through the optical filter, and is incident into the second coupling optical system for shaping after the propagation direction of a light path is adjusted through the reflecting sheet.
The beneficial effect of adopting the further scheme is that: because the double-frequency laser emitted from the V-shaped cavity contains light with various wave bands, the filter is arranged, the laser output from the V-shaped cavity can be filtered, the wave bands of 808nm, 914nm, 1064nm and 1342nm can be filtered, only the wave band of 457nm is left to penetrate through, and after the adjustment and the shaping of the light transmission direction, the number of laser beams emitted into the annular cavity can be reduced, and the efficiency of resonance quadruple frequency treatment is improved.
Furthermore, the length of the first sub-arm is 60 mm-70 mm, and the length of the second sub-arm is 30 mm-35 mm.
Further, the laser crystal is Nd: YVO4 laser crystal, and the size of the Nd: YVO4 laser crystal is 4 multiplied by 5mm3，Nd3+The doping concentration of (a) is 0.1%;
the input end face of the YVO4 laser crystal is plated with a dielectric film M1, the output end face of the YVO4 laser crystal is plated with a dielectric film S2, and the optical parameters of the dielectric film M1 are AR @808nm &1064nm and HR @914 nm; the optical parameters of the dielectric film S2 are AR @914nm &1064nm &1342 nm.
Further, the lens M is made of quartz, the diameter of the lens M is 12.7mm, the light incident surface of the lens M is a concave surface or a plane, and the curvature radius of the concave surface is 500mm, 200mm, 100mm or 50 mm;
the optical parameters of the dielectric film plated on the light incident surface are 10degHR @914nm and 10degAR @1064nm &1342&457 nm; the optical parameter of the dielectric film coated on the light-emitting surface is 10degAR @457nm &914nm &1064nm &1342 nm.
Further, the lens M2 is made of quartz, the diameter is 12.7mm, the light incident surface of the lens M2 is a concave surface or a plane, and the curvature radius of the concave surface is 600mm, 300mm or 200 mm;
the light incident surface and the light emergent surface of the lens M2 are both plated with dielectric films, and the optical parameters of the dielectric films plated on the light incident surface are as follows: HR @914&457nm, AR @1064&1342 nm; the optical parameters of the dielectric film coated on the light-emitting surface are as follows: AR @457nm &914nm &1064nm &1342 nm.
Further, the size of the LBO frequency doubling crystal is 4 multiplied by 15mm3Phase matching angle (theta, phi) ═ 90,21.7), two end faces of the LBO frequency doubling crystal are plated with dielectric films, and the optical parameters of the dielectric films plated on the two end faces are AR @457nm&914nm&1064nm。
Further, the annular cavity comprises a lens M3, a lens M4, a lens M5, a lens M6 and a BBO frequency doubling crystal, wherein the lens M3 and the lens M4 and the lens M5 and the lens M6 are respectively arranged in a mirror image mode relative to the same vertical central line, and the BBO frequency doubling crystal is arranged between the lens M5 and the lens M6;
the distance between the lens M3 and the lens M4 is 40-50 mm; the distance between the lens M5 and the lens M6 is 70-90 mm; the distance between the lens M3 and the lens M5 is 30 mm.
Furthermore, the lens M3, the lens M4, the lens M5 and the lens M6 are all made of quartz and have the diameter of 12.7mm, and the lens M3 and the lens M4 are both plane mirrors;
the light incident surface of the lens M3 is coated with a film, and the optical parameter of the coated film is T3% @914 nm;
the light incident surface of the lens M4 is plated with a film, and the optical parameter of the plated film is HR @914 nm;
the curvature radius of the lens M5 is 100mm, the light incident surface of the lens M5 is coated with a film, and the optical parameter of the coated film is HR @914 nm;
the curvature radius of the lens M6 is 100mm, the light incoming surface of the lens M6 is coated, and the optical parameters of the coated film are HR @914& AR @228.5 nm.
Further, the BBO frequency doubling crystal has the size of 4 multiplied by 10mm3Phase matching angle of thetapm61.4 degrees and an azimuth angle phi of 0 degrees, wherein the two end faces of the BBO frequency doubling crystal are coated with films, and the optical parameters of the coated films are AR @228nm&457nm。
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an all-solid-state quasi-three-level 228.5nm laser based on a V-shaped cavity and a ring cavity structure according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, the embodiment of the utility model discloses a full solid state quasi three-energy level 228.5nm laser based on V die cavity and ring chamber structure, this laser includes along the light path direction in proper order: the device comprises a pumping source 1, a first coupling optical system 2, a V-shaped cavity and an annular cavity;
wherein: the V-shaped cavity comprises: the lens M comprises a first sub-arm, a second sub-arm and a lens M at the intersection of the first sub-arm and the second sub-arm; the first branch arm is provided with a laser crystal 3; the second sub-arm is sequentially provided with a lens M2 and an LBO frequency doubling crystal 4;
the pump source 1 emits pump light, and the pump light is shaped through the first coupling optical system 2; the light is incident on the laser crystal 3 to generate a spectral line; the spectral line oscillates in the V-shaped cavity, and the frequency doubling treatment is carried out by an LBO frequency doubling crystal 4 to obtain frequency doubling laser; the double frequency laser is input into the ring cavity, and resonance quadruple frequency processing is carried out in the ring cavity to output 228.5nm pulse laser.
In some embodiments, the above all-solid-state quasi-three-level 228.5nm laser based on the V-cavity and ring-cavity structure further includes a filter shaping component, and the filter shaping component is disposed between the V-cavity and the ring-cavity;
the light filtering and shaping component sequentially comprises in the direction of the light path: the laser device comprises an optical filter 5, a reflector 6 and a second coupling optical system 7, wherein the double-frequency laser filters stray light through the optical filter 5, and enters the second coupling optical system 7 for shaping after the propagation direction of a light path is adjusted through the reflector 6.
In this embodiment, two reflectors 6 are provided, and the two reflectors 6 cooperate to adjust the transmission direction of the optical path.
Specifically, the length L1 of the first arm section is 60mm to 70mm, and the length L2 of the second arm section is 30mm to 35 mm.
In this embodiment, two independent optical waists are arranged on two arms of the V-cavity, that is, the optical waist of the 914nm laser in the resonant cavity formed by M1-M and the optical waist of the 914nm laser in the resonant cavity formed by M1-M2, and the sizes of the light spots on the laser crystal and the frequency doubling crystal are freely selected, so that the good mode matching and the high frequency doubling efficiency are achieved, and the contradiction between the mode matching and the high-efficiency frequency doubling is effectively solved.
Specifically, the laser crystal 3 is a Nd: YVO4 laser crystal, and the size of the Nd: YVO4 laser crystal is 4X 5mm3，Nd3+The doping concentration of (a) is 0.1%;
the input end face of the YVO4 laser crystal is plated with a dielectric film M1, the output end face of the YVO4 laser crystal is plated with a dielectric film S2, and the optical parameters of the dielectric film M1 are AR @808nm &1064nm and HR @914 nm; the optical parameters of the dielectric film S2 are AR @914nm &1064nm &1342 nm.
YVO4 is a laser crystal with excellent performance, and is suitable for making laser diode pump, especially for laser in medium and low power. Compared with Nd: YAG, Nd: YVO4 has higher absorption coefficient and larger stimulated emission cross section for pump light. YVO4 crystal of Nd of laser diode pump is used with high non-linear coefficient crystal such as LBO, BBO, KTP, etc., can reach better frequency doubling conversion efficiency, can make and output all solid state laser of near infrared, green, blue to ultraviolet, etc.. YVO4 laser is now widely used in many fields such as machinery, material processing, spectroscopy, wafer inspection, display, medical inspection, laser printing, data storage, etc. Compared with Nd: YAG, the Nd: YVO4 has the following advantages: the pump bandwidth at about 808nm is about 5 times that of Nd: YAG, the stimulated emission cross section at 1064nm is 3 times that of Nd: YAG, the optical damage threshold is low, the slope efficiency is high, the crystal is biaxial, and the output is linear polarization.
Specifically, the lens M is made of quartz, the diameter of the lens M is 12.7mm, the light incident surface of the lens M is a concave surface or a plane, and the curvature radius of the concave surface is 500mm, 200mm, 100mm or 50 mm;
the light incident surface and the light emergent surface of the lens M are both coated with dielectric films, and the optical parameters of the dielectric films coated on the light incident surface are 10degHR @914nm, 10degAR @1064nm &1342&457 nm; the optical parameter of the dielectric film coated on the light-emitting surface is 10degAR @457nm &914nm &1064nm &1342 nm.
Specifically, the lens M2 is made of quartz, the diameter is 12.7mm, the light incident surface of the lens M2 is a concave surface or a plane, and the curvature radius of the concave surface is 600mm, 300mm or 200 mm;
the light incident surface and the light emergent surface of the lens M2 are both plated with dielectric films, and the optical parameters of the dielectric films plated on the light incident surface are as follows: HR @914&457nm, AR @1064&1342 nm; the optical parameters of the dielectric film coated on the emergent surface are as follows: AR @457nm &914nm &1064nm &1342 nm.
In particular, the dimensions of the LBO frequency doubling crystal 4 are 4X 15mm3The phase matching angle (θ, Φ) ═ 90,21.7, both end faces of the LBO frequency doubling crystal 4 were coated with dielectric films, and the optical parameters of the dielectric films coated on both end faces were AR @457nm&914nm&1064nm。
Specifically, the annular cavity comprises a lens M3, a lens M4, a lens M5, a lens M6 and a BBO frequency doubling crystal 8, wherein the lens M3 and the lens M4, and the lens M5 and the lens M6 are respectively arranged in a mirror image mode relative to the same vertical central line, and the BBO frequency doubling crystal 8 is arranged between the lens M5 and the lens M6;
the distance L3 from the lens M3 to the lens M4 is 40-50 mm; the distance L4 from the lens M5 to the lens M6 is 70-90 mm; the distance L5 from the lens M3 to the lens M5 is 30 mm.
Specifically, the lens M3, the lens M4, the lens M5 and the lens M6 are all made of quartz and have the diameter of 12.7mm, and the lens M3 and the lens M4 are both plane mirrors;
coating a film on the light incident surface of the lens M3, wherein the optical parameter of the coated film is T3% @914 nm;
coating a film on the light incident surface of the lens M4, wherein the optical parameter of the coated film is HR @914 nm; preferably, in order to achieve a better effect, a frequency locking controller PZT is further mounted on the M4 in the embodiment;
the curvature radius of the lens M5 is 100mm, the light incident surface of the lens M5 is coated with a film, and the optical parameter of the coated film is HR @914 nm;
the curvature radius of the lens M6 is 100mm, the light incident surface of the lens M6 is coated, and the optical parameter of the coated film is HR @914& AR @228.5 nm.
Specifically, the BBO frequency doubling crystal 8 has a size of 4X 10mm3Phase matching angle of thetapmCoating films on two end faces of the BBO frequency doubling crystal with the azimuth angle phi of 0 degrees of 61.4 degrees, wherein the optical parameters of the coated films are AR @228nm&457nm。
In this embodiment, the ring cavity adopts a traveling wave cavity structure, and the traveling wave cavity structure only allows a light beam to pass through in the cavity in a single direction, so that single-frequency laser resonance in the cavity is facilitated, the frequency doubling efficiency is improved, and a standing wave field and a spatial non-uniform effect formed by the light beam in the cavity are eliminated.
In the present embodiment, both the first coupling optical system and the second coupling optical system are used to shape the light beam input thereto.
The working principle of the laser is explained in detail as follows:
(1) the pump source provides 808nm pump light (i.e. fundamental frequency light);
(2) the first coupling optical system shapes the pump light of 808nm, and the pump light is emitted to the Nd: on the M1 plane of YVO4 laser crystal;
(3) nd: YVO4 laser crystal generates 914nm spectral line;
(4) the 914nm spectral line oscillates among M1, M and M2 to form laser;
(5) the LBO frequency doubling crystal doubles the frequency of 914nm laser to obtain 457nm laser output;
(6) the filter filters the output laser, and can filter 808nm, 914nm, 1064nm and 1342nm wave bands, and only the 457nm wave band is left to transmit;
(7) the second coupling optical system shapes the 457nm laser light beam and emits the laser light beam into the annular cavity through a lens M3;
(8) the annular cavity consisting of M3, M4, M5 and M6 enables the 457nm laser to be stabilized in the cavity and to be self-reproduced around the circumference;
the BBO frequency doubling crystal doubles the frequency of the 457nm laser, and the 228.5nm laser is obtained and is output from the lens M6.
The embodiment of the utility model discloses a novel quasi three energy level 228.5nm lasers in solid state of structure can be used to detect the heavy metal pollution in the soil, detects medicines such as anticancer drug taxol, dittany bark and gliclazide.
To sum up, the embodiment of the utility model discloses a based on V die cavity and ring cavity structure's accurate three energy levels 228.5nm laser of full solid state compares with prior art, has following advantage:
1. the V-shaped cavity is utilized to carry out intracavity frequency doubling on the fundamental frequency light, the power density and the frequency doubling efficiency of the fundamental frequency light are improved, and meanwhile, two arms of the V-shaped cavity are provided with two independent light waists, so that the contradiction between mode matching and high-efficiency frequency doubling is effectively solved;
2. the annular cavity is used for carrying out intracavity resonance quadruple frequency on the double-frequency light, so that the power density and the frequency doubling efficiency of the double-frequency light in the frequency doubling crystal are improved, and meanwhile, the annular cavity is a traveling wave cavity, so that single-frequency laser can resonate in the cavity, the frequency doubling efficiency is improved, and high-power 228.5nm deep ultraviolet laser is obtained.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An all-solid-state quasi-three-level 228.5nm laser based on a V-shaped cavity and ring cavity structure is characterized by sequentially comprising the following components in the direction of an optical path: the device comprises a pumping source, a first coupling optical system, a V-shaped cavity and an annular cavity;
wherein: the V-shaped cavity comprises: the lens M comprises a first sub-arm, a second sub-arm and a lens M at the intersection of the first sub-arm and the second sub-arm; the first sub-arm is provided with a laser crystal; the second sub-arm is sequentially provided with a lens M2 and an LBO frequency doubling crystal;
the pump source emits pump light, and the pump light is shaped by the first coupling optical system; incident on the laser crystal to generate a spectral line; oscillating the spectral line in the V-shaped cavity, and performing double frequency treatment on the spectral line by the LBO frequency doubling crystal to obtain double frequency laser; the double-frequency laser is input into the annular cavity, resonance quadruple frequency processing is carried out in the annular cavity, and 228.5nm pulse laser is output.
2. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 1, further comprising a filter shaping component, wherein said filter shaping component is disposed between said V-shaped cavity and said ring cavity;
the filtering and shaping component sequentially comprises the following components in the direction of the light path: the double-frequency laser filters stray light through the optical filter, and is incident into the second coupling optical system for shaping after the propagation direction of a light path is adjusted through the reflecting sheet.
3. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 1, wherein the length of the first arm is 60 mm-70 mm, and the length of the second arm is 30 mm-35 mm.
4. The all-solid-state quasi-tri-level 228.5nm laser device based on the V-cavity and ring cavity structure as claimed in claim 1, wherein the laser crystal is Nd YVO4 laser crystal, and the size of the Nd YVO4 laser crystal is 4 x 5mm3；
The input end face of the YVO4 laser crystal is plated with a dielectric film M1, the output end face of the YVO4 laser crystal is plated with a dielectric film S2, and the optical parameters of the dielectric film M1 are AR @808nm &1064nm and HR @914 nm; the optical parameters of the dielectric film S2 are AR @914nm &1064nm &1342 nm.
5. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 1, wherein the diameter of the lens M is 12.7mm, the light incident surface of the lens M is a concave surface or a plane, and the radius of curvature of the concave surface is 500mm, 200mm, 100mm or 50 mm;
the optical parameters of the dielectric films plated on the light incident surface are 10degHR @914nm and 10degAR @1064nm &1342&457 nm; the optical parameter of the dielectric film coated on the emergent surface is 10degAR @457nm &914nm &1064nm &1342 nm.
6. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 1, wherein the diameter of the lens M2 is 12.7mm, the incident surface of the lens M2 is a concave surface or a plane, and the radius of curvature of the concave surface is 600mm, 300mm or 200 mm;
the incident surface and the emergent surface of the lens M2 are both plated with dielectric films, and the optical parameters of the dielectric films plated on the incident surface are as follows: HR @914&457nm, AR @1064&1342 nm; the optical parameters of the dielectric film coated on the emergent surface are as follows: AR @457nm &914nm &1064nm &1342 nm.
7. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 1, wherein the size of the LBO frequency doubling crystal is 4 x 15mm3Phase ofThe matching angle (theta, phi) is (90,21.7), two end faces of the LBO frequency doubling crystal are plated with dielectric films, and optical parameters of the dielectric films plated on the two end faces are AR @457nm&914nm&1064nm。
8. The all-solid-state quasi-three-level 228.5nm laser based on the V-cavity and ring-cavity structure as claimed in claim 1, wherein said ring cavity comprises a lens M3, a lens M4, a lens M5, a lens M6 and a BBO frequency doubling crystal, said lenses M3 and M4 and said lenses M5 and M6 are respectively arranged in mirror image relative to the same vertical center line, said BBO frequency doubling crystal is arranged between said lenses M5 and M6;
the distance between the lens M3 and the lens M4 is 40-50 mm; the distance between the lens M5 and the lens M6 is 70-90 mm; the distance between the lens M3 and the lens M5 is 30 mm.
9. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 8, wherein the diameters of said lens M3, lens M4, lens M5 and lens M6 are all 12.7mm, and said lens M3 and lens M4 are both plane mirrors;
the light incident surface of the lens M3 is coated with a film, and the optical parameter of the coated film is T3% @914 nm;
the light incident surface of the lens M4 is plated with a film, and the optical parameter of the plated film is HR @914 nm;
the curvature radius of the lens M5 is 100mm, the light incident surface of the lens M5 is coated with a film, and the optical parameter of the coated film is HR @914 nm;
the curvature radius of the lens M6 is 100mm, the light incoming surface of the lens M6 is coated, and the optical parameters of the coated film are HR @914& AR @228.5 nm.
10. The all-solid-state quasi-three-level 228.5nm laser based on the V-shaped cavity and ring cavity structure as claimed in claim 8, wherein the BBO frequency doubling crystal has a size of 4 x 10mm3Phase matching angle of thetapmThe azimuth angle phi is 0DEG at 61.4 DEG, and two end faces of the BBO frequency doubling crystalCoating film, wherein the optical parameters of the coated film are AR @228nm&457nm。
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