CN212275006U - MEMS gas flow detection chip and intelligent gas flow instrument - Google Patents
MEMS gas flow detection chip and intelligent gas flow instrument Download PDFInfo
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- CN212275006U CN212275006U CN202020385451.2U CN202020385451U CN212275006U CN 212275006 U CN212275006 U CN 212275006U CN 202020385451 U CN202020385451 U CN 202020385451U CN 212275006 U CN212275006 U CN 212275006U
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Abstract
The embodiment of the utility model discloses MEMS gas flow detects chip and intelligent gas flow instrument, this MEMS gas flow detects chip includes: a substrate; a flow sensor and at least one environmental parameter sensor are integrated on the front side of the substrate. The embodiment of the utility model provides a technical scheme has realized accomplishing flow and multiple environmental parameter's measurement through single chip.
Description
Technical Field
The embodiment of the utility model provides a relate to gaseous detection technical field, especially relate to a MEMS gas flow detects chip and intelligent gas flow instrument.
Background
With the rapid development of the internet of things communication technology, the measurement and monitoring of gas enter a new development stage. Flow meters are trending toward automation, intelligence, remoting, and integration. The flow detection chip is a core component for realizing the intelligent gas flow instrument.
At present, the gas flow meter on the market has a single function, most meters only have a gas flow measurement function, and a mechanical flow measurement assembly is generally adopted, so that multifunctional and high-added-value intelligent flow measurement and monitoring are difficult to realize. In recent years, deflagration accidents of combustible gases and toxic gases frequently occur, the requirements of users on safety are higher and higher, and safety supervision departments pay more and more attention to safe use and management of the combustible gases and the toxic gases.
But if the user needs to achieve gas environment parameters such as: the real-time monitoring of pipeline atmospheric pressure, gas temperature, gas humidity etc. need install various detecting instrument additional on the flow instrument or paste the sensor of multiple separation on same or different base plates. The method has the advantages of high cost, large volume and high power consumption, and the interference among various devices can influence the measurement precision and reliability of the instrument. Therefore, a MEMS gas flow detection chip for real-time monitoring of gas environment parameters is needed.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the utility model provides a MEMS gas flow detects chip and intelligent gas flow instrument can not realize gaseous environment parameter real time monitoring's technical problem in order to solve MEMS gas flow and detect the chip among the prior art.
In a first aspect, an embodiment of the present invention provides a MEMS gas flow detection chip, including:
a substrate;
a flow sensor and at least one environmental parameter sensor are integrated on the front side of the substrate.
Optionally, the substrate comprises a silicon-based material or a glass-based material.
Optionally, the at least one ambient parameter sensor comprises one or more of a first temperature sensor, a pressure sensor, a humidity sensor, a gas concentration sensor, and an acceleration sensor.
Optionally, the front surface of the substrate is provided with at least one first groove; and the suspension structure is arranged above the first groove.
Optionally, the suspending structure covers at least a part of the substrate except for the first groove.
Optionally, the suspension structure includes a cantilever structure or a bridge structure, and in the direction of the gas flow, the gas enters the first groove through a first portion of the first groove not covered by the suspension structure, and passes out of a second portion of the first groove not covered by the suspension structure.
Optionally, one or more of the flow sensor, the humidity sensor, the gas concentration sensor, and the acceleration sensor are disposed above the suspended structure.
Optionally, the back surface of the substrate is provided with at least one second groove, and one or more of the flow sensor, the pressure sensor, the humidity sensor, and the gas concentration sensor are respectively located on the second groove.
Optionally, the flow sensor comprises at least one heating unit and at least one pair of a second temperature sensor and a third temperature sensor, each pair of the second temperature sensor and the third temperature sensor being symmetrically disposed about one of the heating units.
Optionally, the heating unit is electrically connected to the heating device.
Optionally, the gas flow meter further comprises a signal processing unit, which is electrically connected to the second temperature sensor and the third temperature sensor, respectively, and calculates the gas flow.
Optionally, the signal processing unit is electrically connected to at least one of the environmental parameter sensors for determining the environmental parameter.
Optionally, the signal processing unit is integrated on the substrate or separately formed outside the substrate.
In a second aspect, an embodiment of the present invention provides an intelligent gas flow meter, including the first aspect arbitrary MEMS gas flow detection chip.
According to the technical scheme, the flow sensor and the at least one environmental parameter sensor are integrated on the front face of the substrate to form the MEMS gas flow detection chip, various detection instruments do not need to be additionally arranged on a gas or toxic gas flow instrument or various separated sensors are attached to the same or different substrates, the flow and various environmental parameters are measured only through a single chip, the production cost, the size and the power consumption of the gas or toxic gas flow instrument are reduced, the problem that the measurement accuracy and the reliability of the instrument can be influenced by interference among various devices is solved, and the technical problem that the MEMS gas flow detection chip cannot realize real-time monitoring of gas environmental parameters in the prior art is solved.
Drawings
Fig. 1 is a schematic structural diagram of an MEMS gas flow detection chip according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another MEMS gas flow detection chip according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another MEMS gas flow detection chip according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another MEMS gas flow detection chip according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another MEMS gas flow detection chip according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another MEMS gas flow detection chip according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of another MEMS gas flow detection chip according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
At present, the gas flow meter on the market has a single function, most meters only have a gas flow measurement function, and a mechanical flow measurement assembly is generally adopted, so that multifunctional and high-added-value intelligent flow measurement and monitoring are difficult to realize. In recent years, deflagration accidents of combustible gases and toxic gases frequently occur, the requirements of users on safety are higher and higher, and safety supervision departments pay more and more attention to safe use and management of the combustible gases and the toxic gases. But if the user needs to achieve gas environment parameters such as: the real-time monitoring of pipeline atmospheric pressure, gas temperature, gas humidity etc. need install various detecting instrument additional on the flow instrument or paste the sensor of multiple separation on same or different base plates. The method has the advantages of high cost, large volume and high power consumption, and the interference among various devices can influence the measurement precision and reliability of the instrument. To MEMS gas flow detection chip among the prior art can not realize gas environment parameter real time monitoring's technical problem, the embodiment of the utility model provides a MEMS gas flow detection chip, see figure 1, this MEMS gas flow detection chip includes: a substrate 10; a flow sensor 20 and at least one environmental parameter sensor 30 are integrated on the front side of the substrate 10.
In the present embodiment, the substrate 10 is exemplified by a silicon substrate. Among them, a Micro-Electro-Mechanical System (MEMS), also called a Micro-Electro-Mechanical System, a microsystem, a micromachine, etc., refers to a high-tech chip having a size of several millimeters or less. MEMS is an independent intelligent system, which can be mass produced, the system size is several millimeters or even smaller, and the internal structure is generally in the micrometer or even nanometer level. Specifically, the environmental parameters may include: one or more of temperature, pressure, humidity, gas concentration and environmental vibration play the early warning effect to gas pressure anomaly, gas leakage and earthquake dangerous condition through the real-time measurement and the control to gas flow, temperature, pressure, humidity, gas concentration and environmental vibration multiple parameter. Fig. 1 exemplarily shows two environmental parameter sensors 30, and the number of the environmental parameter sensors 30 is not limited in this embodiment.
According to the technical scheme of the embodiment, the flow sensor 20 and the at least one environmental parameter sensor 30 are integrated on the front surface of the substrate 10 to form an MEMS gas flow detection chip, various detection instruments do not need to be additionally arranged on a gas flow instrument or various separated sensors are attached to the same or different substrates, the measurement of flow and various environmental parameters is completed only through a single chip, the production cost, the size and the power consumption of the gas flow instrument are reduced, the problem that the measurement accuracy and the reliability of the instrument are affected by the interference among various devices is avoided, and the technical problem that the gas flow instrument cannot realize the real-time monitoring of the gas environmental parameters of gas, especially combustible gas and toxic gas in the prior art is solved.
Optionally, on the basis of the above technical solution, the substrate 10 includes a silicon-based material or a glass-based material. It should be noted that the selection of the material for the substrate 10 in the present embodiment is not limited to a silicon-based material or a glass-based material.
Optionally, on the basis of the above technical solution, referring to fig. 2, the at least one environmental parameter sensor 30 includes one or more of a first temperature sensor 31, a pressure sensor 32, a humidity sensor 33, a gas concentration sensor 34, and an acceleration sensor 35. It should be noted that fig. 2 shows a schematic distribution of the at least one environmental parameter sensor 30 and the flow sensor 20 on the substrate 10, but the present embodiment is not limited to the illustrated distribution. The gas flow direction is shown, wherein the flow sensor 20 is used for gas flow sensing. The first temperature sensor 31 is used for temperature compensation of gas temperature detection and other environmental parameter sensors. The humidity sensor 33 is used for humidity detection of the gas. The pressure sensor 32 is used for detecting the pressure of the gas pipeline, in particular for detecting the abnormal condition of the gas pressure, and when the gas pressure is abnormal, a gas control system electrically connected with the pressure sensor 32 can cut off the gas valve in time. The gas concentration sensor 34 is used for detecting gas concentration, when the gas concentration is abnormal, namely when gas leakage occurs in a pipeline or an instrument, a gas control system electrically connected with the gas concentration sensor 34 can detect abnormal conditions and cut off a gas valve in time, so that accidents are avoided. The acceleration sensor 35 is used for environmental seismic monitoring. When the acceleration sensor detects an earthquake signal, the gas valve can be automatically cut off in time by the gas control system electrically connected with the acceleration sensor 35, so that accidents are avoided. Alternatively, the flow sensor 20 and the at least one environmental parameter sensor 30 may be semiconductor thin films and/or metal thin films.
Optionally, on the basis of the above technical solution, referring to fig. 3 and 4, the front surface 100 of the substrate 10 is provided with at least one first groove 101; and the suspension structure 40 is arranged above the first groove 101.
Optionally, on the basis of the above technical solution, the suspension structure 40 covers at least a portion of the substrate 10 except for the portion of the first groove 101. The portion of the substrate 10 excluding the first recess 101 serves as a support structure to support the suspended structure 40.
Optionally, on the basis of the above technical solution, referring to fig. 3 and 4, one or more of the flow sensor 20, the humidity sensor 33, the gas concentration sensor 34, and the acceleration sensor 35 are disposed above the suspension structure 40. Illustratively, the MEMS gas flow rate detecting chip shown in fig. 3 and 4 may be formed by processes such as thin film deposition, photolithography, diffusion, etc. using silicon micromachining technology. The first groove 101 and the suspension structure 40 form a silicon cavity, the suspension structure 40 includes a cantilever structure or a bridge structure, and in the direction of the gas flow, the gas enters the first groove 101 through the first portion a1 of the first groove 101 not covered by the suspension structure 40, and passes out of the second portion a2 of the first groove 101 not covered by the suspension structure 40. The flow sensor 20 and the gas concentration sensor 34 are thermally isolated from each other, the humidity sensor 33 is thermally isolated from each other, and the acceleration sensor 35 is a mass and/or a pressure-sensitive film. The suspended structure 40 is illustratively one or more of silicon oxide, silicon nitride, diffused silicon, or a metal film.
Optionally, on the basis of the above technical solution, referring to fig. 3 and 4, the back surface 103 of the substrate 10 is provided with at least one second groove 102, and one or more of the flow sensor 20, the pressure sensor 32, the humidity sensor 33, and the gas concentration sensor 34 are respectively located above the second groove 102. Illustratively, the MEMS gas flow rate detecting chip shown in fig. 3 and 4 may be formed by processes such as thin film deposition, photolithography, diffusion, etc. using silicon micromachining technology. The second groove 102 serves as a pressure-sensitive film while thermally isolating the flow sensor 20 and the gas concentration sensor 34 from each other and thermally isolating the humidity sensor 33. The formation of the second groove 102 allows the pressure sensor 32 to form a pressure sensitive membrane. It should be noted that, on the basis of the gas flow direction in fig. 3 and 4, the back surface 103 of the substrate 10 is provided with at least one second groove 102, and the second groove 102 and one or more of the flow sensor 20, the pressure sensor 32, the humidity sensor 33, and the gas concentration sensor 34 exist in the substrate 10, so that no gas enters the second groove 102.
Referring to fig. 3 and 4, the first temperature sensor 31 is not disposed above the first recess 101 or the second recess 102, and the first temperature sensor 31 detects the gas ambient temperature, which may be measured without being thermally isolated.
Alternatively, on the basis of the above technical solution, referring to fig. 5, the flow sensor 20 includes at least one heating unit 21 and at least one pair of the second temperature sensor 22 and the third temperature sensor 23, and each pair of the second temperature sensor 22 and the third temperature sensor 23 is symmetrically disposed about one heating unit 21. Optionally, a connecting wire 24 and a bonding pad 25 are further included to lead out the detection electrical signals of the second temperature sensor 22 and the third temperature sensor 23, respectively. For example, fig. 5 shows only one pair of the second temperature sensor 22 and the third temperature sensor 23 and one heating unit 21, but the embodiment of the present invention is not limited to the number thereof.
Optionally, on the basis of the above technical solution, the heating unit 21 is electrically connected with the heating device, and optionally, the heating unit 21 is electrically connected with the heating device through the connecting wire 24 and the pad 25. Optionally, the heating unit 21 is a micro-heater.
The principle of the flow sensor 20 detecting the gas flow is as follows:
the flow sensor 20 measures the gas flow based on the principle of heat conduction. When no gas flows on the heating unit 21, the temperatures around the heating unit are symmetrically distributed, and the second temperature sensor 22 and the third temperature sensor 23 detect that the temperatures around the micro unit 21 are equal. When air flows through the heating unit 21, the temperature values detected by the second temperature sensor 22 and the third temperature sensor 23 are reduced due to heat carried away by the air flow, wherein the reduction range of the temperature value detected by the second temperature sensor 22 is larger than that of the temperature value detected by the third temperature sensor 23, so that the temperatures detected by the second temperature sensor 22 and the third temperature sensor 23 are asymmetrically distributed, the asymmetry of the temperature distribution is more obvious when the air flow rate is larger, and the air flow is calculated through the temperature difference when the temperature difference between the second temperature sensor 22 and the third temperature sensor 23 is larger.
Referring to fig. 5, a schematic diagram of the structure of the first temperature sensor 31 is also shown, and a temperature signal detected by the first temperature sensor 31 is extracted from the connection line 24 and the pad 25.
Optionally, on the basis of the above technical solution, referring to fig. 6, the MEMS gas flow rate detection chip further includes a signal processing unit 50, which is electrically connected to the second temperature sensor 22 and the third temperature sensor 23, respectively, and calculates the gas flow rate. Alternatively, the signal processing unit 50 may exemplarily include a comparison circuit and a micro control unit, two input terminals of the comparison circuit may be the second temperature sensor 22 and the third temperature sensor 23, and the micro control unit obtains a difference between the temperatures detected by the second temperature sensor 22 and the third temperature sensor 23 according to an output structure of the comparison circuit, so as to calculate the gas flow rate.
Optionally, on the basis of the above technical solution, referring to fig. 6, the signal processing unit 50 is electrically connected with at least one environmental parameter sensor 30 for determining an environmental parameter. The signal processing unit 50 illustratively may include an analog-to-digital converter that converts an analog quantity output by the environmental parameter sensor 30 into a digital quantity, and the micro control unit determines the environmental parameter based on the digital quantity output by the analog-to-digital converter.
Alternatively, on the basis of the above technical solution, referring to fig. 6, the signal processing unit 50 is integrated on the substrate 10.
It should be noted that, on the basis of the above technical solution, referring to fig. 7, the signal processing unit 50 may also be separately formed outside the substrate 10, and electrically connected to the flow sensor 20 and the at least one environmental parameter sensor 30 on the substrate to obtain the gas flow and the environmental parameter.
Based on same utility model design, this embodiment still provides an intelligence gas flow instrument, including any one MEMS gas flow detection chip among the above-mentioned technical scheme.
The intelligent gas flow instrument in the embodiment includes any one of the MEMS gas flow detection chips in the above technical solutions, wherein the flow sensor 20 and at least one of the environmental parameter sensors 30 are integrated on the front surface of the substrate 10 to form one MEMS gas flow detection chip, it is not necessary to add various detection instruments on the gas flow instrument or attach various separated sensors on the same or different substrates, the measurement of flow and various environmental parameters is completed only by a single chip, the production cost, volume, and power consumption of the gas flow instrument are reduced, the problem that the interference between various devices may affect the measurement accuracy and reliability of the instrument is avoided, and the technical problem that the gas flow instrument in the prior art cannot realize real-time monitoring of the environmental parameters of gas, especially combustible gas and toxic gas is solved.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments illustrated herein, but is capable of various obvious modifications, rearrangements and substitutions without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (13)
1. A MEMS gas flow detection chip, comprising:
a substrate;
the flow sensor and the at least one environmental parameter sensor are integrated on the front surface of the substrate;
the front surface of the substrate is provided with at least one first groove; and the suspension structure is arranged above the first groove.
2. The MEMS gas flow sensing chip of claim 1, wherein the substrate comprises a silicon-based material or a glass-based material.
3. The MEMS gas flow sensing chip of claim 1, wherein at least one of the environmental parameter sensors comprises one or more of a first temperature sensor, a pressure sensor, a humidity sensor, a gas concentration sensor, and an acceleration sensor.
4. The MEMS gas flow sensing chip of claim 1, wherein the suspended structure covers at least a portion of the substrate excluding the first recess.
5. The MEMS gas flow detection chip of claim 1, wherein the suspension structure comprises a cantilever structure or a bridge structure, and in a direction of a gas flow direction, the gas enters the first recess through a first portion of the first recess not covered by the suspension structure and passes out of a second portion of the first recess not covered by the suspension structure.
6. The MEMS gas flow sensing chip of claim 3, wherein one or more of the flow sensor, the humidity sensor, the gas concentration sensor, and the acceleration sensor are disposed over the suspended structure.
7. The MEMS gas flow detecting chip according to claim 3, wherein the back surface of the substrate is provided with at least one second groove, and one or more of the flow sensor, the pressure sensor, the humidity sensor, and the gas concentration sensor are respectively located above the second groove.
8. The MEMS gas flow sensing chip of claim 1, wherein the flow sensor includes at least one heating unit and at least one pair of second and third temperature sensors, each pair of the second and third temperature sensors being symmetrically disposed about one of the heating units.
9. The MEMS gas flow sensing chip of claim 8, wherein the heating unit is electrically connected to a heating device.
10. The MEMS gas flow rate detection chip according to claim 8, further comprising a signal processing unit electrically connected to the second temperature sensor and the third temperature sensor, respectively, for calculating a gas flow rate.
11. The MEMS gas flow sensing chip of claim 10, wherein the signal processing unit is electrically connected to at least one of the environmental parameter sensors for determining the environmental parameter.
12. The MEMS gas flow detecting chip according to claim 10 or 11, wherein the signal processing unit is integrated on the substrate or separately formed outside the substrate.
13. An intelligent gas flow meter, comprising a MEMS gas flow detection chip according to any one of claims 1 to 12.
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| CN202020385451.2U CN212275006U (en) | 2020-03-24 | 2020-03-24 | MEMS gas flow detection chip and intelligent gas flow instrument |
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| CN202020385451.2U CN212275006U (en) | 2020-03-24 | 2020-03-24 | MEMS gas flow detection chip and intelligent gas flow instrument |
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