CN219869821U - Thermal acceleration micro-nano vortex flowmeter - Google Patents
Thermal acceleration micro-nano vortex flowmeter Download PDFInfo
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- CN219869821U CN219869821U CN202321040851.XU CN202321040851U CN219869821U CN 219869821 U CN219869821 U CN 219869821U CN 202321040851 U CN202321040851 U CN 202321040851U CN 219869821 U CN219869821 U CN 219869821U
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- 230000001133 acceleration Effects 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 238000012545 processing Methods 0.000 claims abstract description 10
- 238000005192 partition Methods 0.000 claims description 27
- 239000012530 fluid Substances 0.000 claims description 15
- 230000008676 import Effects 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 abstract description 6
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
The utility model discloses a thermal acceleration micro-nano vortex flowmeter, which comprises a shell/data processing system and a data display system, wherein a flow detection channel is arranged on the shell, a vortex generator capable of dividing the flow detection channel into an inlet cavity and an outlet cavity is arranged in the flow detection channel, and the vortex generator is provided with an inlet channel and an outlet channel; the housing is internally provided with a containing cavity, a connecting channel which can be used for communicating the inlet channel with the outlet channel is arranged in the containing cavity, an MEMS (micro electro mechanical system) thermal acceleration gas flow sensor which can detect the gas flow is arranged on the connecting channel, and a vortex frequency sensor which can detect the separation frequency of the vortex is arranged in the outlet cavity. The vortex frequency sensor is combined with the MEMS thermal acceleration gas flow sensor, so that the measurement accuracy and the measurement range are improved; the bypass measuring connecting piece is arranged in the accommodating cavity of the shell, so that the influence of external factors on the internal parts of the device can be avoided, and the service life of the device is prolonged.
Description
Technical Field
The utility model relates to the technical field of flow measuring devices, in particular to a thermally accelerated micro-nano vortex flowmeter.
Background
At present, various methods for measuring gas flow exist in the prior art, corresponding testing devices are various, but each device has the limitation of testing, for example, a mechanical gas flow measuring device has stable performance under the condition of larger gas flow rate, and has higher measuring precision, but the mechanical gas flow measuring device has larger error when the gas flow rate is smaller, for example, the vortex street type gas flow measuring device can hardly perform accurate measurement when the gas flow rate is smaller than 5 meters per second, and the thermal type gas flow measuring device is suitable for measuring when the gas flow rate is smaller, and has larger error when the gas flow rate is larger. Therefore, it is difficult to measure a single gas flow rate with a wide range ratio and high accuracy.
In order to solve the problems, the existing vortex street type gas flowmeter is connected with a bypass pipe in parallel, and the bypass pipe is provided with an MEMS flow sensor, so that the accommodating cover measuring device has the advantages of wide range ratio, high precision measurement and the like, but the bypass pipe of the measuring device is arranged outside the gas flowmeter, so that the damage of the bypass pipe is easily caused by external factors, the service life of the gas flowmeter is further influenced, and meanwhile, the structure of the gas flowmeter is not compact, and the bypass pipe is required to be assembled on the gas flowmeter, so that the production and the manufacturing are not facilitated.
Disclosure of Invention
In view of the above, the present utility model aims to provide a thermally accelerated micro-nano vortex flowmeter with a wide range ratio, high measurement accuracy, long service life and compact mechanism.
The utility model adopts the technical proposal for solving the technical problems that:
the utility model provides a heat accelerating micro-nano vortex flowmeter, includes the casing, connects data processing system on the casing, and with data processing system communication connection's data display system, be equipped with flow detection passageway on the casing, be equipped with in the flow detection passageway and separate the flow detection passageway into the vortex generating body of import cavity and outlet cavity, be equipped with on the vortex generating body with the import passageway of import cavity intercommunication, be equipped with on the vortex generating body with the outlet channel of outlet cavity intercommunication, be equipped with in the casing and accept the chamber, it can be equipped with the connecting channel with both intercommunication of import passageway and outlet channel to accept the intracavity, be equipped with detectable gas flow's MEMS heat accelerating gas flow sensor on the connecting channel, be equipped with the vortex frequency sensor of detectable vortex's separation frequency in the outlet cavity.
In a preferred embodiment of the present utility model, a bypass measurement connector is disposed in the accommodating cavity, and the connection channel and the MEMS thermal acceleration gas flow sensor are both designed in the bypass measurement connector.
In a preferred embodiment of the present utility model, the vortex generator includes a first partition, a second partition and a third partition sequentially designed from front to back, the inlet channel is disposed between the first partition and the second partition, the outlet channel is disposed between the second partition and the third partition, the first partition is provided with a fluid inlet communicated with the inlet channel, and the third partition is provided with a fluid outlet communicated with the outlet channel.
In a preferred embodiment of the present utility model, the number of the fluid inlets is not less than three.
In a preferred embodiment of the present utility model, the number of the fluid outlet holes is not less than three.
In a preferred embodiment of the utility model, the bypass measuring connection is of one-piece construction.
In a preferred embodiment of the present utility model, the vortex generator is of a unitary structure.
In a preferred embodiment of the present utility model, a pressure sensor and a temperature sensor are disposed in the outlet cavity, and a fixed end of the pressure sensor and a fixed end of the temperature sensor are both disposed in the accommodating cavity.
In a preferred embodiment of the present utility model, sealing gaskets are disposed at the joint of the connecting channel and the inlet channel and at the joint of the connecting channel and the outlet channel.
In a preferred embodiment of the present utility model, the housing is provided with a connection portion at the inlet and the outlet of the flow detection channel.
The beneficial effects of the utility model are as follows: the vortex frequency sensor and the MEMS thermal acceleration gas flow sensor are combined to measure the gas flow flowing through the micro-nano thermal acceleration vortex flowmeter, so that the measuring accuracy is high and the measuring range is improved. The bypass measurement connecting piece is arranged in the accommodating cavity of the shell, so that the decrease or damage of the measurement precision of the MEMS thermal acceleration gas flow sensor in the bypass measurement connecting piece caused by external factors can be avoided, the service life of the device is prolonged, and the accurate measurement precision is ensured. The bypass measurement connecting piece and the vortex generator are of an integrated structure, so that the device is more compact in structure, convenient to produce and assemble and high in assembly precision.
Drawings
FIG. 1 is a schematic illustration of a thermally accelerated micro-nano vortex flowmeter according to the present utility model.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings.
Referring to fig. 1, a thermal acceleration micro-nano vortex flowmeter comprises a shell 1, a data processing system 2 connected to the shell 1, and a data display system 3 in communication with the data processing system 2, wherein a vortex generating body 4 capable of separating the flow detection channel 11 is arranged in the flow detection channel 11, the vortex generating body 4 is used for separating the flow detection channel 11 into an inlet cavity 111 positioned at one inlet side and an outlet cavity 112 positioned at one outlet side, and meanwhile, an inlet channel 41 communicated with the inlet cavity 111 and an outlet channel 42 communicated with the outlet cavity 112 are arranged on the vortex generating body 4; the housing 1 is internally provided with a housing cavity 12, the housing cavity 12 is internally provided with a connecting channel 52 which can be used for communicating the inlet channel 41 with the outlet channel 42, the connecting channel 52 is provided with a MEMS thermal acceleration gas flow sensor 53 which can detect gas flow, and the outlet cavity 112 is internally provided with a vortex frequency sensor 6 which can detect the separation frequency of the vortex, wherein the MEMS thermal acceleration gas flow sensor 53 and the vortex frequency sensor 6 are both in communication connection with the data processing system 2, and data detected by the MEMS thermal acceleration gas flow sensor 53 and the vortex frequency sensor 6 are analyzed and processed through the data processing system 2 and then transmitted to the data display system 3 for display. The bluff vortex generator 4 is assembled in the flow detection channel 11, so that gas can be alternately separated and released from two rows of regular and staggered vortices on two sides of the vortex generator 4, the separation frequency of the vortices in a certain flow velocity range is proportional to the flow rate of the fluid, the vortex frequency sensor 6 can detect the separation frequency of the vortices, and the vortex frequency sensor 6 is arranged on one side of the outlet cavity 112, so that the vortices are more stable in separation and release, and the measured result is more accurate; the data detected by the MEMS thermally accelerated gas flow sensor 53 is then combined and analyzed by the data processing system 2 to improve measurement accuracy and measurement range. The MEMS thermal acceleration gas flow sensor 53 is disposed in the accommodating cavity 12 of the housing 1, so as to avoid the decrease or damage of the measurement accuracy caused by external factors, thereby improving the service life of the device and ensuring the accurate measurement accuracy.
Specifically, a bypass measurement connector 51 is disposed in the accommodating cavity 12, the connection channel 52 and the MEMS thermal acceleration gas flow sensor 53 are both designed in the bypass measurement connector 51, and the bypass measurement connector 51, the connection channel 52 and the MEMS thermal acceleration gas flow sensor 53 form a bypass measurement module 5. The MEMS thermally accelerated gas flow sensor 53 is a chip processed by micro-electro-mechanical system technology, and is capable of accurately measuring heat taken away from the chip surface by gas molecules during gas flow and thermal field distribution variation in a minute space on the chip surface, and directly converting detected data into millivolt-level voltage output signals.
In this embodiment, the vortex generator 4 includes a first partition 45, a second partition 46 and a third partition 47 sequentially configured from front to back, the inlet channel 41 is disposed between the first partition 45 and the second partition 46, the outlet channel 42 is disposed between the second partition 46 and the third partition 47, the first partition 45 is provided with a fluid inlet 43 communicated with the inlet channel 41, and the third partition 47 is provided with a fluid outlet 44 communicated with the outlet channel 42. Preferably, the number of the fluid inlet holes 43 and the fluid outlet holes 44 is not less than three, so that the flow rate of the gas flowing into the inlet channel 41 is smoothed to improve the detection accuracy of the MEMS thermally accelerated gas flow sensor 53. Also, the inlet channel 41 is longer than the outlet channel 42, facilitating the flow of gas from the inlet channel 41 to the outlet channel 42 and out. Thus, the gas entering flow detection channel 11 is throttled on the windward side of the bluff vortex generator 4, the split gas enters the fluid inlet 43 with average total pressure on the windward side, and flows out from the fluid outlet 44 with average static pressure on the back side, and the MEMS thermal acceleration type gas flow sensor is arranged on the connecting channel 52 between the two channels to detect the flow on the gas inlet, so that the measuring range ratio of the flowmeter can reach 100:1, the highest range reachable ratio is 400:1.
In this embodiment, the joint between the connecting channel 52 and the inlet channel 41 and the joint between the connecting channel and the outlet channel 42 are provided with sealing gaskets 7, so as to improve the tightness of the bypass measuring module 5.
In this scheme, the bypass measurement connector 51 and the vortex generator 4 are of an integral structure, so that the structure of the device is more compact, the device is convenient to produce and assemble, and the assembly precision is improved; and the bypass measuring connection 51 and the vortex generating body 4 are easily produced and are not easily damaged by external force.
In this embodiment, a pressure sensor 13 and a temperature sensor 14 are disposed in the flow detection channel 11, and a fixed end of the pressure sensor 13 and a fixed end of the temperature sensor 14 are both disposed in the accommodating cavity 12, so that parameter values of the gas flowing in the flow detection channel 11 can be measured.
In this solution, the housing 1 is provided with a connection portion 8 at the inlet and the outlet of the flow detection channel 11, and the connection portion 8 may be a flange with a connection hole, so as to facilitate assembly thereof.
With the above-described preferred embodiments according to the present utility model as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present utility model. The technical scope of the present utility model is not limited to the description, but must be determined according to the scope of claims.
Claims (10)
1. The utility model provides a little vortex flowmeter that receives of heat acceleration, is including casing (1), connect data processing system (2) on casing (1), and with data display system (3) that data processing system (2) communication is connected, be equipped with flow detection passageway (11) on casing (1), a serial communication port, be equipped with in flow detection passageway (11) and separate into vortex generator (4) of import cavity (111) and export cavity (112), be equipped with on vortex generator (4) with import channel (41) of import cavity (111) intercommunication, be equipped with on vortex generator (4) with export cavity (112) intercommunication's exit channel (42), be equipped with in casing (1) and accept chamber (12), be equipped with in acceping chamber (12) and be equipped with both intercommunication's connecting channel (52) with import passageway (41) and exit channel (42), be equipped with on connecting channel (52) and detectable gas flow's the heat acceleration gas flow sensor (53), but be equipped with vortex frequency sensor (112) of vortex frequency sensor in export cavity (6).
2. The thermally accelerated micro-nano vortex flowmeter of claim 1 wherein a bypass measurement connector (51) is disposed within the housing chamber (12), and the connection channel (52) and MEMS thermally accelerated gas flow sensor (53) are both configured within the bypass measurement connector (51).
3. The thermally accelerated micro-nano vortex flowmeter of claim 1, wherein the vortex generator (4) comprises a first partition (45), a second partition (46) and a third partition (47) which are sequentially arranged from front to back, the inlet channel (41) is arranged between the first partition (45) and the second partition (46), the outlet channel (42) is arranged between the second partition (46) and the third partition (47), the first partition (45) is provided with a fluid inlet (43) communicated with the inlet channel (41), and the third partition (47) is provided with a fluid outlet (44) communicated with the outlet channel (42).
4. A thermally accelerated micro-nano vortex flowmeter according to claim 3 wherein the number of fluid inlet holes (43) is not less than three.
5. A thermally accelerated micro-nano vortex flowmeter according to claim 3 wherein the number of fluid outlet holes (44) is not less than three.
6. A thermally accelerated micro-nano vortex meter according to claim 2, characterized in that the bypass measuring connection (51) is of one piece construction.
7. The thermally accelerated micro-nano vortex flowmeter of claim 1 wherein the vortex generator (4) is of unitary construction.
8. The thermally accelerated micro-nano vortex flowmeter of any of claims 1-7, wherein a pressure sensor (13) and a temperature sensor (14) are disposed in the outlet chamber (112), and a fixed end of the pressure sensor (13) and a fixed end of the temperature sensor (14) are both disposed in the housing chamber (12).
9. The thermally accelerated micro-nano vortex flowmeter of claim 8, wherein the junction of the connecting channel (52) with the inlet channel (41) and the junction of the outlet channel (42) are provided with sealing gaskets (7).
10. The thermally accelerated micro-nano vortex flowmeter of claim 9, wherein the housing (1) is provided with a connecting portion (8) at the inlet and the outlet of the flow detection channel (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321040851.XU CN219869821U (en) | 2023-05-05 | 2023-05-05 | Thermal acceleration micro-nano vortex flowmeter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321040851.XU CN219869821U (en) | 2023-05-05 | 2023-05-05 | Thermal acceleration micro-nano vortex flowmeter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219869821U true CN219869821U (en) | 2023-10-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321040851.XU Active CN219869821U (en) | 2023-05-05 | 2023-05-05 | Thermal acceleration micro-nano vortex flowmeter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219869821U (en) |
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2023
- 2023-05-05 CN CN202321040851.XU patent/CN219869821U/en active Active
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