CN212265598U - Precision ceramic working table - Google Patents
Precision ceramic working table Download PDFInfo
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- CN212265598U CN212265598U CN202020565333.XU CN202020565333U CN212265598U CN 212265598 U CN212265598 U CN 212265598U CN 202020565333 U CN202020565333 U CN 202020565333U CN 212265598 U CN212265598 U CN 212265598U
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Abstract
The utility model relates to an accurate ceramic work platform contains: the base is provided with a plurality of gas flow channels and through holes, each gas flow channel is communicated with the through hole through air, and the through holes penetrate through the base; the antistatic multi-hole precise ceramic disc is arranged on the upper surface of the base and provided with a plurality of through holes, each through hole penetrates through the antistatic multi-hole precise ceramic disc, the plurality of through holes are communicated with a gas flow passage and air is communicated with an air pump, and the upper surface of the antistatic multi-hole precise ceramic disc is a workpiece adsorption surface, so that the air pump generates suction to a workpiece through the through holes of the through holes, the gas flow passage and the antistatic multi-hole precise ceramic disc.
Description
Technical Field
The utility model relates to an accurate pottery working disc especially relates to an antistatic accurate pottery workstation.
Background
The precision ceramic working disc is an appliance for adsorbing a workpiece to facilitate processing. The precision ceramic working disk utilizes an air pump to pump air so as to generate suction force for adsorbing workpieces on the workpiece adsorption surface of the multi-hole precision ceramic disk. Thereby, the position of the workpiece is fixed. The air pump can also provide air for the precise ceramic working disk, so that the workpiece is desorbed and even suspended on the precise ceramic working disk.
However, static electricity generated by multiple touches between the conventional precision ceramic working plate and the workpiece is difficult to dissipate, so that the static electricity is gradually accumulated to cause an electrostatic discharge (ESD) phenomenon on the workpiece. The electrostatic discharge may damage or destroy the characteristics of the workpiece, resulting in a reduction in the quality and yield of the product.
SUMMERY OF THE UTILITY MODEL
Therefore, the present invention provides a precision ceramic worktable which can avoid the gradual accumulation of static electricity, thereby avoiding the electrostatic discharge.
The utility model discloses a solve the technical means that prior art's problem adopted and provide an accurate ceramic workstation, contain: the base is provided with a plurality of gas flow channels and through holes, each gas flow channel is communicated with the through hole through air, and the through holes penetrate between the upper surface and the lower surface of the base; the antistatic multi-hole precise ceramic disc is arranged on the upper surface of the base, is made of antistatic materials and is provided with a plurality of through holes, each through hole penetrates through the upper surface and the lower surface of the antistatic multi-hole precise ceramic disc, the plurality of through holes are communicated with the gas flow channel, air is communicated with the air pump, and the upper surface of the antistatic multi-hole precise ceramic disc is a workpiece adsorption surface.
In an embodiment of the present invention, an anti-static multi-hole precision ceramic plate is one of a silicon carbide ceramic plate, an aluminum phosphate ceramic plate and an aluminum oxide ceramic plate.
In an embodiment of the present invention, there is provided an antistatic multi-hole precision ceramic plate, which is a silicon carbide-aluminum phosphate composite ceramic plate, an aluminum phosphate-aluminum oxide composite ceramic plate, a silicon carbide-aluminum oxide composite ceramic plate, or a silicon carbide-aluminum phosphate-aluminum oxide composite ceramic plate.
An embodiment of the present invention provides a precision ceramic worktable, wherein a groove is formed on the upper surface of the base, and the antistatic multi-hole precision ceramic plate is disposed in the groove.
In an embodiment of the present invention, a precision ceramic worktable is provided, and the gas flow channel is recessed from the upper surface of the base.
In an embodiment of the present invention, a precision ceramic worktable is provided, and the gas flow passages are distributed in a bilateral symmetry manner and an up-down symmetry manner.
Via the utility model discloses a technological means that accurate ceramic workstation adopted, when the static that antistatic multi-pass hole accurate ceramic dish produced because of the response, perhaps when antistatic multi-pass hole accurate ceramic dish touches the work piece and produces static, the static can dissipate gradually and avoid the accumulation of static to avoid electrostatic discharge and electrostatic discharge to the influence that the product caused.
Drawings
Fig. 1 is a schematic plan view showing a precision ceramic table according to a first embodiment of the present invention.
Fig. 2 is a schematic plan view showing a base of a precision ceramic table according to a first embodiment of the present invention.
Fig. 3 is a schematic bottom view of a precision ceramic table according to a first embodiment of the present invention.
Fig. 4 is a schematic plan view showing a precision ceramic table according to a second embodiment of the present invention.
Reference numerals
100 precision ceramic working table
100a precision ceramic working table
1 base
11 gas flow channel
12 through hole
13 upper surface of
14 lower surface
15 trough body
2 antistatic multi-hole precision ceramic disc
21 upper surface of the container
Detailed Description
The following describes an embodiment of the present invention with reference to fig. 1 to 4. The description is not intended to limit the embodiments of the present invention, but is one of the embodiments of the present invention.
As shown in fig. 1 to 3, a precision ceramic table 100 according to a first embodiment of the present invention includes: a base 1 and an antistatic multi-hole precise ceramic disc 2.
The base 1 has a plurality of gas flow channels 11 and through holes 12, each gas flow channel 11 is in air communication with the through hole 12, and the through hole 12 penetrates between an upper surface 13 and a lower surface 14 of the base.
The antistatic multi-hole precise ceramic disc 2 is arranged on the upper surface 13 of the base, the antistatic multi-hole precise ceramic disc 2 is made of antistatic materials and is provided with a plurality of through holes, each through hole penetrates through the upper surface 21 and the lower surface of the antistatic multi-hole precise ceramic disc 2, the plurality of through holes are communicated with the gas flow channel 11, air is communicated with the air pump, and the upper surface 21 of the antistatic multi-hole precise ceramic disc 2 is a workpiece adsorption surface.
In the present embodiment, the base 1 is made of a metal material. In detail, the base 1 is made of stainless steel material, and is resistant to corrosion and durable in use. Of course, the base 1 may be made of other hard materials.
As shown in fig. 2, according to the precision ceramic table 100 of the first embodiment of the present invention, a groove 15 is formed in the middle of the upper surface 13 of the base 1 for the arrangement of the antistatic multi-hole precision ceramic plate 2. The gas flow channel 11 is a concave groove depressed in the tank body 15 for gas circulation. In other embodiments, the gas channel 11 may be a channel located inside the base 1, and has a plurality of openings on the upper surface 13.
As shown in fig. 2, the plurality of gas channels 11 are symmetrically distributed in the left-right direction and the front-back direction, and the through hole 12 is located at the center of the plurality of gas channels 11, so that the air-extracting effect on the anti-static multi-hole precision ceramic plate 2 is symmetrically distributed in the left-right direction and the front-back direction. In the present embodiment, the plurality of gas channels 11 are arranged in a checkerboard shape, so that the suction force of the pumping is uniformly distributed on the antistatic multi-hole precision ceramic plate 2.
As shown in fig. 3, according to the precision ceramic worktable 100 of the first embodiment of the present invention, the through hole 12 is connected to the air pump at the lower surface 14 of the base 1, so that the air pump generates suction force to the workpiece on the workpiece adsorption surface through the through hole 12, the gas flow passage 11, and the through hole of the antistatic multi-hole precision ceramic plate 2.
As shown in fig. 1, according to a precision ceramic table 100 of a first embodiment of the present invention, an antistatic multi-hole precision ceramic plate 2 is a square plate. Is fixed in a square groove body 15 on the upper surface 13 of the base 1. Of course, the antistatic multi-hole precision ceramic disk 2 is not limited to a square shape.
The diameter of the through-holes is typically between a few microns and several hundred microns. The antistatic multi-hole precise ceramic disc 2 passes through a plurality of through holes, so that gas can pass through the antistatic multi-hole precise ceramic disc 2, and the gas has good air permeability,
the whole antistatic multi-through hole precision ceramic disc 2 is made of antistatic materials. The antistatic material of the antistatic multi-hole precise ceramic disc 2 mainly comprises one of silicon carbide, aluminum phosphate and aluminum oxide. Among them, alumina may be a crystal structure formed as corundum. In some embodiments, the antistatic material of the antistatic multi-hole precision ceramic disk 2 comprises at least two of silicon carbide, aluminum phosphate, and aluminum oxide.
The antistatic multi-hole precision ceramic disc 2 is integrally made of an antistatic material, and in detail, the surface impedance of the antistatic multi-hole precision ceramic disc has an impedance value of 105Ohm to 109Between ohms. Therefore, when the antistatic multi-hole precise ceramic disc 2 generates static electricity due to induction or when the antistatic multi-hole precise ceramic disc 2 touches a workpiece to generate static electricity, the static electricity can be gradually dissipated to avoid static electricity discharge caused by static electricity accumulation. Preferably, the impedance value of the antistatic multi-hole precise ceramic disc is 108Ohm.
As shown in fig. 4, a precision ceramic table 100a according to a second embodiment of the present invention has substantially the same structure as the precision ceramic table 100 of the first embodiment, with the following differences: the antistatic multi-hole precise ceramic disc 2 is a circular plate body, and the groove body of the base 1 is also correspondingly circular. Of course, the antistatic multi-hole precision ceramic disk 2 is not limited to a circular shape.
The above description and illustrations are only for the purpose of illustrating the preferred embodiments of the present invention, and other modifications may occur to those skilled in the art from the foregoing claims and the foregoing description, which modifications are still within the spirit of the present invention.
Claims (6)
1. A precision ceramic table, comprising:
the gas flow channel is communicated with the through hole by air, and the through hole penetrates through the position between the upper surface and the lower surface of the base;
the antistatic multi-hole precise ceramic disc is arranged on the upper surface of the base and provided with a plurality of through holes, each through hole penetrates through the upper surface and the lower surface of the antistatic multi-hole precise ceramic disc, the plurality of through holes are communicated with the gas flow channel, air is communicated with the air pump, and the upper surface of the antistatic multi-hole precise ceramic disc is a workpiece adsorption surface.
2. The precision ceramic worktable of claim 1, wherein the antistatic multi-hole precision ceramic disk is one of a silicon carbide ceramic disk, an aluminum phosphate ceramic disk and an alumina ceramic disk.
3. The precision ceramic worktable of claim 1, wherein the antistatic multi-pass precision ceramic disk is a silicon carbide-aluminum phosphate composite ceramic disk, an aluminum phosphate-aluminum oxide composite ceramic disk, a silicon carbide-aluminum oxide composite ceramic disk or a silicon carbide-aluminum phosphate-aluminum oxide composite ceramic disk.
4. The precision ceramic worktable of claim 1, wherein a groove is formed on the upper surface of the base, and the antistatic multi-hole precision ceramic disc is arranged in the groove.
5. The precision ceramic table of claim 1, wherein the gas flow channel is recessed from the upper surface of the base.
6. The precision ceramic table of claim 1, wherein the gas flow channels are distributed in a left-right symmetrical manner and a front-back symmetrical manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020565333.XU CN212265598U (en) | 2020-04-16 | 2020-04-16 | Precision ceramic working table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020565333.XU CN212265598U (en) | 2020-04-16 | 2020-04-16 | Precision ceramic working table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212265598U true CN212265598U (en) | 2021-01-01 |
Family
ID=73876779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020565333.XU Active CN212265598U (en) | 2020-04-16 | 2020-04-16 | Precision ceramic working table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212265598U (en) |
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2020
- 2020-04-16 CN CN202020565333.XU patent/CN212265598U/en active Active
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