CN214059174U - Rectangular Bernoulli sucker - Google Patents

Rectangular Bernoulli sucker Download PDF

Info

Publication number
CN214059174U
CN214059174U CN202023031516.2U CN202023031516U CN214059174U CN 214059174 U CN214059174 U CN 214059174U CN 202023031516 U CN202023031516 U CN 202023031516U CN 214059174 U CN214059174 U CN 214059174U
Authority
CN
China
Prior art keywords
core
chuck
rectangular
sucker
bernoulli
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202023031516.2U
Other languages
Chinese (zh)
Inventor
刘忠进
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Wochi Intelligent Technology Co ltd
Original Assignee
Suzhou Wochi Intelligent Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Wochi Intelligent Technology Co ltd filed Critical Suzhou Wochi Intelligent Technology Co ltd
Priority to CN202023031516.2U priority Critical patent/CN214059174U/en
Application granted granted Critical
Publication of CN214059174U publication Critical patent/CN214059174U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

The utility model relates to a haulage equipment technical field discloses a rectangle Bernoulli sucking disc, include: the back surface of the sucker core is provided with a gas port, the front surface of the sucker core is provided with a diversion trench, the gas port is communicated with the diversion trench through a gas path, the sucker core is also provided with a diversion hole, one end of the diversion hole is communicated with the diversion trench, and the other end of the diversion hole is communicated with the outer side surface of the sucker core; the sucker comprises a sucker body, wherein the front surface of the sucker body is provided with an installation cavity and a flow guide groove, a sucker core is installed in the installation cavity, an airflow guide groove is formed between the outer side surface of the sucker core and the inner wall surface of the installation cavity, and compressed gas introduced from a gas port can flow out of the flow guide groove and the flow guide groove; the guiding gutter runs through the sucking disc body, and the air current that flows from the splitter box and air current guiding gutter can flow into the guiding gutter. The airflow distribution in this rectangle bernoulli's sucking disc is even, has that the adsorption affinity distributes evenly, and the adsorption affinity is strong, the little advantage of noise.

Description

Rectangular Bernoulli sucker
Technical Field
The utility model relates to a haulage equipment technical field especially relates to a rectangle Bernoulli sucking disc.
Background
A bernoulli chuck is a chuck suitable for handling thin, delicate and fragile workpieces, and is usually used in conjunction with a robot, for example, for handling solar cells in the photovoltaic industry.
At present, most of the existing Bernoulli chucks adopt a multi-component assembly structure, cannot be used as single components, and are not popular in functional application. The material of sucking disc is mostly rubber products, easily wearing and tearing in the use, and the life of sucking disc is short. In addition, in the prior commonly used Bernoulli chuck, the airflow distribution is uneven, the adsorption force is unstable, so that the Bernoulli chuck has low adsorption index, and not only has high air consumption but also has high noise.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a rectangle Bernoulli sucking disc, the air current distribution among this rectangle Bernoulli sucking disc is even, and it is even to have the adsorption affinity and distribute, and the adsorption affinity is strong, advantage that the noise is little.
To achieve the purpose, the utility model adopts the following technical proposal:
a rectangular bernoulli chuck comprising: the back surface of the sucker core is provided with a gas port, the front surface of the sucker core is provided with a diversion trench, the gas port is communicated with the diversion trench through a gas path, the sucker core is also provided with a diversion hole, one end of the diversion hole is communicated with the diversion trench, and the other end of the diversion hole is communicated with the outer side surface of the sucker core; the sucker body is rectangular, an installation cavity and a flow guide groove are formed in the front face of the sucker body, the sucker core is installed in the installation cavity, an airflow guide groove is formed between the outer side face of the sucker core and the inner wall face of the installation cavity, and compressed air introduced from the air port can flow out of the flow distribution groove and the airflow guide groove; the diversion trench penetrates through the sucker body, and airflow flowing out of the diversion trench and the airflow guide trench can flow into the diversion trench.
As a preferred scheme of the rectangular bernoulli chuck, the chuck core is a cylinder, the splitter box is an annular groove, and the central axis of the air port and the central axis of the splitter box are both coincident with the central axis of the chuck core.
As a preferred scheme of the rectangular Bernoulli chuck, the flow guide groove is an arc-shaped groove, and the central axis of the flow guide groove is coincided with the central axis of the chuck core.
As a preferred scheme of the rectangular Bernoulli chuck, the air passages are arranged in a plurality, and the air passages are evenly distributed by taking the central axis of the annular groove as the center.
As a preferable scheme of the rectangular bernoulli chuck, a plurality of the shunting holes are provided, and the plurality of shunting holes are uniformly distributed by taking the central axis of the annular groove as the center.
As a preferred scheme of the rectangular Bernoulli chuck, the number of the shunting holes is equal to that of the air passages, and the shunting holes and the air passages are arranged in one-to-one correspondence along the radial direction of the chuck core.
As a preferable scheme of the rectangular bernoulli chuck, supporting gaskets are arranged on the front surface of the chuck core and the front surface of the chuck body, and the supporting gaskets are used for forming air permeable gaps between the chuck core and the chuck body and a workpiece to be conveyed.
As a preferred scheme of the rectangular Bernoulli chuck, the supporting gaskets on the chuck body are arranged in a plurality and are uniformly distributed on the outer side of the mounting cavity along the circumferential direction.
As an optimal scheme of the rectangular Bernoulli chuck, a buffer gasket is further arranged on the front face of the chuck body and can be clamped between the chuck body and a workpiece to be conveyed.
As a preferred scheme of the rectangular Bernoulli chuck, the chuck body is further provided with an inductor mounting opening, and the back of the chuck body is provided with a sensor bracket mounting hole and a fixed mounting hole.
The utility model has the advantages that:
the utility model provides a rectangle Bernoulli sucker, which comprises a sucker core and a sucker body, wherein the sucker body is provided with an installation cavity and a diversion trench, the diversion trench penetrates through the sucker body, the sucker core is installed in the installation cavity, the front surface and the back surface of the sucker core are respectively provided with a diversion trench and a gas port, the gas port is communicated with the diversion trench through a gas circuit, one end of the diversion trench is communicated with the diversion trench, the other end of the diversion trench is communicated with the outer side surface of the sucker core, so that the diversion trench is communicated with the gas flow guide trench of the inner wall surface of the installation cavity, compressed gas introduced by the gas port can flow out from the diversion trench and the gas flow guide trench, a thin layer gas flow which flows rapidly is generated on the front surfaces of the sucker core and the sucker body, thereby the speed of the upper surface gas flow of a workpiece to be carried is higher than the gas flow speed of the lower surface, and a pressure difference is generated between the upper side and the lower side of the workpiece to be carried, the lower side surface of the workpiece to be carried generates upward lifting force, so that the workpiece to be carried is adsorbed on the rectangular Bernoulli chuck.
The front surface of the sucking disc core is provided with the splitter box, so that airflow can be uniformly distributed on the front surface of the rectangular Bernoulli sucking disc through the splitter box, the adsorption force of the rectangular Bernoulli sucking disc is uniformly distributed, and the adsorption force is strong; in addition, because the guiding gutter runs through the sucking disc body for the air current that flows from the splitter box and air current guiding gutter can discharge through the guiding gutter fast, makes the exhaust smooth and easy, not only is favorable to improving the flow velocity of thin layer air current, still is favorable to noise abatement.
Drawings
FIG. 1 is a schematic view of a suction cup core provided in an embodiment of the present invention;
FIG. 2 is an angled cross-sectional view of a suction cup core provided in accordance with an embodiment of the present invention;
FIG. 3 is a cross-sectional view of another angle of the suction cup core provided by an embodiment of the present invention;
FIG. 4 is a bottom view of a rectangular Bernoulli chuck according to embodiments of the present invention;
fig. 5 is a top view of a rectangular bernoulli chuck according to an embodiment of the present invention.
In the figure:
1. a sucker core; 11. a gas port; 12. a shunt slot; 13. a gas circuit; 14. a shunt hole; 2. a suction cup body; 21. a mounting cavity; 22. an airflow guide slot; 23. a diversion trench; 3. a support pad; 4. a cushion pad; 5. an inductor mounting port; 6. a sensor bracket mounting hole; 7. and fixing the mounting hole.
Detailed Description
In order to make the technical problem solved by the present invention, the technical solutions adopted by the present invention and the technical effects achieved by the present invention clearer, the following will be described in further detail with reference to the accompanying drawings, and obviously, the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by the skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The technical solution of the rectangular bernoulli chuck according to the present invention is further described by the following embodiments with reference to the accompanying drawings.
The present embodiment provides a rectangular bernoulli chuck, which can be used for adsorbing thin, precise and fragile workpieces, so that the rectangular bernoulli chuck is convenient to carry. This rectangle bernoulli's sucking disc includes sucking disc core 1 and sucking disc body 2, has seted up installation cavity 21 on sucking disc body 2's the front, and sucking disc core 1 installs in installation cavity 21. Preferably, as shown in fig. 1, the outer side wall of the sucker core 1 near the back surface is provided with a connecting thread, and the sucker core 1 is connected in the mounting cavity 21 by the thread, so that the sucker core 1 can be conveniently mounted and dismounted. As shown in fig. 1 to 3, an airflow guide groove 22 is formed between the outer side surface of the chuck core 1 and the inner wall surface of the mounting cavity 21, and compressed air can flow out from the airflow guide groove 22, so that a thin airflow flowing fast is generated on the front surface of the rectangular bernoulli chuck, the speed of the airflow on the upper surface of the workpiece to be conveyed is higher than that of the airflow on the lower surface, a pressure difference is generated between the upper side and the lower side of the workpiece to be conveyed, an upward lifting force is generated on the lower side surface of the workpiece to be conveyed, and the workpiece to be conveyed is adsorbed on the rectangular bernoulli chuck.
In this embodiment, the guiding gutter 23 has still been seted up on the front of sucking disc body 2, and guiding gutter 23 runs through sucking disc body 2, and is located the outside of air current guide way 22, and the air current that flows out from splitter box 12 and air current guide way 22 can flow into guiding gutter 23 and discharge fast for it is smooth and easy to exhaust, not only is favorable to improving the flow velocity of thin layer air current, still is favorable to reducing the noise that produces because of air current and part collision. Preferably, the diversion trench 23 is an arc-shaped trench, and the central axis of the diversion trench 23 coincides with the central axis of the suction cup core 1, so that not only the positioning and the arrangement of the diversion trench 23 are facilitated, but also the thin layer airflow flows into the diversion trench 23 after flowing through the same distance along the radial direction.
In this embodiment, gas port 11 has been seted up at the back of sucking disc core 1, gas port 11 is used for letting in compressed gas, splitter box 12 has been seted up in sucking disc core 1's front, be equipped with gas circuit 13 in sucking disc core 1, gas port 11 and splitter box 12 pass through gas circuit 13 intercommunication, still be equipped with reposition of redundant personnel hole 14 on the sucking disc core 1, the one end of reposition of redundant personnel hole 14 communicates in splitter box 12, the other end of reposition of redundant personnel hole 14 communicates in the lateral surface of sucking disc core 1, make the partial compressed gas that gas port 11 let in can flow from splitter box 12 through gas circuit 13, partial compressed gas can pass through gas circuit 13 in proper order, splitter box 12, flow out from air current guiding groove 22 behind the reposition of redundant personnel hole 14, make the thin layer air current that produces the rapid flow on this rectangle bernoulli's the front. The splitter box 12 not only can promote the even flow of inlet air and can also reduce the noise that produces because of air friction, in addition because compressed gas can flow from the splitter box 12, can flow from the air current guide way 22 again, make the air current can be through the evenly distributed on the front of this rectangle bernoulli's sucking disc, make the upper and lower side of treating the transport work piece can form stable pressure difference, thereby make this rectangle bernoulli's sucking disc have that the adsorption affinity distributes evenly, the adsorption affinity is strong, the air consumption is little and the advantage that the noise is little.
Preferably, the suction cup core 1 is provided as a cylinder, the splitter box 12 is an annular groove, and the central axis of the air port 11 and the central axis of the splitter box 12 are both coincident with the central axis of the suction cup core 1, so that the arrangement, processing and manufacturing of the structure of the suction cup core 1 are facilitated.
In this embodiment, the gas circuit 13 is provided with a plurality of, and a plurality of gas circuits 13 use the central axis of ring channel as the center along same circumference evenly distributed for the air current that lets in the splitter box 12 evenly distributed in the splitter box 12, not only is favorable to the air current evenly to flow into in the diffluence orifice 14, still makes the air current distribution of splitter box 12 exhaust even. In this embodiment, there are 6 air passages 13 on the suction cup core 1, and the 6 air passages 13 are uniformly distributed on the same circumferential surface along the same circumferential direction with the central axis of the annular groove as the center, so that the air flow introduced into the splitter box 12 has a certain ventilation amount.
Preferably, the plurality of branch holes 14 are provided, and the plurality of branch holes 14 are uniformly distributed along the same circumferential direction with the central axis of the annular groove as the center, so that the airflow in the branch groove 12 can uniformly flow out into the airflow guide groove 22, and the airflow in the airflow guide groove 22 can be uniformly distributed and uniformly flow out.
In this embodiment, the number of the distribution holes 14 is also set to be 6 (that is, the number is equal to that of the air paths 13), and the distribution holes 14 and the air paths 13 are arranged in a one-to-one correspondence manner along the radial direction of the chuck core 1, so that the resistance of the air flow in the process of flowing through the air paths 13, the distribution grooves 12 and the distribution holes 14 is small, and reduction of energy consumption is facilitated.
As shown in fig. 1 and 4, preferably, the front surface of the suction cup core 1 and the front surface of the suction cup body 2 are both provided with a support pad 3, and the support pads 3 are used for forming air permeable gaps between the suction cup core 1 and the suction cup body 2 and a workpiece to be carried, so as to ensure that air flow can rapidly flow on the front surface of the rectangular bernoulli suction cup. Specifically, support gasket 3 on the sucking disc body 2 is equipped with a plurality ofly, and along circumference evenly distributed in the outside of installation cavity 21 for all evenly arranged support gasket 3 on the sucking disc body 2's in every installation cavity 21 outside the front, can guarantee that the air permeable gap that forms between sucking disc core 1 and the work piece of treating to carry is ventilative smooth and easy, makes the high velocity air can follow airflow guide way 22 and smoothly flow to sucking disc body 2 on the front.
As shown in fig. 4, the front surface of the suction cup core 1 is preferably provided with a support pad 3 at the center, so that the rectangular bernoulli suction cup can better support the workpiece to be conveyed, prevent the workpiece to be conveyed from deforming and prevent the diversion channel 12 and the airflow guide channel 22 from ventilating outwards, and ensure that the thin airflow on the front surface of the rectangular bernoulli suction cup can be formed smoothly.
More preferably, the support pad 3 is a PEEK pad, which is a traceless material, so that the rectangular bernoulli chuck does not mark the workpiece to be transported when the workpiece to be transported is adsorbed onto the rectangular bernoulli chuck.
In this embodiment, the front surface of the suction cup body 2 is further provided with a buffer pad 4, the buffer pad 4 can be clamped between the suction cup body 2 and the workpiece to be carried when the workpiece to be carried is adsorbed, the acting force between the suction cup body 2 and the workpiece to be carried can be buffered, and the workpiece to be carried is prevented from being scratched. Preferably, a plurality of buffer gaskets 4 are arranged, wherein part of the buffer gaskets 4 are circular arc-shaped, and the plurality of circular arc-shaped buffer gaskets 4 are uniformly distributed on the outer side of the installation cavity 21 along the circumferential direction thereof, so that the acting force between the sucker body 2 and the workpiece to be carried is uniformly distributed; the buffer gaskets 4 of the rest parts are arranged at the edge and the corner of the sucker body 2, so that the scratch of the workpiece to be carried can be prevented from being caused by the edge and the corner of the sucker body 2.
Preferably, the buffer gasket 4 is made of ethylene and vinyl acetate through copolymerization, and compared with a traditional silica gel gasket, the silica gel gasket has excellent elasticity, wear resistance and heat insulation performance, so that the sucker body 2 can absorb a workpiece to be carried more effectively, and has a good anti-static effect, thereby providing good protection for a semiconductor component.
In this embodiment, the suction cup body 2 is further provided with an inductor mounting opening 5, and the inductor mounting opening 5 is a through hole for mounting an inductor. Specifically, the back surface of the suction cup body 2 is provided with a sensor bracket mounting hole 6 and a fixed mounting hole 7, which are respectively used for mounting the sensor bracket and the rectangular bernoulli suction cup on other carrying mechanisms such as a manipulator. Because be equipped with sensor bracket mounting hole 6 on this sucking disc body 2 for the sensor bracket can follow-up the installation on this sucking disc body 2, makes the rectangle bernoulli sucking disc of this embodiment compare in prior art's rectangle bernoulli sucking disc overall structure frivolous more.
Preferably, sucking disc core 1 and sucking disc body 2 all adopt the aluminum alloy to make, light in weight, and the cost is lower, and has better ductility, and difficult emergence extrusion deformation when with treating the contact of transport work piece to the condition of piece, rotation and displacement is difficult for taking place to make and treat that transport work piece is being taken off by this rectangle Bernoulli sucking disc when being difficult for.
In this embodiment, this rectangle bernoulli's sucking disc body 2 is the rectangle, and it has 2 at least sucking disc cores 1 to be the rectangular array on the sucking disc body 2 for this rectangle bernoulli's adsorption efficiency is strong, can adsorb the great work piece of treating the transport of weight. As shown in fig. 4 and 5, 2 chuck cores 1 are provided on the rectangular bernoulli chuck, so that the rectangular bernoulli chuck can provide sufficient suction capacity with a small number of chuck cores 1, and can suck a heavy workpiece to be conveyed.
It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. A rectangular Bernoulli chuck, comprising:
the air inlet (11) is formed in the back of the suction disc core (1), the diversion trench (12) is formed in the front of the suction disc core (1), the air inlet (11) is communicated with the diversion trench (12) through an air passage (13), the suction disc core (1) is further provided with a diversion hole (14), one end of the diversion hole (14) is communicated with the diversion trench (12), and the other end of the diversion hole (14) is communicated with the outer side face of the suction disc core (1);
the sucker body (2) is rectangular, an installation cavity (21) and a flow guide groove (23) are formed in the front face of the sucker body (2), the sucker core (1) is installed in the installation cavity (21), an airflow guide groove (22) is formed between the outer side face of the sucker core (1) and the inner wall face of the installation cavity (21), and compressed air introduced from the air port (11) can flow out of the flow dividing groove (12) and the airflow guide groove (22); the diversion trench (23) penetrates through the sucker body (2), and airflow flowing out of the diversion trench (12) and the airflow guide trench (22) can flow into the diversion trench (23).
2. The rectangular bernoulli chuck according to claim 1, wherein the chuck core (1) is provided as a cylinder, the splitter box (12) is an annular groove, and the central axis of the air port (11) and the central axis of the splitter box (12) both coincide with the central axis of the chuck core (1).
3. The rectangular bernoulli chuck according to claim 2, wherein the flow guide groove (23) is an arc-shaped groove, the central axis of the flow guide groove (23) coinciding with the central axis of the chuck core (1).
4. The rectangular bernoulli chuck according to claim 3, wherein said air passages (13) are provided in plurality, and a plurality of said air passages (13) are evenly distributed around the central axis of said annular groove.
5. The rectangular Bernoulli chuck according to claim 4, wherein said plurality of diverter holes (14) is provided, and a plurality of said diverter holes (14) are evenly distributed centered on the central axis of said annular groove.
6. The rectangular Bernoulli chuck according to claim 5, wherein the number of the shunting holes (14) is equal to the number of the air passages (13), and the shunting holes (14) and the air passages (13) are arranged in a one-to-one correspondence along the radial direction of the chuck core (1).
7. The rectangular bernoulli chuck according to claim 1, wherein a support pad (3) is provided on each of the front face of the chuck core (1) and the front face of the chuck body (2), said support pads (3) being used to create an air-permeable gap between the chuck core (1) and the chuck body (2) and the workpiece to be handled.
8. The rectangular bernoulli chuck according to claim 7, wherein the supporting pads (3) on the chuck body (2) are provided in plurality and evenly distributed circumferentially outside the mounting cavity (21).
9. The rectangular bernoulli chuck according to claim 1, wherein a bumper pad (4) is further provided on the front face of the chuck body (2), said bumper pad (4) being capable of being clamped between the chuck body (2) and a workpiece to be handled.
10. The rectangular Bernoulli chuck according to claim 1, wherein the chuck body (2) is further provided with an inductor mounting opening (5), and the backside of the chuck body (2) is provided with a sensor bracket mounting hole (6) and a fixing mounting hole (7).
CN202023031516.2U 2020-12-16 2020-12-16 Rectangular Bernoulli sucker Active CN214059174U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202023031516.2U CN214059174U (en) 2020-12-16 2020-12-16 Rectangular Bernoulli sucker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202023031516.2U CN214059174U (en) 2020-12-16 2020-12-16 Rectangular Bernoulli sucker

Publications (1)

Publication Number Publication Date
CN214059174U true CN214059174U (en) 2021-08-27

Family

ID=77408753

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202023031516.2U Active CN214059174U (en) 2020-12-16 2020-12-16 Rectangular Bernoulli sucker

Country Status (1)

Country Link
CN (1) CN214059174U (en)

Similar Documents

Publication Publication Date Title
CN213660369U (en) Circular Bernoulli sucking disc
CN219203129U (en) Wafer adsorption auxiliary member and wafer adsorption device
CN214059174U (en) Rectangular Bernoulli sucker
CN113035681B (en) Wafer airlock device
CN216996588U (en) Adsorption device
CN214191652U (en) Bernoulli sucking disc with top air outlet
CN212161782U (en) Vacuum adsorption type circular tail end clamp holder
CN220282798U (en) Upper exhaust type Bernoulli sucker
CN219448487U (en) Top-exhaust Bernoulli sucker and carrying hand
CN114220762A (en) Semiconductor process equipment and wafer transmission device thereof
CN113078095A (en) Bearing device and semiconductor detection equipment
CN220282796U (en) Bernoulli sucker capable of preventing mutual interference
CN219998188U (en) Bernoulli sucker for grabbing silicon wafer
CN214779200U (en) Sucking disc subassembly and unloader that goes up
CN220033030U (en) Silicon wafer adsorption mechanism, reversing mechanism and wafer collecting device
KR20120045758A (en) Non contact transport apparatus
CN212240768U (en) A supplementary tool for outward appearance processing
CN214242842U (en) Photovoltaic bernoulli chuck
CN218582386U (en) Vacuum logic valve
CN218364821U (en) Vacuum adsorption finger and wafer carrying equipment
CN219958957U (en) Oil stain-proof Bernoulli sucker structure
CN218769462U (en) Sucking disc exhaust structure and mini sucking disc
CN220282797U (en) Bernoulli sucker capable of preventing mutual interference
CN214114156U (en) Bernoulli sucking disc with negative pressure detects
CN216413036U (en) Bernoulli sucker and silicon wafer transfer device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant