CN212253665U - Quartz double-furnace door structure - Google Patents
Quartz double-furnace door structure Download PDFInfo
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- CN212253665U CN212253665U CN202020961834.XU CN202020961834U CN212253665U CN 212253665 U CN212253665 U CN 212253665U CN 202020961834 U CN202020961834 U CN 202020961834U CN 212253665 U CN212253665 U CN 212253665U
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Abstract
The utility model discloses a quartzy two furnace gate structures, including the sealed pad of internal seal quartzy furnace gate, quartz package, insulation material, external seal furnace gate, fire door water-cooling business turn over faucet, furnace gate cavity intake pipe, two furnace gate actuating mechanism mount pads, elastomeric element, furnace gate cavity, the quartzy technology pipe of two-chamber, cooling water course and pressure balance gas port, the left end of the quartzy technology pipe of two-chamber is provided with the furnace gate cavity, the inside of furnace gate cavity is provided with the quartzy furnace gate of internal seal, the left end fixed mounting of the quartzy furnace gate of internal seal has quartzy package. The utility model discloses a furnace gate structure to using always improves, makes its reactant that can not produce double-chamber process pipe in the course of the technology using furnace gate department store up in the fire door department, finally realizes that the fire door is clean and the sealed effect that makes double-furnace gate keeps good, the fire door does not have the reactant and stores up, and the material business turn over that can not hinder the intraductal completion technology work of process yet is smooth and easy, extravagant clearance and maintenance time.
Description
Technical Field
The utility model relates to a semiconductor industry wafer coating equipment and photovoltaic trade wafer coating equipment production technical field specifically are two furnace gate structures of quartz.
Background
The semiconductor refers to a material having a conductivity between a conductor and an insulator at normal temperature. Semiconductors are used in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting applications, high-power conversion, and the like. Such as diodes, are devices fabricated using semiconductors. The importance of semiconductors is enormous, both from a technological and economic point of view. Most of today's electronic products, such as computers, mobile phones or digital audio recorders, have a core unit closely related to semiconductors. Common semiconductor materials are silicon, germanium, gallium arsenide, etc., and silicon is the most influential of various semiconductor materials in commercial applications.
The furnace gate structure that commonly uses is single furnace gate structure, this kind of single furnace gate structure can appear the furnace gate seal nature not good often when using, because oxygen in the air gets into furnace mouth department and the inside gas of process tube can generate the reactant and store up at the furnace mouth because the furnace gate is sealed not good, the reactant piles up and the adhesion furnace gate at the furnace mouth appears, influence the leakproofness more, vicious circle is developed more fiercely, the while has also hindered the wafer that accomplishes the technology in the process tube and has passed in and out the furnace mouth smoothly, need regular clearance, extravagant board clearance and maintenance time, influence board productivity and wafer process quality.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a two furnace gate structures of quartz to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a quartzy two furnace door structures of quartz, includes that internal seal quartzy furnace gate, quartz package, insulation material, external seal furnace gate, the sealed pad of fire door mouth, fire door water-cooling advance outlet nozzle, furnace gate chamber intake pipe, two furnace gate actuating mechanism mount pads, elastomeric element, furnace gate chamber, two-chamber quartzy technology pipe, cooling water course and pressure balance gas port, the left end of two-chamber quartzy technology pipe is provided with the furnace gate chamber, the inside of furnace gate chamber is provided with the quartzy furnace gate of internal seal, the left end fixed mounting of the quartzy furnace gate of internal seal has quartzy package, the inside of quartzy package is provided with insulation material, the left side fixed surface of quartzy package is installed elastomeric element, the left side of furnace gate chamber is provided with the external seal furnace gate, the inside of external seal furnace gate is provided with the sealed pad of fire door mouth, the left side, the quartz bag comprises an outer sealing furnace door, a furnace door cavity air inlet pipe, a double-furnace door driving mechanism mounting seat, a cooling water channel and a pressure balance air port, wherein the furnace door cavity air inlet pipe is fixedly mounted inside the outer sealing furnace door, the double-furnace door driving mechanism mounting seat is fixedly mounted on the left side surface of the outer sealing furnace door, the cooling water channel is placed inside the edge of the outer sealing furnace door, and the pressure balance.
Preferably, the inner sealing quartz furnace door (1) comprises a quartz bag (2) and a heat insulation material (3).
Preferably, the right side surface of the outer sealing furnace door (4) is provided with an interface matched with the elastic component (9), and the outer sealing furnace door and the elastic component are fixedly installed through the interface.
Preferably, the furnace door water-cooling water inlet and outlet nozzle (6) is arranged on the diameter of the outer sealing furnace door (4) close to the edge and is connected with the cooling water channel (12) to keep the sequence of lower water inlet and upper water outlet; the furnace door chamber air inlet pipe (7) is arranged in the diameter range corresponding to the furnace door chamber (10), and the double-furnace door driving mechanism mounting seat (8) is fixedly mounted at the central part of the outer sealing furnace door (4).
Preferably, the cooling water channel (12) is arranged on the diameter of the tight edge of the outer sealing furnace door and is placed inside the outer sealing furnace door (4).
Preferably, the right end of the elastic component (9) is fixedly arranged on the surface of the quartz bag (2), and the left end of the elastic component is fixedly arranged on the surface of the outer sealing furnace door (4).
Compared with the prior art, the beneficial effects of the utility model are that: according to the quartz double-furnace door structure, a commonly used furnace door structure is improved, so that trace inert gas is introduced into a furnace door chamber through a furnace door chamber air inlet pipe at the position of a used furnace door, the pressure value of the inert gas is slightly higher than that of a process pipe, and the process gas cannot leak out due to pressure difference, so that reactant accumulation cannot be formed.
The reactant of the double-chamber process tube in the process can not be accumulated at the furnace opening, the sealing position of the furnace door can be kept clean due to pressure difference, the furnace opening is finally clean, the sealing effect of the double furnace doors is kept good, no reactant is accumulated at the furnace opening, the smooth in-and-out of the wafer for completing the process work in the process tube can not be hindered, and the cleaning and maintenance time is not wasted.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic diagram of the left end structure of the dual-chamber quartz process tube of the present invention.
In the figure: 1. an inner sealed quartz furnace door; 2. a quartz bag; 3. a thermal insulation material; 4. the outer sealing of the furnace door; 5. A furnace mouth sealing gasket; 6. the furnace door is water-cooled and enters the water outlet nozzle; 7. a furnace door cavity air inlet pipe; 8. a double-furnace door driving mechanism mounting seat; 9. an elastic member; 10. an oven door chamber; 11. a two-chamber quartz process tube; 12. a cooling water channel; 13. pressure balancing ports.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides an embodiment: a quartz double-furnace door structure comprises an inner sealing quartz furnace door 1, a quartz bag 2, a heat insulation material 3, an outer sealing furnace door 4, a furnace mouth sealing gasket 5, a furnace door water cooling water inlet and outlet nozzle 6, a furnace door chamber air inlet pipe 7, a double-furnace door driving mechanism mounting seat 8, an elastic component 9, a furnace door chamber 10, a double-chamber quartz process pipe 11, a cooling water channel 12 and a pressure balance air port 13, wherein the left end of the double-chamber quartz process pipe 11 is provided with the furnace door chamber 10, the inner sealing quartz furnace door 1 is arranged inside the furnace door chamber 10, the inner sealing quartz furnace door 1 is made of quartz generally, is high-temperature resistant and clean, ensures flatness after plane polishing, and is easy to realize hard sealing with the inner plane of the furnace door chamber 10, the left end of the inner sealing quartz furnace door 1 is fixedly provided with the quartz bag 2, the heat insulation material 3 is arranged inside the quartz bag 2, the inner sealing quartz furnace door 1, an elastic component 9 is fixedly installed on the left side surface of the quartz bag 2, a port matched with the elastic component 9 is formed in the right side surface of the outer sealing furnace door 4, the outer sealing furnace door 4 is fixedly installed on the left side of the furnace door cavity 10, the right end of the elastic component 9 is fixedly installed on the surface of the quartz bag 2, the left end of the elastic component is fixedly installed on the surface of the outer sealing furnace door 4, a furnace mouth sealing gasket 5 is arranged inside the outer sealing furnace door 4, a furnace door water cooling water inlet and outlet nozzle 6 is fixedly installed on the left side of the outer sealing furnace door 4, a furnace door cavity air inlet pipe 7 is fixedly installed inside the outer sealing furnace door 4, a double-furnace door driving mechanism installation seat 8 is fixedly installed on the left side surface of the outer sealing furnace door 4, the water cooling water inlet and outlet nozzle 6 is arranged on the diameter, close to the edge, of the outer sealing furnace door, and the cooling water channel 12 is arranged on the diameter of the close edge of the outer sealing furnace door and is arranged in the outer sealing furnace door 4. The double-furnace door driving mechanism mounting seat 8 is fixedly mounted at the central part of the outer sealed furnace door 4, the quartz bag 2 is internally provided with a pressure balance air port 13, the temperature in the double-chamber quartz process pipe 11 is conducted to the outside of the furnace door through the quartz bag 2 and the heat insulation material 3 so as to play a role of direct blocking and isolation, the temperature of the sealing position of the outer sealed furnace door 4 is lower, the complete sealing is realized, the service life of the furnace door sealing gasket 5 is more favorable, the function of the elastic component 9 is easier to realize for a long time due to the isolation and reduction of the temperature, the material of the outer sealed furnace door 4 can be made of metal materials such as quartz or aluminum materials, the quartz double-furnace door structure is convenient to process and match, the common furnace door structure is improved, the reactant of the double-chamber quartz process pipe 11 in the process can not be accumulated at the furnace door, and the sealing position can be kept clean due to pressure difference and oxygen, finally, the furnace mouth is clean, so that the sealing effect of the double furnace doors is kept good, no reactant is accumulated at the furnace mouth, the smooth in-and-out of the wafers for completing the process work in the process tube is not hindered, and the cleaning and maintenance time is not wasted.
The working principle is as follows: when the door is closed, the double doors are operated by a driving device (not shown), the double doors are integrally moved to the sealing position of the port of the double-chamber quartz process tube 11, the inner sealing quartz door 1 is firstly contacted with the end surface of the inner tube of the double-chamber quartz process tube 10, the outer sealing door 4 is continuously moved to contact the furnace mouth sealing gasket 5 with the large-diameter port of the double-chamber quartz process tube 11 and tightly press the sealing gasket, at the moment, the annular end surface of the inner sealing quartz door 1 and the inner side end surface of the furnace door chamber 10 are tightly pressed with the sealing surface through the elastic force implemented by the elastic component 9 (the sealing is a hard surface sealing which can be slightly leaked), then the sealing of the double doors is completed inside and outside, after the sealing of the double doors is completed, the space in the furnace door chamber 10 is inflated through the air inlet tube 7 (with a valve) of the furnace door chamber, and the pressure value of the space in the furnace door chamber, moreover, the gas (usually N2) in the furnace door chamber 10 is allowed to leak into the double-chamber quartz process tube 11 through the annular sealing surface where the inner sealed quartz furnace door 1 is pressed against the inner side end surface of the furnace door chamber 10, i.e. the pressure of the furnace door chamber 10 is slightly higher than the pressure in the double-chamber quartz process tube 11, because the process gas in the pressure difference cannot leak, and at the same time, N2 contains no oxygen-containing air, the purpose is that the reactant of the double-chamber quartz process tube 11 in the process is not accumulated at the furnace mouth at the furnace door, the furnace door sealing position is kept clean due to the pressure difference, and finally the furnace mouth is clean, so that the sealing effect of the double furnace doors is kept good, the furnace mouth has no reactant accumulation, the wafer for completing the process work in the process tube is not hindered, and the cleaning and maintenance time is not wasted.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or scope of the present invention. Accordingly, the embodiments of the present invention are exemplary, and not limiting. The scope of the invention is indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a two furnace door structures of quartz, includes internal seal quartzy furnace gate (1), quartzy package (2), insulation material (3), external seal furnace gate (4), the sealed pad of furnace mouth (5), furnace gate water-cooling business turn over faucet (6), furnace gate cavity intake pipe (7), two furnace door actuating mechanism mount pads (8), elastomeric element (9), furnace gate cavity (10), two-chamber quartzy technology pipe (11), cooling water course (12) and pressure balance gas port (13), its characterized in that: the left end of two chamber quartzy technology pipes (11) is provided with furnace gate cavity (10), the inside of furnace gate cavity (10) is provided with internal seal quartzy furnace gate (1), the left end fixed mounting of internal seal quartzy furnace gate (1) has quartzy package (2), the inside of quartzy package (2) is provided with insulation material (3), the left side fixed surface of quartzy package (2) installs elastomeric element (9), the left side of furnace gate cavity (10) is provided with external seal furnace gate (4), the inside of external seal furnace gate (4) is provided with the sealed pad of fire door (5), the left side fixed mounting of external seal furnace gate (4) has furnace gate water-cooling water inlet and outlet nozzle (6), the internal fixed mounting of external seal furnace gate (4) has furnace gate cavity intake pipe (7), the left side fixed surface of external seal furnace gate (4) installs two furnace gate actuating mechanism mount pads (8), a cooling water channel (12) is arranged inside the edge of the outer sealing furnace door (4), and a pressure balance air port (13) is arranged inside the quartz bag (2).
2. The quartz double-furnace door structure according to claim 1, wherein: the inner sealing quartz furnace door (1) comprises a quartz bag (2) and a heat insulation material (3).
3. The quartz double-furnace door structure according to claim 1, wherein: the right side surface of the outer sealing furnace door (4) is provided with an interface matched with the elastic component (9), and the outer sealing furnace door and the elastic component are fixedly installed through the interface.
4. The quartz double-furnace door structure according to claim 1, wherein: the furnace door water-cooling water inlet and outlet nozzle (6) is arranged on the diameter of the outer sealing furnace door (4) close to the edge and is connected with the cooling water channel (12) to keep the sequence of lower water inlet and upper water outlet; the furnace door chamber air inlet pipe (7) is arranged in the diameter range corresponding to the furnace door chamber (10), and the double-furnace door driving mechanism mounting seat (8) is fixedly mounted at the central part of the outer sealing furnace door (4).
5. The quartz double-furnace door structure according to claim 1, wherein: the cooling water channel (12) is arranged on the diameter of the outer sealing furnace door close to the edge and is arranged inside the outer sealing furnace door (4).
6. The quartz double-furnace door structure according to claim 1, wherein: the right end of the elastic component (9) is fixedly arranged on the surface of the quartz bag (2), and the left end of the elastic component is fixedly arranged on the surface of the outer sealing furnace door (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020961834.XU CN212253665U (en) | 2020-06-01 | 2020-06-01 | Quartz double-furnace door structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020961834.XU CN212253665U (en) | 2020-06-01 | 2020-06-01 | Quartz double-furnace door structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212253665U true CN212253665U (en) | 2020-12-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020961834.XU Active CN212253665U (en) | 2020-06-01 | 2020-06-01 | Quartz double-furnace door structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212253665U (en) |
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2020
- 2020-06-01 CN CN202020961834.XU patent/CN212253665U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211214 Address after: 214000 three comma maker spaces in the east of 1 / F, building 6, Ruiyun, No. 99, Furong Zhongsan Road, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 266000 f / F, 1022 Beilao Road, Licang District, Qingdao City, Shandong Province Patentee before: QINGDAO SUNRED ELECTRONIC EQUIPMENT Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida Intelligent Electronic Equipment (Wuxi) Co.,Ltd. Address before: 214000 three comma maker spaces in the east of 1 / F, building 6, Ruiyun, No. 99, Furong Zhongsan Road, Xishan District, Wuxi City, Jiangsu Province Patentee before: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. |