CN212103059U - Crystal pulling furnace - Google Patents
Crystal pulling furnace Download PDFInfo
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- CN212103059U CN212103059U CN202020839889.3U CN202020839889U CN212103059U CN 212103059 U CN212103059 U CN 212103059U CN 202020839889 U CN202020839889 U CN 202020839889U CN 212103059 U CN212103059 U CN 212103059U
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Abstract
The embodiment of the utility model provides a crystal pulling furnace, include: the furnace body is internally limited with a cavity, and the top of the furnace body is provided with a crystal pulling port communicated with the cavity; the crucible is arranged on the supporting piece, and the crucible and the supporting piece are positioned in the chamber; the heat preservation cover is sleeved on the periphery of the crucible, the bottom end of the heat preservation cover is connected with the inner side of the bottom wall of the furnace body, the upper end of the heat preservation cover is spaced from the inner side of the top wall of the furnace body, the heat preservation cover and the side wall of the furnace body are spaced to define an air guide channel, an air outlet is formed in the side wall of the furnace body, and the air outlet is communicated with the air guide channel; the flow guide structure is arranged in the air guide channel and is sleeved on the outer side of the heat preservation cover. The guide structure is arranged in the air guide channel and can guide the air flow to flow in the air guide channel, the flow path of the air flow is prolonged, volatile matters in the air flow are deposited on the guide structure, the deposition of the volatile matters on the furnace wall is reduced, and the situation that the volatile matters are deposited in the pipeline and the vacuum pump to block filter screens of the pipeline and the vacuum pump or pollute vacuum pump oil is avoided.
Description
Technical Field
The utility model relates to a crystal pulling furnace technical field, concretely relates to crystal pulling furnace.
Background
At present, in the monocrystalline silicon industry, a Czochralski method (CZ method for short) is mainly adopted to grow monocrystalline silicon, a thermal field has great influence on the quality of the monocrystalline silicon, and the monocrystalline with high quality can be grown by the proper thermal field. In the crystal pulling process, after the gas flow passing through the crystal pulling opening passes through the liquid level of the silicon melt, the waste gas (argon and volatile matters) generated in the crystal pulling process is carried along the gas flow channel of the furnace wall through the exhaust hole and is pumped away by the vacuum pump through the pipeline. The upper exhaust thermal field near the crucible has the problems of poor heat preservation performance and serious pollution after use, because the air flow passes through the furnace wall of the single crystal furnace, a plurality of volatile matters (such as silicon oxide) brought out by the air flow can remain on the furnace wall and can damage the furnace wall, in the production process, the air flow is directly pumped away in an exhaust mode through vacuumizing, the air flow rapidly flows out from an exhaust hole, the retention time of the air in an air flow channel is short, and the volatile matters in the air flow are easy to deposit in the pipeline and a vacuum pump to cause the blockage of filter screens of the pipeline and the vacuum pump or the pollution of vacuum pump oil.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a crystal pulling furnace for solve many volatile matters that the air current brought out and easily remain and damage the oven on the oven, gaseous flow path and time are short in the air current passageway, and volatile matters in the air current easily deposit in pipeline and vacuum pump and lead to blockking up the filter screen of pipeline and vacuum pump or pollute the problem of vacuum pump oil.
In order to solve the technical problem, the utility model discloses a following technical scheme:
according to the utility model discloses crystal pulling furnace, include:
the furnace body is internally limited with a cavity, and the top of the furnace body is provided with a crystal pulling opening communicated with the cavity;
the crucible is arranged on the support, and the crucible and the support are positioned in the chamber;
the heat-preserving cover is sleeved on the periphery of the crucible, the bottom end of the heat-preserving cover is connected with the inner side of the bottom wall of the furnace body, the upper end of the heat-preserving cover is spaced from the inner side of the top wall of the furnace body, the heat-preserving cover and the side wall of the furnace body are spaced to define an air guide channel, an air outlet is formed in the side wall of the furnace body, and the air outlet is communicated with the air guide channel;
the heat insulation cover comprises at least one air guide channel, and is characterized in that the air guide channel is internally provided with at least one air guide structure, the air guide structure is spiral, and the air guide structure is sleeved on the outer side of the heat insulation cover.
Wherein, still include:
the upper end of the guide cylinder is arranged in the crystal pulling opening, and the lower end of the guide cylinder is positioned above the crucible.
The inner side of the side wall of the furnace body is provided with a heat insulation layer, and the heat insulation cover and the heat insulation layer are arranged at intervals to limit the air guide channel.
The outer side of each flow guide structure is abutted against the inner side wall of the furnace body, and the inner side of each flow guide structure is abutted against the outer side wall of the heat preservation cover.
The air guide channel is provided with a plurality of flow guide structures, and the plurality of flow guide structures are arranged at intervals along the length direction of the air guide channel.
And each flow guide structure is provided with a heat reservoir for absorbing and storing heat in the airflow.
Wherein, the longitudinal section of the flow guide structure is L-shaped or U-shaped.
And turbulent flow structures are arranged on the upper side face or/and the lower side face of each flow guide structure.
Wherein, still include: the heater is arranged on the periphery of the crucible and is positioned between the crucible and the heat preservation cover.
Wherein, the inside of the top wall of the furnace body and the inside of the bottom wall of the furnace body are respectively provided with a heat preservation layer.
The utility model discloses an above-mentioned technical scheme's beneficial effect as follows:
according to the utility model discloses crystal pulling furnace, it has the cavity to inject in the furnace body, the top of furnace body be equipped with the mouth of pulling of cavity intercommunication, the crucible is established on the support piece, support piece is located in the cavity, the heat preservation cover is established the periphery of crucible, just the bottom of heat preservation cover with the diapire inboard of furnace body links to each other, the upper end of heat preservation cover with the roof of furnace body is inboard spaced apart, the heat preservation cover with the lateral wall of furnace body is spaced apart to be set up in order to inject air guide channel, be equipped with the gas vent on the lateral wall of furnace body, the gas vent with air guide channel intercommunication, water conservancy diversion structure set up in the air guide channel, the water conservancy diversion structure is the heliciform, the water conservancy diversion structure cover is established the outside of heat preservation. The guide structure is arranged in the air guide channel to guide the air flow to flow in the air guide channel, so that the flow path of the air flow is prolonged, the outflow time of the air flow is prolonged, volatile matters in the air flow can be deposited on the guide structure, the deposition of the volatile matters on the furnace wall is reduced, the damage of the volatile matters to the furnace wall is reduced, and the volatile matters in the air flow are prevented from being deposited in a pipeline and a vacuum pump to block a filter screen of the pipeline and the vacuum pump or pollute vacuum pump oil.
Drawings
FIG. 1 is a schematic view of a crystal pulling furnace according to an embodiment of the present invention;
FIG. 2 is a schematic view of the combination of the diversion structure and the heat-retaining cover;
FIG. 3 is another schematic view of the diversion structure in cooperation with the heat retention cover;
FIG. 4 is another schematic view of the diversion structure in cooperation with the heat retention cover;
fig. 5 is a schematic structural view of the flow guide structure.
Reference numerals
A furnace body 10; a chamber 11; an air guide passage 12; an exhaust port 13; a draft tube 14;
a crucible 20; a support member 21;
a heat-insulating cover 30;
a flow directing structure 40; a heat reservoir 41; a flow perturbation structure 42;
an insulating layer 50;
a heater 60; and an electrode 61.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
A crystal pulling furnace according to an embodiment of the present invention is described in detail below.
As shown in FIG. 1, the crystal pulling furnace according to the embodiment of the present invention comprises a furnace body 10, a crucible 20, a support member 21, a heat insulation cover 30 and at least one flow guide structure 40, wherein a chamber 11 is defined in the furnace body 10, a crystal pulling opening communicated with the chamber 11 is provided at the top of the furnace body 10, the crucible 20 is provided on the support member 21, the crucible 20 and the support member 21 are located in the chamber 11, the support member 21 can rotate, and the crucible 20 can be driven to rotate by the support member 21, so that the crucible is heated uniformly. A heat preservation cover can be arranged at the top of the furnace body through a pressure ring, so that heat loss from the top is reduced. The periphery at crucible 20 is established to heat preservation cover 30 cover, and the diapire inboard of heat preservation cover 30 links to each other with furnace body 10 is inboard, and heat preservation cover 30's upper end is spaced apart with the roof inboard of furnace body 10, and heat preservation cover 30 sets up in order to inject air guide channel 12 with the lateral wall of furnace body 10 is spaced apart, is equipped with gas vent 13 on the lateral wall of furnace body 10, and gas vent 13 communicates with air guide channel 12, and water conservancy diversion structure 40 sets up in air guide channel 12, and water conservancy diversion structure 40 is the heliciform, and water conservancy diversion structure 40 cover is established in heat.
That is, the crystal pulling furnace mainly comprises a furnace body 10, a crucible 20, a support 21, a heat insulation cover 30 and at least one flow guide structure 40, wherein a chamber 11 can be defined in the furnace body 10, the chamber 11 can be columnar, the axis of the chamber 11 and the axis of the furnace body 10 can be collinear, and a crystal pulling opening communicated with the chamber 11 is arranged at the top of the furnace body 10, and a crystal bar can grow through the crystal pulling opening. The crucible 20 and the support member 21 are located in the chamber 11, the crucible 20 is arranged on the support member 21, the heat-insulating cover 30 can be in a cylindrical shape, the heat-insulating cover 30 can be sleeved on the periphery of the crucible 20 to reduce heat dissipation in the crucible 20, the bottom end of the heat-insulating cover 30 is connected with the inner side of the bottom wall of the furnace body 10, the upper end of the heat-insulating cover 30 is spaced from the inner side of the top wall of the furnace body 10, and therefore airflow flowing out of the crucible 20 can flow out through the upper end of the heat-insulating cover 30 and the spaced position of the inner side.
The heat-insulating cover 30 is arranged at a distance from the side wall of the furnace body 10 to define the gas guide channel 12, the gas flow flowing out of the crucible 20 flows through the gas guide channel 12, the side wall of the furnace body 10 is provided with the gas outlet 13, the gas outlet 13 is communicated with the gas guide channel 12, and the gas flow in the gas guide channel 12 is discharged from the gas outlet 13. The air guide channel 12 is internally provided with at least one flow guide structure 40, the flow guide structure 40 can be in a spiral shape, the flow guide structure 40 is sleeved on the outer side of the heat preservation cover 30, the air flow in the air guide channel 12 flows along the flow guide structure 40 through the flow guide structure 40 and is finally discharged from the air outlet 13, the air flow can be guided to flow in the air guide channel 12 by arranging the flow guide structure in the air guide channel 12, the flow path of the air flow is prolonged, the outflow time of the air flow is prolonged, volatile matters (such as silicon oxide) in the air flow can be deposited on the flow guide structure 40, the deposition of the volatile matters on the furnace wall is reduced, the damage of the volatile matters on the furnace wall is reduced, and the volatile matters in the air flow are prevented from being deposited in the pipeline and.
In some embodiments of the present invention, as shown in fig. 1, the crystal pulling furnace further comprises a draft tube 14, an upper end of the draft tube 14 is disposed in the pulling spout, and a lower end of the draft tube 14 is located above the crucible 20. The gas flow from the pulling mouth into the crucible 20 can be guided by the guide shell 14. The lower end of the guide cylinder 14 may partially extend into the crucible 20, and the outer side of the lower end of the guide cylinder 14 is spaced apart from the inner wall of the crucible 20 by a certain distance, so that the gas flow passes through the silicon melt surface and then enters the gas guide channel 13.
The utility model discloses an in other embodiments, the lateral wall inboard of furnace body 10 is equipped with heat preservation 50, and heat preservation 50 can be for keeping warm the carbon felt, and heat preservation cover 30 sets up in order to inject air guide channel 12 with heat preservation 50 spaced apart, can reduce the thermal scattering and disappearing in furnace body 10 through heat preservation 50, reduces the high temperature of air current to the damage of furnace body simultaneously, prolongs the life of furnace body.
The utility model discloses an in the embodiment, the outside of every water conservancy diversion structure 40 ends the inside wall of furnace body 10, and the inboard of every water conservancy diversion structure 40 ends the lateral wall of heat preservation cover 30 for the air current can flow along water conservancy diversion structure 40 steadily, along the gas vent 13 of spiral water conservancy diversion structure 40 from the top flow below, the flow path of extension air current, the outflow time of extension air current makes the volatile substance deposit in the air current at water conservancy diversion structure 40. In the process that the air flow flows from the upper part to the lower part of the exhaust port 13 along the spiral flow guide structure 40, a temperature gradient can be formed along the flow guide structure 40 from top to bottom, the heat taken away by the air flow flowing out of the furnace body is reduced, and a certain heat preservation effect can be realized on the crucible 20.
Optionally, as shown in fig. 2 to 5, the longitudinal section of the flow guiding structure 40 may be L-shaped or U-shaped, that is, when the longitudinal section of the flow guiding structure 40 is L-shaped, a baffle is disposed on the inner side or the outer side of the flow guiding structure 40, and the baffle in the flow guiding structure 40 may stop against the outer side wall of the heat-insulating cover 30 or the inner side wall of the furnace body 10; when the longitudinal section of water conservancy diversion structure 40 is the U type, inboard and the outside in the water conservancy diversion structure 40 have the baffle, baffle in the water conservancy diversion structure 40 can only end the lateral wall of heat preservation cover 30 and the inside wall of furnace body 10 respectively, be convenient for laminate with the inside wall of furnace body 10 and the lateral wall of heat preservation cover 30, so that gaseous water conservancy diversion, can reduce impurity deposition on heat preservation cover and oven, avoid influencing the heat preservation effect of heat preservation cover, the life of extension oven, can prevent that the hot gas flow from heating the inboard oven of oven or the inboard heat preservation carbon felt of oven, avoid the heat to lose along with the outer cooling water of oven.
In some embodiments of the present invention, as shown in fig. 2 to 4, the flow guiding structure 40 may have a plurality of, for example, three, the flow guiding structures 40 may be spaced apart along the length direction of the air guide channel 12, that is, the flow guiding structures 40 may be spaced apart along the vertical direction in the air guide channel 12.
In other embodiments of the present invention, as shown in fig. 4, each flow guiding structure 40 can be respectively provided with a heat storage 41 for absorbing and storing heat in the air flow, the heat storage 41 can absorb and store heat in the air flow flowing through the air guiding channel 12, heat taken away by the air flow flowing out of the furnace body 10 is reduced, the heat stored by the heat storage 41 can keep the temperature of the periphery of the crucible 20, the heat loss of the periphery of the crucible 20 is reduced, and energy consumption is reduced. The heat reservoir 41 may have a receiving cavity therein, and a material or a solution having a large specific heat capacity may be contained in the receiving cavity so as to absorb and store heat. The phase change material can be arranged in the containing cavity, the phase change material can better absorb and store heat energy, and the phase change material can store heat energy with low loss and long time. In addition, the heat storage 41 absorbs and stores the heat of the high-temperature gas, reduces the heat transferred to the furnace wall, lowers the temperature of the furnace wall, and reduces the energy consumption of the crystal pulling furnace because the lower temperature of the furnace wall can bring less heat away by the cooling water which lowers the temperature of the furnace wall.
The plurality of flow guide structures 40 may be disposed at intervals along the length direction of the air guide channel 12, each flow guide structure 40 may be provided with a heat reservoir 41 for absorbing heat in the stored air flow, each flow guide structure 40 may be provided with a plurality of heat reservoirs 41, the plurality of heat reservoirs 41 may be disposed at intervals along the extending direction of the flow guide structure 40, and the heat reservoirs 41 absorb and store heat in the air flow flowing through the air guide channel 12. In the process that the airflow flows from the upper part to the lower part of the exhaust port 13 along the spiral flow guide structures 40, a slowly-changing temperature gradient can be formed on each flow guide structure 40, and a temperature gradient can also be formed between different flow guide structures 40 from top to bottom, so that the temperature gradient from top to bottom in the air guide channel 12 is ensured, the heat taken away by the airflow flowing out of the furnace body is reduced, a certain heat preservation effect on the crucible 20 can be realized, and the energy consumption is reduced; in addition, the damage of the high temperature of the air flow to the furnace body 10 and the vacuum equipment can be avoided, the oxide in the air flow can be deposited on the surfaces of the heat reservoir 41 and the flow guide structure 40, the deposition of the oxide in the air flow on the furnace wall is reduced, the oxide enters the vacuum equipment, the blockage of a filter screen of a vacuum pump or the pollution of vacuum pump oil is avoided, the flow rate and the flow velocity of cooling water required for reducing the temperature of the vacuum pump are reduced, and the power consumption loss is reduced. The diversion structure 40 and the heat reservoir 41 can be detached and replaced without considering the problem of cleaning.
In the embodiment of the present invention, the upper side surface or/and the lower side surface of the flow guiding structure 40 is provided with the turbulent flow structure 42, the turbulent flow structure 42 may be a column, a bent plate or a circular tube, as shown in fig. 5, the upper side surface of the flow guiding structure 40 is provided with the columnar turbulent flow structure 42, and the air flow flowing through the flow guiding structure 40 can be disturbed by the turbulent flow structure 42, so that the volatile matters in the air flow are deposited on the turbulent flow structure 42 more. A receiving chamber may be provided in the flow disturbing structure 42, and a material or solution having a large specific heat capacity is contained in the receiving chamber so as to absorb and store heat. The phase change material can be contained in the containing chamber, and the phase change material can better absorb and store heat energy, so that the phase change material can store heat energy with low loss and long time.
Wherein, absorb and store the heat in the air current that flows through the air guide channel 12 through the heat reservoir 41, and make the temperature of oven relatively reduce, and can reduce the heat that oven cooling water took away, can keep certain temperature in the air guide channel 12 of crystal pulling in-process, if the heat preservation cover 30 is not enough to the heat preservation effect of crucible, the heat that water conservancy diversion structure 40 and heat reservoir 41 stored can provide heat retaining effect, and then improves graphite heater's thermal stability, prevents to draw the influence of crystal process because of heater power fluctuation.
Optionally, as shown in FIG. 1, the crystal pulling furnace further includes a heater 60, the heater 60 being disposed at an outer periphery of the crucible 20 and between the crucible 20 and the heat-retaining cover 30. The crucible 20 is heated by the heater 60 and is positioned between the crucible 20 and the heat-insulating cover 30, and the heat dissipation of the crucible 20 can be reduced by the heat-insulating cover 30. An electrode 61 may be provided on the bottom wall of the furnace body 10, the electrode 61 is connected to the heater 60, and the heater 60 may be powered by the electrode 61.
The utility model discloses an in the embodiment, the roof inboard of furnace body 10 and the diapire inboard of furnace body 10 can be equipped with the heat preservation respectively, and the roof and the diapire position that reduce the heat from furnace body 10 scatter and disappear, reduce the energy consumption.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by those of ordinary skill in the art to which the invention belongs. The use of "first," "second," and similar terms in the description herein do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships are changed accordingly.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A crystal pulling furnace, comprising:
the furnace body is internally limited with a cavity, and the top of the furnace body is provided with a crystal pulling opening communicated with the cavity;
the crucible is arranged on the support, and the crucible and the support are positioned in the chamber;
the heat-preserving cover is sleeved on the periphery of the crucible, the bottom end of the heat-preserving cover is connected with the inner side of the bottom wall of the furnace body, the upper end of the heat-preserving cover is spaced from the inner side of the top wall of the furnace body, the heat-preserving cover and the side wall of the furnace body are spaced to define an air guide channel, an air outlet is formed in the side wall of the furnace body, and the air outlet is communicated with the air guide channel;
the heat insulation cover comprises at least one air guide channel, and is characterized in that the air guide channel is internally provided with at least one air guide structure, the air guide structure is spiral, and the air guide structure is sleeved on the outer side of the heat insulation cover.
2. A crystal puller as set forth in claim 1 further comprising:
the upper end of the guide cylinder is arranged in the crystal pulling opening, and the lower end of the guide cylinder is positioned above the crucible.
3. A crystal pulling furnace as set forth in claim 1 wherein an insulating layer is provided inboard of the side walls of the furnace body, the heat shield being spaced from the insulating layer to define the air guide passage.
4. A crystal pulling furnace as set forth in claim 1 wherein the outer side of each flow directing structure abuts the inner side wall of the furnace body and the inner side of each flow directing structure abuts the outer side wall of the heat shield.
5. A crystal pulling furnace as set forth in claim 1 wherein the flow directing structure is provided in plurality, the flow directing structure being spaced apart along the length of the gas guide channel.
6. A crystal pulling furnace as claimed in claim 1, wherein each flow directing structure is provided with a heat reservoir for absorbing heat from the stored gas stream.
7. A crystal puller as set forth in claim 1 wherein the flow directing structure is L-shaped or U-shaped in longitudinal cross section.
8. A crystal puller as set forth in claim 1 wherein each of the flow directing structures is provided with a flow disrupting structure on an upper or/and lower side thereof.
9. A crystal puller as set forth in claim 1 further comprising:
the heater is arranged on the periphery of the crucible and is positioned between the crucible and the heat preservation cover.
10. A crystal pulling furnace as set forth in claim 1 wherein the furnace body is provided with insulation on the inside of the top wall and insulation on the inside of the bottom wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020839889.3U CN212103059U (en) | 2020-05-19 | 2020-05-19 | Crystal pulling furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020839889.3U CN212103059U (en) | 2020-05-19 | 2020-05-19 | Crystal pulling furnace |
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| CN212103059U true CN212103059U (en) | 2020-12-08 |
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| CN202020839889.3U Active CN212103059U (en) | 2020-05-19 | 2020-05-19 | Crystal pulling furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113249780A (en) * | 2021-06-07 | 2021-08-13 | 浙江晶科能源有限公司 | Flow guide device, single crystal furnace and flow guide control method |
| CN117230522A (en) * | 2023-11-15 | 2023-12-15 | 江苏鑫瑞崚新材料科技有限公司 | Metal single crystal preparation device |
-
2020
- 2020-05-19 CN CN202020839889.3U patent/CN212103059U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113249780A (en) * | 2021-06-07 | 2021-08-13 | 浙江晶科能源有限公司 | Flow guide device, single crystal furnace and flow guide control method |
| CN117230522A (en) * | 2023-11-15 | 2023-12-15 | 江苏鑫瑞崚新材料科技有限公司 | Metal single crystal preparation device |
| CN117230522B (en) * | 2023-11-15 | 2024-01-26 | 江苏鑫瑞崚新材料科技有限公司 | Metal single crystal preparation device |
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