CN117230522B - Metal single crystal preparation device - Google Patents

Metal single crystal preparation device Download PDF

Info

Publication number
CN117230522B
CN117230522B CN202311518678.4A CN202311518678A CN117230522B CN 117230522 B CN117230522 B CN 117230522B CN 202311518678 A CN202311518678 A CN 202311518678A CN 117230522 B CN117230522 B CN 117230522B
Authority
CN
China
Prior art keywords
furnace body
single crystal
crucible
frame
exhaust gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202311518678.4A
Other languages
Chinese (zh)
Other versions
CN117230522A (en
Inventor
刘佩瀛
杜正强
孙洪留
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Xin Rui Ling New Mstar Technology Ltd
Original Assignee
Jiangsu Xin Rui Ling New Mstar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Xin Rui Ling New Mstar Technology Ltd filed Critical Jiangsu Xin Rui Ling New Mstar Technology Ltd
Priority to CN202311518678.4A priority Critical patent/CN117230522B/en
Publication of CN117230522A publication Critical patent/CN117230522A/en
Application granted granted Critical
Publication of CN117230522B publication Critical patent/CN117230522B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to the technical field of metal single crystal preparation, in particular to a metal single crystal preparation device, which comprises: main frame, waste gas recovery subassembly and single crystal furnace subassembly, the top fixed mounting of main frame has the lifting rail frame, and the output fixedly connected with motion seat of lifting rail frame, waste gas recovery subassembly include waste gas guide case, drive box and climbing frame and fixed mounting in the closed smoke valve of furnace body bottom surface, and drive box fixed mounting is in the top surface of waste gas guide case and sliding sleeve joint in the outside of climbing frame, and the inboard fixed mounting of drive box has the external rotor motor. Through adopting furnace body rising formula motion structure, realize climbing frame and furnace body's joint under shutoff valve head control to utilize waste gas guide case climbing motion to drive the furnace body and promote the work, the crucible bottom exposes in outdoor environment, and inside material temperature reduces and is less than the fusing point gradually, and begins crystallization, and the crystal is continuous growing up along with the furnace body rises, and waste gas guide case and furnace body steadily rise in the exhaust emission work and avoid external environment air current to interfere.

Description

Metal single crystal preparation device
Technical Field
The invention relates to the technical field of metal single crystal preparation, in particular to a metal single crystal preparation device.
Background
The single crystal furnace equipment for growth by the crucible descent method is a common crystal growth method, namely Bridgman crystal growth method, raw materials are filled in a crucible, a temperature gradient is formed by controlling the slow rising of a heating furnace body, the furnace temperature is controlled to be slightly higher than the melting point of the materials, the materials in the crucible are melted when the crucible passes through a heating area, when the heating furnace is continuously raised, the materials at the bottom of the crucible are lower than the melting point, crystallization is started, and the crystals continuously grow along with the rising of the furnace body. This method generally has the growth of single crystals of metals in bicrystals for the preparation of single crystals of alkali and alkaline earth halides and fluorides, etc.
The existing single crystal furnace grown by a crucible descent method adopts a crucible to move in a heating furnace to separate out, so that an internal molten metal raw material forms single crystals, a supporting structure such as a lifting driving structure is required to carry out movement execution of the crucible so as to ensure stable advancing of a large-quality crucible, the structure operation is complex, the service life of an executing structure is reduced due to the influence of high temperature, the crucible movement mode is easy to introduce external environment control due to negative pressure in the heating furnace, the risk of leakage of internal heating tail gas exists, the physical health of staff is damaged, the entering of external low-temperature air flow influences the surface temperature of the crucible, the top surface of the crucible is also cooled and cooled, the generation of metal single crystals is influenced, and more defects exist.
In view of the above, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a device for producing a metal single crystal, which solves the problems and improves the practical value by the above technique.
Disclosure of Invention
The present invention aims to solve one of the technical problems existing in the prior art or related technologies.
The technical scheme adopted by the invention is as follows: a metal single crystal production apparatus comprising: the device comprises a main machine seat, an exhaust gas recovery assembly and a single crystal furnace assembly, wherein a lifting rail frame is fixedly arranged at the top end of the main machine seat, a motion seat is fixedly connected to the output end of the lifting rail frame, the exhaust gas recovery assembly comprises an exhaust gas guide box, a driving box, a climbing frame and a smoke closing valve fixedly arranged on the bottom surface of a furnace body, the driving box is fixedly arranged on the top surface of the exhaust gas guide box and is sleeved on the outer side of the climbing frame in a sliding manner, an outer rotor motor is fixedly arranged on the inner side of the driving box, a thread sleeve seat is fixedly sleeved on the outer side of the outer rotor motor, and screw teeth matched with the thread sleeve seat are arranged on the surface of the climbing frame;
the single crystal furnace assembly comprises a furnace body, a crucible, a plugging valve head and a heating sleeve group positioned on the inner side of the furnace body, wherein a vacuum heat insulation layer and a heat insulation tile are arranged on the inner side of the furnace body, the plugging valve head is fixedly installed at the bottom end of a climbing frame, a plurality of lock bolts are arranged on the bottom surface of the plugging valve head, the crucible is sleeved on the inner side of the heating sleeve group, and the end part of the heating sleeve group is electrically connected with a vortex generator.
The present invention may be further configured in a preferred example to: the lifting rail frame is of a screw rod guide rail structure and is arranged in the vertical direction, and the moving seat is slidably mounted on the surface of the lifting rail frame, one end of the moving seat is fixedly connected with the output end of the lifting rail frame and used for executing lifting movement of the climbing frame.
The present invention may be further configured in a preferred example to: the surface of the main machine seat is provided with a heat insulation seat for supporting a crucible, and the crucible is arranged on the surface of the heat insulation seat and positioned on the inner side of the furnace body.
The present invention may be further configured in a preferred example to: the vacuum heat insulation layer is of a multi-layer structure and is internally provided with a vacuum cavity, the heat insulation tiles are of arc-shaped cube rotating block structures and are mutually spliced and combined to form a columnar sleeve, and the heating sleeve group is embedded into the surface of the heat insulation tiles.
The present invention may be further configured in a preferred example to: the heating sleeve is in a spiral ring shape and sleeved on the periphery of the crucible, and a space is arranged between the inner side of the heating sleeve and the periphery of the crucible.
The present invention may be further configured in a preferred example to: the surface of shutoff valve head is equipped with the commentaries on classics handle that is used for deflecting the motion of drive spring bolt, the top surface of furnace body be equipped with the smoke guide hole of shutoff valve head looks adaptation and the smoke guide hole is laminated with the bottom surface of closing the cigarette valve mutually, the inboard of furnace body is equipped with the catching groove with spring bolt looks adaptation.
The present invention may be further configured in a preferred example to: the inside of the exhaust gas guide box is of a cavity structure, the surface of the exhaust gas guide box is provided with a smoke exhaust hole, and the end part of the smoke exhaust hole is communicated with tail gas treatment equipment.
The present invention may be further configured in a preferred example to: the smoke-closing valve comprises a movable flange ring, a static flange ring and six valve sheets, wherein sliding guide bars and guide pins are respectively arranged on the upper surface and the lower surface of each valve sheet, a regular hexagon chute is formed in the bottom surface of the movable flange ring, the sliding guide bars are in sliding sleeve connection with the chute, six guide grooves which are tangentially arranged along the inner ring of the movable flange ring are formed in the surface of the movable flange ring, the guide pins on the bottom surface of each valve sheet are in sliding sleeve connection with the guide grooves, a hand rotating handle is arranged on the periphery of the movable flange ring, and the static flange ring is fixed on the bottom surface of the waste gas guide box.
The beneficial effects obtained by the invention are as follows:
1. according to the invention, the furnace body lifting type movement structure is adopted, the joint of the lifting frame and the furnace body is realized under the control of the plugging valve head, the furnace body is driven to lift by the lifting movement of the waste gas guide box, the bottom of the crucible is exposed to the outdoor environment, the temperature of internal materials is reduced gradually below the melting point and starts to crystallize, crystals continuously grow along with the lifting of the furnace body, and the waste gas guide box and the furnace body stably lift in the tail gas emission work to avoid the interference of external environment air flow.
2. According to the invention, the independent exhaust guide box structure is arranged, the exhaust guide box and the inside of the furnace body are communicated and controlled by the smoke closing valve to guide the tail gas, the sealing effect of the top end of the furnace body is maintained in crystal growth, the continuous absorption of heating tail gas caused by uneven temperature of the top end of the crucible due to the low temperature of the outside is avoided, and leakage is avoided.
3. In the invention, the top of the furnace body is closed and opened by an independent smoke-closing valve, and the furnace body is closed or opened in the heating, heat-preserving and heat-preserving stage or the single crystal growth stage, and the tail gas emission treatment and heat-preserving are carried out.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
FIG. 2 is a schematic view showing an internal structure of an exhaust guide box according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of a single crystal furnace assembly according to one embodiment of the present invention;
FIG. 4 is a schematic view of a climbing frame according to an embodiment of the present invention;
FIG. 5 is a schematic view of the crucible, shutoff valve head and heating jacket assembly of one embodiment of the invention;
FIG. 6 is a schematic diagram of an exploded construction of a smoke shut-off valve according to one embodiment of the present invention;
fig. 7 is a schematic view of a bottom surface structure of a smoke shut-off valve according to an embodiment of the present invention.
Reference numerals:
100. a main machine base; 110. lifting the rail frame; 120. a motion seat;
200. an exhaust gas recovery assembly; 210. an exhaust gas guide box; 220. a drive box; 230. a climbing frame; 240. closing a smoke valve; 221. an outer rotor motor; 222. a threaded sleeve seat; 231. screw teeth; 241. a movable flange ring; 242. a stationary flange ring; 243. a valve plate; 244. a sliding guide bar; 245. a guide pin;
300. a single crystal furnace assembly; 310. a furnace body; 320. a crucible; 330. plugging the valve head; 340. a heating jacket; 311. a vacuum heat insulating layer; 312. a heat insulating tile; 331. and a lock tongue.
Detailed Description
The objects, technical solutions and advantages of the present invention will become more apparent by the following detailed description of the present invention with reference to the accompanying drawings. It should be noted that, without conflict, the embodiments of the present invention and features in the embodiments may be combined with each other.
A metal single crystal production apparatus according to some embodiments of the present invention is described below with reference to the accompanying drawings.
Referring to FIGS. 1 to 7, the present invention provides a metal single crystal production apparatus comprising: the device comprises a main machine base 100, an exhaust gas recovery assembly 200 and a single crystal furnace assembly 300, wherein a lifting rail frame 110 is fixedly arranged at the top end of the main machine base 100, a motion seat 120 is fixedly connected to the output end of the lifting rail frame 110, the exhaust gas recovery assembly 200 comprises an exhaust gas guide box 210, a driving box 220, a climbing frame 230 and a smoke-closing valve 240 fixedly arranged on the bottom surface of a furnace body 310, the driving box 220 is fixedly arranged on the top surface of the exhaust gas guide box 210 and is in sliding sleeve joint with the outer side of the climbing frame 230, an outer rotor motor 221 is fixedly arranged on the inner side of the driving box 220, a thread sleeve seat 222 is fixedly sleeved on the outer side of the outer rotor motor 221, and threads 231 matched with the thread sleeve seat 222 are arranged on the surface of the climbing frame 230;
the single crystal furnace assembly 300 comprises a furnace body 310, a crucible 320, a plugging valve head 330 and a heating sleeve group 340 positioned on the inner side of the furnace body 310, a vacuum heat insulation layer 311 and a heat insulation tile 312 are arranged on the inner side of the furnace body 310, the plugging valve head 330 is fixedly installed at the bottom end of the climbing frame 230, a plurality of lock bolts 331 are arranged on the bottom surface of the plugging valve head 330, the crucible 320 is sleeved on the inner side of the heating sleeve group 340, and the end part of the heating sleeve group 340 is electrically connected with a vortex generator.
In this embodiment, the lifting rail frame 110 is a screw guide rail structure and is arranged in a vertical direction, and the motion seat 120 is slidably mounted on the surface of the lifting rail frame 110, and one end of the motion seat is fixedly connected to the output end of the lifting rail frame 110, so as to perform the lifting motion of the climbing frame 230.
In this embodiment, the surface of the main frame 100 is provided with a heat insulating seat for supporting the crucible 320, and the crucible 320 is placed on the surface of the heat insulating seat and inside the furnace body 310.
Specifically, the structure of the stationary crucible 320 is adopted to cooperate with the relative lifting motion of the furnace body 310 to realize the generation of metal single crystals in the crucible 320, so that the high-temperature damage of the downlink motion executing mechanism caused by the high temperature of the crucible is effectively avoided.
In this embodiment, the vacuum insulation layer 311 is a multi-layer structure and is internally provided with a vacuum cavity, the insulation tiles 312 are arc-shaped cube-shaped rotating block structures and are mutually spliced and combined to form a columnar sleeve, and the heating jacket group 340 is embedded in the surface of the insulation tiles 312.
Specifically, the vacuum heat insulation layer 311 and the heat insulation tiles 312 are used as heat insulation structures of the furnace body 310, so that heat is prevented from escaping, the energy utilization rate is improved, efficient heat insulation is realized, and the stability of the heating effect is maintained.
In this embodiment, the heating jacket 340 is spirally annular and is sleeved on the outer periphery of the crucible 320, and a space is provided between the inner side of the heating jacket 340 and the outer periphery of the crucible 320.
Further, the surface of the plugging valve head 330 is provided with a rotating handle for deflecting and driving the lock tongue 331 to move, the top surface of the furnace body 310 is provided with a smoke guide hole matched with the plugging valve head 330, the smoke guide hole is attached to the bottom surface of the closing valve 240, and the inner side of the furnace body 310 is provided with a buckling groove matched with the lock tongue 331.
Specifically, after the bolt 331 is rotated, the joint locking or unlocking work of the plugging valve head 330 and the top surface of the furnace body 310 is realized, and the connection and disconnection work of the climbing frame 230 and the furnace body 310 is realized.
In this embodiment, the inside of the exhaust guide case 210 is a hollow structure, and the surface of the exhaust guide case 210 is provided with a smoke exhaust hole, and the end of the smoke exhaust hole is communicated with an exhaust gas treatment device.
In this embodiment, the smoke-closing valve 240 includes a movable flange ring 241, a static flange ring 242 and six valve plates 243, the upper and lower surfaces of the valve plates 243 are respectively provided with a sliding guide strip 244 and a guide pin 245, the bottom surface of the movable flange ring 241 is provided with a regular hexagonal sliding groove, the sliding guide strip 244 is slidably sleeved in the sliding groove, the surface of the movable flange ring 241 is provided with six guide grooves tangentially arranged along the inner ring of the movable flange ring 241, the guide pin 245 on the bottom surface of the valve plate 243 is slidably sleeved in the guide groove, the periphery of the movable flange ring 241 is provided with a handle, and the static flange ring 242 is fixed on the bottom surface of the waste gas guide box 210.
Specifically, the iris is a switch valve structure, and the deflection of each valve plate 243 is realized under the manual rotation of the movable flange ring 241, so that the smoke discharging channel is opened and closed.
The working principle and the using flow of the invention are as follows:
during metal raw material adding, the flange ring 241 is manually rotated to enable each valve piece 243 to be rotationally opened, a channel between the punching waste gas guide box 210 and the furnace body 310 is opened, the lifting rail frame 110 and the moving seat 120 work to enable the climbing frame 230 to move downwards, meanwhile, the screw thread sleeve seat 222 is driven by the outer rotor motor 221 to rotate, the waste gas guide box 210 and the smoke closing valve 240 move upwards relative to the climbing frame 230 integrally, the sealing valve head 330 at the bottom end of the climbing frame 230 is connected with the top opening of the furnace body 310, the lock tongue 331 deflects and is buckled with the top opening of the furnace body 310, and connection between the furnace body 310 and the bottom end of the climbing frame 230 are realized; the lifting rail frame 110 and the moving seat 120 work to integrally lift the waste gas recovery assembly 200 and the furnace body 310, so that the crucible 320 is separated from the bottom end of the furnace body 310, the crucible 320 is exposed, after the crucible 320 is removed and metal raw materials are added into the crucible 320, the lifting rail frame 110 and the moving seat 120 drive the waste gas recovery assembly 200 and the furnace body 310 to move downwards, the furnace body 310 is sleeved on the Zhou Bingjie ground outside the crucible 320, the lifting rail frame 110 and the moving seat 120 work to drive the climbing frame 230 to lift after the lock tongue 331 is unlocked and separated from the top end of the furnace body 310, meanwhile, the outer rotor motor 221 drives the waste gas guide box 210 to move downwards along the surface of the climbing frame 230, so that the bottom end of the waste gas guide box 210 always keeps fit with the top surface of the furnace body 310, and the closing of the smoke closing valve 240 is manually executed to finish the preparation stage and the feeding work;
thereafter, the metal raw material is heated to be molten, the waste gas is heated, induction heating is performed under the vortex effect of the heating sleeve group 340 in the furnace body 310, and heat insulation and preservation are performed through the smoke closing valve 240, the vacuum heat insulation layer 311 and the heat insulation tiles 312 in the furnace body 310;
after heating and melting, metal single crystals are generated, the same steps are carried out, the smoke opening and closing valve 240 is opened, the ascending of the ascending frame 230 is carried out through the working of the ascending frame 110 and the moving seat 120, the bottom surface of the smoke closing valve 240 is kept attached to the top surface of the furnace body 310 through the working of the outer rotor motor 221, the bottom end of the ascending frame 230 is enabled to plug the valve head 330 to move relatively and be inserted into the furnace body 310 to be jointed internally, the locking of the furnace body 310 and the plug valve head 330 is achieved through deflection of the lock tongue 331, after the butt joint is completed, the sealing effect of the top of the furnace body 310 is kept, the external air flow is prevented from entering from above the furnace body 310, the raw materials inside the crucible 320 are prevented from being heated unevenly, the waste gas guide box 210, the smoke closing valve 240, the furnace body 310 and the ascending frame 230 are driven to move integrally through the ascending of the moving seat 120, the crucible 320 placed on the ground is lowered relative to the heating jacket 340 inside the furnace body 310, when the heating furnace is continuously ascended, the temperature of the internal materials of the crucible is gradually decreases below the melting point and the internal materials are started to crystallize, and the crystal continuously grows along with the ascent of the furnace body.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.

Claims (7)

1. A metal single crystal production apparatus, comprising: the device comprises a main machine seat (100), an exhaust gas recovery assembly (200) and a single crystal furnace assembly (300), wherein a lifting rail frame (110) is fixedly arranged at the top end of the main machine seat (100), a moving seat (120) is fixedly connected to the output end of the lifting rail frame (110), the exhaust gas recovery assembly (200) comprises an exhaust gas guide box (210), a driving box (220) and a climbing frame (230) and a smoke blocking valve (240) fixedly arranged on the bottom surface of the exhaust gas guide box (210), the driving box (220) is fixedly arranged on the top surface of the exhaust gas guide box (210) and is sleeved on the outer side of the climbing frame (230) in a sliding manner, an outer rotor motor (221) is fixedly arranged on the inner side of the driving box (220), a threaded sleeve seat (222) is fixedly sleeved on the outer side of the outer rotor motor (221), and screw teeth (231) matched with the threaded sleeve seat (222) are arranged on the surface of the climbing frame (230).
The single crystal furnace assembly (300) comprises a furnace body (310), a crucible (320), a plugging valve head (330) and a heating sleeve group (340) positioned at the inner side of the furnace body (310), wherein a vacuum heat insulation layer (311) and a heat insulation tile (312) are arranged at the inner side of the furnace body (310), the plugging valve head (330) is fixedly arranged at the bottom end of a climbing frame (230), a plurality of lock bolts (331) are arranged at the bottom surface of the plugging valve head (330), the crucible (320) is sleeved at the inner side of the heating sleeve group (340), and the end part of the heating sleeve group (340) is electrically connected with a vortex generator;
the surface of shutoff valve head (330) is equipped with the commentaries on classics handle that is used for deflecting the motion of drive spring bolt (331), the top surface of furnace body (310) be equipped with the smoke guide hole of shutoff valve head (330) looks adaptation and the bottom surface of smoke guide hole and close cigarette valve (240) laminating mutually, the inboard of furnace body (310) be equipped with the catching groove of spring bolt (331) looks adaptation.
2. The apparatus for preparing metal single crystals as set forth in claim 1, wherein the lifting rail frame (110) is a screw guide rail structure and is disposed in a vertical direction, and the moving seat (120) is slidably mounted on a surface of the lifting rail frame (110) and has one end fixedly connected to an output end of the lifting rail frame (110), for performing a lifting movement of the climbing frame (230).
3. The apparatus for producing a metal single crystal according to claim 1, wherein a heat insulating base for supporting the crucible (320) is provided on the surface of the main frame (100), and the crucible (320) is placed on the surface of the heat insulating base and inside the furnace body (310).
4. The metal single crystal preparation device according to claim 1, wherein the vacuum heat insulation layer (311) is of a multi-layer structure and is internally provided with a vacuum cavity, the heat insulation tiles (312) are of arc-shaped cube block rotating structures and are mutually spliced and combined to form a columnar sleeve, and the heating sleeve group (340) is embedded in the surface of the heat insulation tiles (312).
5. The apparatus for producing a metal single crystal according to claim 1, wherein the heating jacket (340) is spirally annular and is fitted around the outer periphery of the crucible (320), and a space is provided between the inner side of the heating jacket (340) and the outer periphery of the crucible (320).
6. The apparatus for preparing metal single crystals as set forth in claim 1, wherein the inside of said exhaust gas guide box (210) is a hollow structure, and the surface of said exhaust gas guide box (210) is provided with a smoke exhaust hole, and the end of said smoke exhaust hole is connected with an exhaust gas treatment device.
7. The metal single crystal preparation device according to claim 1, wherein the smoke-closing valve (240) comprises a movable flange ring (241), a static flange ring (242) and six valve pieces (243), sliding guide strips (244) and guide pins (245) are respectively arranged on the upper surface and the lower surface of the valve pieces (243), a regular hexagon chute is formed in the bottom surface of the movable flange ring (241) and the sliding guide strips (244) are in sliding sleeve connection with the chute, six guide grooves tangentially arranged along the inner ring of the movable flange ring (241) are formed in the surface of the movable flange ring (241), the guide pins (245) on the bottom surface of the valve pieces (243) are in sliding sleeve connection with the guide grooves, a hand rotating handle is arranged on the periphery of the movable flange ring (241), and the static flange ring (242) is fixed on the bottom surface of the waste gas guide box (210).
CN202311518678.4A 2023-11-15 2023-11-15 Metal single crystal preparation device Active CN117230522B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311518678.4A CN117230522B (en) 2023-11-15 2023-11-15 Metal single crystal preparation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311518678.4A CN117230522B (en) 2023-11-15 2023-11-15 Metal single crystal preparation device

Publications (2)

Publication Number Publication Date
CN117230522A CN117230522A (en) 2023-12-15
CN117230522B true CN117230522B (en) 2024-01-26

Family

ID=89086579

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311518678.4A Active CN117230522B (en) 2023-11-15 2023-11-15 Metal single crystal preparation device

Country Status (1)

Country Link
CN (1) CN117230522B (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006016242A (en) * 2004-07-01 2006-01-19 Nikon Corp Manufacturing method of fluoride crystal, optical part and exposure unit
CN103526300A (en) * 2013-09-29 2014-01-22 青岛赛瑞达电子装备股份有限公司 Multifunctional crystal growing furnace
CN106222733A (en) * 2016-10-12 2016-12-14 安徽贝意克设备技术有限公司 A kind of crucible lifting method single-crystal metal growth furnace
WO2017166001A1 (en) * 2016-03-28 2017-10-05 中国科学院福建物质结构研究所 Ba3p3o10cl single crystal growth method and crystal growth device
CN110484968A (en) * 2019-09-30 2019-11-22 山西中科晶电信息材料有限公司 A kind of crystal growing furnace being provided with furnace body elevating mechanism
CN210134179U (en) * 2019-03-12 2020-03-10 赛维Ldk太阳能高科技(新余)有限公司 Single crystal ingot furnace
CN212103059U (en) * 2020-05-19 2020-12-08 西安奕斯伟硅片技术有限公司 Crystal pulling furnace
CN213232448U (en) * 2020-09-18 2021-05-18 江苏鑫瑞崚新材料科技有限公司 Smelting furnace with waste heat recovery function for copper purification
CN213433750U (en) * 2020-09-18 2021-06-15 江苏鑫瑞崚新材料科技有限公司 Heat treatment device with waste gas treatment function

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110846712B (en) * 2019-09-10 2023-11-10 浙江大学 Supergravity directional solidification casting furnace device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006016242A (en) * 2004-07-01 2006-01-19 Nikon Corp Manufacturing method of fluoride crystal, optical part and exposure unit
CN103526300A (en) * 2013-09-29 2014-01-22 青岛赛瑞达电子装备股份有限公司 Multifunctional crystal growing furnace
WO2017166001A1 (en) * 2016-03-28 2017-10-05 中国科学院福建物质结构研究所 Ba3p3o10cl single crystal growth method and crystal growth device
CN106222733A (en) * 2016-10-12 2016-12-14 安徽贝意克设备技术有限公司 A kind of crucible lifting method single-crystal metal growth furnace
CN210134179U (en) * 2019-03-12 2020-03-10 赛维Ldk太阳能高科技(新余)有限公司 Single crystal ingot furnace
CN110484968A (en) * 2019-09-30 2019-11-22 山西中科晶电信息材料有限公司 A kind of crystal growing furnace being provided with furnace body elevating mechanism
CN212103059U (en) * 2020-05-19 2020-12-08 西安奕斯伟硅片技术有限公司 Crystal pulling furnace
CN213232448U (en) * 2020-09-18 2021-05-18 江苏鑫瑞崚新材料科技有限公司 Smelting furnace with waste heat recovery function for copper purification
CN213433750U (en) * 2020-09-18 2021-06-15 江苏鑫瑞崚新材料科技有限公司 Heat treatment device with waste gas treatment function

Also Published As

Publication number Publication date
CN117230522A (en) 2023-12-15

Similar Documents

Publication Publication Date Title
WO2021088314A1 (en) Edge-defined film-fed growth-based sapphire crystal growth furnace capable of multiple replacement of seed crystals
CN112795980B (en) Temperature field regulation and control device and temperature field dynamic regulation and control method for artificial crystal growth
CN113106548B (en) PZN-based large-size ternary high-performance single crystal, growth method and molten salt furnace
CN109553293A (en) A kind of preform prick-drawing device and corresponding drawing cone method
CN102732947B (en) Ingot thermal field for growing pure quasi-monocrystalline
CN117230522B (en) Metal single crystal preparation device
EP3760767A1 (en) Ingot furnace for directional solidification growth of crystalline silicon and application
CN114059162B (en) Gallium oxide crystal growth device and crystal growth method
CN215404647U (en) Single crystal furnace feeding device
JPS60119496A (en) Fuel exchanger for nuclear reactor facility
CN207176024U (en) A kind of new and effective heat-treatment furnace
CN116219533A (en) Continuous feeding method for producing monocrystalline silicon by Czochralski method and monocrystalline furnace
CN215713513U (en) Heating body in Bridgman method
CN108193263A (en) A kind of monocrystalline produces stove
CN210237841U (en) Ingot furnace of movable heater
CN117187953B (en) Preparation method of monocrystalline silicon
WO2022052080A1 (en) Edge-defined film-fed growth method-based sapphire crystal growth furnace capable of replacing seed crystals for multiple times
CN214830779U (en) Temperature field regulating and controlling device for artificial crystal growth
CN117552109A (en) Silicon carbide crystal growth furnace with power-off protection function
CN102094232B (en) Polycrystal furnace thermal field with rapid cooling and using method thereof
CN217399040U (en) Crystal support mechanism for single crystal furnace
CN116145232A (en) Single crystal furnace and control method thereof
CN219326866U (en) Suspension pulling growth furnace capable of producing metal single crystal
CN214572348U (en) Crystal pulling tank
CN211734527U (en) Novel double-auxiliary-chamber single crystal furnace

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant