CN219326866U

CN219326866U - Suspension pulling growth furnace capable of producing metal single crystal

Info

Publication number: CN219326866U
Application number: CN202222322383.7U
Authority: CN
Inventors: 邾根祥; 朱沫浥; 方辉; 翁继先; 刘盼盼
Original assignee: Hefei Kejing Materials Technology Co ltd
Current assignee: Hefei Kejing Materials Technology Co ltd
Priority date: 2022-09-01
Filing date: 2022-09-01
Publication date: 2023-07-11
Anticipated expiration: 2032-09-01

Abstract

The utility model relates to the technical field of crystal growth furnaces, and provides a suspension pulling growth furnace capable of producing metal single crystals, which aims to solve the problems that the existing crystal growth furnace is difficult to control the pulling speed when pulling crystals, the pulling effect of the crystals is poor, and meanwhile, the grown crystals are inconvenient to observe. The utility model is especially suitable for metal single crystal growth, and has higher social use value and application prospect.

Description

Suspension pulling growth furnace capable of producing metal single crystal

Technical Field

The utility model relates to the technical field of crystal growth furnaces, in particular to a suspension pulling growth furnace capable of producing metal single crystals.

Background

The crystal pulling method is also called Czochralski method, which is one of the most dominant methods for growing single crystals from a melt, and is suitable for mass production of large-sized perfect crystals. The heated pulling furnace contains molten material, the seed rod is inserted into the melt from top to bottom with seed crystal, and the melt near the solid-liquid interface maintains certain supercooling degree, and the melt crystallizes along the seed crystal and grows into rod-like monocrystal with the gradual rise of the seed crystal.

At present, the crystal growth furnace is widely applied to research institutions and experiments, most of the crystal growth furnaces in the prior art are used for pulling and growing various oxide single crystals and metal single crystals in laboratories, but the furnace for unilateral metal single crystal growth is not yet related in China, the pulling speed is not easy to control when the crystal is pulled, the pulling effect of the crystal is poor, the growth effect of the crystal cannot be effectively ensured, and meanwhile, the grown crystal is inconvenient to observe.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a suspension pulling growth furnace capable of producing metal single crystals, which overcomes the defects of the prior art, has reasonable design and compact structure, and aims to solve the problems that the existing crystal growth furnace is difficult to control the pulling speed when pulling crystals, has poor pulling effect of the crystals and is inconvenient to observe the grown crystals.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme:

the utility model provides a can produce suspension lift growth furnace of metal single crystal, includes water-cooled copper crucible, the cold vacuum chamber of stainless steel, response radio frequency power, control box, water-cooling machine, evacuating machine, lifting mechanism and crucible elevating system, the cold vacuum chamber of stainless steel lower extreme fixedly connected with frame, and the cold vacuum chamber of stainless steel adopts the double-deck water-cooled cavity of stainless steel, guarantees that the during operation of equipment shows that temperature is less than or equal to 40 ℃, has observation window, four-core Tao Feng motor, vacuum pressure gauge and evacuation hole on the cavity of cold vacuum chamber of stainless steel, and the evacuation hole is linked together with evacuating machine, water-cooled copper crucible sliding connection is in cold vacuum chamber inner chamber lower part of stainless steel, and water-cooled copper crucible lower extreme is connected with crucible elevating system, and sealing connection between cold vacuum chamber of stainless steel passes through the pipeline and evacuating machine through the vacuum-pumping machine, evacuating machine is fixed mounting in the frame through the support, response radio frequency power, water-cooling machine and evacuating machine are controlled through the control box through the control, the annular inner wall upper end of cold vacuum chamber of stainless steel is equipped with and is used for installing the sliding hole on the cold vacuum chamber of stainless steel, and the sliding connection has the sliding connection on the side of vacuum chamber of vacuum;

the lifting mechanism comprises a sliding rail which is vertically and fixedly arranged at the upper end of the stainless steel water cooling vacuum chamber, a sliding block is connected to the sliding rail in a sliding way, the sliding block horizontally extends outwards and is horizontally and fixedly connected with a linkage plate, a threaded hole is vertically formed in the linkage plate in a penetrating way, a stud is connected to the threaded hole in a threaded way, the stud extends downwards and is rotationally connected to the top wall of the stainless steel water cooling vacuum chamber through a rotating seat, the stud extends upwards and is coaxially and fixedly connected to the output end of a servo motor, the servo motor is vertically and fixedly arranged at the upper end of the sliding rail through a motor bracket, a mounting sleeve is fixedly connected to the side wall of one side, far away from the sliding block, of the linkage plate, a mounting hole matched with the lifting rod is vertically formed in a penetrating way at the upper position of the mounting sleeve corresponding to the sealing sleeve, and a fixing sleeve is connected to the upper end of the mounting hole in a penetrating way.

Preferably, a reinforcing rib is connected between the top wall of the stainless steel water cooling vacuum chamber and the sliding rail.

Preferably, a plurality of reinforcing ribs are fixedly connected between the linkage plate and the mounting sleeve.

Preferably, a plurality of fixed holes are formed in the annular side wall of the fixed sleeve in a penetrating manner, bolts are connected in the fixed holes in a threaded manner, the bolts extend to the similar side and are fixedly connected with fixed blocks, and a plurality of bolts extend to the opposite side and are sleeved with locking nuts in a threaded manner.

More preferably, the similar sides of the fixing blocks are all provided with anti-slip cushions.

Preferably, the crucible lifting mechanism adopts a dynamic sealing system, and the distance between the crucible and the induction coil is adjusted by manually fine-adjusting the upper and lower positions of the crucible.

(III) beneficial effects

The embodiment of the utility model provides a suspension pulling growth furnace capable of producing metal single crystals, which has the following beneficial effects:

1. according to the utility model, water cooling is ensured in the sample smelting process through the water-cooling copper crucible, the temperature of metal crystal growth is ensured, and the durability and safety of the crucible are ensured. Compared with the existing ceramic crucible, graphite crucible or iridium crucible at home and abroad, the novel ceramic crucible has the advantages that a water cooling structure is added, and the novel ceramic crucible is not provided with the structure in the past.

2. According to the utility model, the crucible up-and-down moving mechanism is adopted to manually lift the screw rod, so that the position of the crucible can be moved, and the proper smelting height and observation angle are ensured.

3. Compared with the prior crystal growth furnace, the crystal growth furnace has the advantages of small structure, light weight and accurate control of functions in all aspects, is particularly suitable for researching metal crystals by using a research institute and various universities, adopts modularization of all control parts, can be freely selected, and provides greater possibility for researching metal single crystal growth.

4. According to the utility model, the servo motor is matched with the stud to drive the linkage plate to slide up and down, and the installation sleeve is matched with the linkage plate to drive the lifting rod to move upwards slowly and pull the metal single crystal at the same time, after the metal single crystal grows, the crystal is quickly lifted and fallen melt by the lifting mechanism, so that the growth effect of the crystal is ensured.

Drawings

The above-mentioned features, technical features, advantages and implementation of a suspension pulling furnace for producing metal single crystals will be further described in a clear and easily understood manner by referring to the accompanying drawings.

FIG. 1 is a schematic view of the present utility model;

FIG. 2 is a schematic view of a pulling mechanism according to the present utility model;

FIG. 3 is a schematic view of a water-cooled copper crucible of the present utility model;

fig. 4 is a schematic top view of the pulling mechanism of the present utility model.

In the figure: the vacuum furnace comprises a water-cooled copper crucible 1, a stainless steel water-cooled vacuum chamber 2, a sliding hole 21, a sealing sleeve 22, an induction radio frequency power supply 3, a control box 4, a water cooler 5, a vacuum extractor 6, a lifting mechanism 7, a sliding rail 71, a reinforcing rib 72, a sliding block 73, a linkage plate 74, a threaded hole 75, a stud 76, a servo motor 77, a mounting sleeve 78, a fixing sleeve 79, a fixing hole 710, a fixing block 711, a bolt 712, a locking nut 713 and a crucible lifting mechanism 8.

Detailed Description

The utility model is further illustrated by the following examples in connection with figures 1-4:

a suspension pulling growth furnace capable of producing metal single crystals comprises a water-cooled copper crucible 1, a stainless steel water-cooled vacuum chamber 2, an induction radio frequency power supply 3, a control box 4, a water-cooled machine 5, a vacuumizing machine 6, a pulling mechanism 7 and a crucible lifting mechanism 8, wherein the water-cooled copper crucible 1 consists of 16 water-cooled copper flaps, the maximum melting sample quantity is 60g, good coupling and good magnetic suspension can be realized, the metal single crystals can be grown in a stable suspension state, the lower end of the stainless steel water-cooled vacuum chamber 2 is fixedly connected with a frame, the stainless steel water-cooled vacuum chamber 2 adopts a 304 stainless steel double-layer water-cooled cavity, the temperature indicated by the equipment is ensured to be less than or equal to 40 ℃ when in operation, an observation window, a four-core Tao Feng motor, a vacuum pressure gauge and a vacuumizing hole are arranged on the cavity of the stainless steel water-cooled vacuum chamber 2, the vacuumizing hole is communicated with the vacuumizing machine 6, the water-cooled copper crucible 1 is slidingly connected to the lower part of the inner cavity of the stainless steel water cooling vacuum chamber 2, the lower end of the water-cooled copper crucible 1 is connected with the crucible lifting mechanism 8, the crucible lifting mechanism 8 is in sealing connection with the stainless steel water cooling vacuum chamber 2, the stainless steel water cooling vacuum chamber 2 is in through connection with the vacuum extractor 6 through a pipeline, the vacuum extractor 6 is fixedly arranged on a frame through a bracket, the vacuum extractor 6 adopts a molecular pump system, the vacuum extractor 6 performs vacuum extraction on the stainless steel water cooling vacuum chamber 2 to meet the experiment requirement, the induction radio frequency power supply 3, the water cooling machine 5 and the vacuum extractor 6 are controlled through the control box 4, the upper end of the annular inner wall of the stainless steel water cooling vacuum chamber 2 is provided with a sliding hole 21 for installing a lifting rod in through connection, the upper end of the sliding hole 21 is provided with a sealing sleeve 22 matched with the lifting rod in size, a lifting mechanism 7 is arranged above the stainless steel water cooling vacuum chamber 2;

the lifting mechanism 7 comprises a sliding rail 71 vertically and fixedly installed at the upper end of the stainless steel water cooling vacuum chamber 2, a sliding block 73 is fixedly connected to the sliding rail 71, the sliding block 73 horizontally extends outwards and is horizontally and fixedly connected with a linkage plate 74, a threaded hole 75 is vertically formed in the linkage plate 74 in a penetrating mode, a stud 76 is connected to the threaded hole 75 in a threaded mode, the stud 76 extends downwards and is rotationally connected to the top wall of the stainless steel water cooling vacuum chamber 2 through a rotating seat, the stud 76 extends upwards and is coaxially and fixedly connected to the output end of a servo motor 77, the servo motor 77 is vertically and fixedly installed at the upper end of the sliding rail 71 through a motor bracket, a mounting sleeve 78 is fixedly connected to the side wall of the linkage plate 74, which is far away from one side of the sliding block 73, a mounting hole matched with a lifting rod is vertically formed in a penetrating mode, the upper end of the mounting sleeve 78 is correspondingly provided with a fixing sleeve 79, the stainless steel water cooling vacuum chamber 2 is firstly pulled to an experiment requirement value through the vacuum extractor 6, the extractor 6 is closed, the water cooler 5 and the induction radio frequency power supply 3 are opened, the induction radio frequency power supply 3 is controlled through the control box 4, the control current is large and is fixedly connected to the output end of the servo motor 77 through the motor, the metal melt is actually pulled down through the metal melt, the metal melt is slowly and is slowly pulled down through the metal melt, and the metal melt is slowly and is matched with the lifting sleeve 78, and the metal melt, the effect is slowly pulled down, and the metal melt is slowly and the growth mechanism is slowly and the growth on the metal melt through the lifting mechanism.

In this embodiment, as shown in fig. 2-4, a reinforcing rib 72 is connected between the top wall of the stainless steel water cooling vacuum chamber 2 and the sliding rail 71, so as to improve the stability of the sliding rail 71.

In this embodiment, as shown in fig. 2-4, a plurality of reinforcing ribs are fixedly connected between the linkage plate 74 and the mounting sleeve 78, so that the stability of the mounting sleeve 78 is improved, and the lifting effect of the lifting rod is ensured.

In this embodiment, as shown in fig. 3 and 4, a plurality of fixing holes 710 are formed in the annular side wall of the fixing sleeve 79 in a penetrating manner, bolts 712 are connected in the fixing holes 710 in a threaded manner, the bolts 712 extend to a similar side and are fixedly connected with fixing blocks 711, and a plurality of bolts 712 extend to a side away from each other and are sleeved with locking nuts 713 in a threaded manner, so that the fixing of the lifting rods is facilitated, and the adaptation effect of the lifting rods to different crystals is improved.

In this embodiment, as shown in fig. 4, the adjacent sides of the fixing blocks 711 are all provided with anti-slip soft pads, so as to improve the fixing effect of the lifting rod and ensure the stability of the lifting crystal of the lifting rod.

In this embodiment, as shown in fig. 1 and 2, the crucible lifting mechanism 8 adopts a dynamic sealing system, and the distance between the crucible and the induction coil is adjusted by manually fine-adjusting the upper and lower positions of the crucible, so as to ensure a proper magnetic field and observation angle during smelting.

According to the suspension pulling growth furnace capable of producing metal single crystals, according to the embodiment of the utility model, the vacuum degree of the stainless steel water cooling vacuum chamber 2 is firstly pumped to the experimental required value through the vacuum extractor 6, the vacuum extractor 6 is closed, the water cooler 5 and the induction radio frequency power supply 3 are turned on, the induction radio frequency power supply 3 is controlled through the control box 4, the current is controlled, the current is adjusted according to the actual situation, and metal materials are completely melted, a pulling rod arranged on the pulling mechanism 7 on the fixed sleeve 79 is lowered onto the liquid surface, then the linkage plate 74 is driven to slide up and down through the servo motor 77 in cooperation with the stud, the pulling rod is driven to move upwards slowly in cooperation with the installation sleeve 78, meanwhile, the metal single crystals are pulled out through the pulling mechanism, and after the metal single crystals are grown, the crystal is pulled out of the melt rapidly, and the growth effect of the crystals is guaranteed.

The embodiments of the present utility model are disclosed as preferred embodiments, but not limited thereto, and those skilled in the art will readily appreciate from the foregoing description that various extensions and modifications can be made without departing from the spirit of the present utility model.

Claims

1. The utility model provides a suspension pull growth furnace capable of producing metal single crystal, includes water-cooled copper crucible (1), cold vacuum chamber of stainless steel (2), induction radio frequency power (3), control box (4), water-cooled machine (5), evacuating machine (6), pull mechanism (7) and crucible elevating system (8), characterized by, cold vacuum chamber of stainless steel (2) lower extreme fixedly connected with frame, just cold vacuum chamber of stainless steel (2) adopts (304) stainless steel double-deck water-cooled cavity, guarantees that the surface temperature is less than or equal to 40 ℃ when equipment work, has observation window, four-core Tao Feng motor, vacuum pressure gauge and evacuation hole on the cavity of cold vacuum chamber of stainless steel (2), and evacuation hole is linked together with evacuating machine (6), cold vacuum chamber of water-cooled copper (1) sliding connection is in cold vacuum chamber of stainless steel (2) inner chamber lower part, and cold vacuum chamber of stainless steel (2) are sealed between elevating system (8) and the cold vacuum chamber of stainless steel (2), cold vacuum chamber of stainless steel (2) is through (6) vacuum pump (6) and vacuum pump (6) are fixed through vacuum pump (6) and vacuum pump (6) on control box (6), the upper end of the annular inner wall of the stainless steel water cooling vacuum chamber (2) is provided with a sliding hole (21) for installing a lifting rod in a penetrating way, the upper end of the sliding hole (21) is provided with a sealing sleeve (22) matched with the lifting rod in size in a penetrating way, and a lifting mechanism (7) is arranged above the stainless steel water cooling vacuum chamber (2);

the lifting mechanism (7) comprises a sliding rail (71) which is vertically and fixedly arranged at the upper end of the stainless steel water cooling vacuum chamber (2), a sliding block (73) is connected to the sliding rail (71) in a sliding mode, the sliding block (73) horizontally extends outwards and is horizontally and fixedly connected with a linkage plate (74), a threaded hole (75) is vertically formed in the linkage plate (74) in a penetrating mode, a stud (76) is connected to the top wall of the stainless steel water cooling vacuum chamber (2) in a threaded mode through a rotating seat in a threaded mode, the stud (76) extends downwards and is connected to the top wall of the stainless steel water cooling vacuum chamber (2) in a rotating mode, the stud (76) extends upwards and is fixedly connected to the output end of the servo motor (77) in a coaxial mode, the servo motor (77) is fixedly arranged at the upper end of the sliding rail (71) through a motor support, a mounting sleeve (78) is fixedly connected to the side wall of one side, which is far away from the sliding block (73), a mounting hole matched with the lifting rod is vertically formed in a penetrating mode in the upper position of the mounting sleeve (78), and the mounting hole is correspondingly arranged in a position of the sealing sleeve (22).

2. A suspension pull-up furnace for producing metal single crystals as set forth in claim 1, wherein: a reinforcing rib (72) is connected between the top wall of the stainless steel water cooling vacuum chamber (2) and the sliding rail (71).

3. A suspension pull-up furnace for producing metal single crystals as set forth in claim 1, wherein: a plurality of reinforcing ribs are fixedly connected between the linkage plate (74) and the mounting sleeve (78).

4. A suspension pull-up furnace for producing metal single crystals as set forth in claim 1, wherein: a plurality of fixing holes (710) are formed in the annular side wall of the fixing sleeve (79) in a penetrating mode, bolts (712) are connected in the fixing holes (710) in a threaded mode, the bolts (712) extend to the similar side and are fixedly connected with fixing blocks (711), and locking nuts (713) are arranged on the plurality of bolts (712) in a threaded mode in a extending mode to the opposite side.

5. A suspension pulling furnace for producing a metal single crystal as defined in claim 4, wherein: and the similar sides of the fixing blocks (711) are respectively provided with an anti-slip soft cushion.

6. A suspension pull-up furnace for producing metal single crystals as set forth in claim 1, wherein: the crucible lifting mechanism (8) adopts a dynamic sealing system, and the distance between the crucible and the induction coil is adjusted by manually fine-adjusting the upper and lower positions of the crucible.