CN218711030U - Growth furnace for processing single crystal - Google Patents

Growth furnace for processing single crystal Download PDF

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Publication number
CN218711030U
CN218711030U CN202222956969.9U CN202222956969U CN218711030U CN 218711030 U CN218711030 U CN 218711030U CN 202222956969 U CN202222956969 U CN 202222956969U CN 218711030 U CN218711030 U CN 218711030U
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Prior art keywords
single crystal
growth furnace
motor
crucible
block
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CN202222956969.9U
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Chinese (zh)
Inventor
肖若愚
李谦
宋克鑫
郭海生
陈彦
沈亦寒
王伟
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Jiangsu Lanjing New Material Co ltd
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Jiangsu Lanjing New Material Co ltd
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Abstract

The utility model discloses a growth furnace for processing single crystal, which comprises a growth furnace body, wherein a bracket is fixed on the lower surface of the growth furnace body, a processing opening is arranged on the growth furnace body, a transmission case is arranged on the lower surface of the growth furnace body, the inner side of the transmission case is connected with a movable edge block through a transmission structure, and a crucible for single crystal growth is arranged at the top end of the edge block; the transmission structure comprises a rotating shaft, a first motor, a transmission screw, a rotating block and a second motor; through being provided with axis of rotation, first motor, driving screw, turning block and second motor, avoid making single crystal growth through the czochralski method, be not convenient for control the rotation or the lift of crucible respectively, device simple structure can rotate alone and make the inboard material distribution of crucible even, also can carry out the lift operation to the crucible when the crucible is rotatory simultaneously, perhaps makes the crucible carry out solitary lift.

Description

Growth furnace for processing single crystal
Technical Field
The utility model relates to a growth furnace for processing single crystal.
Background
The term "single crystal" means that fine particles in a crystal are regularly and periodically arranged in a three-dimensional space, or the entire crystal is formed of the same spatial lattice in the three-dimensional direction, and the arrangement of particles in the whole crystal in the space is long-range order. During single crystal processing, firstly, putting a high-purity polycrystalline raw material into a high-purity quartz crucible, and melting the high-purity polycrystalline raw material through high temperature generated by a graphite heater; then, the molten liquid is cooled slightly to generate a certain supercooling degree, a single crystal (called as seed crystal) fixed on a seed crystal shaft is inserted into the surface of the melt, after the seed crystal is melted with the melt, the seed crystal is slowly pulled upwards, the crystal can grow at the lower end of the seed crystal, and the dislocation-free single crystal is grown through a Czochralski method.
When the existing single crystal growth furnace is used, a crucible can rotate and lift at the same time, the crucible cannot be well controlled to lift or rotate independently, so that the crucible cannot be well heated uniformly through rotation, melted materials are uniformly distributed in the crucible, and then the crucible is rotated and lifted, the operation effect is poor, and therefore the single crystal growth furnace for processing single crystals is provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a growth furnace for processing single crystal to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a growth furnace for processing single crystals comprises a growth furnace body, wherein a support is fixed on the lower surface of the growth furnace body, a processing opening is formed in the growth furnace body, a transmission case is arranged on the lower surface of the growth furnace body, the inner side of the transmission case is connected with a movable edge block through a transmission structure, and a crucible for growing the single crystals is arranged at the top end of the edge block;
the transmission structure includes axis of rotation, first motor, drive screw, turning block and second motor, first motor is fixed in a transmission case lateral wall and rotates in order to drive the axis of rotation of the inboard lower extreme of growth furnace body, just the axis of rotation cooperates in order to drive the rotation of arris piece with the arris piece through the arris groove, the arris piece inboard is connected with the turning block through rotating groove cooperation, drive screw rotates and installs in the transmission case inboardly, drive screw reciprocates in order to drive the arris piece through screw thread portion and turning block cooperation, the second motor is fixed in the inboard other end of transmission case and rotates in order to drive screw.
Preferably, the outer surface of the transmission screw is sleeved with first bevel teeth, the output end of the second motor is provided with second bevel teeth, and the second bevel teeth are matched with the first bevel teeth.
Preferably, a first gear is arranged on the rotating shaft, and a second gear matched with the first gear is arranged on the outer surface of the rotating shaft.
Preferably, the inner side of the rotating groove is provided with a ball, and the ball is in contact with the rotating block.
Preferably, the top end of the edge block is provided with a supporting plate, and the supporting plate is detachably connected with the crucible.
Preferably, the side wall of the transmission case is provided with a terminal, and the terminal is electrically connected with the second motor through a lead.
Preferably, the support is welded and fixed with the growth furnace body, and a mounting hole is formed in the lower end of the inner side of the support.
Compared with the prior art, the beneficial effects of the utility model are that:
through being provided with the axis of rotation, first motor, drive screw, turning block and second motor, avoid when making single crystal growth through the czochralski method, be not convenient for control the rotation or the lift of crucible respectively, device simple structure can rotate alone and make the inboard material distribution of crucible even, also can carry out the lift operation to the crucible when the crucible is rotatory simultaneously, perhaps make the crucible carry out solitary lift, and easy operation easily operates according to actual need, and the result of use is better.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the bracket structure of the present invention;
FIG. 3 is a schematic cross-sectional view of the transmission case of the present invention;
fig. 4 is a schematic cross-sectional view at a in fig. 3 according to the present invention;
fig. 5 is an enlarged schematic structural view of the utility model at the position B in fig. 4;
in the figure: 1. a growth furnace body; 2. processing a port; 3. a support; 4. a transmission case; 5. a terminal; 6. a drive screw; 7. a first bevel gear; 8. a second motor; 9. a first motor; 10. a rotating shaft; 11. a prism block; 12. rotating the block; 13. a first gear; 14. a ball bearing; 15. a crucible is provided.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: a growth furnace for processing single crystals comprises a growth furnace body 1, a support 3 is fixed on the lower surface of the growth furnace body 1, a processing opening 2 is formed in the growth furnace body 1, a transmission case 4 is arranged on the lower surface of the growth furnace body 1, a movable edge block 11 is connected to the inner side of the transmission case 4 through a transmission structure, the position of a crucible 15 can be conveniently adjusted when the single crystals are processed through a Czochralski method, and the crucible 15 for growing the single crystals is arranged at the top end of the edge block 11;
the transmission structure includes axis of rotation 10, first motor 9, drive screw 6, turning block 12 and second motor 8, first motor 9 is fixed in 4 lateral walls of transmission case and rotates with axis of rotation 10 that drives 1 inboard lower extreme of growth furnace body, and axis of rotation 10 cooperates with arris piece 11 through the arris groove in order to drive arris piece 11 rotatory, be convenient for through the rotation of arris piece 11, it takes place to rotate to drive crucible 15, it is connected with turning block 12 through the cooperation of rotating groove to drive arris piece 11 inboard, drive screw 6 rotates and installs in 4 inboards of transmission case, drive screw 6 reciprocates in order to drive arris piece 11 through screw thread portion and the cooperation of turning block 12, be convenient for send turning block 12 to go up and down soon, and then drive arris piece 11 and go up and down the removal, second motor 8 is fixed in 4 inboard other ends of transmission case and rotates in order to drive screw 6, be convenient for drive screw 6 rotatory.
In this embodiment, preferably, the outer surface of the transmission screw 6 is sleeved with a first bevel gear 7, the output end of the second motor 8 is provided with a second bevel gear, and the second bevel gear is matched with the first bevel gear 7, so that the transmission screw 6 can be driven to rotate better.
In this embodiment, preferably, the rotating shaft 10 is provided with a first gear 13, and the outer surface of the rotating shaft 10 is provided with a second gear matched with the first gear 13, so as to drive the rotating shaft 10 to rotate.
In this embodiment, preferably, the inside of the rotation groove is provided with a ball 14, and the ball 14 contacts with the rotation block 12, so as to better enable the rotation block 12 and the prism block 11 to rotate.
In this embodiment, preferably, the top end of the prism block 11 is provided with a support plate, and the support plate is detachably connected with the crucible 15.
In this embodiment, it is preferable that the side wall of the transmission case 4 is provided with a terminal 5, and the terminal 5 is electrically connected to the second motor 8 through a conducting wire.
In this embodiment, preferably, support 3 and growth furnace body 1 welded fastening, the mounting hole has been seted up to 3 inboard lower extremes of support, and the better messenger support 3 of being convenient for passes through bolt and mounting hole with outside brace table and is connected fixedly.
The utility model discloses a theory of operation and use flow: when using, make the polycrystal place and melt it in 15 inboards of crucible, then drive axis of rotation 10 through first motor 9 and rotate, axis of rotation 10 drives arris piece 11 rotatoryly through the edge groove, arris piece 11 rotates and drives crucible 15 and rotate and make its inside polycrystal dispersion of melting even, when needs pass through czochralski method growth single crystal, it rotates to make second motor 8 drive driving screw 6, driving screw 6 drives turning block 12 through screw thread portion and rises or descends, turning block 12 removes and drives crucible 15 through arris piece 11 and rise or descend, and the operation is simple, be convenient for control crucible 15 respectively and rotate or go up and down.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a growth furnace of processing single crystal, includes growth furnace body (1), growth furnace body (1) lower fixed surface has support (3), processing mouth (2), its characterized in that have been seted up on growth furnace body (1): the lower surface of the growth furnace body (1) is provided with a transmission case (4), the inner side of the transmission case (4) is connected with a movable prism block (11) through a transmission structure, and the top end of the prism block (11) is provided with a crucible (15) for single crystal growth;
the utility model discloses a growth furnace, including transmission case (1), transmission structure, rotation axis (10), first motor (9), drive screw (6), turning block (12) and second motor (8), first motor (9) are fixed in a transmission case (4) lateral wall and rotate in order to drive rotation axis (10) of growth furnace body (1) inboard lower extreme, just rotation axis (10) cooperate through the edge groove with edge block (11) in order to drive edge block (11) rotatory, edge block (11) inboard is connected with turning block (12) through the rotation groove cooperation, drive screw (6) rotate to be installed in transmission case (4) inboardly, drive screw (6) reciprocate in order to drive edge block (11) through screw thread portion and turning block (12) cooperation, second motor (8) are fixed in transmission case (4) inboard other end and rotate in order to drive screw (6).
2. A growing furnace for processing a single crystal according to claim 1, wherein: the outer surface of the transmission screw rod (6) is sleeved with first bevel teeth (7), the output end of the second motor (8) is provided with second bevel teeth, and the second bevel teeth are matched with the first bevel teeth (7).
3. A growing furnace for processing a single crystal according to claim 1, wherein: the rotating shaft (10) is provided with a first gear (13), and the outer surface of the rotating shaft (10) is provided with a second gear matched with the first gear (13).
4. A growing furnace for processing a single crystal according to claim 1, wherein: the inner side of the rotating groove is provided with a ball (14), and the ball (14) is in contact with the rotating block (12).
5. A growing furnace for processing a single crystal according to claim 1, wherein: the top end of the edge block (11) is provided with a supporting plate, and the supporting plate is detachably connected with the crucible (15).
6. A growing furnace for processing a single crystal according to claim 1, wherein: the side wall of the transmission case (4) is provided with a wiring end (5), and the wiring end (5) is electrically connected with the second motor (8) through a conducting wire.
7. A growing furnace for processing a single crystal according to claim 1, wherein: the support (3) is welded and fixed with the growth furnace body (1), and a mounting hole is formed in the lower end of the inner side of the support (3).
CN202222956969.9U 2022-11-07 2022-11-07 Growth furnace for processing single crystal Active CN218711030U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222956969.9U CN218711030U (en) 2022-11-07 2022-11-07 Growth furnace for processing single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222956969.9U CN218711030U (en) 2022-11-07 2022-11-07 Growth furnace for processing single crystal

Publications (1)

Publication Number Publication Date
CN218711030U true CN218711030U (en) 2023-03-24

Family

ID=85607793

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222956969.9U Active CN218711030U (en) 2022-11-07 2022-11-07 Growth furnace for processing single crystal

Country Status (1)

Country Link
CN (1) CN218711030U (en)

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