CN212083724U - Planar optical waveguide device and photoelectric sensing system - Google Patents
Planar optical waveguide device and photoelectric sensing system Download PDFInfo
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- CN212083724U CN212083724U CN202021051091.9U CN202021051091U CN212083724U CN 212083724 U CN212083724 U CN 212083724U CN 202021051091 U CN202021051091 U CN 202021051091U CN 212083724 U CN212083724 U CN 212083724U
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Abstract
The utility model relates to a planar optical waveguide device and photoelectric sensing system, including the substrate, set up at least one beam split waveguide in the substrate, beam split waveguide is used for leading optical signal along specific path propagation; the optical fiber node is arranged on one side of the substrate and is used for communicating the light splitting waveguide with the optical fiber sensing device; the photoelectric sensing device is arranged on the other side of the substrate and used for receiving an optical signal carrying optical fiber sensing data and converting the optical signal into an electrical signal; the photoelectric sensing device comprises a mounting base, wherein the mounting base is provided with a mounting cavity, the substrate is accommodated in the mounting cavity, and the photoelectric sensing device is arranged on one side of the mounting base.
Description
Technical Field
The utility model relates to an optical fiber sensing technical field especially relates to a planar optical waveguide device and photoelectric sensing system.
Background
A general photoelectric sensing system usually uses a photosensitive sensor, an infrared sensor and other devices to realize photoelectric signal conversion, and more advanced photoelectric sensing can be performed by an optical fiber sensing technology. FBG (Fiber bragg grating) sensors are common devices in Fiber optic photoelectric sensing technology.
The FBG sensor is essentially different from an electric-based sensor, light is used as a carrier of sensitive information, optical fiber is used as a medium for transmitting the sensitive information, a light source is sent into the optical fiber through a planar optical waveguide device, an optical signal carrying environmental sensing data is reflected back by collecting fiber bragg gratings, the planar optical waveguide device is provided with a plurality of light splitting channels for separating incident light emitted by the light source from reflected light carrying the sensing data and transmitted back by the optical fiber, and then the reflected light carrying the sensing data is converted into an electric signal to complete the collection and processing of the data of the FBG sensor and a corresponding photoelectric sensing system.
The existing FBG sensor and the photoelectric sensing system with the FBG sensor have the advantages that the planar optical waveguide device can only realize light path separation and transmission, the function is simple, the photoelectric sensing system comprises a plurality of independently arranged components, such as independently arranged photoelectric sensing devices, the whole system is complex to install, and the maintenance cost is high.
SUMMERY OF THE UTILITY MODEL
In order to overcome the not enough of above-mentioned prior art, the utility model provides a planar optical waveguide device and photoelectric sensing system for solve current FBG sensor's optical waveguide device function simple, the photoelectric sensing system installation that has the FBG sensor is complicated, problem that the maintenance cost is high.
The utility model provides an above-mentioned technical problem's technical scheme as follows:
a planar lightwave circuit device comprising:
a substrate, at least one optical splitter waveguide disposed within the substrate, the optical splitter waveguide configured to guide an optical signal to propagate along a particular path;
the optical fiber node is arranged on one side of the substrate and is used for communicating the light splitting waveguide with the optical fiber sensing device;
the photoelectric sensing device is arranged on the other side of the substrate and used for receiving an optical signal carrying optical fiber sensing data and converting the optical signal into an electrical signal;
the photoelectric sensing device comprises a mounting base, wherein the mounting base is provided with a mounting cavity, the substrate is contained in the mounting cavity, and the photoelectric sensing device is arranged on one side of the mounting base.
Furthermore, one end of the photoelectric sensing device comprises a metal pin, and the metal pin is connected with an external signal processing device and used for transmitting the electric signal to the external signal processing device.
Furthermore, the other end side face of the photoelectric sensing device comprises at least N photoelectric sensing chips, the N photoelectric sensing chips are arranged corresponding to the reflection light paths of the N light splitting channels, and the photoelectric sensing chips are used for receiving optical signals carrying optical fiber sensing data and converting the optical signals into electric signals and transmitting the electric signals to the external signal processing device through the metal pins.
Further, the first interface and the second interface are arranged on the same side of the substrate, the first interface is arranged at the starting end of an incident light path of the optical splitter waveguide, the second interface is arranged at the terminal end of a reflection light path of the optical splitter waveguide, the first interface is used for connecting a light source system, and the second interface is used for connecting the photoelectric sensing device.
Furthermore, the light splitting waveguide comprises N light splitting channels arranged in parallel, where N is an integer greater than 1, each light splitting channel comprises an incident light path, a reflection light path and an exit light path, the optical fiber node is connected with the exit light path, the photoelectric sensing device is arranged opposite to the reflection light path, each incident light path and each reflection light path are provided with a curved waveguide, and each incident light path and each reflection light path form a light splitting point at the tail end of the curved waveguide.
Further, the curved waveguide of the incident light path and the curved waveguide of the reflected light path form M intersections, where M is equal to (1+ N) × N/2-N.
Furthermore, the emergent light path extends backwards of the incident light path, the incident light path and the reflecting light path are arranged in parallel, and the photoelectric sensing chip and the substrate are arranged vertically.
Furthermore, 4 parallel optical splitting waveguides are arranged in the substrate, and the 4 parallel optical splitting waveguides comprise a first optical splitting waveguide, a second optical splitting waveguide, a third optical splitting waveguide and a fourth optical splitting waveguide;
the incident light path in the first light splitting waveguide and the reflecting light path in the other light splitting waveguides do not form a cross point;
an incident optical path in the second optical splitter forms an intersection with a reflected optical path in the first optical splitter and a reflected optical path in the second optical splitter respectively;
an incident optical path in the third optical branch optical path forms a cross point with a reflected optical path in the first optical branch waveguide and a reflected optical path in the second optical branch waveguide.
And an incident light path in the fourth light splitting light path forms an intersection with a reflection light path in the first light splitting waveguide, a reflection light path in the second light splitting waveguide and a reflection light path in the third light splitting waveguide.
Furthermore, the upper part of the mounting cavity of the mounting base is provided with a parallel slide rail, the substrate is a cube, one end of the mounting base is provided with an upper through groove and a lower through groove, the photoelectric sensing device penetrates through the through grooves to be vertically connected with the mounting base, the metal pin and the photoelectric sensing chip are arranged on the upper side and the lower side of the through groove, the substrate slides into the mounting cavity from one end of the parallel slide rail and abuts against the photoelectric sensing device, so that the substrate is connected with the photoelectric sensing chip through the second interface, and the mounting base is mounted on the external signal processing device through the metal pin.
The utility model also provides a photoelectric sensing system, which comprises a light source system, an optical fiber sensing device and a planar optical waveguide device;
at least one optical splitting waveguide is arranged in the substrate and used for guiding optical signals to propagate along a specific path;
the optical fiber node is arranged on one side of the substrate and is used for communicating the light splitting waveguide with the optical fiber sensing device;
the photoelectric sensing device is arranged on the other side of the substrate, at least N photoelectric sensing chips are arranged at one end of the photoelectric sensing device and used for receiving optical signals carrying optical fiber sensing data and converting the optical signals into electric signals, and the other end of the photoelectric sensing device comprises a metal pin which is connected with an external signal processing device and used for transmitting the electric signals to the external signal processing device;
the light splitting waveguide comprises N light splitting channels which are arranged in parallel, wherein N is an integer larger than 1, each light splitting channel comprises an incident light path, a reflecting light path and an emergent light path, the optical fiber node is arranged opposite to the optical fiber sensing device, and the photoelectric sensing device is arranged opposite to the reflecting light path;
the light source system is communicated with one end of the incident light path, the optical fiber sensing device is communicated with an optical fiber node, a grating sensor is arranged in the optical fiber sensing device, and the optical fiber sensing device is used for returning an optical signal carrying data collected by the grating sensor to the reflection light path; and
the mounting base is provided with a mounting cavity, the substrate is contained in the mounting cavity, the photoelectric sensing device is arranged on one side of the mounting base, an upper through groove and a lower through groove are formed in one end of the mounting base, the photoelectric sensing device penetrates through the through groove to be vertically connected with the mounting base, the metal pins and the photoelectric sensing chip are arranged on the upper side and the lower side of the through groove, the substrate is mounted in the mounting cavity and abutted against the photoelectric sensing device so that the substrate is connected with the photoelectric sensing chip through the second interface, and the mounting base is mounted on the external signal processing device through the metal pins.
Compared with the prior art, the planar optical waveguide device and the photoelectric sensing system have the advantages that the photoelectric sensing device is integrated with the planar optical waveguide device through the mounting base, so that the planar optical waveguide device has two functions of optical path separation and photoelectric signal conversion, the functions are complex, the waveguide device and the photoelectric sensing device in the photoelectric sensing system are integrated together, the mounting complexity of the photoelectric sensing system is reduced, and the maintenance cost is reduced.
Drawings
Fig. 1 is a schematic perspective view of a planar lightwave circuit according to an embodiment of the present invention;
FIG. 2 is a bottom view of FIG. 1;
FIG. 3 is a top view of FIG. 1;
FIG. 4 is a side view of FIG. 1;
fig. 5 is a schematic diagram of a photoelectric sensing device in a planar lightwave circuit according to an embodiment of the present invention;
FIG. 6 is a rear view of FIG. 5;
FIG. 7 is a schematic diagram of an embodiment of a planar lightwave circuit substrate;
fig. 8 is a system diagram of an optoelectronic sensing system according to an embodiment of the present invention.
In the figures, the list of components represented by the various reference numbers is as follows:
a planar optical waveguide device 100; a substrate 110; the light-splitting waveguide 111; an optical fiber node 120; a photoelectric sensing device 130; metal leads 131; a photoelectric sensing chip 132; a mounting base 140; a mounting cavity 141; parallel slide rails 142; an optical fiber sensing device 200; a light source 300; an external signal processing device 400.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
Referring to fig. 1, fig. 2, fig. 3, fig. 4, fig. 7 and fig. 8, a planar optical waveguide device 100 according to an embodiment of the present invention includes:
the optical waveguide structure comprises a substrate 110, wherein at least one optical splitter waveguide 111 is arranged in the substrate 110, and the optical splitter waveguide 111 is used for guiding optical signals to propagate along a specific path.
And an optical fiber node 120 disposed on one side of the substrate 110, wherein the optical fiber node 120 is used for communicating the optical splitter waveguide 111 and the optical fiber sensing device 200.
And the photoelectric sensing device 130 is disposed on the other side of the substrate 110, and the photoelectric sensing device 130 is configured to receive an optical signal carrying optical fiber sensing data and convert the optical signal into an electrical signal.
A mounting base 140, wherein the mounting base 140 has a mounting cavity 141, the substrate 110 is accommodated in the mounting cavity 141, and the photoelectric sensing device 130 is disposed on one side of the mounting base 140.
Specifically, the Planar Lightwave Circuit, PLC, Planar Lightwave Circuit according to an embodiment of the present invention is used for communication light splitting, and the Planar Lightwave Circuit device 100 includes a substrate 110, and a light path, i.e., a light splitting waveguide 111, is etched on the substrate 110 by photolithography, etching, developing, and other techniques, and the Planar Lightwave Circuit device 100 transmits an optical signal to a specific direction through the light path disposed on the substrate 110. Specifically, the material of the substrate 110 may employ silicon dioxide, lithium niobate, and a group III-V semiconductor compound.
The optical fiber node 120 is disposed on one side of the substrate 110 and is configured to communicate the optical splitter waveguide 111 and the optical fiber sensing device 200, the photoelectric sensing device 130 is disposed on the other side of the substrate 110 and is configured to receive an optical signal carrying optical fiber sensing data and convert the optical signal into an electrical signal, the substrate 110 is accommodated in the installation cavity 141 of the installation base 140, and the photoelectric sensing device 130 is disposed on one side of the installation base 140.
In this embodiment, the upper portion of the mounting cavity 141 of the mounting base 140 has a parallel sliding rail 142, the substrate 110 is a cube, one end of the mounting base 140 has an upper through slot and a lower through slot, the photoelectric sensing device 130 passes through the through slot to be vertically connected to the mounting base 140, the metal pin 131 and the photoelectric sensing chip 132 are disposed on the upper and lower sides of the through slot, the substrate 110 slides into the mounting cavity 141 from one end of the parallel sliding rail 142 and abuts against the photoelectric sensing device 130, so that the substrate 110 is connected to the photoelectric sensing chip 132 through the second interface, and the mounting base 140 is mounted on the external signal processing device 400 through the metal pin 131.
In the planar optical waveguide device 100 of the present embodiment, the optical-electrical sensing apparatus is integrated with the planar optical waveguide device through the mounting base 140, so that the planar optical waveguide device 100 has two functions of optical path separation and optical-electrical signal conversion. Please refer to fig. 5 and fig. 6, which are schematic structural diagrams of a photoelectric sensing device 130 of a planar lightwave circuit 100 according to an embodiment of the present invention, wherein one end of the photoelectric sensing device 130 includes a metal pin 131, and the metal pin 131 is connected to an external signal processing device for transmitting the electrical signal to the external signal processing device. In the present embodiment, the external signal processing device is a server, and in other embodiments, the external signal processing device may also be other computers with electronic computing functions, such as a mobile phone, a computer, and the like.
The other end side surface of the photoelectric sensing device 130 includes at least N photoelectric sensing chips 132, the N photoelectric sensing chips 132 are disposed corresponding to the reflection light paths of the N light splitting channels, and the photoelectric sensing chips 132 are configured to receive the optical signal carrying the optical fiber sensing data and convert the optical signal into the electrical signal, and transmit the electrical signal to the external signal processing device (not shown in the figure) through the metal pins 131. The photo sensor chip 132, or photo sensor, including processing paths and processing elements, is a device that converts optical signals into electrical signals. The working principle is based on the photoelectric effect. The photoelectric effect refers to the phenomenon that when light irradiates on some substances, electrons of the substances absorb the energy of photons, and the corresponding electric effect occurs. The photoelectric sensor is a key element for realizing photoelectric conversion in various photoelectric detection systems, and is a core device for converting an optical signal into an electric signal.
Please refer to fig. 7, which is a schematic structural diagram of the photoelectric sensing device 130 of the planar optical waveguide device 100 according to an embodiment of the present invention, in which the planar optical waveguide device 100 further includes a first interface and a second interface, the first interface and the second interface are disposed at the same side of the substrate 110, the first interface is disposed at the incident light path starting end of the optical splitter waveguide 111, the second interface is disposed at the reflective light path terminal end of the optical splitter waveguide 111, the first interface is used for connecting a light source 300 system, and the second interface is used for connecting the photoelectric sensing device 130. The arrangement of the first interface and the second interface realizes stable transmission between the incident light emitted by the light source 300 and the reflected light carrying the sensing data and transmitted back by the optical fiber and the planar optical waveguide device 100.
Referring to fig. 7, the light splitting waveguide 111 includes N light splitting channels arranged in parallel, where N is an integer greater than 1, each light splitting channel includes an incident light path, a reflective light path, and an exit light path, the optical fiber node 120 is connected to the exit light path, the photoelectric sensing device 130 is arranged opposite to the reflective light path, each incident light path and each reflective light path have a curved waveguide, and each incident light path and each reflective light path form a light splitting point at a tail end of the curved waveguide. The emergent light path extends backward of the incident light path, the incident light path and the reflected light path are arranged in parallel, and the photoelectric sensing chip 132 and the substrate 110 are arranged vertically.
The requirement for crosstalk is relatively high in optical communication, and in the planar optical waveguide device 100 for communication splitting, crosstalk is generated at intersections between different communication channels. Therefore, when the optical paths of the two communication channels need to be crossed, in the prior art, because it is feared that crosstalk is generated so much that the two optical paths can be crossed by an optical fiber, the optical path crossing of the two communication channels is not realized in the planar optical waveguide device 100, and correlation calculation and design are not performed between sensing accuracy and crosstalk error.
In this embodiment, through performing correlation calculation and design between sensing accuracy and crosstalk error, N parallel optical waveguides 111 are disposed in the planar optical waveguide device 100, and a cross point is disposed between an incident optical path of one optical waveguide 111 and a reflection optical path of at least one other optical waveguide 111, when probe light propagates from the incident optical path to the cross point, most of the probe light enters an emergent optical path, but a small part of the probe light enters the reflection optical path, at this time, crosstalk occurs, but through reasonable control over sensing accuracy, in some systems which do not have high requirements on sensing accuracy, such as a temperature measurement system, the requirement on accuracy is not high, and at this time, the crosstalk does not affect normal operation of the system. Therefore, the planar optical waveguide device 100 having the intersection point between the optical paths of the different thermometric channels does not affect the system function.
In this embodiment, the substrate 110 is provided with 4 parallel optical splitting waveguides 111, that is, N is 4, the 4 parallel optical splitting waveguides 111 include a first optical splitting waveguide 111, a second optical splitting waveguide 111, a third optical splitting waveguide 111 and a fourth optical splitting waveguide 111, an incident optical path in the first optical splitting waveguide 111 does not form an intersection with a reflected optical path in the other optical splitting waveguides 111, an incident optical path in the second optical splitting waveguide 111 respectively forms an intersection with a reflected optical path in the first optical splitting waveguide 111 and a reflected optical path in the second optical splitting waveguide 111, and an incident optical path in the third optical splitting waveguide forms an intersection with a reflected optical path in the first optical splitting waveguide 111 and a reflected optical path in the second optical splitting waveguide 111. An incident optical path in the fourth optical branch path forms an intersection with a reflected optical path in the first optical branch waveguide 111, a reflected optical path in the second optical branch waveguide 111, and a reflected optical path in the third optical branch waveguide 111.
Wherein the curved waveguide of the incident light path and the curved waveguide of the reflected light path form M intersections, wherein M is equal to (1+ N) × N/2-N. I.e., M is 6, the curved waveguide of the incident optical path and the curved waveguide of the reflected optical path form 6 intersections.
In this embodiment, the emergent light path extends backward from the incident light path, the incident light path and the reflective light path are arranged in parallel, and the photoelectric sensing chip 132 and the substrate 110 are arranged perpendicularly. The incident optical path and the reflected optical path are arranged in parallel, and the photoelectric sensing chip 132 is arranged perpendicular to the substrate 110, so that the optical path layout in the planar optical waveguide can be optimized to the greatest extent, and the size and volume of the planar optical waveguide can be reduced after the photoelectric sensing chip 132 is integrated.
A photoelectric sensing system is described in detail below.
As shown in fig. 1 and 8, in an embodiment, an optoelectronic sensing system of the present embodiment includes a light source 300 system, an optical fiber sensing device and a planar optical waveguide device 100;
a substrate 110, wherein at least one optical splitter waveguide 111 is disposed in the substrate 110, and the optical splitter waveguide 111 is configured to guide an optical signal to propagate along a specific path;
an optical fiber node 120 disposed on one side of the substrate 110, the optical fiber node 120 being configured to communicate the optical splitter waveguide 111 and the optical fiber sensing device 200;
the optical fiber sensor comprises a photoelectric sensing device 130, which is arranged on the other side of the substrate 110, wherein the photoelectric sensing device 130 is used for receiving an optical signal carrying optical fiber sensing data and converting the optical signal into an electrical signal, one end of the photoelectric sensing device 130 comprises a metal pin 131, and the metal pin 131 is connected with an external signal processing device and is used for transmitting the electrical signal to the external signal processing device;
the optical splitting waveguide 111 comprises N optical splitting channels arranged in parallel, where N is an integer greater than 1, each optical splitting channel comprises an incident light path, a reflected light path and an emergent light path, the optical fiber node 120 is arranged opposite to the optical fiber sensing device 200, and the photoelectric sensing device 130 is arranged opposite to the reflected light path;
the light source 300 system is communicated with one end of the incident light path, the optical fiber sensing device 200 is communicated with the optical fiber node 120, a grating sensor is arranged in the optical fiber sensing device 200, and the optical fiber sensing device 200 is used for returning an optical signal carrying data collected by the grating sensor to the reflection light path; and
the mounting base 140, the mounting base 140 has a mounting cavity 141, the substrate 110 is accommodated in the mounting cavity 141, the photoelectric sensing device 130 is disposed at one side of the mounting base 140, an upper through slot and a lower through slot are formed at one end of the mounting base 140, the photoelectric sensing device 130 passes through the through slot to be vertically connected to the mounting base 140, the metal pins 131 and the photoelectric sensing chip 132 are disposed at upper and lower sides of the through slot, the substrate 110 is mounted in the mounting cavity 141 and abuts against the photoelectric sensing device 130, so that the substrate 110 is connected to the photoelectric sensing chip 132 through the second interface, and the mounting base 140 is mounted on the external signal processing device through the metal pins 131.
In this embodiment, the principle of photoelectric signal conversion performed by the photoelectric sensing system is as follows: the detection light source 300 emits detection light, and the detection light propagates along the optical fiber sensing device 200 through the planar lightwave circuit device 100; the optical fiber sensing device 200 is internally provided with an FBG sensor, when probe light is transmitted to the FBG sensor, the probe light is reflected to reflect a received optical signal, a photoelectric sensing chip 132 of a photoelectric sensing device 130 in the planar optical waveguide device 100 demodulates the received reflected optical signal, the photoelectric sensing device 130 converts the optical signal into an electrical signal, and the other end of the photoelectric sensing device 130 is provided with a metal pin 131 through which the electrical signal is transmitted to an external signal processing device.
Specifically, the working principle of the photoelectric sensing system is described with reference to the planar optical waveguide device 100: each incident light path, each reflected light path and each emergent light path are in butt joint with the photoelectric sensing system through one end far away from the intersection point, wherein the incident light path is in butt joint with the detection light source 300 through one end far away from the intersection point, the reflected light path is in butt joint with the photoelectric sensing device 130 through one end far away from the intersection point, and the emergent light path is in butt joint with the optical fiber sensing device 200 through the optical fiber node 120; after entering the light splitting channel from the detection light source 300, the detection light propagates forwards in the incident light path and enters the emergent light path through the intersection point; the FBG sensor of the optical fiber sensing device 200 is abutted with the emergent light path passing through the optical fiber node 120, the detection light enters the emergent light path from the intersection point, when the detection light encounters the FBG sensor, the FBG sensor reflects the light information back, the reflected light information enters the reflective light path through the intersection point, and then the reflected light path is sent to the optical inductance sensing device 130; the photoelectric sensing system demodulates the optical signal through the photoelectric sensing device 130, so as to achieve the purpose of converting the optical signal into an electrical signal.
The utility model provides a planar optical waveguide device 100 and photoelectric sensing system, photoelectric sensing device integrates through installation base 140 and planar optical waveguide ware, make planar optical waveguide device 100 have two kinds of effects of light path separation and photoelectric signal conversion, have the multiple effect of light path separation and photoelectric signal conversion, the function is complicated, waveguide device and photoelectric sensing device integration in the photoelectric sensing system are in the same place, the installation complexity of photoelectric sensing system has been reduced, the maintenance cost has been reduced.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A planar lightwave circuit device comprising:
a substrate, at least one optical splitter waveguide disposed within the substrate, the optical splitter waveguide configured to guide an optical signal to propagate along a particular path;
the optical fiber node is arranged on one side of the substrate and is used for communicating the light splitting waveguide with the optical fiber sensing device;
the photoelectric sensing device is arranged on the other side of the substrate and used for receiving an optical signal carrying optical fiber sensing data and converting the optical signal into an electrical signal;
the photoelectric sensing device comprises a mounting base, wherein the mounting base is provided with a mounting cavity, the substrate is contained in the mounting cavity, and the photoelectric sensing device is arranged on one side of the mounting base.
2. The planar lightwave circuit of claim 1 wherein the photo-sensing device comprises a metal pin at one end, the metal pin being connected to an external signal processing device for transmitting electrical signals to the external signal processing device.
3. The planar optical waveguide device of claim 2, wherein the other end side of the optical electrical sensing device comprises at least N optical electrical sensing chips, the N optical electrical sensing chips are disposed corresponding to the reflective optical paths of the N optical splitting channels, and the optical electrical sensing chips are configured to receive the optical signal carrying the optical fiber sensing data, convert the optical signal into the electrical signal, and transmit the electrical signal to the external signal processing device through the metal pins.
4. The planar lightwave circuit device of claim 3 further comprising a first interface and a second interface, wherein the first interface and the second interface are disposed on the same side of the substrate, the first interface is disposed at the beginning of the incident lightpath of the optical splitter waveguide, the second interface is disposed at the end of the reflected lightpath of the optical splitter waveguide, the first interface is configured to connect to a light source system, and the second interface is configured to connect to the photo-electric sensor.
5. The planar lightwave circuit of claim 4 wherein said light splitting waveguide comprises N light splitting channels arranged in parallel, where N is an integer greater than 1, each of said light splitting channels comprising an incident light path, a reflected light path and an exit light path, said fiber junction being connected to said exit light path, said photo-electric sensor device being arranged opposite to said reflected light path, each of said incident light path and said reflected light path having a curved waveguide, each of said incident light path and said reflected light path forming a light splitting point at an end of said curved waveguide.
6. The planar lightwave circuit of claim 5 wherein the curved waveguide of the incident lightpath and the curved waveguide of the reflected lightpath form M crossover points, wherein M is equal to (1+ N) N/2-N.
7. The planar lightwave circuit of claim 6 wherein said exit optical path is a backward extension of said incident optical path, said incident optical path and said reflected optical path are arranged in parallel, and said photo-sensing die and said substrate are arranged vertically.
8. The planar optical waveguide device of claim 6, wherein 4 parallel optical waveguides are disposed in the substrate, and the 4 parallel optical waveguides include a first optical waveguide, a second optical waveguide, a third optical waveguide and a fourth optical waveguide;
the incident light path in the first light splitting waveguide and the reflecting light path in the other light splitting waveguides do not form a cross point;
an incident optical path in the second optical splitter forms an intersection with a reflected optical path in the first optical splitter and a reflected optical path in the second optical splitter respectively;
an incident optical path in the third optical splitting optical path forms a cross point with a reflected optical path in the first optical splitting waveguide and a reflected optical path in the second optical splitting waveguide;
and an incident light path in the fourth light splitting light path forms an intersection with a reflection light path in the first light splitting waveguide, a reflection light path in the second light splitting waveguide and a reflection light path in the third light splitting waveguide.
9. The planar lightwave circuit of claim 8 wherein the upper portion of the mounting cavity of the mounting base has parallel rails, the substrate is a cube, one end of the mounting base has upper and lower through slots, the photo sensor device passes through the through slots to vertically connect to the mounting base, the metal pins and the photo sensor chip are disposed on upper and lower sides of the through slots, the substrate slides into the mounting cavity from one end of the parallel rails and abuts against the photo sensor device, so that the substrate is connected to the photo sensor chip through the second interface, and the mounting base is mounted on the external signal processing device through the metal pins.
10. A photoelectric sensing system, characterized by: the device comprises a light source system, an optical fiber sensing device and a planar optical waveguide device;
a substrate, at least one optical splitter waveguide disposed within the substrate, the optical splitter waveguide configured to guide an optical signal to propagate along a particular path;
the optical fiber node is arranged on one side of the substrate and is used for communicating the light splitting waveguide with the optical fiber sensing device;
the photoelectric sensing device is arranged on the other side of the substrate and used for receiving an optical signal carrying optical fiber sensing data and converting the optical signal into an electric signal, one end of the photoelectric sensing device comprises a metal pin, and the metal pin is connected with an external signal processing device and used for transmitting the electric signal to the external signal processing device;
the light splitting waveguide comprises N light splitting channels which are arranged in parallel, wherein N is an integer larger than 1, each light splitting channel comprises an incident light path, a reflecting light path and an emergent light path, the optical fiber node is arranged opposite to the optical fiber sensing device, and the photoelectric sensing device is arranged opposite to the reflecting light path;
the light source system is communicated with one end of the incident light path, the optical fiber sensing device is communicated with an optical fiber node, a grating sensor is arranged in the optical fiber sensing device, and the optical fiber sensing device is used for returning an optical signal carrying data collected by the grating sensor to the reflection light path; and
the mounting base is provided with a mounting cavity, the substrate is accommodated in the mounting cavity, the photoelectric sensing device is arranged on one side of the mounting base, an upper through groove and a lower through groove are formed in one end of the mounting base, the photoelectric sensing device penetrates through the through groove to be vertically connected with the mounting base, the metal pins and the photoelectric sensing chip are arranged on the upper side and the lower side of the through groove, the substrate is mounted in the mounting cavity and abutted against the photoelectric sensing device, so that the substrate is connected with the photoelectric sensing chip through a second interface, and the mounting base is mounted on the external signal processing device through the metal pins.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115327710A (en) * | 2021-05-11 | 2022-11-11 | 飞巽传感技术(上海)有限公司 | Optical waveguide device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115327710A (en) * | 2021-05-11 | 2022-11-11 | 飞巽传感技术(上海)有限公司 | Optical waveguide device |
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