CN109254365A - Light-receiving mould group and preparation method thereof, light receiving element - Google Patents
Light-receiving mould group and preparation method thereof, light receiving element Download PDFInfo
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- CN109254365A CN109254365A CN201811355086.4A CN201811355086A CN109254365A CN 109254365 A CN109254365 A CN 109254365A CN 201811355086 A CN201811355086 A CN 201811355086A CN 109254365 A CN109254365 A CN 109254365A
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- 238000002360 preparation method Methods 0.000 title abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 241000218202 Coptis Species 0.000 claims description 17
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000005622 photoelectricity Effects 0.000 claims description 4
- 238000004891 communication Methods 0.000 abstract description 5
- 238000011079 streamline operation Methods 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 description 15
- 238000010168 coupling process Methods 0.000 description 15
- 238000005859 coupling reaction Methods 0.000 description 15
- 230000000875 corresponding effect Effects 0.000 description 12
- 239000013307 optical fiber Substances 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
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- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
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- 230000009471 action Effects 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4244—Mounting of the optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
Abstract
The invention discloses a kind of light-receiving mould groups and preparation method thereof, light receiving element, are related to technical field of photo communication.Including substrate, the array waveguide grating of setting on the substrate, and the multiple photodetectors arranged in the same direction of setting on the substrate, the photosurface of multiple photodetectors is in the same plane, the output end face of multiple photosurfaces and the array waveguide grating is correspondingly arranged, and makes to couple with multiple photosurfaces respectively by the multi beam emergent light of the array waveguide grating.Directly the optical signal of demultiplexing can be coupled, user-friendly, streamline operation.
Description
Technical field
The present invention relates to technical field of photo communication, connect in particular to a kind of light-receiving mould group and preparation method thereof, light
Receive device.
Background technique
With the fast development of communication field, wavelength-division multiplex technique (English name: Wavelength Division
Multiplexing, referred to as: WDM) be widely used, wavelength-division multiplex technique is in an optical fiber while by believing more
Transmit the technology of multiple and different wavelength channels in road.The basic principle of wavelength-division multiplex technique is the light in transmitting terminal by different wave length
Signal combines (multiplexing), and is transmitted in the same root optical fiber being coupled on lightguide cable link, again will combination in receiving end
Wavelength channels separate (demultiplexing), and be for further processing, be sent into different terminals after recovering original signal.
Light wave is transmitted along an optical fiber, can load very high-speed simultaneously digital signal, or very wide band signal.People
It is expected that playing the potentiality of optical fiber, makes the more information of optical fiber load, can be realized by multiplexing technology.Work as light wave transmissions
To after receiving end, demultiplexed device separates the light carrier of various wavelength, then by photoreceiver for further processing to restore
Original signal is sent into different terminals, realizes the signal transmission of high efficiency, diversification.The wavelength-division multiplex of early stage typically refers to only have
The system of two channels (wavelength) of 1310nm and 1550nm, wavelength-division multiplex system is in 1550nm wavelength section while to make at present
With 8,16 or more wavelength, the optical communication system constituted on a pair of of optical fiber or on simple optical fiber, wherein between each wavelength
Between be divided into 1.6nm, 0.8nm or lower, corresponding about 200GHz, 100GHz or narrower bandwidth.It in this case, is difference
In the former, in the same window (1550nm) the lesser wavelength-division multiplex of channel spacing call dense wave division multipurpose (English name:
Dense Wavelength Division Multiplexing, referred to as: DWDM).
Array waveguide grating (English name: Arrayed Waveguide Grating, referred to as: AWG) it is the wave that will be combined
One of the component of long optical signal demultiplexing, is the one preferred technique in dense wavelength division multiplexing system.Demultiplexing need by it is multiple not
The optical signal transmitted in cochannel passes through the channel output of multiple propagation light in array waveguide grating respectively.But by defeated
The coupling of the light and photodetector of waveguide is not easy to out.User oneself carry out in use coupling difficulty it is bigger, also
It is possible that destroying normal optical path, causes coupling to fail, it could even be possible to causing the damage of component, influence normally to use.
Summary of the invention
The purpose of the present invention is to provide a kind of light-receiving mould group and preparation method thereof, light receiving element, can directly by
The optical signal of demultiplexing is coupled, user-friendly, streamline operation.
The embodiment of the present invention is achieved in that
The one side of the embodiment of the present invention provides a kind of light-receiving mould group, including substrate, the battle array of setting on the substrate
Train wave guide grating, and the multiple photodetectors arranged in the same direction of setting on the substrate, multiple photoelectricity
In the same plane, multiple photosurfaces are corresponding with the output end face of the array waveguide grating to be set the photosurface of detector
It sets, makes to couple with multiple photosurfaces respectively by the multi beam emergent light of the array waveguide grating.
Optionally, it is additionally provided with boss on the substrate, the array waveguide grating passes through the boss and the base
Plate is fixedly connected.
Optionally, the photodetector is fixedly connected by being laid with the substrate of electrode with the substrate, and the light
Electric explorer is electrically connected with the electrode.
Optionally, the output end face of the array waveguide grating is vertical with the base plan, and the photodetector is logical
It is opposite with the output end face to cross the substrate.
Optionally, the output end face of the array waveguide grating is parallel with the base plan, the array waveguide grating
It further include the fully reflecting surface with output end face angle at 45 °, the output end face stretches out the boss, the photodetection
Device setting is on the substrate and opposite with the output end face.
Optionally, further include trans-impedance amplifier, trans-impedance amplifier fixed setting on the substrate, for it is multiple
The photodetector electrical connection.
Optionally, it is provided with gold thread between the trans-impedance amplifier and multiple photodetectors, makes described to put across resistance
Big device is bonded with multiple photodetectors by the gold thread respectively.
The another aspect of the embodiment of the present invention provides a kind of production method of light-receiving mould group, comprising the following steps: in base
Array waveguide grating is set on plate；It arranges in the same direction on substrate multiple photodetectors, wherein multiple photoelectricity are visited
Survey the photosurface of device in the same plane；Adjust the photosurface of the photodetector and the output end of the array waveguide grating
Face is corresponding and fixed, makes to couple with multiple photosurfaces respectively by the multi beam emergent light of the array waveguide grating.
Optionally, the light-receiving mould group further includes trans-impedance amplifier；The photosurface of the adjustment photodetector
It is corresponding with the output end face of the array waveguide grating and after fixing, the method also includes: it is arranged on the substrate
The trans-impedance amplifier；The trans-impedance amplifier is passed through gold thread with multiple photodetectors respectively to be bonded.
The embodiment of the present invention in another aspect, a kind of light receiving element is provided, including described in any one as described above
Light-receiving mould group and trans-impedance amplifier, the trans-impedance amplifier are fixed on the substrate of the light-receiving mould group, are used for
It is electrically connected with multiple photodetectors of the light-receiving mould group.
The beneficial effect of the embodiment of the present invention includes:
Light-receiving mould group provided in an embodiment of the present invention and preparation method thereof, light receiving element, by being disposed on the substrate
Array waveguide grating, and the photodetector being correspondingly arranged with array waveguide grating can be directly by the multi beam of demultiplexing
Optical signal is coupled with the photosurface of corresponding photodetector, and user is using light-receiving mould group provided in an embodiment of the present invention
When, it is not necessary to carry out coupling operation again, directly with needed for other connection structure such as trans-impedance amplifier between be correspondingly arranged and
Gold thread bonding, user-friendly, streamline operation, and improve the packaging efficiency of light-receiving mould group.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is one of the structural schematic diagram of light-receiving mould group provided in an embodiment of the present invention；
Fig. 2 is the second structural representation of light-receiving mould group provided in an embodiment of the present invention；
Fig. 3 is the third structural representation of light-receiving mould group provided in an embodiment of the present invention；
Fig. 4 is the four of the structural schematic diagram of light-receiving mould group provided in an embodiment of the present invention；
Fig. 5 is one of the flow chart of light-receiving mould group production method provided in an embodiment of the present invention；
Fig. 6 is the two of the flow chart of light-receiving mould group production method provided in an embodiment of the present invention.
Icon: 100- light-receiving mould group；110- substrate；120- array waveguide grating；125- output end face；127- total reflection
Face；130- photodetector；140- boss；150- substrate；160- trans-impedance amplifier；170- gold thread.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, or be somebody's turn to do
Invention product using when the orientation or positional relationship usually put, be merely for convenience of description of the present invention and simplification of the description, without
It is that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore not
It can be interpreted as limitation of the present invention.In addition, term " first ", " second " etc. are only used for distinguishing description, and should not be understood as referring to
Show or imply relative importance.
In addition, the terms such as term "horizontal", "vertical" are not offered as requiring component abswolute level or pendency, but can be slightly
Low dip.It is not to indicate that the structure has been had to if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It is complete horizontal, but can be slightly tilted.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirect by intermediary
It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
Referring to Fig.1 and 2, the embodiment of the present invention provides a kind of light-receiving mould group 100, including substrate 110, setting in base
Array waveguide grating 120 on plate 110, and the multiple photodetectors arranged in the same direction being arranged on substrate 110
130, and the photosurface of multiple photodetectors 130 is in the same plane, the output of multiple photosurfaces and array waveguide grating 120
End face 125 is correspondingly arranged, and makes to couple with multiple photosurfaces respectively by the multi beam emergent light of array waveguide grating 120.
Array waveguide grating 120 first by light source (the light modulating signal containing multi-wavelength) via partial wave element (such as: input star
Type coupler) it is divided into several optical signal beams roughly equal to dozens of amplitude, then these optical signals are sequentially imported in advance
It designs in the array waveguide grating 120 of length, so that it is respectively possessed specific output phase, then via output star coupler
Afterwards, optical signal is successively exported from the output end face 125 of array waveguide grating 120.Array waveguide grating 120 has small middle cardiac wave
Long offset, wide passband spectral response, low insertion loss, low channel interference, low polarization correlated, flat spectral response
Equal many merits, can effectively promote the quality of optic path.
The semiconductor devices that photodetector 130 is made of a PN junction has one direction conductive characteristic, in illumination item
Photoelectric current can be generated under part.If connecting load on its external circuit, load can obtain electric signal, moreover, electric signal
The corresponding change with the intensity of illumination variation of photodetector 130.When array waveguide grating 120 multi beam emergent light respectively with
After the photosurface coupling of multiple photodetectors 130, the multi beam optical signal for exporting array waveguide grating 120 is converted to respective phase
The electric signal answered.
It should be noted that as shown in figure 3, multiple photodetectors 130 are arranged in the same direction on substrate 110, originally
The orientation is not specifically limited in inventive embodiments, is not limited to orientation as shown in Figure 3, multiple photoelectricity
The purpose that detector 130 is arranged in the same direction is so that the multi beam optical signal incidence respectively that array waveguide grating 120 exports
In the photosurface of corresponding photodetector 130, therefore, as long as can guarantee the row of the photosurface of multiple photodetectors 130
Column direction is matched with the orientation of the multi beam emergent light of array waveguide grating 120, passes through the multi beam of array waveguide grating 120
Emergent light is coupled with the photosurface of multiple photodetectors 130 respectively.
In addition, the purpose that the output end face 125 of multiple photosurfaces and array waveguide grating 120 is correspondingly arranged is also guarantee two
Therefore coupling between person is not made corresponding mode and corresponding distance between the two in the embodiment of the present invention
It is specific to limit, as long as can be realized coupling between the two.
Light-receiving mould group 100 provided in an embodiment of the present invention, by the array waveguide grating 120 being arranged on substrate 110,
And the photodetector 130 being correspondingly arranged with array waveguide grating 120, can directly by the multi beam optical signal of demultiplexing with it is right
The photosurface for the photodetector 130 answered is coupled, user when using light-receiving mould group 100 provided in an embodiment of the present invention,
Need not carry out coupling operation again, directly with needed for other connection structure such as trans-impedance amplifier between be correspondingly arranged and gold thread
Bonding, user-friendly, streamline operation, and improve the packaging efficiency of light-receiving mould group 100.
It is exemplary, as depicted in figs. 1 and 2, boss 140 is additionally provided on substrate 110, array waveguide grating 120 passes through
Boss 140 is fixedly connected with substrate 110.
So, convenient for needing to couple between the output end face 125 of array waveguide grating 120 and photodetector 130
Position correspondence, reduce operation difficulty, be conducive to promoted assembling coupling efficiency.Wherein, it the setting position of boss 140 and sets
It sets in the height embodiment of the present invention and is not especially limited, those skilled in the art can couple knot according to needed for design structure
Structure relationship is specifically set.
It is exemplary, can also on substrate 110 a recessed groove, make the output end face 125 and base of array waveguide grating 120
There is a certain distance between plate 110, facilitate the setting and cooperation of subsequent component.
Optionally, as shown in Figure 1, photodetector 130 connects by the way that the substrate 150 and substrate 110 that are laid with electrode are fixed
It connects, and photodetector 130 is electrically connected with the electrode in substrate 150.
It should be noted that the embodiment of the present invention is not particularly limited the structure type of substrate 150, exemplary, substrate
150 can be set to cuboid, lay electrode in the one side of cuboid and side adjacent thereto, the one side of cuboid is for pasting
Setting photodetector 130 is closed, side adjacent thereto is for being electrically connected with other electronic components to constitute access.Alternatively,
Those skilled in the art can also according to actual needs by the structure setting of substrate 150 be other different shapes or thickness, with
Meet matching requirements.
The first embodiment of the embodiment of the present invention, using the structure of upright-type light electric explorer 130.As shown in Figure 1,
The output end face 125 of array waveguide grating 120 is vertical with 110 plane of substrate, i.e., array waveguide grating 120 is arranged with substrate 110
Place plane is vertical, and photodetector 130 is arranged in a manner of upright by substrate 150, the photosurface of photodetector 130 with
The output end face 125 of array waveguide grating 120 is opposite.
Exemplary, usual array waveguide grating 120 includes input waveguide, input star coupler, Waveguide array, output star
Type coupler and output waveguide etc. are constituted, and include output waveguide at the output end face 125 of array waveguide grating 120, after demultiplexing
Optical signal from output waveguide project, that is, from the output end face 125 of array waveguide grating 120 project (arrow institute as shown in figure 1
The direction shown), according to the position for the direction setting photodetector 130 that optical signal projects, make the photosurface of photodetector 130
It is corresponding with the optical signal direction being emitted by the output end face 125 of array waveguide grating 120.Pass through array waveguide grating 120
The multi beam optical signal that output end face 125 is emitted is coupled with multiple photosurfaces respectively, to convert optical signals to electric signal.
The another embodiment of the embodiment of the present invention, using 130 structure of flatwise photodetector.Such as Fig. 2 and Fig. 4 institute
Show, the output end face 125 of array waveguide grating 120 is parallel with 110 plane of substrate, i.e., array waveguide grating is arranged with substrate 110
120 plane is parallel, and array waveguide grating 120 further includes the fully reflecting surface 127 with the angle at 45 ° of output end face 125, and defeated
Boss 140 is stretched out in end face 125 out, at the space formed with substrate 110, the photosurface and Waveguide array light of photodetector 130
The output end face 125 of grid 120 is opposite, so that array waveguide grating 120 is coupled with photodetector 130.
Specifically, tool can be set into there are two the stage body of different height plane in boss 140, array waveguide grating 120 is set
It sets on the stage body of higher level.So, there is a difference in height, light at the relatively low degree on output end face 125 and stage body
Electric explorer 130 can be set up directly at the relatively low degree on stage body, to realize optical coupling.In another example can also be by boss 140
It is set as simple cuboid, the output end face 125 of array waveguide grating 120 and substrate 110 is made to form certain difference in height, light
Electric explorer 130 can be set up directly on the suitable position on substrate 110, to realize optical coupling.
Likewise, when the difference in height formed between the output end face 125 and substrate 110 of array waveguide grating 120 cannot expire
When the demand of sufficient optical coupling, can also be controlled by substrate 150 photodetector 130 photosurface and output end face 125 it
Between it is specific, to promote the ability of optical coupling.
The fully reflecting surface 127 with the angle at 45 ° of output end face 125 formed by rubbing down or other form processings, can
The direction of propagation (as shown by the arrows in Figure 2) for changing optical signal, as shown in Fig. 2, photodetector 130 is located at output end face 125
Underface and photosurface towards output end face 125.So, to provide the structure type of another light-receiving mould group 100,
It is compact-sized between each composition component in the light-receiving mould group 100 of this structure, it is also beneficial to improve subsequent overall package
Size minimizes entire optical texture.
Exemplary, as shown in Figure 3 and Figure 4, the light-receiving mould group 100 of the embodiment of the present invention further includes trans-impedance amplifier 160,
Trans-impedance amplifier 160 is fixed on substrate 110, for being electrically connected with multiple photodetectors 130.
Specifically, trans-impedance amplifier 160 is arranged in the device architecture of optic communication, it is for intensity lesser conversion electricity
Signal carries out the sensitive detection parts of a degree of noise amplification.When the photosurface of photodetector 130 is illuminated by the light, PN junction is in anti-
To biasing, photo-generated carrier generates drift under the action of electric field, generates photoelectric current in external circuit.Photoelectric current across resistance by amplifying
It is exported after the amplification of device 160, thereby realizes the function that optical signal is converted into electric signal and then tentatively amplifies electric signal.
Trans-impedance amplifier 160 may be provided at the suitable position on substrate 110, user can according to oneself demand selector channel into
Row electrical connection, keeps the applicability of light-receiving mould group 100 more flexible.Trans-impedance amplifier 160 is set in predeterminated position, so that this hair
When in use, the gold thread bonding in channel needed for directly carrying out can be used the light-receiving mould group 100 of bright embodiment, light-receiving mould group
100 whole assembly is more reliable and more stable, advantageously reduces the loss of optical coupling.
Optionally, as shown in figure 4, being provided with gold thread 170 between trans-impedance amplifier 160 and multiple photodetectors 130, make
Trans-impedance amplifier 160 is bonded with multiple photodetectors 130 by gold thread 170 respectively.
Specifically, passing through connecting pin (for example, can be electrode substrate 150 in) of the gold thread 170 by trans-impedance amplifier 160
Connection is bonded between photodetector 130, to directly form finished product, user directly selects suitable connection side in use
The product that formula and interface channel are constituted.
It should be noted that those skilled in the art should know, in above-mentioned bonding connection, commonly use gold thread 170 or
Spun gold is as connection medium, and as needed, those skilled in the art are also an option that other can satisfy bonding connection request
Other connection media.
The embodiment of the invention also provides a kind of production methods of light-receiving mould group 100, as shown in figure 5, including following step
It is rapid:
S100, array waveguide grating 120 is set on substrate 110.
S200, multiple photodetectors 130 of arranging in the same direction on substrate 110, wherein multiple photodetectors
130 photosurface is in the same plane.
S300, the photosurface for adjusting photodetector 130 and the output end face 125 of array waveguide grating 120 are corresponding simultaneously
It is fixed, make to couple with multiple photosurfaces respectively by the multi beam emergent light of array waveguide grating 120.
The method of production light-receiving mould group 100 provided in an embodiment of the present invention, by array waveguide grating 120 with multiple along same
The photodetector 130 of one direction arrangement is fixed on substrate 110, realizes array waveguide grating 120 and photodetector 130
Optocoupler merges the module for becoming an entirety.It reduces because the influence that outside environmental elements generate optical coupling, improves light
The stability of receiving module 100.Remove from user voluntarily assemble trouble while, have using use mass automation flowing water
Assembling makes the more efficient of assembling.
Light-receiving mould group 100 further includes trans-impedance amplifier 160, as shown in fig. 6, in the photosensitive of adjustment photodetector 130
Face is corresponding with the output end face 125 of array waveguide grating 120 and after fixing, this method further include:
S400, trans-impedance amplifier 160 is set on substrate 110.
S500, trans-impedance amplifier 160 is bonded by gold thread 170 respectively with multiple photodetectors 130.
Specifically, can be directly electrically connected by gold thread 170 between trans-impedance amplifier 160, gold thread 170 can also be connected
On electrode in substrate 150, it is electrically connected again with photodetector 130 by electrode.
The embodiment of the invention also provides a kind of light receiving elements, including light-receiving mould described in any one as described above
Group 100 and trans-impedance amplifier 160, trans-impedance amplifier 160 are fixed on the substrate 110 of light-receiving mould group 100, are used for
It is electrically connected with multiple photodetectors 130 of light-receiving mould group 100.The light receiving element includes to connect with the light in previous embodiment
Receive the identical structure of mould group 100 and beneficial effect.The structure and beneficial effect of light-receiving mould group 100 are in the aforementioned embodiment
It is described in detail, details are not described herein.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of light-receiving mould group, which is characterized in that including substrate, the array waveguide grating of setting on the substrate, and
The multiple photodetectors arranged in the same direction on the substrate are set, and the photosurface of multiple photodetectors exists
On same plane, the output end face of multiple photosurfaces and the array waveguide grating is correspondingly arranged, and is made through the array
The multi beam emergent light of waveguide optical grating is coupled with multiple photosurfaces respectively.
2. light-receiving mould group according to claim 1, which is characterized in that it is additionally provided with boss on the substrate, it is described
Array waveguide grating is fixedly connected by the boss with the substrate.
3. light-receiving mould group according to claim 2, which is characterized in that the photodetector is by being laid with electrode
Substrate is fixedly connected with the substrate, and the photodetector is electrically connected with the electrode.
4. light-receiving mould group according to claim 3, which is characterized in that the output end face of the array waveguide grating and institute
It is vertical to state base plan, the photodetector is opposite with the output end face by the substrate.
5. light-receiving mould group according to claim 3, which is characterized in that the output end face and base of the array waveguide grating
Plate plane is parallel, and the array waveguide grating further includes the fully reflecting surface with output end face angle at 45 °, the output end
The boss is stretched out in face, and the photodetector setting is on the substrate and opposite with the output end face.
6. light-receiving mould group described in -5 any one according to claim 1, which is characterized in that it further include trans-impedance amplifier, institute
Trans-impedance amplifier fixed setting is stated on the substrate, for being electrically connected with multiple photodetectors.
7. light-receiving mould group according to claim 6, which is characterized in that the trans-impedance amplifier and multiple photoelectricity are visited
It surveys between device and is provided with gold thread, be bonded the trans-impedance amplifier with multiple photodetectors by the gold thread respectively.
8. a kind of production method of light-receiving mould group characterized by comprising
Array waveguide grating is set on substrate；
It arranges in the same direction on substrate multiple photodetectors, wherein the photosurface of multiple photodetectors is same
In one plane；
The photosurface for adjusting the photodetector is corresponding with the output end face of the array waveguide grating and fixed, makes to pass through
The multi beam emergent light of the array waveguide grating is coupled with multiple photosurfaces respectively.
9. the production method of light-receiving mould group according to claim 8, which is characterized in that the light-receiving mould group further includes
Trans-impedance amplifier；
The photosurface of the adjustment photodetector is corresponding with the output end face of the array waveguide grating and fixes it
Afterwards, the method also includes:
The trans-impedance amplifier is set on the substrate；
The trans-impedance amplifier is passed through gold thread with multiple photodetectors respectively to be bonded.
10. a kind of light receiving element, which is characterized in that the light-receiving mould group including claim 1-5 any one, and across resistance
Amplifier, the trans-impedance amplifier are fixed on the substrate of the light-receiving mould group, for the light-receiving mould group
Multiple photodetector electrical connections.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110736975A (en) * | 2019-11-07 | 2020-01-31 | 上海禾赛光电科技有限公司 | Receiving module and laser radar comprising same |
| CN112821954A (en) * | 2019-11-15 | 2021-05-18 | 讯芯电子科技（中山）有限公司 | Optical module device |
| CN113568113A (en) * | 2020-04-29 | 2021-10-29 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| TWI786599B (en) * | 2021-04-15 | 2022-12-11 | 國立高雄科技大學 | High-Speed Optical Diode Structure with Corner Reflection |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105425351A (en) * | 2015-12-14 | 2016-03-23 | 博创科技股份有限公司 | Packaging structure of light receiving/ transmitting sub module and manufacturing method thereof |
| CN106209254A (en) * | 2016-07-08 | 2016-12-07 | 河南仕佳光子科技股份有限公司 | Multi-wavelength hybrid integrated receptor |
| CN107688216A (en) * | 2017-10-10 | 2018-02-13 | 成都优博创通信技术股份有限公司 | Optical Receivers and optical communication system |
| CN209102958U (en) * | 2018-11-14 | 2019-07-12 | 珠海市本佳科技有限公司 | Light-receiving mould group and light receiving element |
-
2018
- 2018-11-14 CN CN201811355086.4A patent/CN109254365A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105425351A (en) * | 2015-12-14 | 2016-03-23 | 博创科技股份有限公司 | Packaging structure of light receiving/ transmitting sub module and manufacturing method thereof |
| CN106209254A (en) * | 2016-07-08 | 2016-12-07 | 河南仕佳光子科技股份有限公司 | Multi-wavelength hybrid integrated receptor |
| CN107688216A (en) * | 2017-10-10 | 2018-02-13 | 成都优博创通信技术股份有限公司 | Optical Receivers and optical communication system |
| CN209102958U (en) * | 2018-11-14 | 2019-07-12 | 珠海市本佳科技有限公司 | Light-receiving mould group and light receiving element |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110736975A (en) * | 2019-11-07 | 2020-01-31 | 上海禾赛光电科技有限公司 | Receiving module and laser radar comprising same |
| CN110736975B (en) * | 2019-11-07 | 2020-11-27 | 上海禾赛光电科技有限公司 | Receiving module and laser radar comprising same |
| CN112821954A (en) * | 2019-11-15 | 2021-05-18 | 讯芯电子科技（中山）有限公司 | Optical module device |
| CN113568113A (en) * | 2020-04-29 | 2021-10-29 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| WO2021218464A1 (en) * | 2020-04-29 | 2021-11-04 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| TWI786599B (en) * | 2021-04-15 | 2022-12-11 | 國立高雄科技大學 | High-Speed Optical Diode Structure with Corner Reflection |
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