CN211947207U - Auxiliary tool with arc suppression function - Google Patents
Auxiliary tool with arc suppression function Download PDFInfo
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- CN211947207U CN211947207U CN201922414976.4U CN201922414976U CN211947207U CN 211947207 U CN211947207 U CN 211947207U CN 201922414976 U CN201922414976 U CN 201922414976U CN 211947207 U CN211947207 U CN 211947207U
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Abstract
The utility model relates to an arc suppression function auxiliary tool, which comprises a tool body, wherein molybdenum rods are arranged on the left side and the right side of the tool body and used as auxiliary anodes for adsorbing secondary electrons, the molybdenum rods are connected with a zero line, the tool further comprises a base and a driving device at the bottom, the driving device comprises a driving motor, a conveyor belt and a rotating shaft, the rotating shaft is arranged on the base, a titanium pipe is arranged in the middle of a target material, and the titanium pipe is connected with the rotating shaft so as to drive the target material to rotate; the base is provided with a water inlet pipe and a water tank, the side surface of the water tank is provided with the water inlet pipe, the water inlet pipe is hermetically connected with the titanium pipe, and the water inlet end of the water tank is connected with a water pump; the upper end of the titanium pipe is connected with the water outlet pipe in a sealing mode, the top end of the titanium pipe is connected with the bearing, the bearing is installed on the tool body, and the top end of the titanium pipe is connected with the water outlet pipeline in a sealing mode. The utility model has the advantages of simple structure, improved coating layer uniformity, abnormal arc discharge inhibition, convenient target installation and the like.
Description
Technical Field
The utility model relates to a coating equipment technical field, concretely relates to have arc function auxiliary fixtures that restrain.
Background
The working principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying to a substrate under the action of an electric field E, so that the argon atoms are ionized to generate Ar ions and new electrons; the new electrons fly to the substrate and simultaneously make spiral motion under the combined action of the electric field and the magnetic field, so that the probability of ion collision is increased. Ar ions are accelerated to fly to the cathode target under the action of an electric field, and bombard the surface of the target at high energy, so that the target is sputtered. In the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film.
According to the magnetron sputtering principle, when a low-resistance product is coated, the requirement on the sputtering rate of the target is high due to the large thickness of the film layer. In order to ensure the production efficiency, the film coating is carried out by adopting a rotary cathode high-power process at present, but the scheme has higher power, secondary electrons are difficult to be effectively adsorbed to an anode and are easy to accumulate near a glass substrate and a clamp, the problem of abnormal arc discharge is generated, and the film quality is influenced.
SUMMERY OF THE UTILITY MODEL
For solving the problem that exists among the prior art, the utility model provides a have arc function auxiliary fixtures that restrain, concrete technical scheme is as follows:
an auxiliary tool with an arc suppression function comprises a tool body, molybdenum rods are mounted on the left side and the right side of the tool body and used as auxiliary anodes for adsorbing secondary electrons, the molybdenum rods are connected with a zero line, the tool further comprises a base and a driving device at the bottom, the driving device comprises a driving motor, a conveying belt and a rotating shaft, and the rotating shaft is mounted on the base; the tool is also provided with a target material, a titanium tube is arranged in the middle of the target material, and the titanium tube is connected with the rotating shaft so as to drive the target material to rotate;
the base is provided with a water inlet pipe and a water tank, the side surface of the water tank is provided with the water inlet pipe, the water inlet pipe is hermetically connected with the titanium pipe, and the water inlet end of the water tank is connected with a water pump;
the upper end of the titanium pipe is connected with the water outlet pipe in a sealing mode, the top end of the titanium pipe is connected with the bearing, the bearing is installed on the tool body, and the top end of the titanium pipe is connected with the water outlet pipeline in a sealing mode.
Further, the diameter of the molybdenum rod is 10-15 mm.
Furthermore, the side of the base is provided with a target material loading and unloading device, the target material loading and unloading device comprises a hydraulic lifting device, the top end of the hydraulic lifting device is provided with a telescopic rod, the telescopic rod is controlled to stretch through a driving motor, the front end of the telescopic rod is provided with a clamping device, the clamping device can clamp the target material tightly, and the target material is unloaded or installed on the base through lifting and stretching. The utility model has the advantages that: the utility model discloses can promote target surface quality, reduce abnormal discharge, restrain abnormal arc discharge. By adopting the cylindrical target material, the target material is rotated during working, so that the target material can not form a pit when being bombarded, the formation of a sputtering oxide layer is avoided, the utilization rate of the target material is improved, and the uniformity of a coating layer is improved. And cooling water is introduced into the titanium tube to prevent the temperature from being too high. The utility model discloses still be provided with the device of auto-control handling target, realize the auto-control handling of target, reduce artifical intensity of labour. Therefore, the utility model has the advantages of simple structure, improved uniformity of the coating layer, inhibition of abnormal arc discharge, convenience for target installation and the like.
Drawings
Fig. 1 is a schematic structural diagram of an auxiliary tool with arc suppression function according to an embodiment of the present invention.
The device comprises a molybdenum rod 1, a base 2, a driving motor 3, a conveyor belt 4, a rotating shaft 5, a titanium tube 6, a target 7, a water outlet pipe 8, a bearing 9, a water inlet pipe 10, a water tank 11, a hydraulic lifting device 12, a telescopic rod 13, a driving motor 14 and a clamping device 15.
The specific implementation mode is as follows:
in order to deepen understanding of the present invention, the following detailed description is made on the embodiments of the present invention with reference to the accompanying drawings.
It should be understood that the structure, ratio, size and the like shown in the drawings attached to the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and are not used for limiting the limit conditions that the present invention can be implemented, so that the present invention has no technical essential meaning, and any structure modification, ratio relationship change or size adjustment should still fall within the scope that the technical content disclosed in the present invention can cover without affecting the function that the present invention can produce and the purpose that the present invention can achieve.
Examples
With reference to figure 1 of the drawings,
an auxiliary tool with an arc suppression function comprises a tool body, molybdenum rods 1 are mounted on the left side and the right side of the tool body and used as auxiliary anodes for adsorbing secondary electrons, the molybdenum rods 1 are connected with a zero line, the tool further comprises a base 2 and a driving device, the driving device comprises a driving motor 3, a conveying belt 4 and a rotating shaft 5, and the rotating shaft 5 is mounted on the base 2; the target material is also installed, a titanium tube 6 is arranged in the middle of the target material 7, and the titanium tube 6 is connected with the rotating shaft 5 so as to drive the target material 7 to rotate;
a water inlet pipe 10 and a water tank 11 are arranged on the base 2, the water inlet pipe 10 is arranged on the side surface of the water tank 11, the water inlet pipe 10 is hermetically connected with the titanium pipe 6, and the water inlet end of the water tank 11 is connected with a water pump;
the upper end of the titanium pipe 6 is hermetically connected with the water outlet pipe 8, the top end of the titanium pipe 6 is connected with the bearing 9, the bearing 9 is installed on the tool body, and the top end of the titanium pipe 6 is hermetically connected with the water outlet pipeline 8.
Further, the diameter of the molybdenum rod 1 is 10-15 mm.
Further, a target material handling device is mounted on the side face of the base 2, the target material handling device comprises a hydraulic lifting device 12, an extensible rod 13 is mounted at the top end of the hydraulic lifting device 12, the extensible rod 13 is controlled to extend and retract through a driving motor 14, a clamping device 15 is arranged at the front end of the extensible rod 13, the clamping device 15 can clamp the target material 7, and the target material 7 can be dismounted or mounted on the base 2 through lifting and retracting. The device can improve the surface quality of the target 7, reduce abnormal discharge and inhibit abnormal arc discharge. By adopting the cylindrical target material, the target material is rotated during working, so that the target material can not form a pit when being bombarded, the formation of a sputtering oxide layer is avoided, the utilization rate of the target material is improved, and the uniformity of a coating layer is improved. And cooling water is introduced into the titanium tube to prevent the temperature from being too high.
The technical means disclosed by the scheme of the utility model is not limited to the technical means disclosed by the technical means, but also comprises the technical scheme consisting of the equivalent replacement of the technical features. The present invention is not to be considered as the best thing, and belongs to the common general knowledge of the technicians in the field.
Claims (3)
1. The auxiliary tool with the arc suppression function is characterized by comprising a tool body, molybdenum rods are mounted on the left side and the right side of the tool body and used as auxiliary anodes for adsorbing secondary electrons, the molybdenum rods are connected with a zero line, the tool further comprises a base and a driving device at the bottom, the driving device comprises a driving motor, a conveying belt and a rotating shaft, and the rotating shaft is mounted on the base; the tool is also provided with a target material, a titanium tube is arranged in the middle of the target material, and the titanium tube is connected with the rotating shaft so as to drive the target material to rotate;
the base is provided with a water inlet pipe and a water tank, the side surface of the water tank is provided with the water inlet pipe, the water inlet pipe is hermetically connected with the titanium pipe, and the water inlet end of the water tank is connected with a water pump;
the upper end of the titanium pipe is connected with the water outlet pipe in a sealing mode, the top end of the titanium pipe is connected with the bearing, the bearing is installed on the tool body, and the top end of the titanium pipe is connected with the water outlet pipeline in a sealing mode.
2. The arc suppression auxiliary tool according to claim 1, wherein the diameter of the molybdenum rod is 10-15 mm.
3. The arc suppression function auxiliary tool according to claim 1, wherein a target material handling device is mounted on a side surface of the base, the target material handling device comprises a hydraulic lifting device, a telescopic rod is mounted at the top end of the hydraulic lifting device, the telescopic rod is controlled to extend and retract through a driving motor, a clamping device is arranged at the front end of the telescopic rod, the clamping device can clamp the target material, and the target material can be detached or mounted on the base through lifting and retracting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922414976.4U CN211947207U (en) | 2019-12-29 | 2019-12-29 | Auxiliary tool with arc suppression function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922414976.4U CN211947207U (en) | 2019-12-29 | 2019-12-29 | Auxiliary tool with arc suppression function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211947207U true CN211947207U (en) | 2020-11-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922414976.4U Active CN211947207U (en) | 2019-12-29 | 2019-12-29 | Auxiliary tool with arc suppression function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211947207U (en) |
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2019
- 2019-12-29 CN CN201922414976.4U patent/CN211947207U/en active Active
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