CN211393876U - Polysilicon silicon core preparation device - Google Patents
Polysilicon silicon core preparation device Download PDFInfo
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- CN211393876U CN211393876U CN201922234979.XU CN201922234979U CN211393876U CN 211393876 U CN211393876 U CN 211393876U CN 201922234979 U CN201922234979 U CN 201922234979U CN 211393876 U CN211393876 U CN 211393876U
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Abstract
The utility model discloses a polysilicon silicon core preparation device, which comprises a silicon core furnace and a zone-melting heating device, wherein the zone-melting heating device comprises a heating component and an adjusting component, the heating component comprises a heating coil and a heating sheet, the heating coil and the heating sheet are arranged in the furnace body of the silicon core furnace, the heating sheet is matched with the heating coil and can heat silicon core master batch, and zone melting is formed on the surface of the silicon core master batch; the adjusting component is arranged outside the furnace body of the silicon core furnace, is in transmission connection with the heating sheet and can adjust the spatial position of the heating sheet in the furnace body. The utility model provides a polycrystalline silicon core preparation facilities can adjust the spatial position of heating plate, and then stabilizes the zone-melting temperature of silicon core masterbatch within certain extent, has avoided because the undulant problem of temperature, electric current causes trouble blowing out, the silicon core resistivity is low, silicon core carbon content is high, the silicon core masterbatch explodes the material scheduling problem.
Description
Technical Field
The utility model relates to a silicon core preparation facilities, in particular to polysilicon silicon core preparation facilities belongs to polycrystalline silicon production technical field.
Background
In the production of polycrystalline silicon, due to the influence of temperature and current in the process of drawing a silicon core, the problems of furnace shutdown due to faults, low resistivity of the silicon core, material explosion of silicon core master batch and the like are caused; in addition, the carbon content of the silicon core is increased due to the graphite heating sheet, and the loss of the heating sheet (graphite) is serious, so that the phenomena of unstable production, increased cost, reduced quality, incapability of using the silicon core and the like are caused.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to provide a preparation device of polysilicon silicon core, which is used for overcoming the defects in the prior art.
For realizing the purpose of the utility model, the utility model discloses a technical scheme include:
the embodiment of the utility model provides a polycrystalline silicon core preparation facilities, it includes silicon core stove and zone-melting heating device, zone-melting heating device includes heating element and adjusting part, heating element includes heating coil and heating plate, heating coil and heating plate set up in the furnace body of silicon core stove, the heating plate sets up between heating coil and the silicon core masterbatch of being arranged in the furnace body, and the heating plate with the heating coil phase-match can heat the silicon core masterbatch, and then form zone-melting on silicon core masterbatch surface;
the adjusting component is arranged outside the furnace body of the silicon core furnace, is in transmission connection with the heating sheet and can adjust the spatial position of the heating sheet in the furnace body.
Further, the adjusting assembly comprises a first adjusting piece and a second adjusting piece, the first adjusting piece and the second adjusting piece are in transmission connection with the heating sheet, wherein the first adjusting piece is used for driving the heating sheet to move along a first plane, and then adjusting the relative position of the heating sheet and the center of the heating coil; the second adjusting piece is used for driving the heating sheet to move along a second plane, and then the distance between the heating sheet and the heating coil silicon core master batch is adjusted.
Further, the first plane is a vertical plane, and the second plane is a horizontal plane.
Further, the adjusting component is connected with the heating plate through a metal rod.
Furthermore, the first adjusting component comprises a lifting mechanism arranged along a first plane and a sliding block movably matched with the lifting mechanism, the heating plate is fixedly connected with the sliding block, and the sliding block is further connected with an adjusting knob.
Furthermore, the second adjusting component comprises an adjusting screw and a double-rocker mechanism in transmission connection with the adjusting screw, and the double-rocker mechanism is connected with the heating plate.
Furthermore, the double-rocker mechanism is fixedly connected with the sliding block.
Furthermore, the adjusting knob and the adjusting screw rod are both arranged on a control wheel disc.
Further, the heating coil is still connected with the current controller electricity, and, still be provided with the temperature monitoring subassembly in the furnace body, the temperature monitoring subassembly includes temperature sensor.
Furthermore, the adjusting component further comprises an adjusting controller, and the temperature monitoring component, the current controller, the first adjusting part and the second adjusting part are all connected with the adjusting controller.
Furthermore, the heating plate comprises a carbon heating plate substrate and a silicon protective layer arranged on the surface of the heating plate substrate, and the heating plate substrate comprises a graphite substrate.
Compared with the prior art, the embodiment of the utility model provides a pair of polycrystalline silicon core preparation facilities, can be according to the zone-melting temperature of electric current in the heating coil and silicon core masterbatch, adjust the spatial position of the heating plate in the furnace body of silicon core stove through adjusting part, and change the relative position at interval and heating plate and heating coil center between heating plate and the heating coil, and then stabilize the zone-melting temperature of silicon core masterbatch within a certain limit, avoided because the temperature, the undulant problem of electric current causes the trouble to shut down the stove, the silicon core resistivity is low, the silicon core carbon content is high, the silicon core masterbatch explodes the material scheduling problem.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of an apparatus for preparing polysilicon silicon core according to an exemplary embodiment of the present invention;
fig. 2 is a schematic view of a part of the structure of a polysilicon silicon core preparation device according to an exemplary embodiment of the present invention.
Detailed Description
In view of the deficiencies in the prior art, the inventor of the present invention has made extensive studies and practices to provide the technical solution of the present invention. The technical solution, its implementation and principles, etc. will be further explained as follows.
Referring to fig. 1 and 2, a polysilicon silicon core preparation apparatus includes a silicon core furnace and a zone melting heating apparatus, the zone melting heating apparatus includes a heating assembly and an adjusting assembly, the heating assembly includes a current controller (not shown), a heating coil 1 and a heating sheet 2, the heating coil 1 and the heating sheet 2 are disposed in a furnace body 10 of the silicon core furnace, the current controller is connected with the heating coil 1, the heating sheet 2 is matched with the heating coil 1 and can heat silicon core master batch disposed in the furnace body of the silicon core furnace, so as to form zone melting on the surface of the silicon core master batch, wherein the silicon core master batch is accommodated in a container 6 in the furnace body 10, or the silicon core master batch is directly disposed in the furnace body 10, and the heating sheet 2 is disposed between the heating coil 1 and the silicon core master batch.
Specifically, the adjusting component 7 is arranged outside the furnace body 10, the adjusting component 10 is in transmission connection with the heating plate 2 through a metal rod 8, the heating plate can be moved in a horizontal plane and a vertical plane through the adjusting component 7, the space between the heating plate 2 and the heating coil 1 and the silicon core master batch and the relative position of the heating plate 2 and the central position of the heating coil 1 can be adjusted, the melting temperature of the surface region of the silicon core master batch can be adjusted, and the purpose of stabilizing a thermal field can be achieved.
Specifically, the adjusting assembly 7 comprises an adjusting knob 3 and an adjusting screw rod 4 which are arranged on the control wheel disc 5, and the adjusting knob 3 and the adjusting screw rod 4 are connected with the metal rod 8 through a transmission assembly 9;
specifically, the transmission assembly 9 comprises a lifting mechanism 12 arranged along the vertical direction and a sliding block 11 movably matched with the lifting mechanism 12, the sliding block 11 is further connected with the metal rod 8 through a double-rocker mechanism 13, the sliding block 11 is further connected with an adjusting knob, and the double-rocker mechanism 13 is further connected with the adjusting screw rod 4; wherein the double rocker mechanism 13 may be a four-bar linkage.
Specifically, the adjusting knob 3 can drive the slide block 11 to move along the lifting mechanism 12 in the vertical direction, and further drive the heating plate 2 to move between the heating coil and the silicon core master batch; the double-rocker structure 13 is driven to move back and forth and left and right by adjusting the adjusting screw rod 4, and then the relative position relation between the heating sheet and the central position of the heating coil is adjusted.
Specifically, the adjusting knob 3 can be adjusted in a manual adjusting manner, and the adjusting screw rod 4 is rotated to drive the heating plate to move.
Specifically, a temperature sensor (not shown in the figure) is further disposed in the furnace body 10, the temperature sensor is used for monitoring the temperature of the heating plate and/or the furnace body and/or the silicon core master batch, and the number, the arrangement position and the like of the temperature sensor can be set according to specific conditions.
Specifically, the adjusting assembly 7 is further connected with an adjusting controller (not shown in the figure), the adjusting controller is further connected with a current controller and a temperature sensor, the adjusting controller can automatically control the adjusting knob 3 and the adjusting screw rod 4 to adjust the position of the heating plate through temperature information fed back by the temperature sensor, in addition, the adjusting controller can also adjust the current in the heating coil through the current controller, and then the surface of the silicon core master batch reaches the effect of zone melting heating, so that the problem that the silicon core master batch is fried due to overhigh temperature of the furnace body and the surface of the silicon core master batch is prevented.
Specifically, the heat patch 2 may include a carbon heat patch substrate including a graphite substrate and a silicon protective layer disposed on a surface of the heat patch substrate. Specifically, in the heating process, the silicon-plated heating plate does not release carbon and other pollution impurities, and the quality of the silicon core is not affected.
Specifically, the current controller, the regulation controller, the temperature sensor, and the like may be those known to those skilled in the art, and they are commercially available.
Specifically, a silicon core master batch is placed in a furnace body of a silicon core furnace, a heating sheet substrate (such as graphite) is uniformly plated with a layer of silicon with a certain thickness on the surface to serve as a protective layer, the protective layer is completely wrapped by the heating sheet substrate, a heating sheet is placed in the furnace body and fixed to one end of a metal rod, a heating coil is electrified for heating, and the heating sheet is matched with the heating coil to heat the silicon core master batch; after the silicon core is heated to a preset temperature, the height and the distance of the heating sheet are adjusted, so that zone melting is formed on the surface of the silicon core master batch, and the silicon core is drawn by further pressing and releasing the seed crystal.
The utility model discloses a set up the carborundum heating plate in the silicon core stove, according to the distance of the manual (automatic) regulation heating plate of the rising of temperature and coil, reach the effect of zone-melting heating on the surface of silicon core material, satisfy the production needs of processing silicon core, compare prior art, the silicon core quality of producing is unqualified, and the trouble blowing out leads to production efficiency not high, according to the utility model discloses a phenomenon that zone-melting heating device greatly reduced the trouble blowing out, the silicon core carbon content of producing is lower, has reduced the waste of silicon core, has improved production efficiency.
The utility model provides a pair of polysilicon silicon core preparation facilities, wherein adopt heating coil to carry out induction heating to the heating plate, and produce the high temperature region around the heating plate, adjust the position of heating plate through carrying and adjusting the adjusting part, and then make the silicon core masterbatch be located the high temperature region of heating plate, finally reach zone-melting temperature on silicon core masterbatch surface, make the silicon core masterbatch melt, adjust the distance of heating plate and heating coil center, can put the seed crystal in pressure, keep zone-melting temperature stable simultaneously; further, the position of the heating sheet is adjusted to adjust the zone melting temperature, so that the effect of stabilizing the thermal field is achieved.
The embodiment of the utility model provides a pair of polycrystalline silicon core preparation facilities, can be according to the zone-melting temperature of electric current in the heating coil and silicon core masterbatch, adjust the spatial position of heating plate in the furnace body of silicon core stove through adjusting part, and change the interval between heating plate and the heating coil and the relative position at heating plate and heating coil center, and then stabilize the zone-melting temperature of silicon core masterbatch within a certain limit, avoided because the temperature, the undulant problem of electric current causes the trouble to shut down the stove, the silicon core resistivity is low, the silicon core carbon content is high, silicon core masterbatch explodes the material scheduling problem.
It should be understood that the above-mentioned embodiments are merely illustrative of the technical concepts and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, and therefore, the protection scope of the present invention should not be limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (10)
1. A polysilicon silicon core preparation device is characterized by comprising a silicon core furnace and a zone melting heating device, wherein the zone melting heating device comprises a heating assembly and an adjusting assembly, the heating assembly comprises a heating coil and a heating sheet, the heating coil and the heating sheet are arranged in the furnace body of the silicon core furnace, the heating sheet is arranged between the heating coil and a silicon core master batch arranged in the furnace body, and the heating sheet is matched with the heating coil and can heat the silicon core master batch, so that zone melting is formed on the surface of the silicon core master batch;
the adjusting component is arranged outside the furnace body of the silicon core furnace, is in transmission connection with the heating sheet and can adjust the spatial position of the heating sheet in the furnace body.
2. The apparatus of claim 1, wherein: the adjusting assembly comprises a first adjusting piece and a second adjusting piece, and the first adjusting piece and the second adjusting piece are in transmission connection with the heating sheet, wherein the first adjusting piece is used for driving the heating sheet to move along a first plane so as to adjust the relative position of the heating sheet and the center of the heating coil; the second adjusting piece is used for driving the heating sheet to move along a second plane, and then adjusting the distance between the heating sheet and the heating coil and the silicon core master batch.
3. The apparatus of claim 2, wherein: the first plane is a vertical plane, and the second plane is a horizontal plane.
4. The apparatus of claim 2, wherein: the adjusting component is connected with the heating plate through a metal rod.
5. The apparatus of claim 4, wherein: the first adjusting component comprises a lifting mechanism arranged along a first plane and a sliding block movably matched with the lifting mechanism, the heating plate is fixedly connected with the sliding block, and the sliding block is further connected with an adjusting knob.
6. The apparatus of claim 5, wherein: the second adjusting component comprises an adjusting screw rod and a double-rocker mechanism in transmission connection with the adjusting screw rod, and the double-rocker mechanism is further connected with the sliding block and the heating sheet.
7. The apparatus of claim 6, wherein: and the adjusting knob and the adjusting screw rod are both arranged on a control wheel disc.
8. The apparatus of claim 2, wherein: the heating coil is still connected with the current controller electricity, and, still be provided with the temperature monitoring subassembly in the furnace body, the temperature monitoring subassembly includes temperature sensor.
9. The apparatus of claim 8, wherein: the adjusting component further comprises an adjusting controller, and the temperature monitoring component, the current controller, the first adjusting piece and the second adjusting piece are all connected with the adjusting controller.
10. The apparatus of claim 1, wherein: the heating plate comprises a carbon heating plate substrate and a silicon protective layer arranged on the surface of the heating plate substrate, and the heating plate substrate comprises a graphite substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922234979.XU CN211393876U (en) | 2019-12-13 | 2019-12-13 | Polysilicon silicon core preparation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922234979.XU CN211393876U (en) | 2019-12-13 | 2019-12-13 | Polysilicon silicon core preparation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211393876U true CN211393876U (en) | 2020-09-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922234979.XU Active CN211393876U (en) | 2019-12-13 | 2019-12-13 | Polysilicon silicon core preparation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211393876U (en) |
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2019
- 2019-12-13 CN CN201922234979.XU patent/CN211393876U/en active Active
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