CN101775642A - Combined resistance heater and energy-saving heat field design for polycrystalline silicon ingot or purifying furnace - Google Patents
Combined resistance heater and energy-saving heat field design for polycrystalline silicon ingot or purifying furnace Download PDFInfo
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- CN101775642A CN101775642A CN 201010117293 CN201010117293A CN101775642A CN 101775642 A CN101775642 A CN 101775642A CN 201010117293 CN201010117293 CN 201010117293 CN 201010117293 A CN201010117293 A CN 201010117293A CN 101775642 A CN101775642 A CN 101775642A
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Abstract
The invention relates to a combined resistance heater and an energy-saving heat field design for a polycrystalline silicon ingot or a purifying furnace, which belong to the field of structural design and manufacture of heaters of polycrystalline silicon ingots or purifying furnaces. The heater can reduce cost and prevent the phenomenon of poor electric contact caused by long-term use after combination. The gradient design of the static heat field has obvious energy saving effect. The resistance heater consists of an upper heater, a middle heater and a lower heater. The upper heater, the middle heater and the lower heater are formed by using the method that four graphite plates are slotted to adjust the resistances thereof; the left edge and the right edge of the graphite plates are processed into sawtooth shapes, and then can be combined into square graphite coils; the connecting part is fixed by carbon fiber screws; the upper heater is formed by two graphite plates through slotting; the graphite plate, the screws and thread holes are coated with graphite slurry, and then sintered at high temperature after combination. The three heaters are controlled by an independent program to form a controllable energy-saving static heat field gradient. The simple ingot furnace decreasing crucible or increasing heat insulation material can manufacture the single resistance heater by using a method that the carbon fiber screws are applied with the graphite slurry and then fixed.
Description
Technical field:
The invention belongs to the production unit technical field of polycrystalline silicon ingot casting or purification.
Background technology:
The existing resistance-type polycrystalline silicon ingot or purifying furnace that uses is all to be to adopt graphite heater, its graphite heater can be one or is combined by graphite piece, as material cost height with the crucible of integral type, as with knockdown, under the situation of the high electric current of high temperature, add the loosening situation that reaches oxidation in contact position, produce well heater production in the time of can reducing the work-ing life of well heater and cause loose contact and beat the accident phenomenon that arc needs blowing out midway.The used polycrystalline silicon ingot or purifying furnace methods of falling crucible or rising lagging material cover that adopt produce thermograde more, as Chinese patent application 200710070538.X, Chinese patent application number 200810111800.5 disclosed ingot furnace structures, to consume inevitably on the thermal field structure more and remove some heat energy.Measure of the present invention is to utilize each parts of well heater advantage of temperature control separately as far as possible, makes the gradient thermal field that forms few power consumption in the stove, adopts isothermal thermal field simultaneously when the melted silicon material, has reduced the local unnecessary excess temperature phenomenon of quartz crucible and has produced.Using the heat radiation or the type of cooling of crucible bottom significantly also is to utilize the many distribute heats in bottom to cause thermograde, as used cooling plate scheme in the Chinese patent application numbers 200710109123.9.The use that has just forms fixed thermal field gradient when processing well heater, used as Chinese patent application numbers 200710079489.6, it does not have the present invention few local overheating and advantage of thermograde in the transformation temperature gradient Yi Full foot crucible significantly when melting charge.Another characteristics of the present invention are the information that directly obtains thermal field gradient in the stove from three thermal sensors, and other cooling method often is indirect because of its information of thermograde that the mobile grade by parts causes, and method therefor of the present invention more helps the meticulous control of thermal field.
Summary of the invention:
The present invention provides combined resistance heater and the energy-saving heat field design that a kind of polycrystalline silicon ingot or purifying furnace or purification furnace are used, and purpose is the reliability that reduces the cost of devices consume accessory and increase its work, saves heat energy through the optimizing of thermal field design simultaneously.
Resistance heater is by well heater, middle well heater and upper heater are formed down, in down well heater combine by four graphite cakes, each graphite cake is adjusted its optimal resistance through cracking, to consider the resistivity of used graphite when adjusting resistance, from the thickness of adjusting graphite cake, the bar number that cracks, long, the wide resistance optimizing that makes well heater of seam of seam.The right and left of graphite cake is processed into spination, positive tooth graphite cake that is processed into and cloudy tooth graphite cake can 90 degree be closely linked and form square graphite circle, the junction is fixed with the carbon fiber screw again, the precision of processing is wanted good so that the slit of junction minimizes, and jagged handing-over is will increase the contact area of two graphite cakes and form each other to support.Two graphite cakes that upper heater is adjusted by cracking behind the resistance are formed, and each well heater is connected to lead to into electric current with the graphite rod that contains square knuckle with the carbon fiber screw at two ends, the left and right sides.Each graphite cake junction and screw, screw place all apply black lead wash, slowly be warmed up to 1200 ℃ and carry out sintering after making up, and comprise the well heater of the globality of external graphite rod with formation.
But three well heaters are the single program temperature control all, forms the static heat field gradient of controllable and energy saving.The thermal field of conventional single heating device is a fixed, and well heater temperature inside gradient is limited, and the thermograde that form sufficient Enough by the cold degree of making the crucible below is finished the directional freeze operation.Adopt the scheme of three well heaters, the thermograde in the well heater combination can be transferred to suitable degree, as far as possible by the requirement of scattering and disappearing Full foot thermograde of bottom energy, in the reasonable time of when comprising directional freeze under well heater can be cold.Because the insulation around the crucible is all very good, in order to control crystal growth well, suitable a small amount of low-temperature receiver still needs, and this is just had by the crucible lower edge leaves little heat exchange hole on an insulation ring moving up and down and the crucible bottom thermal insulation layer and finish.The good control crystal growth also is necessary, the insulation ring that can descend when the thermograde that produces when well heater is still not enough increases thermograde, at last employ crucible bottom thermal insulation layer again and open the mode in little heat exchange hole, thermal insulation layer adopts and solidifies the graphite fibre plate, and institute's perforate can be inserted the size of adjusting the hole with different insulating rings.The ideal Energy Saving Control is not open very little that this hole or hole open.The assist measure of thermograde has increased the controllability of crystal growth and the handiness that increase equipment uses.
Three well heaters all carry out thermometric and temperature control by the temperature probe near it, and this transmitter can be occasionally infrared optics temperature measurer of thermoelectricity.Three independent temperature control programs were moved synchronously by the time, be warmed up to synchronously about 1530 ℃ earlier and carry out the melted silicon material, after the silicon materialization is intact, temperature just drops to about 1450 ℃, at this moment begins three well heaters and just is controlled at the different temperature difference and lowering the temperature lentamente to carry out controlled directional freeze.
For still to use the single heating device ingot furnace, be basically as long as will in or well heater down add and double, adjust its resistance with the degree of cracking, crux is still and will makes full use of cost and the reliability that advantage that the black lead wash reinforcement electrically contacts reduces well heater.
Description of drawings:
Fig. 1: the overall construction drawing of resistance type heater and thermal field design
Fig. 2: in or the following structure iron of well heater
Fig. 3: the structure iron of upper heater
Fig. 4: the structure iron of single heating device
Embodiment:
Ingot casting of the present invention or purification are carried out at the double-layer stainless steel stove [1] of logical water coolant, the element of its heating comprises that well heater [2], middle well heater [3] and upper heater [4] are formed down, the outside of well heater is undertaken heat insulation by thick lagging material, thermofin [6] is to adopt curing graphite fibre plate to form.Well heater is that external graphite rod is connected to carry out the heating of low-voltage, high-current with the copper electrode [5] of logical water coolant again.Crucible is placed on through thermal baffle on the stainless steel pallet of logical water coolant, and the aperture [8] that crucible [7] bottom can be driven capable heat exchange into provides low-temperature receiver in a small amount, and there is an annular warming plate movable up and down [9] below of following well heater, is beneficial to optionally strengthen insulation.All there is temperature element to carry out thermometric and temperature control in three nearest places of well heater, three well heaters of program setting all are that identical temperature heats up synchronously before the silicon material has melted, when the silicon material has melted will carry out directional freeze the time, program just is controlled to the certain thermograde of tool with three well heaters and carries out directional freeze, and the setting of thermograde is to make ingot casting carry out crystal growth with the average speed when the 15-20mm/.Wei the efficient temperature gradient of Full foot in crucible, the time variable control of well heater is arranged on cold under the considerable time of directional freeze section.Adopt best insulation measure, only provide very a spot of low-temperature receiver to reach energy-conservation effect.
In or down the concrete structure of well heater [10] see Fig. 2, it is combined by two positive tooth graphite cakes [11] [15] and two cloudy tooth graphite cakes [12] [18], have wire casing and carry out the adjustment of resistance on graphite cake, used graphite cake will use three high graphite or highdensity electrode graphite.To select for use three high graphite for paying the utmost attention to.Be processed with threaded hole [17] with the junction of graphite cake and reinforce in order to screwing in the carbon fiber screw, introduce electric current be through containing the graphite wrench graphite rod and graphite cake mutually Even connect, it also is processed with threaded hole [18] and connects with sharp Even.Well heater has the characteristics of two-way current parallel.
The concrete structure of upper heater [19] is seen Fig. 3, is made up of two symmetric graphite cakes that crack, and hole, middle composition garden is done to see and looked into hole usefulness, and two ends are fixed with the carbon fiber screw through threaded hole [22] with the graphite rod [20] of graphitiferous wrench [21].
Make up again after the graphite cake junction of three kinds of well heaters, graphite wrench, screw and threaded hole all apply black lead wash, be installed in then and slowly be warmed up to 1200 ℃ in the ingot furnace to carry out sintering curing so that well heater is integrated.
The design of well heater of the present invention and thermal field experimentizes in the growth of the silicon ingot of 270KG, and gained polycrystal silicon ingot quality well can satisfy the requirement of use.
As still using the ingot furnace of single heating device structure, its structure such as Fig. 4, be to descend or the height of middle well heater doubles, the thickness that increases graphite cake is to increase support strength, also connect with carbon fiber spiral shell nail Even through threaded hole [26] by two positive tooth graphite cakes [20] [26] and two cloudy tooth graphite cakes [21] [27], also use the graphite rod [22] of graphitiferous wrench [23] to be connected with graphite cake through threaded hole [27], the extended horizontal bench in the below of graphite wrench is more effectively to support well heater, and the method for last black lead wash as mentioned above.
Claims (7)
1. polycrystalline silicon ingot or purifying furnace or purification furnace combined resistance heater, well heater by last, in and down well heater form, three well heaters all have temperature sensor to carry out the single program temperature control, all reach first three well heater employing equitemperature control of directional freeze before the fusing at the silicon material, the program of three temperature is just set to make and is formed certain thermograde in the crucible after the beginning directional freeze, contain thermal insulation layer in conjunction with crucible bottom thermal insulation layer, in little thermal conversion hole is arranged, and below following well heater, an insulating ring movable up and down is arranged, form static energy-conservation thermal field design.
Described in the claim 1 in and down well heater adopt two of processing Chengyang, two ends odontolith China ink plates and two of cloudy tooth graphite cakes to closely combine.
Described in the claim 1 in and down to adopt the Hang Even of carbon fiber screw Jin to connect fixing in the junction of well heater, the graphite rod of two ends, the well heater left and right sides, upper, middle and lower and graphitiferous wrench connects fixing with the Hang Even of carbon fiber screw Jin.
Each graphite cake junction, graphite wrench, carbon fiber screw and the threaded hole place of the upper, middle and lower well heater described in the claim 1 all Pu apply black lead wash, carry out sintering and form integrated in order to well heater through slowly being warmed up to 1200 ℃.
5. the use carbon fiber screw described in the claim 3, but be not limited only to the carbon fiber screw, also comprise and use the graphite screw.
6. the generation type of the described thermograde of claim 1 is to consider or maximum utilization with the thermograde override that well heater forms, and inferior is the application of insulating ring up and down, the last little thermal conversion hole of going up crucible bottom thermal insulation layer of just using.In order to energy-saving effect.
7. when ingot furnace adopts the single heating device, in the aspect ratio of graphite cake, well heater increases twice down, still adopts two of positive tooth graphite cakes and two of cloudy tooth graphite cakes closely to organize.Each graphite cake junction, graphite wrench, carbon fiber screw and threaded hole place all Pu apply black lead wash, carry out sintering and form integrated in order to well heater through slowly being warmed up to 1200 ℃.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102400215A (en) * | 2011-11-08 | 2012-04-04 | 嘉兴嘉晶电子有限公司 | Variable heat exchange device of polycrystal silicon ingot furnace and control method thereof |
| CN102495128A (en) * | 2009-06-30 | 2012-06-13 | 同方威视技术股份有限公司 | Doped gas generation device |
| CN102703964A (en) * | 2012-05-08 | 2012-10-03 | 常州天合光能有限公司 | Production method of ingot single crystal |
| CN102758254A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Heating system for single crystal furnace |
| CN103334154A (en) * | 2013-05-29 | 2013-10-02 | 浙江晟辉科技有限公司 | Preparation method of polycrystalline silicon ingots based on thermal exchange technology |
| CN103526286A (en) * | 2012-07-02 | 2014-01-22 | 浙江宏业新能源有限公司 | Precise temperature adjustment device of polycrystalline ingot furnace |
| CN105200529A (en) * | 2015-09-29 | 2015-12-30 | 郎业方 | Double-region heater for single-crystal furnace |
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN107952942A (en) * | 2016-10-18 | 2018-04-24 | 福建省瑞奥麦特轻金属有限责任公司 | A kind of holding furnace for being used to continuously prepare aluminium alloy semi-solid slurry |
| CN108330537A (en) * | 2018-03-12 | 2018-07-27 | 江苏高照新能源发展有限公司 | A kind of close period polycrystalline silicon ingot casting furnace side heater |
| CN108486650A (en) * | 2018-05-24 | 2018-09-04 | 江阴东升新能源股份有限公司 | Silicon core side ingot ingot furnace thermal field structure |
| CN112080797A (en) * | 2020-10-16 | 2020-12-15 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | Combined type heat-preservation felt disc and heat-preservation felt disc structural member |
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| CN200968773Y (en) * | 2006-05-08 | 2007-10-31 | 上海普罗新能源有限公司 | Ingot furnace for preparing polycrystalline silicon |
| CN101165226A (en) * | 2007-08-23 | 2008-04-23 | 浙江精工科技股份有限公司 | Thermal field energy-saving synergistic device for polycrystalline silicon ingot casting furnace |
| CN101240448A (en) * | 2007-11-29 | 2008-08-13 | 晶湛（南昌）科技有限公司 | Vacuum purifying furnace specially used for metal silicon/silicon dioxide and purifying method thereof |
| CN201165563Y (en) * | 2007-11-12 | 2008-12-17 | 中国电子科技集团公司第四十八研究所 | Graphitic heater for polysilicon casting ingot technology |
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| CN200968773Y (en) * | 2006-05-08 | 2007-10-31 | 上海普罗新能源有限公司 | Ingot furnace for preparing polycrystalline silicon |
| CN101165226A (en) * | 2007-08-23 | 2008-04-23 | 浙江精工科技股份有限公司 | Thermal field energy-saving synergistic device for polycrystalline silicon ingot casting furnace |
| CN201165563Y (en) * | 2007-11-12 | 2008-12-17 | 中国电子科技集团公司第四十八研究所 | Graphitic heater for polysilicon casting ingot technology |
| CN101240448A (en) * | 2007-11-29 | 2008-08-13 | 晶湛（南昌）科技有限公司 | Vacuum purifying furnace specially used for metal silicon/silicon dioxide and purifying method thereof |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102495128A (en) * | 2009-06-30 | 2012-06-13 | 同方威视技术股份有限公司 | Doped gas generation device |
| CN102400215A (en) * | 2011-11-08 | 2012-04-04 | 嘉兴嘉晶电子有限公司 | Variable heat exchange device of polycrystal silicon ingot furnace and control method thereof |
| CN102703964B (en) * | 2012-05-08 | 2015-05-06 | 常州天合光能有限公司 | Production method of ingot single crystal |
| CN102703964A (en) * | 2012-05-08 | 2012-10-03 | 常州天合光能有限公司 | Production method of ingot single crystal |
| CN102758254A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Heating system for single crystal furnace |
| CN103526286A (en) * | 2012-07-02 | 2014-01-22 | 浙江宏业新能源有限公司 | Precise temperature adjustment device of polycrystalline ingot furnace |
| CN103334154A (en) * | 2013-05-29 | 2013-10-02 | 浙江晟辉科技有限公司 | Preparation method of polycrystalline silicon ingots based on thermal exchange technology |
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN105200529A (en) * | 2015-09-29 | 2015-12-30 | 郎业方 | Double-region heater for single-crystal furnace |
| CN107952942A (en) * | 2016-10-18 | 2018-04-24 | 福建省瑞奥麦特轻金属有限责任公司 | A kind of holding furnace for being used to continuously prepare aluminium alloy semi-solid slurry |
| CN108330537A (en) * | 2018-03-12 | 2018-07-27 | 江苏高照新能源发展有限公司 | A kind of close period polycrystalline silicon ingot casting furnace side heater |
| CN108330537B (en) * | 2018-03-12 | 2023-09-05 | 江苏美科太阳能科技股份有限公司 | Side heater of dense-period polycrystalline silicon ingot furnace |
| CN108486650A (en) * | 2018-05-24 | 2018-09-04 | 江阴东升新能源股份有限公司 | Silicon core side ingot ingot furnace thermal field structure |
| CN112080797A (en) * | 2020-10-16 | 2020-12-15 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | Combined type heat-preservation felt disc and heat-preservation felt disc structural member |
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Open date: 20100714 |