CN211292656U - A scanning electron microscope sample platform fixing device for nanometer experiment of impressing - Google Patents
A scanning electron microscope sample platform fixing device for nanometer experiment of impressing Download PDFInfo
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- CN211292656U CN211292656U CN201921610291.0U CN201921610291U CN211292656U CN 211292656 U CN211292656 U CN 211292656U CN 201921610291 U CN201921610291 U CN 201921610291U CN 211292656 U CN211292656 U CN 211292656U
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Abstract
The utility model provides a scanning electron microscope sample platform fixing device for nanometer experiment of impressing, includes impressing test platform, annular knurl screw, elasticity preforming clamp and scanning electron microscope sample platform, scanning electron microscope sample platform below stand and the cooperation of impressing test platform center round hole, press from both sides semicircular recess through elasticity preforming and apply the packing force to scanning electron microscope sample platform, annular knurl screw control elasticity preforming clamp's packing force to the clamping and the dismantlement of scanning electron microscope sample platform of being convenient for. The utility model discloses a this middle platform of scanning electron microscope sample platform changes the fixed transfer of sample into the tight removal of clamp of scanning electron microscope sample platform, presss from both sides tightly sample platform through clamping piece and the annular knurl screw on the test bench of impressing, has improved and has detected rapidity, stability and the accuracy that destroys the appearance and observe from mechanical properties.
Description
Technical Field
The utility model relates to a scanning electron microscope sample platform fixing device for nanometer experiment of impressing belongs to mechanical properties and detects and survey the field.
Background
After micro-nano indentation detection is performed on a micro sample, the damaged morphology of the sample needs to be observed, but due to the fact that the sample is small in size, the micro-nano indentation detection is often performed on other observation instruments such as a Scanning Electron Microscope (SEM). During the process of detecting the appearance from the mechanical property detection, the deformed sample is inevitably required to be collected from a pressing-in experiment table and transferred to an observation experiment table. In the process, the sample may generate new deformation under the interference of external force; and because the sample volume is tiny, in a press-in experiment, only individual samples pressed into the experiment table are subjected to the press-in experiment, the press-in samples and non-press-in samples are easy to be confused in the subsequent collection process, and the corresponding press-in samples are difficult to find in electron microscope observation. Even if the press-in sample is observed, the press-in damaged surface cannot be accurately observed because the posture of the sample on the press-in test stand is different from that on the observation sample stand. Even more, the sample loss during the collection and transfer process will occur.
In order to solve the problems, in order to avoid directly transferring the sample from the press-in experiment table to the observation experiment table, a method of fixing the scanning electron microscope sample table to the press-in experiment table, and directly transferring the SEM sample table and the sample thereon to the scanning electron microscope experiment table for detection after press-in detection is carried out is adopted. The fixed two prerequisites that need satisfy of scanning sample platform on the test bench of impressing: ensuring that the precision of press-in detection is not influenced; two convenient quick fixed and dismantlement scanning sample platform.
Therefore, it is necessary to design a fixing device for a scanning electron microscope sample stage for nanoimprint experiments.
Disclosure of Invention
In order to solve the not enough of micro sample difficult accurate sample destruction appearance observation of carrying on after the micro-nano mechanics that impresses detects, the utility model provides a clamping device of scanning electron microscope sample platform in micro-nano impressing, through this middle platform of scanning electron microscope sample platform, change the fixed transfer of sample into the tight removal of clamp of sample platform, through clamping piece and the annular knurl screw on the test bench of impressing to the sample platform clamp tightly, improved and detected rapidity, stability and the accuracy of destroying the appearance observation from mechanical properties.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a scanning electron microscope sample platform fixing device for nanometer experiment of impressing, includes impressing test platform, annular knurl screw, elasticity preforming clamp and scanning electron microscope sample platform, scanning electron microscope sample platform below stand and the cooperation of impressing test platform center round hole, press from both sides semicircular recess through elasticity preforming and apply the packing force to scanning electron microscope sample platform, annular knurl screw control elasticity preforming clamp's packing force to the clamping and the dismantlement of scanning electron microscope sample platform of being convenient for.
Furthermore, the bottom surface of the scanning sample table is in contact with the press-in test table, so that a sample to be tested is positioned in the center of the press-in test table, and subsequent press-in test calibration and press-in are facilitated.
And furthermore, the semicircular groove of the elastic pressing sheet clamp is attached to the edge of the sample table of the scanning electron microscope, the sample table is in close contact with the test bed through the elastic force of the pressing sheet clamp, the error generated in the pressing-in process is avoided, and the degree of freedom of the sample table in all directions is restricted by matching with the center hole of the test bed.
Furthermore, the knurling screw is loosened and screwed to control the fixing and loosening of the elastic clamping piece clamp, so that the fixing and the dismounting of the scanning electron microscope sample stage are realized, and the simple, convenient and quick clamping is realized.
The knurling screw is located the adjusting shim, the adjusting shim is used for adjusting the compressing height of the elastic pressing sheet clamp, and the adaptability of the device to the sample table and the accuracy of the whole device are improved.
The utility model discloses in, in the experiment of impressing in micro-nano, will take the observation sample to arrange scanning electron microscope sample bench in, the test bench center is arranged in to the sample platform, carries out the experiment of impressing to the sample bench. And after the pressing-in is completed, taking out the sample table, putting the sample table into a sample box, and carrying out next step of observation on the damaged appearance.
The beneficial effects of the utility model are that: on the basis that the traditional sample is placed in the pressing-in experiment platform for detection and is collected and then placed in the observation platform for observation, the fixed transfer of the sample is changed into the clamping movement of the sample platform through the middle platform of the scanning electron microscope sample platform, and the sample platform is clamped through the clamping piece and the knurled screw on the pressing-in experiment platform, so that the rapidity, the stability and the accuracy of detecting the appearance observation of the damage from the mechanical property are improved.
Drawings
FIG. 1 is a schematic structural diagram of a micro-nano pressing-in clamping device for a scanning electron microscope stage;
labeled in the figure, 1-press in test stand; 2-knurled screw; 3 scanning an electron microscope sample stage; 4-elastic pressing sheet clips; 5-adjusting the gasket.
Fig. 2 is an assembly schematic of the utility model;
fig. 3 is a top view of the utility model;
figure 4 is a side view of the utility model;
fig. 5 is a working schematic diagram of the utility model (the sample is in micron level, the schematic diagram is drawn in non-equal proportion).
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1-5, a micro-nano pressing-in clamping device for a scanning electron microscope sample stage comprises a pressing-in test table 1, a knurled screw 2, an elastic pressing piece clamp 4 and a scanning electron microscope sample stage 3, wherein an upright column below the scanning electron microscope sample stage 3 is matched with a central round hole of the pressing-in test table 1, pressing force is applied to the scanning electron microscope sample stage through a semicircular groove on the elastic pressing piece clamp 4, and the knurling screw 2 controls the pressing force of the elastic pressing piece clamp 4, so that the scanning electron microscope sample stage 3 is convenient to clamp and disassemble.
Further, the bottom surface of the scanning electron microscope sample stage 3 is in contact with the press-in test stage 1, so that a sample to be tested is positioned in the center of the press-in test stage 1, and subsequent press-in test calibration and press-in are facilitated.
And furthermore, the semicircular groove of the elastic pressing piece clamp 4 is attached to the edge of the sample table of the scanning electron microscope, the sample table is in close contact with the test bed through the elastic force of the pressing piece clamp, the error generated in the pressing-in process is avoided, and the degree of freedom of the sample table in all directions is restricted by matching with the center hole of the test bed.
Furthermore, the knurled screw 2 controls the fixing and loosening of the elastic clamping piece clamp through loosening and screwing, so that the sample platform is fixed and detached, and simple, convenient and quick clamping is realized.
In this embodiment, preparation before press-fitting: evenly distributing the sample to be observed on a scanning electron microscope sample table 1, clamping the edge groove of the sample table by using tweezers, slowly aligning an upright column below the sample table with a round hole in the center of an indentation experiment table 2, and gradually placing the sample table on the indentation experiment table.
Clamping a sample table: loosening the two knurled screws to enable the two clamping pieces with the semicircular arcs to rotate freely; respectively rotating the two elastic pressing clips, and attaching the semi-circular arcs of the elastic pressing clips to the grooves at the edge of the scanning electron microscope stage; and then the two screws are screwed, so that the sample table is fixed on the test bed by the pressing sheet clamp, the lower surface of the sample table is tightly attached to the surface of the press-in test bed, and no gap exists.
Performing a press-in detection experiment: the movement of the pressure head is controlled by the control device, so that the pressure head moves to the upper part of the sample to be observed, and the pressure head is not allowed to touch the screw cap and the pressing sheet in the process. And controlling the pressure head to descend to apply load to the sample, unloading after detecting data, and removing the pressure head.
Taking out and transferring the sample stage: screwing and loosening the set screw, removing the two elastic pressing sheet clamps, taking the scanning electron microscope sample table down from the press-in test table by using tweezers, putting the scanning electron microscope sample table into a sample box for storing the sample table, and then transferring the scanning electron microscope sample table to other observation instruments such as a scanning electron microscope to observe the press-in damage appearance. The shaking of the sample table during the transfer from the test stand and into the sample box should be minimized to avoid affecting subsequent observations.
The description of the embodiments is merely intended to illustrate the embodiments of the present invention and the scope of the present invention should not be construed as limited to the specific forms set forth in the examples, but rather the scope of the present invention includes equivalent technical means which can be conceived by those skilled in the art based on the present invention.
Claims (5)
1. The utility model provides a scanning electron microscope sample platform fixing device for nanometer experiment of impressing, a serial communication port, the device is including impressing test bench, annular knurl screw, elasticity preforming clamp and scanning electron microscope sample platform, scanning electron microscope sample platform below stand and impressing test bench center round hole cooperation, through elasticity preforming clamp upper semi-circular recess to scanning electron microscope sample platform application pressing force, annular knurl screw control elasticity preforming clamp's pressing force to the clamping and the dismantlement of scanning electron microscope sample platform of being convenient for.
2. The device for fixing the sample stage of the scanning electron microscope for the nanoimprint experiment as claimed in claim 1, wherein the bottom surface of the sample stage of the scanning electron microscope is in contact with the nanoimprint test bed, so that the sample to be tested is positioned at the center of the nanoimprint test bed, and subsequent calibration and nanoimprint of the nanoimprint test are facilitated.
3. The device for fixing the sample stage of a scanning electron microscope for nanoimprint experiments as claimed in claim 1 or 2, wherein the semicircular groove of the elastic pressing clip is attached to the edge of the sample stage of a scanning electron microscope, the sample stage is tightly contacted with the test bed by the elastic force of the pressing clip, and the degree of freedom of the sample stage in all directions is restricted by matching with the central hole of the test bed.
4. The device for fixing the sample stage of the scanning electron microscope for the nanoimprint experiment as claimed in claim 1 or 2, wherein the knurled screw controls the fixing and the loosening of the elastic clamping clip by unscrewing and screwing, so that the sample stage is fixed and detached.
5. The device for fixing the sample stage of the scanning electron microscope for the nanoimprint experiment as claimed in claim 1 or 2, wherein the knurled screw is located on an adjusting gasket, and the adjusting gasket is used for adjusting the compression height of the elastic pressing sheet clamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921610291.0U CN211292656U (en) | 2019-09-26 | 2019-09-26 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921610291.0U CN211292656U (en) | 2019-09-26 | 2019-09-26 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
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| CN211292656U true CN211292656U (en) | 2020-08-18 |
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| CN201921610291.0U Active CN211292656U (en) | 2019-09-26 | 2019-09-26 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609049A (en) * | 2019-09-26 | 2019-12-24 | 浙江工业大学 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
| CN110609049B (en) * | 2019-09-26 | 2024-05-07 | 浙江工业大学 | Scanning electron microscope sample stage fixing device for nanometer indentation experiment |
-
2019
- 2019-09-26 CN CN201921610291.0U patent/CN211292656U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609049A (en) * | 2019-09-26 | 2019-12-24 | 浙江工业大学 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
| CN110609049B (en) * | 2019-09-26 | 2024-05-07 | 浙江工业大学 | Scanning electron microscope sample stage fixing device for nanometer indentation experiment |
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