CN110609049A - A scanning electron microscope sample platform fixing device for nanometer experiment of impressing - Google Patents
A scanning electron microscope sample platform fixing device for nanometer experiment of impressing Download PDFInfo
- Publication number
- CN110609049A CN110609049A CN201910914563.4A CN201910914563A CN110609049A CN 110609049 A CN110609049 A CN 110609049A CN 201910914563 A CN201910914563 A CN 201910914563A CN 110609049 A CN110609049 A CN 110609049A
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- China
- Prior art keywords
- electron microscope
- scanning electron
- sample
- microscope sample
- platform
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- 238000002474 experimental method Methods 0.000 title claims abstract description 23
- 238000012360 testing method Methods 0.000 claims abstract description 32
- 238000012856 packing Methods 0.000 claims abstract description 6
- 238000012546 transfer Methods 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 description 10
- 238000007373 indentation Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
Abstract
The utility model provides a scanning electron microscope sample platform fixing device for nanometer experiment of impressing, includes impressing test platform, annular knurl screw, elasticity preforming clamp and scanning electron microscope sample platform, scanning electron microscope sample platform below stand and the cooperation of impressing test platform center round hole, press from both sides semicircular recess through elasticity preforming and apply the packing force to scanning electron microscope sample platform, annular knurl screw control elasticity preforming clamp's packing force to the clamping and the dismantlement of scanning electron microscope sample platform of being convenient for. According to the invention, through the middle platform of the sample table of the scanning electron microscope, the fixed transfer of the sample is changed into the clamping movement of the sample table of the scanning electron microscope, and the sample table is clamped through the clamping piece and the knurled screw pressed into the test bed, so that the rapidity, the stability and the accuracy of the observation of the damage morphology detected from the mechanical property are improved.
Description
Technical Field
The invention relates to a fixing device for a scanning electron microscope sample stage for a nanometer indentation experiment, and belongs to the field of mechanical property detection and observation.
Background
After micro-nano indentation detection is performed on a micro sample, the damaged morphology of the sample needs to be observed, but due to the fact that the sample is small in size, the micro-nano indentation detection is often performed on other observation instruments such as a Scanning Electron Microscope (SEM). During the process of detecting the appearance from the mechanical property detection, the deformed sample is inevitably required to be collected from a pressing-in experiment table and transferred to an observation experiment table. In the process, the sample may generate new deformation under the interference of external force; and because the sample volume is tiny, in a press-in experiment, only individual samples pressed into the experiment table are subjected to the press-in experiment, the press-in samples and non-press-in samples are easy to be confused in the subsequent collection process, and the corresponding press-in samples are difficult to find in electron microscope observation. Even if the press-in sample is observed, the press-in damaged surface cannot be accurately observed because the posture of the sample on the press-in test stand is different from that on the observation sample stand. Even more, the sample loss during the collection and transfer process will occur.
In order to solve the problems, in order to avoid directly transferring the sample from the press-in experiment table to the observation experiment table, a method of fixing the scanning electron microscope sample table to the press-in experiment table, and directly transferring the SEM sample table and the sample thereon to the scanning electron microscope experiment table for detection after press-in detection is carried out is adopted. The fixed two prerequisites that need satisfy of scanning sample platform on the test bench of impressing: ensuring that the precision of press-in detection is not influenced; two convenient quick fixed and dismantlement scanning sample platform.
Therefore, it is necessary to design a fixing device for a scanning electron microscope sample stage for nanoimprint experiments.
Disclosure of Invention
In order to solve the problem that a micro sample is difficult to accurately observe the appearance of the damaged sample after micro-nano indentation mechanical detection, the invention provides the clamping device for the scanning electron microscope sample stage in micro-nano indentation.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a scanning electron microscope sample platform fixing device for nanometer experiment of impressing, includes impressing test platform, annular knurl screw, elasticity preforming clamp and scanning electron microscope sample platform, scanning electron microscope sample platform below stand and the cooperation of impressing test platform center round hole, press from both sides semicircular recess through elasticity preforming and apply the packing force to scanning electron microscope sample platform, annular knurl screw control elasticity preforming clamp's packing force to the clamping and the dismantlement of scanning electron microscope sample platform of being convenient for.
Furthermore, the bottom surface of the scanning sample table is in contact with the press-in test table, so that a sample to be tested is positioned in the center of the press-in test table, and subsequent press-in test calibration and press-in are facilitated.
And furthermore, the semicircular groove of the elastic pressing sheet clamp is attached to the edge of the sample table of the scanning electron microscope, the sample table is in close contact with the test bed through the elastic force of the pressing sheet clamp, the error generated in the pressing-in process is avoided, and the degree of freedom of the sample table in all directions is restricted by matching with the center hole of the test bed.
Furthermore, the knurling screw is loosened and screwed to control the fixing and loosening of the elastic clamping piece clamp, so that the fixing and the dismounting of the scanning electron microscope sample stage are realized, and the simple, convenient and quick clamping is realized.
The knurling screw is located the adjusting shim, the adjusting shim is used for adjusting the compressing height of the elastic pressing sheet clamp, and the adaptability of the device to the sample table and the accuracy of the whole device are improved.
In the micro-nano indentation experiment, a sample with an observation function is placed on a sample table of a scanning electron microscope, the sample table is placed in the center of a test table, and the indentation experiment is performed on the sample table. And after the pressing-in is completed, taking out the sample table, putting the sample table into a sample box, and carrying out next step of observation on the damaged appearance.
The invention has the following beneficial effects: on the basis that the traditional sample is placed in the pressing-in experiment platform for detection and is collected and then placed in the observation platform for observation, the fixed transfer of the sample is changed into the clamping movement of the sample platform through the middle platform of the scanning electron microscope sample platform, and the sample platform is clamped through the clamping piece and the knurled screw on the pressing-in experiment platform, so that the rapidity, the stability and the accuracy of detecting the appearance observation of the damage from the mechanical property are improved.
Drawings
FIG. 1 is a schematic structural diagram of a micro-nano pressing-in clamping device for a scanning electron microscope stage;
labeled in the figure, 1-press in test stand; 2-knurled screw; 3 scanning an electron microscope sample stage; 4-elastic pressing sheet clips; 5-adjusting the gasket.
FIG. 2 is an assembly schematic of the invention;
FIG. 3 is a top view of the invention;
FIG. 4 is a side view of the invention;
figure 5 is a schematic representation of the operation of the invention (sample is in micron scale, schematic is not drawn to scale).
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1-5, a micro-nano pressing-in clamping device for a scanning electron microscope sample stage comprises a pressing-in test table 1, a knurled screw 2, an elastic pressing piece clamp 4 and a scanning electron microscope sample stage 3, wherein an upright column below the scanning electron microscope sample stage 3 is matched with a central round hole of the pressing-in test table 1, pressing force is applied to the scanning electron microscope sample stage through a semicircular groove on the elastic pressing piece clamp 4, and the knurling screw 2 controls the pressing force of the elastic pressing piece clamp 4, so that the scanning electron microscope sample stage 3 is convenient to clamp and disassemble.
Further, the bottom surface of the scanning electron microscope sample stage 3 is in contact with the press-in test stage 1, so that a sample to be tested is positioned in the center of the press-in test stage 1, and subsequent press-in test calibration and press-in are facilitated.
And furthermore, the semicircular groove of the elastic pressing piece clamp 4 is attached to the edge of the sample table of the scanning electron microscope, the sample table is in close contact with the test bed through the elastic force of the pressing piece clamp, the error generated in the pressing-in process is avoided, and the degree of freedom of the sample table in all directions is restricted by matching with the center hole of the test bed.
Furthermore, the knurled screw 2 controls the fixing and loosening of the elastic clamping piece clamp through loosening and screwing, so that the sample platform is fixed and detached, and simple, convenient and quick clamping is realized.
Knurling screw 2 is located adjusting shim 5, adjusting shim 5 is used for adjusting the height that compresses tightly of elasticity pressure piece clamp, improves the device to the adaptability of sample platform and the accuracy of whole device.
In this embodiment, preparation before press-fitting: evenly distributing the sample to be observed on a scanning electron microscope sample table 1, clamping the edge groove of the sample table by using tweezers, slowly aligning an upright column below the sample table with a round hole in the center of an indentation experiment table 2, and gradually placing the sample table on the indentation experiment table.
Clamping a sample table: loosening the two knurled screws to enable the two clamping pieces with the semicircular arcs to rotate freely; respectively rotating the two elastic pressing clips, and attaching the semi-circular arcs of the elastic pressing clips to the grooves at the edge of the scanning electron microscope stage; and then the two screws are screwed, so that the sample table is fixed on the test bed by the pressing sheet clamp, the lower surface of the sample table is tightly attached to the surface of the press-in test bed, and no gap exists.
Performing a press-in detection experiment: the movement of the pressure head is controlled by the control device, so that the pressure head moves to the upper part of the sample to be observed, and the pressure head is not allowed to touch the screw cap and the pressing sheet in the process. And controlling the pressure head to descend to apply load to the sample, unloading after detecting data, and removing the pressure head.
Taking out and transferring the sample stage: screwing and loosening the set screw, removing the two elastic pressing sheet clamps, taking the scanning electron microscope sample table down from the press-in test table by using tweezers, putting the scanning electron microscope sample table into a sample box for storing the sample table, and then transferring the scanning electron microscope sample table to other observation instruments such as a scanning electron microscope to observe the press-in damage appearance. The shaking of the sample table during the transfer from the test stand and into the sample box should be minimized to avoid affecting subsequent observations.
The embodiments described in this specification are merely illustrative of implementations of the inventive concept and the scope of the present invention should not be considered limited to the specific forms set forth in the examples but encompasses equivalent technical means as would be appreciated by those skilled in the art based on the inventive concept.
Claims (5)
1. The utility model provides a scanning electron microscope sample platform fixing device for nanometer experiment of impressing, a serial communication port, the device is including impressing test bench, annular knurl screw, elasticity preforming clamp and scanning electron microscope sample platform, just scanning electron microscope sample platform below stand cooperates with impressing test bench center round hole, presss from both sides semicircular recess through elasticity preforming and applys the packing force to scanning electron microscope sample platform, and annular knurl screw control elasticity preforming clamp's packing force to the clamp of scanning electron microscope sample platform of being convenient for presss from both sides tightly and dismantles.
2. The micro-nano press-in fixing device for the scanning electron microscope sample stage according to claim 1, wherein the bottom surface of the scanning electron microscope sample stage is in contact with a press-in test stage, so that a sample to be tested is positioned in the center of the press-in test stage, and subsequent press-in test calibration and press-in are facilitated.
3. The micro-nano pressing-in clamping device for the scanning electron microscope sample stage according to claim 1 or 2, wherein the semicircular groove of the elastic pressing sheet clamp is attached to the edge of the scanning electron microscope sample stage, the sample stage is tightly contacted with the test stage through the elastic force of the pressing sheet clamp, and the degree of freedom of the sample stage in all directions is restricted by matching with a central hole of the test stage.
4. The micro-nano pressing-in clamping device for the scanning electron microscope sample stage according to claim 1 or 2, wherein the knurled screw controls the elastic clamping piece to be fixed and loosened by unscrewing and screwing, so that the sample stage is fixed and detached.
5. The micro-nano pressing-in fixing device for the scanning electron microscope sample stage according to claim 1 or 2, wherein the knurled screw is located on an adjusting gasket, and the adjusting gasket is used for adjusting the pressing height of the elastic pressing sheet clamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910914563.4A CN110609049B (en) | 2019-09-26 | 2019-09-26 | Scanning electron microscope sample stage fixing device for nanometer indentation experiment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910914563.4A CN110609049B (en) | 2019-09-26 | 2019-09-26 | Scanning electron microscope sample stage fixing device for nanometer indentation experiment |
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| Publication Number | Publication Date |
|---|---|
| CN110609049A true CN110609049A (en) | 2019-12-24 |
| CN110609049B CN110609049B (en) | 2024-05-07 |
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| CN201910914563.4A Active CN110609049B (en) | 2019-09-26 | 2019-09-26 | Scanning electron microscope sample stage fixing device for nanometer indentation experiment |
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| CN201159791Y (en) * | 2007-11-01 | 2008-12-03 | 陈怡� | Plane rotatable glass carrier |
| CN201716297U (en) * | 2010-06-17 | 2011-01-19 | 深南电路有限公司 | Ultrasonic scanning test fixture |
| CN105699495A (en) * | 2016-03-24 | 2016-06-22 | 江苏科技大学 | Portable ultrasonic probe pressure adjusting device and use method |
| CN206193332U (en) * | 2016-11-22 | 2017-05-24 | 中国神华能源股份有限公司 | But continuous observation's microscope |
| CN109270137A (en) * | 2018-11-02 | 2019-01-25 | 西南石油大学 | It is a kind of to test scan-type electrochemical microscope sample stage of more gauge coupons with electrolytic cell |
| CN208888469U (en) * | 2018-10-19 | 2019-05-21 | 金华市托普光学仪器有限公司 | A kind of high definition microscope |
| CN211292656U (en) * | 2019-09-26 | 2020-08-18 | 浙江工业大学 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
-
2019
- 2019-09-26 CN CN201910914563.4A patent/CN110609049B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201159791Y (en) * | 2007-11-01 | 2008-12-03 | 陈怡� | Plane rotatable glass carrier |
| CN201716297U (en) * | 2010-06-17 | 2011-01-19 | 深南电路有限公司 | Ultrasonic scanning test fixture |
| CN105699495A (en) * | 2016-03-24 | 2016-06-22 | 江苏科技大学 | Portable ultrasonic probe pressure adjusting device and use method |
| CN206193332U (en) * | 2016-11-22 | 2017-05-24 | 中国神华能源股份有限公司 | But continuous observation's microscope |
| CN208888469U (en) * | 2018-10-19 | 2019-05-21 | 金华市托普光学仪器有限公司 | A kind of high definition microscope |
| CN109270137A (en) * | 2018-11-02 | 2019-01-25 | 西南石油大学 | It is a kind of to test scan-type electrochemical microscope sample stage of more gauge coupons with electrolytic cell |
| CN211292656U (en) * | 2019-09-26 | 2020-08-18 | 浙江工业大学 | A scanning electron microscope sample platform fixing device for nanometer experiment of impressing |
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| CN110609049B (en) | 2024-05-07 |
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