CN211227332U - Baffle valve for vacuum system - Google Patents
Baffle valve for vacuum system Download PDFInfo
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- CN211227332U CN211227332U CN201922155469.3U CN201922155469U CN211227332U CN 211227332 U CN211227332 U CN 211227332U CN 201922155469 U CN201922155469 U CN 201922155469U CN 211227332 U CN211227332 U CN 211227332U
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- high vacuum
- vacuum
- flapper valve
- vacuum system
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Abstract
The utility model relates to a baffle valve for a vacuum system, which comprises a high vacuum obtaining device, a fixing plate for connecting with a cavity in a sealing way and installing the high vacuum obtaining device, a sealing plate for isolating the high vacuum obtaining device and a vacuum chamber, and a driving mechanism linked with the sealing plate; and a driving mechanism mounting flange and a high vacuum obtaining device exhaust opening are arranged on the fixing plate. The utility model has good practicability, usability and vacuum pumping effect, and wide application range; the device for obtaining high vacuum and the vacuum chamber can be quickly communicated or isolated, and the continuous production is convenient.
Description
Technical Field
The utility model relates to a flapper valve for vacuum system.
Background
The vacuum system is a complete set of vacuum system which is composed of a vacuum pump, a PLC program control system, an air storage tank, a vacuum pipeline, a vacuum valve, an overseas filtering assembly and the like. At present, the system is widely applied to the industries of electronic semiconductor industry, photoelectric backlight modules, machining, vacuum coating, electron beam welding, vacuum welding and the like.
For example, vacuum evaporation refers to a process of evaporating a coating material (or called a "coating material") by a certain heating evaporation method under a vacuum condition, vaporizing the coating material, and allowing particles to fly to the surface of a substrate for condensation and film formation. The vapor deposition is a vapor deposition technology which is used earlier and has wider application, and has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like. The vacuum evaporation process generally comprises the steps of substrate surface cleaning, preparation before film coating, evaporation, piece taking, post-plating treatment, detection, product production and the like.
The electron beam evaporation is to bombard the coating material with accelerated electrons, and the kinetic energy of the electrons is converted into heat energy to heat and evaporate the coating material and form a film. The electron gun is divided into a direct type, a ring type and an E type. The electron beam heating evaporation is characterized in that extremely high energy density can be obtained, the highest energy density can reach 109w/cm2, the heating temperature can reach 3000-6000 ℃, and refractory metals or compounds can be evaporated; the evaporated material is placed in a water-cooled crucible, so that the pollution of the crucible material can be avoided, and a high-purity film is prepared; in addition, since the evaporation material has a small heating area, the heat radiation loss is reduced, and the heat efficiency is high. The evaporation coating cavity is used for placing a workpiece to be coated; the cavity is provided with one or more vacuum pumps.
The existing vacuum system uses a vacuum pump, has the defects of large volume and low efficiency, and the vacuum pump and the vacuum chamber cannot be quickly communicated or isolated, so that the production efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to the technical problem who exists among the prior art, provide a flapper valve for vacuum system, solve that the evacuation effect is not good and the problem that can't communicate fast or keep apart between vacuum pump and the real empty room.
The utility model provides an above-mentioned technical problem's technical scheme as follows:
a baffle valve for a vacuum system comprises a high vacuum obtaining device, a fixing plate, a sealing plate and a driving mechanism, wherein the fixing plate is used for being connected with a cavity in a sealing way and installing the high vacuum obtaining device; and a driving mechanism mounting flange and a high vacuum obtaining device exhaust opening are arranged on the fixing plate.
The utility model has the advantages that: the practicability, the service performance and the vacuum pumping effect are better, and the application range is wide; the device for obtaining high vacuum and the vacuum chamber can be quickly communicated or isolated, and the continuous production is convenient.
On the basis of the technical scheme, the utility model discloses can also do following improvement.
Further, the air pumping hole of the high vacuum obtaining device is a square hole.
Further, the air exhaust port of the high vacuum obtaining device is a circular hole.
Further, the high vacuum obtaining device and the high vacuum obtaining device are coaxially arranged at the air exhaust port.
Further, the high vacuum obtaining device is a low-temperature condensation pump and a molecular pump installed at any angle.
Further, the driving mechanism is an air cylinder, and the number of the air cylinders is four.
Furthermore, the four cylinders are distributed in an annular array along the center of the air pumping hole of the high vacuum obtaining device.
Further, the sealing plate is a rectangular plate or a circular plate.
Furthermore, the sealing plate is provided with a sealing ring at the outer edge of one side close to the fixing plate.
Further, the outer edge of the side, close to the sealing plate, of the extraction opening of the high vacuum obtaining device is provided with a sealing ring.
The adoption of the further scheme has the beneficial effects that the production cost and the difficulty are reduced; further improving the vacuum pumping efficiency and effect; the isolation effect between the high vacuum acquisition device and the vacuum chamber is obviously improved.
Drawings
Fig. 1 is a schematic perspective view of a vacuum system according to the present invention;
FIG. 2 is a schematic perspective view of the flapper valve of the present invention;
FIG. 3 is a side view of the flapper valve of the present invention;
FIG. 4 is a front view of the flapper valve of the present invention;
fig. 5 is a sectional view taken along the line a-a in fig. 4.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the high vacuum obtaining device comprises a high vacuum obtaining device 2, a driving mechanism 3, a sealing plate 4, a fixing plate 41, a driving mechanism mounting flange 42 and a high vacuum obtaining device air extraction opening.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
The utility model relates to a baffle valve for vacuum system, which comprises a high vacuum obtaining device 1, a fixing plate 4 for connecting with the cavity in a sealing way and installing the high vacuum obtaining device 1, a sealing plate 3 for isolating the high vacuum obtaining device 1 and a vacuum chamber, and a driving mechanism 2 linked with the sealing plate 3; the fixing plate 4 is provided with a driving mechanism mounting flange 41 and a high vacuum obtaining device air extracting port 42, and the high vacuum obtaining device air extracting port 42 is arranged so that the high vacuum obtaining device 1 can conveniently perform vacuum pumping work.
Example 1
As shown in fig. 1-5, the high vacuum obtaining apparatus 1 of the present embodiment is a low temperature condensation pump and a molecular pump installed at any angle, the conventional vacuum pump has a large volume and low efficiency, the low temperature condensation pump and the molecular pump installed at any angle have the advantages of small volume, high efficiency, cleanness, no pollution, large pumping speed and high reliability, and the vacuum system has better vacuum pumping efficiency and effect, thereby improving the production efficiency; the high vacuum obtaining device air exhaust port 42 is a circular hole to ensure the communication effect between the high vacuum obtaining device 1 and the vacuum chamber, thereby improving the vacuum pumping work efficiency of the high vacuum obtaining device 1; the driving mechanism 2 is a cylinder, the number of the cylinders is four, and the four cylinders are linked with the sealing plate 3 to control the position of the sealing plate 3 and further control the communication or isolation between the high vacuum obtaining device 1 and the vacuum chamber; the four cylinders are distributed in an annular array along the center of the extraction opening 42 of the high vacuum obtaining device, so that the sealing plate 3 can be better controlled, and the service performance of the baffle valve is further improved; the high vacuum obtaining device 1 and the high vacuum obtaining device air extraction opening 42 are coaxially arranged, so that the production cost and difficulty are reduced, and the vacuum-pumping efficiency and effect of the high vacuum obtaining device 1 are improved; the sealing plate 3 is a rectangular plate to reduce production cost and installation difficulty, and is convenient for linkage control of the air cylinder, and the purpose of setting the sealing plate 3 is to isolate the high-vacuum obtaining device 1 from the vacuum chamber through the sealing plate 3 when the high-vacuum obtaining device 1 is not vacuumized.
The outer fringe of closing plate 3 near fixed plate 4 one side is provided with the sealing ring to guarantee that closing plate 3 and fixed plate 4 can closely laminate, show the wall effect that improves closing plate 3 to high vacuum acquisition device 1 and vacuum chamber.
The working principle of the flapper valve in the embodiment is as follows: when the high vacuum obtaining device 1 does not vacuumize, the four cylinders control the sealing plate 3 to be closely attached to the fixing plate 4, so that the air pumping port 42 of the high vacuum obtaining device is completely surrounded by the high vacuum obtaining device 1, the sealing plate 3 and the fixing plate 4, namely the high vacuum obtaining device 1 and the vacuum chamber are in a separation state, and the sealing ring is arranged on the outer edge of one side, close to the fixing plate 4, of the sealing plate 3, so that the sealing plate 3 and the fixing plate 4 can be tightly attached; when the high vacuum obtaining device 1 needs to be vacuumized, the four cylinders control the sealing plate 3 to move along the direction shown in fig. 3 and 5, so that the pumping hole 42 of the high vacuum obtaining device is communicated with the vacuum chamber, that is, the high vacuum obtaining device 1 and the vacuum chamber are in a communicated state, thereby ensuring that the high vacuum obtaining device 1 can normally work.
In addition, the sealing plate 3 and the air pumping port 42 of the high vacuum obtaining device can be in other shapes, for example, the sealing plate 3 is a circular plate to reduce the production cost and the installation difficulty and facilitate the linkage control of the cylinder 2; the high vacuum obtaining device air suction opening 42 is a square hole to reduce the production cost and difficulty, and simultaneously, the vacuum-pumping efficiency and effect of the high vacuum obtaining device 1 are ensured.
The outer edge of the extraction opening 42 of the high vacuum obtaining device, which is close to one side of the sealing plate 3, is provided with a sealing ring to ensure that the sealing plate 3 and the fixing plate 4 can be tightly attached, and further the isolation effect of the sealing plate 3 on the high vacuum obtaining device 1 and the vacuum chamber is obviously improved.
The baffle valve has good practicability, usability and vacuum pumping effect, and has wide application range; the high vacuum obtaining device 1 and the vacuum chamber are quickly communicated or isolated, and continuous production is facilitated.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (10)
1. A flapper valve for a vacuum system, comprising: comprises a high vacuum obtaining device (1), a fixing plate (4) which is used for being connected with a cavity in a sealing way and installing the high vacuum obtaining device (1), a sealing plate (3) which is used for isolating the high vacuum obtaining device (1) from a vacuum chamber, and a driving mechanism (2) which is linked with the sealing plate (3); and a driving mechanism mounting flange (41) and a high vacuum obtaining device extraction opening (42) are arranged on the fixing plate (4).
2. A flapper valve for a vacuum system as set forth in claim 1 wherein: the high vacuum obtaining device air suction opening (42) is a square hole.
3. A flapper valve for a vacuum system as set forth in claim 1 wherein: the high vacuum obtaining device air suction opening (42) is a circular hole.
4. A flapper valve for a vacuum system as set forth in claim 3 wherein: the high vacuum obtaining device (1) and the high vacuum obtaining device are coaxially arranged, and the air pumping hole (42) is arranged.
5. A flapper valve for a vacuum system according to any one of claims 1 to 4, wherein: the high vacuum obtaining device (1) is a low-temperature condensation pump and a molecular pump installed at any angle.
6. A flapper valve for a vacuum system as set forth in claim 5 wherein: the driving mechanism (2) is an air cylinder, and the number of the air cylinders is four.
7. A flapper valve for a vacuum system as set forth in claim 6 wherein: the four cylinders are distributed in an annular array along the center of the pumping hole (42) of the high vacuum obtaining device.
8. A flapper valve for a vacuum system according to any one of claims 1 to 4, wherein: the sealing plate (3) is a rectangular plate or a circular plate.
9. A flapper valve for a vacuum system according to any one of claims 1 to 4, wherein: and a sealing ring is arranged on the outer edge of one side of the sealing plate (3) close to the fixing plate (4).
10. A flapper valve for a vacuum system according to any one of claims 1 to 4, wherein: the outer edge of the side, close to the sealing plate (3), of the extraction opening (42) of the high vacuum obtaining device is provided with a sealing ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922155469.3U CN211227332U (en) | 2019-12-03 | 2019-12-03 | Baffle valve for vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922155469.3U CN211227332U (en) | 2019-12-03 | 2019-12-03 | Baffle valve for vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211227332U true CN211227332U (en) | 2020-08-11 |
Family
ID=71936970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922155469.3U Active CN211227332U (en) | 2019-12-03 | 2019-12-03 | Baffle valve for vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211227332U (en) |
-
2019
- 2019-12-03 CN CN201922155469.3U patent/CN211227332U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230412 Address after: Room 1004, Building B1, Phase I, Optical Valley Chongwen Center, 792 Gaoxin Avenue, Donghu New Technology Development Zone, Wuhan, Hubei Province, 430000 (Wuhan Area of Free Trade Zone) Patentee after: Wuhan Jiuyi Intelligent Technology Co.,Ltd. Address before: 430000 R&D Building B1 of Wuhan National Biological Industrial Base Project B, C and D, 666 High-tech Avenue, Donghu High-tech Development Zone, Wuhan City, Hubei Province Patentee before: WUHAN KERUIDA VACUUM TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |