CN211192494U - Laser processing device with rotary light beam - Google Patents

Laser processing device with rotary light beam Download PDF

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CN211192494U
CN211192494U CN201921519465.2U CN201921519465U CN211192494U CN 211192494 U CN211192494 U CN 211192494U CN 201921519465 U CN201921519465 U CN 201921519465U CN 211192494 U CN211192494 U CN 211192494U
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wedge prism
laser
rotating
coupling
optical wedge
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秦应雄
王洪喆
段光前
黄树平
童杰
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Wuhan Preceder Laser Technology Co ltd
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Wuhan Preceder Laser Technology Co ltd
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Abstract

The utility model belongs to the technical field of laser beam machining, specifically provide a rotatory laser beam machining device of light beam, including the revolving stage, be equipped with the regulating unit who is used for adjusting emergent laser optical axis on the revolving stage, the regulating unit includes acousto-optic deflector and coupling light wedge prism group, and acousto-optic deflector and coupling light wedge prism group are located incident laser optical axis in proper order. The position of the acousto-optic deflector is adjusted, so that emergent laser is drilled at the set drilling position of the workpiece, and the position of the coupling light wedge prism group is adjusted, so that the included angle between the emergent laser and the workpiece is fixed, and the emergent laser is processed into a hole with a preset aperture. Then, the rotating table is rotated to rotate the adjusting unit, so that holes with preset hole diameters can be punched at preset positions of the workpiece. Synchronous scanning of the acousto-optic deflector with the optical wedge prism group rotating together is achieved through the rotary table, the fact that an incident laser optical axis and an emergent laser optical axis are coaxial can be guaranteed, operation is convenient, and the precision of laser drilling is greatly improved.

Description

Laser processing device with rotary light beam
Technical Field
The utility model belongs to the technical field of laser beam machining, concretely relates to rotatory laser beam machining device of light beam.
Background
Laser drilling technology has been widely used as an advanced drilling technology in many industries such as aerospace, automobile manufacturing, electronic instruments, food and drug, chemical engineering, and medical instruments. The traditional single-pulse laser drilling and multi-pulse laser drilling methods cannot accurately control the size and the taper of the micro-hole, so that the laser rotary cutting method is developed. The typical laser rotary cutting system realizes laser rotary cutting by integrally rotating three optical wedge prisms, wherein the distance between two complementary optical wedge prisms with the same wedge angle is adjusted, the inclination angle of a focused light beam is changed, and the taper of laser drilling is adjusted. The angle of the third optical wedge prism relative to the first two optical wedge prisms is adjusted in a rotating mode, the angle of incidence on the focusing mirror is changed, and therefore the size of the micro hole is adjusted. Problems with this approach are: firstly, the optical axis passing through the third optical wedge prism is not in the same plane with the optical axis of the incident beam any more, and finally, the aperture and taper of laser drilling have errors; thirdly, because the system has more moving mechanisms, at least two sets of rotating moving mechanisms are needed, and the actual processing precision is difficult to guarantee.
Disclosure of Invention
The utility model aims at overcoming the problem that the laser beam drilling precision is low and the processing degree of difficulty is high among the prior art.
Therefore, the utility model provides a rotatory laser beam machining device of light beam, including the revolving stage, be equipped with the regulating unit who is used for adjusting emergent laser optical axis on the revolving stage, the regulating unit includes acousto-optic deflector and coupling light wedge prism group, acousto-optic deflector and coupling light wedge prism group lie in incident laser optical axis in proper order.
Preferably, the rotating table is fixedly connected with an output shaft of the motor.
Preferably, the coupled optical wedge prism group includes a first coupled optical wedge prism and a second coupled optical wedge prism that are complementarily disposed, and the first coupled optical wedge prism and the second coupled optical wedge prism are sequentially located on the transmission light path of the acousto-optic polarizer.
Preferably, the distance between the first coupling wedge prism and the second coupling wedge prism is adjustable.
Preferably, the device further comprises a screw rod, the first coupling optical wedge prism and the second coupling optical wedge prism are both in threaded connection with the screw rod, and the thread turning direction of the first coupling optical wedge prism is opposite to the thread turning direction of the second coupling optical wedge prism.
Preferably, the incident laser optical axis is coplanar with the outgoing laser optical axis.
Preferably, the device further comprises a focusing mirror, and the focusing mirror is located on the transmission light path of the coupling optical wedge prism group.
Preferably, the focusing mirror is fixedly connected with the rotating table.
Preferably, the device further comprises an object stage for clamping the workpiece, and the center of the object stage is located on an extension line of an emission light path of the laser emitter.
Preferably, the rotating platform, the acousto-optic deflector and the coupling light wedge prism group are packaged in a box body, and an incident port and an exit port are arranged at two ends of the box body.
The utility model has the advantages that: the utility model provides a laser beam machining device of this kind of light beam rotation, including the revolving stage, be equipped with the regulating unit who is used for adjusting emergent laser optical axis on the revolving stage, the regulating unit includes acousto-optic deflector and coupling light wedge prism group, and acousto-optic deflector and coupling light wedge prism group are located incident laser optical axis in proper order. The position of the acousto-optic deflector is adjusted, so that emergent laser is drilled at the set drilling position of the workpiece, and the position of the coupling light wedge prism group is adjusted, so that the included angle between the emergent laser and the workpiece is fixed, and the emergent laser is processed into a hole with a preset aperture. Then, the rotating table is rotated to rotate the adjusting unit, so that holes with preset hole diameters can be punched at preset positions of the workpiece. Synchronous scanning of the acousto-optic deflector with the optical wedge prism group rotating together is achieved through the rotary table, the fact that an incident laser optical axis and an emergent laser optical axis are coaxial can be guaranteed, operation is convenient, and the precision of laser drilling is greatly improved.
The present invention will be described in further detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural view of the laser processing apparatus of the present invention with a rotating beam.
Description of reference numerals: the device comprises an incident laser optical axis 1, an adjusting unit 2, an acousto-optic deflector 3, a first coupling optical wedge prism 4, a second coupling optical wedge edge 5, a focusing mirror 6, a workpiece 7 and an objective table 8.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of the present invention, "a plurality" means two or more unless otherwise specified.
As shown in fig. 1, the utility model provides a rotatory laser beam machining device of light beam, including the revolving stage, be equipped with the regulating unit 2 that is used for adjusting emergent laser optical axis on the revolving stage, regulating unit 2 includes acousto-optic deflector 3 and coupling optical wedge prism group, acousto-optic deflector 3 and coupling optical wedge prism group are located incident laser optical axis 1 in proper order. The laser emitter emits incident laser, the incident laser vertically enters the adjusting unit 2, the adjusting unit 2 comprises an acoustic optical deflector 3 and a coupling optical wedge prism group, the incident laser vertically irradiates on the acoustic optical deflector 3 to deflect so as to change the angle of the incident laser, and a theta angle is formed between the optical axis of transmission laser transmitted from the acoustic optical deflector 3 and the optical axis 1 of the incident laser. The deflected transmission laser optical axis enters the coupling light wedge prism group to be inclined, so that an emergent laser optical axis and an incident laser optical axis 1 are formed
Figure BDA0002200594960000041
And (4) an angle. Therefore, when the acousto-optic deflector 3 is selected and fixed on the rotary table, the angle θ is determined. Then, the size and the installation position of the coupling optical wedge prism group are determined, in general, the deflection center of the acousto-optic deflector 3 is aligned with the center of the coupling optical wedge prism group, and the incident laser passes through the acousto-optic deflector 3 and the coupling optical wedge prism group and then strikes on the workpiece 7 at a fixed position and a fixed inclination angle. At this time, the rotary table is rotated, so that the outgoing laser beam performs a rotary cutting motion around the extension line of the optical axis 1 of the incoming laser beam, and thus a hole with a predetermined aperture size at a predetermined position can be processed. In addition, the device can not only be used for punching,and the shaft can be processed.
The theta angle can be changed by changing the model of the acousto-optic deflector 3, the irradiation position of the emergent laser on the workpiece 7 can be changed under the condition that the coupled optical wedge prism group is not changed, the corresponding aperture size is determined during rotary cutting, but the change of the size of the aperture is avoided
Figure BDA0002200594960000042
Angle, i.e. without changing the taper of the hole; by changing the parameters of the coupled optical wedge prism group, only the change of the parameters is realized
Figure BDA0002200594960000051
The angle, and thus the taper of the hole, does not change the aperture size. By changing the parameters of the coupling optical wedge prism group in different time periods, taper holes, spiral holes or spiral shafts with different aperture sizes and different conicity can be processed.
Preferably, the rotating table is fixedly connected with an output shaft of the motor. The motor drives the rotating platform to rotate, and the adjusting unit 2 on the rotating platform rotates together to complete the processing of the hole. The rotating speed and the starting and stopping time can be controlled by the motor.
In a preferred embodiment, the coupled optical wedge prism group includes a first coupled optical wedge prism 4 and a second coupled optical wedge prism 5 that are complementarily disposed, and the first coupled optical wedge prism 4 and the second coupled optical wedge prism 5 are sequentially located on a transmission light path of the acousto-optic polarizer. The thicker end of the first coupling optical wedge prism 4 and the thinner end of the second coupling optical wedge prism 5 are correspondingly arranged, and the thinner end of the first coupling optical wedge prism 4 and the thicker end of the second coupling optical wedge prism 5 are correspondingly arranged. The two optical wedge prisms are complementarily arranged, so that the position of a transmission light path from the acousto-optic deflector 3 on the workpiece 7 is not changed, the inclination angle of emergent laser can be adjusted by only changing the distance between the two optical wedge prisms, and the taper is changed on the premise of not changing the aperture size of a laser processing hole.
Preferably, the distance between the first coupling wedge prism 4 and the second coupling wedge prism 5 is adjustable. By adjusting the distance between the first coupling optical wedge prism 4 and the second coupling optical wedge prism 5, the inclination angle of the emergent laser optical axis emergent from the second coupling optical wedge prism 5 can be adjusted, so that the inclination angle of the processing laser and the surface of the workpiece 7 can be controlled, and the hole processed at different inclination angles has different conicity.
Preferably, the device further comprises a screw rod, the first coupling optical wedge prism 4 and the second coupling optical wedge prism 5 are both in threaded connection with the screw rod, and the thread turning direction of the first coupling optical wedge prism 4 is opposite to the thread turning direction of the second coupling optical wedge prism 5. Because the installation rotation directions of the two prisms and the screw rod are opposite, the two prisms can move in the opposite direction or away from each other by controlling the rotation of the rotary screw rod, so that the distance between the two prisms is controlled.
Preferably, the incident laser optical axis 1 is coplanar with the emergent laser optical axis. The optical axis 1 of the incident laser and the optical axis of the emergent laser can be ensured to be coplanar by rotating the posture of the optical wedge prism group.
In a preferable scheme, the device further comprises a focusing mirror 6, and the focusing mirror 6 is located on a transmission light path of the coupling light wedge prism group. The focusing lens 6 has the function of converging the processing laser without changing the original light path.
Preferably, the focusing mirror 6 is fixedly connected with the rotating table. The focusing mirror 6 can also be rotated together with the adjusting unit 2. If the focusing mirror 6 does not rotate together with the adjusting unit 2, when the focusing mirror is rotated, the focusing performance at different positions is different due to different qualities of the focusing mirror 6, so that the track of the emergent laser optical axis can be influenced.
Preferably, the device further comprises an object stage 8 for clamping the workpiece 7, and the center of the object stage 8 is located on an extension line of a transmitting light path of the laser transmitter. The workpiece 7 is clamped at the center of the objective table 8, so that the center of the workpiece 7 can be ensured to be positioned on the extension line of the incident light path of the laser emitter, the subsequent positioning of the coordinate of the workpiece 7 is facilitated, and the position of a hole to be processed can be conveniently positioned.
In the preferred scheme, the rotating platform, the acousto-optic deflector 3 and the coupling light wedge prism group are packaged in a box body, and an incident port and an emergent port are arranged at two ends of the box body. The box body is packaged into a box body, and is convenient to replace, carry and install.
As shown in fig. 1, the system works as follows: the laser processing device with the rotating light beam comprises an acousto-optic deflector 3, a first coupling optical wedge prism 4 and a second coupling optical wedge prism 5 which are arranged complementarily and have the same wedge angle, the acousto-optic deflector 3 and the two optical wedge prisms rotate around an incident laser optical axis 1 together, the emergent laser optical axis deflected by the acousto-optic deflector 3 and the two optical wedge prisms and the incident laser optical axis 1 are always in the same plane, the acousto-optic deflector 3 plays a scanning role, lasers with different deflection angles theta output through the acousto-optic deflector 3 and the rotation of a following rotating platform are enabled to finally hit a workpiece 7, and rotary cutting and punching of the lasers can be achieved. Scanning the outline pattern by the light with different angles theta emitted by the acousto-optic deflector 3, and finally realizing laser drilling with various outline structures and apertures, namely realizing the adjustment of the deviation of the focus of the laser beam irradiated on the workpiece 7 from the center d of the Guangzhou by adjusting the theta; the distance between the first coupling wedge prism 4 and the second coupling wedge prism 5 is adjusted to realize the inclination angle (focus incident angle) of the emergent ray of the lens relative to the direction vertical to the surface of the workpiece 7
Figure BDA0002200594960000071
And finally, the taper of the laser drilling is adjustable. The diameter of laser drilling is realized by scanning with an acousto-optic deflector 3 which rotates together with a coupling optical wedge prism group, so that the coaxial or coplanar of an emergent laser optical axis and an incident laser optical axis 1 after deflection can be ensured, the traditional mechanical rotation adjusting structure is reduced, and the precision of laser drilling is greatly improved.
The utility model has the advantages that: the utility model provides a laser beam machining device of this kind of light beam rotation, including the revolving stage, be equipped with the regulating unit who is used for adjusting emergent laser optical axis on the revolving stage, the regulating unit includes acousto-optic deflector and coupling light wedge prism group, and acousto-optic deflector and coupling light wedge prism group are located incident laser optical axis in proper order. The position of the acousto-optic deflector is adjusted, so that emergent laser is drilled at the set drilling position of the workpiece, and the position of the coupling light wedge prism group is adjusted, so that the included angle between the emergent laser and the workpiece is fixed, and the emergent laser is processed into a hole with a preset aperture. Then, the rotating table is rotated to rotate the adjusting unit, so that holes with preset hole diameters can be punched at preset positions of the workpiece. Synchronous scanning of the acousto-optic deflector with the optical wedge prism group rotating together is achieved through the rotary table, the fact that an incident laser optical axis and an emergent laser optical axis are coaxial can be guaranteed, operation is convenient, and the precision of laser drilling is greatly improved.
The above examples are merely illustrative of the present invention and do not limit the scope of the present invention, and all designs identical or similar to the present invention are within the scope of the present invention.

Claims (10)

1. A laser processing device with a rotating light beam is characterized in that: the laser beam splitter comprises a rotating table, be equipped with the regulating unit who is used for adjusting emergent laser optical axis on the rotating table, the regulating unit includes reputation deflector and coupling light wedge prism group, reputation deflector and coupling light wedge prism group are located incident laser optical axis in proper order.
2. The beam-rotating laser processing apparatus according to claim 1, wherein: the rotating platform is fixedly connected with an output shaft of the motor.
3. The beam-rotating laser processing apparatus according to claim 1, wherein: the coupled optical wedge prism group comprises a first coupled optical wedge prism and a second coupled optical wedge prism which are arranged in a complementary mode, and the first coupled optical wedge prism and the second coupled optical wedge prism are sequentially located on a transmission light path of the acousto-optic deflector.
4. The beam-rotating laser processing apparatus according to claim 3, wherein: the distance between the first coupling optical wedge prism and the second coupling optical wedge prism is adjustable.
5. The beam-rotating laser processing apparatus according to claim 4, wherein: the device further comprises a screw rod, the first coupling optical wedge prism and the second coupling optical wedge prism are in threaded connection with the screw rod, and the thread turning direction of the first coupling optical wedge prism is opposite to the thread turning direction of the second coupling optical wedge prism.
6. The beam-rotating laser processing apparatus according to claim 1, wherein: the incident laser optical axis and the emergent laser optical axis are coplanar.
7. The beam-rotating laser processing apparatus according to claim 1, wherein: the device further comprises a focusing mirror, and the focusing mirror is located on the transmission light path of the coupling optical wedge prism group.
8. The beam-rotating laser processing apparatus according to claim 7, wherein: the focusing mirror is fixedly connected with the rotating platform.
9. The beam-rotating laser processing apparatus according to claim 1, wherein: the device also comprises an object stage for clamping the workpiece, wherein the center of the object stage is positioned on the extension line of the emission light path of the laser emitter.
10. The beam-rotating laser processing apparatus according to claim 1, wherein: the rotating platform, the acousto-optic deflector and the coupling light wedge prism group are packaged in the box body, and an incident port and an exit port are arranged at two ends of the box body.
CN201921519465.2U 2019-09-12 2019-09-12 Laser processing device with rotary light beam Active CN211192494U (en)

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CN201921519465.2U CN211192494U (en) 2019-09-12 2019-09-12 Laser processing device with rotary light beam

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